Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
02/2007
02/15/2007US20070034797 Electron beam apparatus, and inspection instrument and inspection process thereof
02/15/2007US20070034336 Method of, and apparatus for, producing near field optical head
02/15/2007US20070033991 Tracking qualification and self-optimizing probe microscope and method
02/14/2007EP1752756A1 Scanning mechanism for scanning probe microscope
02/14/2007CN1912574A Method for expressing nano-steel microstructure
02/14/2007CN1912568A Speciment preparing method for studying alumina particle section
02/14/2007CN1912540A Tilt error compensation method based on coordinate transformation in micro-nano structure 3-D contour measuring
02/13/2007CA2382516C High dynamic range mass spectrometer
02/07/2007CN2867337Y Membrane stretch loading device under scanning microscopic environment
02/06/2007US7174520 Characterization and verification for integrated circuit designs
02/01/2007WO2005114230A3 Method and apparatus for measuring electrical properties in torsional resonance mode
02/01/2007US20070023658 Method of inspecting pattern and inspecting instrument
02/01/2007US20070023657 Charged particle beam apparatus
02/01/2007US20070022804 Scanning probe microscopy inspection and modification system
01/2007
01/30/2007US7170054 Scanning probe microscopy cantilever holder and scanning probe microscope using the cantilever holder
01/30/2007US7170048 Compound scanning probe microscope
01/25/2007WO2007011405A2 Device and method of use for detection and characterization of microorganisms and microparticles
01/25/2007US20070018096 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
01/24/2007EP1745492A1 Multi-column charged particle optics assembly
01/24/2007CN1900687A Realizing method for low value touch interaction interface based on scam probe microscope
01/24/2007CN1900686A Sensing method for sample topography and property under nano size
01/23/2007US7166839 Apparatus for measuring a three-dimensional shape
01/23/2007US7165445 Digital control of quality factor in resonant systems including cantilever based instruments
01/18/2007US20070013999 Multiplex near-field microscopy with diffractive elements
01/18/2007US20070012095 Scanning probe microscope
01/17/2007EP1252634B1 Spectrometer, method of spectroscopic analysis and method of combined surface topography and spectroscopic analysis
01/11/2007US20070007142 Methods for assembly and sorting of nanostructure-containing materials and related articles
01/03/2007EP1739404A1 Nanogap series substance capturing, detecting and identifying method and device
01/03/2007EP1335879B1 Dye loaded zeolite material
01/02/2007US7155964 Method and apparatus for measuring electrical properties in torsional resonance mode
12/2006
12/28/2006US20060289749 Method for determining material interfacial and metrology information of a sample using atomic force microscopy
12/21/2006US20060284083 Scanning type probe microscope and probe moving control method therefor
12/20/2006EP1733399A1 System and method for detecting the displacement of a plurality of micro- and nanomechanical elements, such as micro-cantilevers
12/20/2006EP1161669A4 Deconvolving far-field images using scanned probe data
12/19/2006US7151257 Tailoring domain engineered structures in ferroelectric materials
12/19/2006US7150185 Optical microcantilever
12/14/2006WO2006132075A1 Sample stand arrangement for scanning type probe microscope
12/13/2006EP1732084A2 A method for determining material interfacial and metrology information of a sample using atomic force microscopy
12/13/2006CN1877246A A method for determining material interfacial and metrology information of a sample using atomic force microscopy
12/12/2006US7148619 Electronic device containing a carbon nanotube
12/07/2006US20060273445 Three-dimensional structure composed of silicon fine wires, method for producing the same, and device including the same
12/06/2006CN1875308A Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method
12/05/2006US7145140 Method of determining whether a conductive layer of a semiconductor device is exposed through a contact hold
11/2006
11/30/2006WO2006125788A1 Local injector of spin-polarized electrons with semiconductor tip under light excitation
11/30/2006DE102006006811A1 Bearbeitungsverfahren mit Rastersonde Processing method with scanning probe
11/28/2006US7143005 Image reconstruction method
11/28/2006US7141800 Non-dispersive charged particle energy analyzer
11/22/2006CN1865901A Seawater fish ovum electron-microscope scanning sample preparing method
11/22/2006CN1865900A Method for preparing film sample for use in transmitted electron microscope
11/21/2006US7137291 Multi-dimensional force sensing for scanning probe microscopy using carbon nanotube tips and carbon nanotube oscillators
