Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
10/2005
10/19/2005EP1513954A4 Device and method of use for detection and characterization of pathogens and biological materials
10/19/2005CN1685195A Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology
10/18/2005US6956212 Electron microscope observation system and observation method
10/18/2005US6956211 Charged particle beam apparatus and charged particle beam irradiation method
10/18/2005US6956210 Methods for preparing samples for atom probe analysis
10/13/2005WO2005095922A1 Nanogap series substance capturing, detecting and identifying method and device
10/13/2005US20050223785 Scanning probe device and processing method by scanning probe
10/12/2005CN1682315A Sensor with suspending arm and optical resonator
10/11/2005US6954267 Device for measuring surface defects
10/11/2005US6953944 Scanning device and method including electric charge movement
10/11/2005US6953939 Testing apparatus using scanning electron microscope
10/11/2005US6953927 Method and system for scanning apertureless fluorescence microscope
10/06/2005US20050217354 Scanning probe microscope
10/05/2005EP1582856A1 Scanning type probe microscope, and method of observing changes in molecular structure
10/05/2005EP1342049B1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
10/04/2005US6952651 Measuring the distance between labeled nucleotides, such as nucleotides labeled with bulky groups
10/04/2005US6952492 Method and apparatus for inspecting a semiconductor device
10/04/2005US6951695 Lapping, mechanical polishing, and reducing internal stress of a gallium, aluminum and indium nitride wafer by thermal annealing or chemical etching; crystallographic plane surfaces
10/04/2005US6951130 Software synchronization of multiple scanning probes
10/04/2005US6951129 Scanning probe microscope with improved probe head mount
09/2005
09/29/2005US20050214509 Hydrophilic, anti-fogging, and anti-staining thin film and method for preparation thereof
09/29/2005US20050214452 Method and apparatus for depositing material with high resolution
09/29/2005US20050212529 Method and apparatus for measuring electrical properties in torsional resonance mode
09/29/2005US20050211927 Method and apparatus for processing a micro sample
09/29/2005US20050211921 Electron beam exposure system
09/29/2005US20050210966 Scanning probe microscope and measuring method by means of the same
09/29/2005DE102004012520A1 Punktquelle für Elektronen-Feldemissionen mit lokaler Abschirmung Point source for electron field emission with local shielding
09/27/2005US6950385 Information recording apparatus
09/27/2005US6950179 Shape measuring apparatus, shape measuring method, and aligning method
09/27/2005US6949744 Electron microscopy system, electron microscopy method and focusing system for charged particles
09/22/2005US20050206877 Shape measuring apparatus, shape measuring method, and aligning method
09/22/2005US20050205805 Scratch repairing processing method and scanning probe microscope (SPM) used therefor
09/22/2005US20050205783 Electron beam apparatus and device manufacturing method using same
09/22/2005US20050205782 Method and an apparatus of an inspection system using an electron beam
09/22/2005DE102004058483A1 Vorrichtung zur Untersuchung von Produkten auf Fehler, Messfühler-Positionierverfahren und Messfühler-Bewegungsverfahren An apparatus for investigating products for errors, sensor-positioning method and probe-moving method
09/21/2005CN1672011A 扫描探针显微镜 SPM
09/20/2005US6946657 Electron microscopy system
09/20/2005US6946656 Sample electrification measurement method and charged particle beam apparatus
09/20/2005US6946655 Spot grid array electron imaging system
09/20/2005US6946654 Collection of secondary electrons through the objective lens of a scanning electron microscope
09/20/2005US6945100 Scanning probe microscope with improved probe tip mount
09/15/2005WO2005086172A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
09/15/2005WO2005085801A1 Method and apparatus for detection of biomolecular interaction using near-field light
09/15/2005US20050200841 Detection of defects in patterned substrates
09/15/2005US20050199828 Method and apparatus for processing a micro sample
09/15/2005US20050199047 Liquid cell and passivated probe for atomic force microscopy and chemical sensing
09/14/2005EP1575058A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
09/14/2005EP1573299A2 Fully digital controller for cantilever-based instruments
09/13/2005US6943352 Particle detectors
09/13/2005US6943351 Multi-column charged particle optics assembly
09/13/2005US6943350 Methods and apparatus for electron beam inspection of samples
09/13/2005US6943349 Multi beam charged particle device
09/13/2005US6943043 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device
09/09/2005WO2005083717A1 Scanning probe microscope
09/08/2005US20050194534 Method of operating a probe microscope
09/08/2005DE102004043191A1 Rastersondenmikroskop A scanning probe microscope
09/07/2005EP1571691A2 Point source for electron field emission with local shielding.
