| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 03/08/2006 | CN1744234A Sample platform for viewing film sample section for scanning force microscope |
| 03/07/2006 | US7009178 Scanning electron microscope |
| 03/02/2006 | US20060043982 Method and apparatus for inspecting integrated circuit pattern |
| 03/02/2006 | US20060043290 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder |
| 03/02/2006 | US20060043289 Environmental cell for a scanning probe microscope |
| 03/01/2006 | EP1181611B1 Scanning device, especially for detecting fluorescent light |
| 03/01/2006 | CN1742197A Fully digital controller for cantilever-based instruments |
| 02/23/2006 | DE102005037570A1 Rastermikroskop und Lasermikroskop Scanning microscope and laser microscope |
| 02/21/2006 | US7003755 User interface for a networked-based mask defect printability analysis system |
| 02/21/2006 | US7002151 Scanning electron microscope |
| 02/21/2006 | US7002149 Delay time modulation femtosecond time-resolved scanning probe microscope apparatus |
| 02/16/2006 | US20060033918 Scanning microscope and laser microscope |
| 02/16/2006 | US20060033415 Electronic device containing a carbon nanotube |
| 02/16/2006 | US20060032296 Software synchronization of multiple scanning probes |
| 02/14/2006 | US6998689 Fluid delivery for scanning probe microscopy |
| 02/09/2006 | WO2006012893A1 Device for receiving a test sample |
| 02/09/2006 | WO2006012881A1 Process and device for creating an evacuated, deep-temperature environment for a sample |
| 02/09/2006 | US20060030963 Sorting a group of integrated circuit devices for those devices requiring special testing |
| 02/09/2006 | US20060029832 High surface quality GaN wafer and method of fabricating same |
| 02/08/2006 | CN2757300Y Pressure adjustable probe base device |
| 02/07/2006 | US6993959 System and method for the analysis of atomic force microscopy data |
| 02/02/2006 | WO2006012124A2 Laser-based method and system for processing targeted surface material and article produced thereby |
| 02/02/2006 | US20060022138 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/01/2006 | CN1727871A Method of operating a probe microscope |
| 01/31/2006 | US6991932 Sequence determination; deformation, amplification; recording, displaying |
| 01/26/2006 | US20060018532 Method and apparatus for inspecting a semiconductor device |
| 01/26/2006 | US20060017014 Patterned wafer inspection method and apparatus therefor |
| 01/26/2006 | US20060016992 Electron beam apparatus |
| 01/26/2006 | US20060016991 Electron beam apparatus with aberration corrector |
| 01/25/2006 | EP1619165A2 Electrostatically driven carbon nanotube gripping apparatus |
| 01/25/2006 | CN1726431A Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrications |
| 01/17/2006 | US6987570 Reference signal for stitching of interferometric profiles |
| 01/17/2006 | US6987265 Method and an apparatus of an inspection system using an electron beam |
| 01/17/2006 | US6986280 Integrated measuring instrument |
| 01/12/2006 | WO2006004064A1 Scanning probe microscope system |
| 01/12/2006 | WO2006003789A1 Method and device for analyzing distribution of coercive force in vertical magnetic recording medium using magnetic force microscope |
| 01/12/2006 | US20060009872 Optical metrology model optimization for process control |
| 01/12/2006 | US20060005615 Method and apparatus for evanescent field measuring of particle-solid separation |
| 01/11/2006 | CN1236303C Method for quantifying texture homogeneity of polycrystalline material |
| 01/10/2006 | US6985223 Raman imaging and sensing apparatus employing nanoantennas |
| 01/10/2006 | US6984822 Apparatus and method for secondary electron emission microscope |
| 01/10/2006 | US6984589 Method for determining etching process conditions and controlling etching process |
| 01/05/2006 | US20060001004 Dye loaded zeolite material containing devices |
| 01/05/2006 | US20060000814 Laser-based method and system for processing targeted surface material and article produced thereby |
| 01/03/2006 | US6982427 Electron beam apparatus with aberration corrector |
| 12/27/2005 | US6980937 Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data |
| 12/27/2005 | US6979824 Filtered e-beam inspection and review |
| 12/27/2005 | US6979823 Patterned wafer inspection method and apparatus therefor |
| 12/27/2005 | US6979821 Scanning electron microscope |
| 12/27/2005 | US6979244 Method of manufacturing an electronic device containing a carbon nanotube |
