Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
09/2006
09/12/2006US7107571 Visual analysis and verification system using advanced tools
09/12/2006US7107117 Sorting a group of integrated circuit devices for those devices requiring special testing
09/06/2006EP0948741B1 Method and apparatus for high spatial resolution spectroscopic microscopy
08/2006
08/31/2006WO2006090594A1 Inching mechanism for scanning probe microscope and scanning probe microscope employing it
08/31/2006WO2006090593A1 Displacement detection mechanism for scanning probe microscope and scanning probe microscope
08/31/2006US20060193037 Vacuum chamber with recessed viewing tube and imaging device situated therein
08/30/2006EP0979414B1 Multi-probe test head and test method
08/29/2006US7098457 Electron beam apparatus and device manufacturing method using same
08/29/2006US7098455 Method of inspecting a circuit pattern and inspecting instrument
08/29/2006US7098453 Scanning probe microscopy system and method of measurement by the same
08/29/2006US7098056 Apparatus, materials, and methods for fabrication and catalysis
08/29/2006US7097708 Substituted donor atoms in silicon crystal for quantum computer
08/24/2006US20060185424 Integrated measuring instrument
08/22/2006US7095020 Sensing mode atomic force microscope
08/16/2006EP1543155A4 Methods and compositions for analyzing polymers using chimeric tags
08/15/2006US7091504 Electron beam exposure system
08/15/2006US7091476 Scanning probe microscope assembly
08/10/2006WO2006083006A1 Optical fiber probe, optical detection device, and optical detection method
08/10/2006WO2006012124A3 Laser-based method and system for processing targeted surface material and article produced thereby
08/10/2006DE102004063980A1 Vorrichtung und Verfahren zur Rastersondenmikroskopie Apparatus and method for scanning probe microscopy
08/08/2006US7087899 Sample electrification measurement method and charged particle beam apparatus
08/03/2006WO2006081240A1 Protein microscope
08/03/2006DE10317894B4 Fokussiersystem für geladene Teilchen, Elektronenmikroskopiesystem und Elektronenmikroskopieverfahren Focusing of charged particles, electron microscopy and electron microscopy system method
07/2006
07/27/2006US20060163479 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
07/18/2006US7079315 Thermal lens microscope device
07/18/2006US7076996 Environmental scanning probe microscope
07/13/2006WO2006073068A1 Surface position measuring method and surface position measuring device
07/13/2006US20060151699 Method and an apparatus of an inspection system using an electron beam
07/13/2006US20060150721 Fluid delivery for scanning probe microscopy
07/12/2006EP1679541A1 Specimen observation method and microscope, and, for use therein, solid immersion lens and optical contact liquid
07/11/2006US7075092 Charged particle beam microscope with minicolumn
07/11/2006US7075078 Scanning electron microscope
07/11/2006US7075058 Photothermal imaging scanning microscopy
07/11/2006US7073937 Heat emitting probe and heat emitting probe apparatus
07/05/2006CN1799045A Optical metrology of structures formed on semiconductor wafers using machine learning systems
07/05/2006CN1796927A Observation board for position and application of force in micro
06/2006
06/29/2006US20060139026 Magnetic field generator device for magnetic force microscope
06/27/2006US7067806 Scanning probe microscope and specimen observation method
06/27/2006US7067805 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method
06/27/2006US7066015 Scanning probe microscope
06/27/2006US7066014 Method to transiently detect samples in atomic force microscopes
06/20/2006US7065423 Optical metrology model optimization for process control
06/14/2006EP1669734A1 Scanning type probe microscope and probe moving control method therefor
06/13/2006US7061008 Single molecule array on silicon substrate for quantum computer
06/08/2006US20060121190 Low-reflection glass article and method for manufacturing
06/01/2006WO2006057300A1 Positioning mechanism and microscope using the same
06/01/2006WO2006056373A1 Near-field antenna
06/01/2006US20060113474 Scanning electron microscope
06/01/2006US20060113469 Scanning probe microscope and sample observing method using this and semiconductor device production method
05/2006
05/31/2006EP1662246A1 Probe replacing method for scanning probe microscope
05/30/2006US7054257 AFM-based data storage and microscopy
05/25/2006US20060109480 Surface texture measuring instrument
05/25/2006US20060108526 Apparatus for measuring a three-dimensional shape