09/07/2005EP1570514A2 Integrated circuit and methods of measurement and preparation of measurement structure
09/07/2005EP1569733A2 Methods for assembly and sorting of nanostructure-containing materials and related articles
09/07/2005CN1666312A Software synchronization of multiple scanning probes
09/06/2005US6940069 Pattern inspection method and apparatus using electron beam
09/01/2005WO2004095500A8 Vacuum chamber with recessed viewing tube and imaging device situated therein
09/01/2005US20050190684 Nanometer scale data storage device and associated positioning system
09/01/2005US20050190439 Thermal lens microscope device
09/01/2005US20050189491 Deconvolving far-field images using scanned probe data
09/01/2005US20050189490 Scanning probe microscopy and method of measurement by the same
09/01/2005US20050188752 Digital control of quality factor in resonant systems including cantilever based instruments
08/2005
08/31/2005CN1662662A Nucleic acid sequencing by signal stretching and data integration
08/30/2005US6936981 Retarding electron beams in multiple electron beam pattern generation
08/30/2005US6936826 Vibration-isolating coupling including an elastomer diaphragm for scanning electron microscope and the like
08/30/2005US6936819 semiconductor wafer chips; scanning electron microscope
08/30/2005US6936818 Charged particle beam apparatus
08/30/2005US6936816 High contrast inspection and review of magnetic media and heads
08/30/2005US6935167 Harmonic cantilevers and imaging methods for atomic force microscopy
08/25/2005US20050184237 Charged particle beam apparatus
08/23/2005US6933499 Electron microscope, method for operating the same, and computer-readable medium
08/23/2005US6932919 Dye loaded zeolite material
08/18/2005US20050182595 Micropattern shape measuring system and method
08/18/2005US20050178966 Light weight portable scanning electron microscope
08/18/2005US20050178965 Scanning electron microscope
08/17/2005EP1563275A2 Nanomotion sensing system and method
08/17/2005CN1656236A Device and method of use for detection and characterization of pathogens and biological materials
08/17/2005CN1656035A Hydrophilic, anti-fogging, and anti-staining thin film and method for preparation thereof
08/16/2005US6930502 Method using conductive atomic force microscopy to measure contact leakage current
08/16/2005US6930479 High resolution scanning magnetic microscope operable at high temperature
08/16/2005US6930309 Dual-energy electron flooding for neutralization of charged substrate
08/16/2005US6930308 SEM profile and surface reconstruction using multiple data sets
08/16/2005US6929934 apparatus for imaging an object, comprising a probe via which an assay component may be delivered; a sensor to detect ion current; and means for controlling the position of the probe relative to the object in response to the ion current
08/16/2005US6928863 Apparatus and method for isolating and measuring movement in a metrology apparatus
08/11/2005US20050172703 Scanning probe microscopy inspection and modification system
08/09/2005US6927391 Method and apparatus for processing a micro sample
08/02/2005US6924494 Method of exposing a target to a charged particle beam
08/02/2005US6924489 Device for reducing the impact of distortions in a microscope
08/02/2005US6924484 Void characterization in metal interconnect structures using X-ray emission analyses
08/02/2005US6924482 Method of inspecting pattern and inspecting instrument
08/02/2005US6924481 Scanning microscope with brightness control
07/2005
07/28/2005US20050161600 Sample electrification measurement method and charged particle beam apparatus
07/28/2005US20050160802 SPM cantilever and fabricating method thereof
07/27/2005EP1556881A2 Electron beam exposure system
07/27/2005EP1556737A2 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication
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