11/16/2006WO2005119728A3 Electron stream apparatus and method
11/16/2006US20060254348 Scanning probe device and processing method of scanning probe
11/16/2006US20060254347 Scanning probe device and processing method by scanning probe
11/16/2006US20060254346 Method to transiently detect sample features using cantilevers
11/15/2006CN2837830Y Vibration damping bench for ultra-high vacuum tunnel scanning microscope system
11/09/2006WO2006118118A1 Scanning mechanism for scanning probe microscope
11/09/2006WO2006118117A1 Scanning stage for scanning probe microscope
11/09/2006US20060253943 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
11/07/2006US7132055 Method of producing near field optical head
11/02/2006WO2006116673A1 Mutliplex near-field microscopy with diffractive elements
11/02/2006US20060247816 Optical metrology model optimization for process control
11/02/2006US20060243908 Method of inspecting a circuit pattern and inspecting instrument
11/02/2006US20060243034 Method and apparatus of manipulating a sample
11/01/2006CN1854714A Defect analyzing method by microarea coating
10/2006
10/31/2006US7130755 Near-field scanning microwave microscope using dielectric resonator
10/31/2006US7130063 Micropattern shape measuring system and method
10/31/2006US7129486 Scanning probe with digitized pulsed-force mode operation and real-time evaluation
10/26/2006US20060239129 Nanometer scale data storage device and associated positioning system
10/26/2006US20060237639 Scanning probe microscope assembly and method for making spectrophotometric, near-filed, and scanning probe measurements
10/25/2006CN1281765C Method for preparing specimen in use for researching DNA through microscope in atomic force
10/24/2006US7126885 Apparatus for patterning recording media
10/19/2006US20060231757 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers
10/19/2006US20060230818 Planar resonant tunneling sensor and method of fabricating and using the same
10/18/2006EP1712893A1 Planar resonant tunneling sensor and method of fabricating and using same
10/18/2006CN1280188C Sharp end, multi-layer carbon nano-tube radial aggregate and method of manufacturing the aggregate
10/17/2006US7122796 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same
10/17/2006US7122795 Detector optics for charged particle beam inspection system
10/12/2006WO2006106949A1 Scanning probe microscope, method of measuring sample surface shape, and probe device
10/05/2006WO2006103937A1 Scanning probe microscope system
10/05/2006US20060219918 Sample electrification measurement method and charged particle beam apparatus
10/05/2006US20060219901 Working method using scanning probe
10/05/2006US20060219900 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
10/05/2006US20060219899 Scanning probe microscope
10/04/2006EP1012584A4 Object inspection and/or modification system and method
10/03/2006US7117063 Sorting a group of integrated circuit devices for those devices requiring special testing
10/03/2006US7116817 Method and apparatus for inspecting a semiconductor device
10/03/2006US7116628 Electroluminescent multilayer optical information storage medium with integrated readout and composition of matter for use therein
10/03/2006US7116115 Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate
10/03/2006US7114405 Probe mounting device for a scanning probe microscope
10/03/2006US7114378 Planar resonant tunneling sensor and method of fabricating and using the same
09/2006
09/28/2006US20060216814 Molecule detecting method, molecule counting method, molecule localization detecting method, and molecule detecting device used for them
09/28/2006US20060213877 Nanospot welder and method
09/28/2006US20060213261 Real Time Detection of Loss of Cantilever Sensing Loss
09/26/2006US7112791 Method of inspecting pattern and inspecting instrument
09/21/2006DE19802409B4 Anordnung zur Korrektur des Öffnungsfehlers dritter Ordnung einer Linse, insbesondere der Objektivlinse eines Elektronenmikroskops Arrangement for the correction of spherical aberration of the third order of a lens, in particular the objective lens of an electron microscope
09/19/2006US7109485 Charged particle beam apparatus
09/19/2006US7107826 Scanning probe device and processing method by scanning probe
09/19/2006US7107825 Method and apparatus for the actuation of the cantilever of a probe-based instrument
09/14/2006DE112004001001T5 Optische Messung von auf Halbleiterwafern gebildeten Strukturen unter Verwendung von Maschinenlernsystemen Optical measurement of formed on semiconductor wafers structures using machine learning systems
09/13/2006CN1831513A 扫描探针显微镜 SPM
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