05/24/2006EP1483595A4 High resolution scanning magnetic microscope operable at high temperature
05/24/2006DE102004056241A1 Nahfeldantenne Near-field antenna
05/24/2006DE102004048971B3 Apparatus for scanning probe microscopy for examining biological systems and which automatically analyzes measurements from the device according to predetermined analysis parameters
05/24/2006DE102004043191B4 Rastersondenmikroskop A scanning probe microscope
05/23/2006US7049607 Electron beam writing equipment and electron beam writing method
05/23/2006US7049591 Scanning electron microscope
05/23/2006US7047796 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
05/18/2006US20060102840 Scanning electron microscope
05/17/2006CN1256752C Method for controlling electrostatic lens and ion implantation device
05/16/2006US7046357 Apparatus for microfluidic processing and reading of biochip arrays
05/16/2006US7045780 Scanning probe microscopy inspection and modification system
05/11/2006US20060097164 Method for locally highly resolved, mass-spectroscopic characterisation of surfaces using scanning probe technology
05/11/2006US20060097162 Apparatus and method for determining surface profiles using a scanning probe microscope
05/11/2006US20060097158 Scanning electron microscope
05/11/2006DE102004037837B3 Vorrichtung zur Schaffung einer evakuierten Tieftemperaturumgebung für eine Probe und Verwendung der Vorrichtung An apparatus for providing an evacuated cryogenic environment for a sample and using the apparatus
05/10/2006EP1540661B1 Sensor with cantilever and optical resonator
05/10/2006CN1769837A Surface texture measuring instrument
05/09/2006US7042828 Nanometer scale data storage device and associated positioning system
05/09/2006US7040147 Method and apparatus for manipulating a sample
05/04/2006WO2006046625A1 Measuring device with daisy type cantilever wheel
05/04/2006CA2585173A1 Measuring device with daisy type cantilever wheel
05/03/2006EP1653477A2 Surface texture measuring instrument
05/03/2006EP1218919B1 Electron image detector coupled by optical fibers with absorbing outer cladding to reduce blurring
04/2006
04/27/2006DE10237477B4 Vorrichtung zur Messung von Oberflächendefekten An apparatus for measuring surface defects
04/25/2006US7034277 Near-field light-generating element for producing localized near-field light, near-field optical recording device, and near-field optical microscope
04/20/2006WO2006040025A1 Device and method for scanning probe microscopy
04/13/2006US20060077540 Compound microscope
04/13/2006US20060076790 Electrostatically driven carbon nanotube gripping device
04/11/2006US7026830 Method and apparatus for inspecting integrated circuit pattern
04/11/2006US7026607 Scanning probe microscope
04/06/2006US20060071167 Scanning electron microscope
04/06/2006US20060071165 Bulk synthesis of long nanotubes of transition metal chalcogenides
04/05/2006CN1755345A Micro acting force modeling method based on deformation of nano scanning probe
03/2006
03/29/2006EP1640996A2 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
03/28/2006US7019537 Non-destructive determination of machining induced surface defects on metal parts
03/23/2006WO2006012124A8 Laser-based method and system for processing targeted surface material and article produced thereby
03/23/2006US20060060794 Method of preventing charging, and apparatus for charged particle beam using the same
03/23/2006US20060060778 Probe microscope system suitable for observing sample of long body
03/22/2006EP1637867A1 Molecule detecting method, molecule counting method, molecule localization detecting method, molecule detection device used for them
03/21/2006US7017141 Integrated verification and manufacturability tool
03/21/2006US7014743 Separating nanotubes and/or nanowires of different electronic properties into groups (e.g. conductors and semiconductors), by suspending them in a liquid, establishing an asymmetrical alternating-current (AC) between electrodes, causing migration
03/14/2006US7012439 Multiple directional scans of test structures on semiconductor integrated circuits
03/14/2006US7012252 Method and an apparatus of an inspection system using an electron beam
03/14/2006US7012249 High capacity and scanning speed system for sample handling and analysis
03/14/2006US7010966 SPM cantilever and fabricating method thereof
03/14/2006US7010949 Apparatus for forming optical aperture
03/08/2006EP1345696B1 Method and device for manipulating small quantities of liquid
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