| 12/22/2005 | US20050283335 Integrated circuit and methods of measurement and preparation of measurement structure |
| 12/22/2005 | US20050280792 Defining a pattern on a substrate |
| 12/21/2005 | EP1606598A2 Raman imaging and sensing apparatus employing nanoantennas |
| 12/20/2005 | US6977377 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus |
| 12/20/2005 | US6977376 Method of prevention charging, and apparatus for charged particle beam using the same |
| 12/20/2005 | US6977375 Multi-beam multi-column electron beam inspection system |
| 12/15/2005 | WO2005119728A2 Electron stream apparatus and method |
| 12/15/2005 | WO2005119206A1 Method and device for controlling photo-excitation q value of vibrator |
| 12/15/2005 | US20050277029 Microstructured pattern inspection method |
| 12/14/2005 | CN2746386Y Micro box of scanning probe microscope |
| 12/14/2005 | CN1708842A Integrated circuit and method of measurement and preparation of measurement structure |
| 12/14/2005 | CN1708826A 电子束曝光系统 Electron beam exposure system |
| 12/13/2005 | US6975129 Electrical scanning probe microscope apparatus |
| 12/13/2005 | US6974712 Method of fabricating a surface-type optical apparatus |
| 12/08/2005 | US20050269511 Probe driving method, and probe apparatus |
| 12/08/2005 | US20050269495 Compound scanning probe microscope |
| 12/08/2005 | US20050269035 Fine pattern forming apparatus and fine pattern inspecting apparatus |
| 12/07/2005 | CN1706002A Model-based fusion of scanning probe microscopic images for detection and identification of molecular structures |
| 12/06/2005 | US6972412 Particle-optical device and detection means |
| 12/01/2005 | WO2005114230A2 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 12/01/2005 | US20050265209 Electroluminescent multilayer optical information storage medium with integrated readout and composition of matter for use therein |
| 12/01/2005 | US20050264825 Sensor with cantilever and optical resonator |
| 12/01/2005 | US20050263703 Pattern inspection method and apparatus using electron beam |
| 11/29/2005 | US6969853 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus |
| 11/29/2005 | US6969847 High dynamic range mass spectrometer |
| 11/24/2005 | WO2005112043A1 Multi-column charged particle optics assembly |
| 11/23/2005 | CN1228809C Charged beam apparatus, pattern testing method and pattern display method |
| 11/22/2005 | US6967328 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor |
| 11/17/2005 | US20050253083 Charged particle beam apparatus and charged particle beam irradiation method |
| 11/16/2005 | CN1696312A Method for preparing specimen in use for researching DNA through microscope in atomic force |
| 11/10/2005 | US20050250224 Method of inspecting pattern and inspecting instrument |
| 11/10/2005 | US20050247998 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
| 11/10/2005 | US20050247874 Scanning probe microscope and molecular structure change observation method |
| 11/08/2005 | US6963067 Scanning electron microscope and sample observing method using it |
| 11/03/2005 | WO2005103647A1 Quantum beam aided atomic force microscopy and quantum beam aided atomic force microscope |
| 11/03/2005 | US20050246129 Near-field scanning microwave microscope using dielectric resonator |
| 11/03/2005 | US20050242381 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 11/03/2005 | US20050242286 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 11/03/2005 | US20050241392 Atomic force microscope tip holder for imaging in liquid |
| 11/03/2005 | DE10258104B4 Präparathalter mit Entnahmehilfe für die Mikrotomie und die AFM-Mikroskopie Specimen holder with Plunger for microtomy and AFM microscopy |
| 11/02/2005 | EP1171791B1 Optical microscopy and its use in the study of cells |
| 11/01/2005 | US6960766 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method |
| 11/01/2005 | US6960765 Probe driving method, and probe apparatus |
| 11/01/2005 | US6960763 Energy filter and electron microscope |
| 11/01/2005 | CA2272100C Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 10/27/2005 | US20050239193 Device and method of use for detection and characterization of microorganisms and microparticles |
| 10/27/2005 | US20050239047 Methods and devices for determining a cell characteristic, and applications employing the same |
| 10/25/2005 | US6959108 Image based defect detection system |
| 10/25/2005 | US6958477 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 10/20/2005 | US20050230622 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |