| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 08/23/2007 | US20070194234 Scanning electron microscope |
| 08/09/2007 | US20070183060 Mirror optic for near-field optical measurements |
| 08/09/2007 | US20070181831 Method and apparatus for processing a micro sample |
| 08/09/2007 | US20070180889 Probe replacement method for scanning probe microscope |
| 08/07/2007 | US7253645 Detection of defects in patterned substrates |
| 08/07/2007 | US7253408 Environmental cell for a scanning probe microscope |
| 08/07/2007 | US7251987 Scanning probe microscope and measuring method by means of the same |
| 08/02/2007 | US20070176100 Automated nanoassembly |
| 07/31/2007 | US7250601 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 07/26/2007 | US20070170358 Scanning electron microscope |
| 07/24/2007 | US7249002 Direct relative motion measurement for vibration induced noise and drift cancellation |
| 07/24/2007 | US7247848 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 07/24/2007 | US7247504 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 07/19/2007 | US20070164216 Scanning ion probe systems and methods of use thereof |
| 07/19/2007 | US20070163335 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 07/19/2007 | DE102006002461A1 Mirror optics for near-field optical microscope, has reflector that is provided in form of paraboloid, where reflector comprises edge section, and focus is illuminated by illumination beam path that is different from another beam path |
| 07/12/2007 | WO2007076828A1 Method for operating a measurement system containing a scanning probe microscope, and measurement system |
| 07/12/2007 | US20070158591 Method and apparatus for processing a micro sample |
| 07/12/2007 | US20070158564 Method and apparatus for processing a micro sample |
| 07/12/2007 | US20070158559 Scanning probe apparatus |
| 07/12/2007 | US20070157711 Digital Q Control for Enhanced Measurement Capability in Cantilever-Based Instruments |
| 07/11/2007 | EP1806572A1 Measuring device with daisy type cantilever wheel |
| 07/10/2007 | US7243316 Test masks for lithographic and etch processes |
| 07/10/2007 | US7242015 Patterned wafer inspection method and apparatus therefor |
| 07/10/2007 | US7240541 Optical microcantilever, manufacturing method thereof, and optical microcantilever holder |
| 07/10/2007 | US7240428 Method for making probes for atomic force microscopy |
| 07/05/2007 | WO2007074228A1 Improved photon-emission scanning tunnel microscopy |
| 07/04/2007 | EP1804050A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 06/28/2007 | WO2007072706A1 Scan type probe microscope |
| 06/28/2007 | WO2007072621A1 Scanning probe microscope |
| 06/28/2007 | US20070145290 Liquid cell |
| 06/28/2007 | US20070144243 Scanning probe apparatus and drive stage therefor |
| 06/26/2007 | US7234343 Method and apparatus for evanescent filed measuring of particle-solid separation |
| 06/26/2007 | US7234342 Fully digital controller for cantilever-based instruments |
| 06/21/2007 | WO2007068612A1 Tool for determining the shape of the probe of an atomic force microscope |
| 06/20/2007 | EP1797567A1 Device and method for scanning probe microscopy |
| 06/20/2007 | CN1322538C Adjustable conductance limiting aperture for ion implanters |
| 06/19/2007 | US7232996 Method and an apparatus of an inspection system using an electron beam |
| 06/14/2007 | WO2006090593A9 Displacement detection mechanism for scanning probe microscope and scanning probe microscope |
| 06/13/2007 | CN1979126A Method for analysis of a sample |
| 06/12/2007 | US7230719 High sensitivity scanning probe system |
| 06/07/2007 | US20070125753 Nanospot welder and method |
| 06/07/2007 | US20070125159 Method for analysis of a sample |
| 06/06/2007 | EP1332509A4 Focused ion beam system |
| 06/06/2007 | CN1975372A Scanning samples electric heating device used for atomic force microscope |
| 05/31/2007 | WO2007061383A1 Determination of field distribution |
| 05/31/2007 | WO2007059833A1 Microscope, in particular a scanning probe microscope provided with a programmable logic |
| 05/31/2007 | DE19838600B4 Energiefilter und Elektronenmikroskop mit Energiefilter Energy filter and electron energy filter |
| 05/29/2007 | US7223973 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 05/24/2007 | US20070114441 Scanning stage for scanning probe microscope |
| 05/24/2007 | US20070114409 Electron beam apparatus with aberration corrector |
| 05/24/2007 | DE102005055460A1 Laser microscope pulse forced mode raster surface inspection process, digitizing information to generate real time force-time graph profile |
| 05/22/2007 | US7221989 Optical metrology model optimization for process control |
| 05/22/2007 | US7220963 Light weight portable scanning electron microscope |
| 05/22/2007 | US7220962 Cantilever array and scanning probe microscope including a sliding, guiding, and rotating mechanism |
| 05/22/2007 | US7220446 Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof |
| 05/17/2007 | US20070109636 Specimen stage array for scanning probe microscope |
| 05/16/2007 | CN1315623C Nanotweezers and nanomanipulator |
| 05/15/2007 | US7217925 Scanning electron microscope |
| 05/15/2007 | US7217923 Microstructured pattern inspection method |
| 05/10/2007 | DE102004056241B4 Nahfeldsonde Near-field probe |
| 05/02/2007 | EP1779286A2 Laser-based method and system for processing targeted surface material and article produced thereby |
| 04/19/2007 | WO2007041976A1 Method for examining a measurement object, and apparatus |
| 04/19/2007 | US20070085022 Scanning mechanism for scanning probe microscope |
| 04/18/2007 | EP1775570A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775569A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775568A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775567A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1774389A1 Device for receiving a test sample |
| 04/18/2007 | CN1311221C Scanning forcing power microscope device and its use |
| 04/17/2007 | US7205560 Method and apparatus for processing a micro sample |
| 04/17/2007 | US7205554 Method and apparatus for processing a micro sample |
| 04/12/2007 | WO2007041556A2 Scanning probe microscopy method and apparatus utilizing sample pitch |
| 04/11/2007 | EP0760109B1 Method for particle wave reconstruction in a particle-optical apparatus |
| 04/05/2007 | WO2007036591A1 Method of using an atomic force microscope and microscope |
| 04/05/2007 | US20070075243 Scanning probe microscopy method and apparatus utilizing sample pitch |
| 04/05/2007 | DE10217948B4 Verfahren und Vorrichtung zur Erstellung Raman- und SER-spektroskopischer Messungen biologischer und chemischer Proben Method and apparatus for creating Raman and SER-spectroscopic measurements of biological and chemical samples |
| 04/05/2007 | CA2613515A1 Method of using an atomic force microscope and microscope |
| 04/04/2007 | CN1942753A Optical fiber probe, optical detection device, and optical detection method |
| 04/03/2007 | US7199365 Electron beam apparatus with aberration corrector |
| 03/29/2007 | WO2007035659A1 Method and apparatus for measuring a characteristic of a sample feature |
| 03/27/2007 | US7196321 Fine pattern forming apparatus and fine pattern inspecting apparatus |
| 03/27/2007 | CA2405047C Time-of-flight mass spectrometer array instrument |
| 03/22/2007 | US20070067140 Method and apparatus for measuring a characteristic of a sample feature |
| 03/22/2007 | US20070062266 Optical microcantilever, manufacturing method thereof, and optical microcantilever holder |
| 03/22/2007 | DE10317894B9 Fokussiersystem für geladene Teilchen, Elektronenmikroskopiesystem und Elektronenmikroskopieverfahren Focusing of charged particles, electron microscopy and electron microscopy system method |
| 03/20/2007 | US7193224 Scanning microscope and laser microscope |
| 03/14/2007 | EP1762838A1 Sample stand arrangement for scanning type probe microscope |
| 03/14/2007 | CN2879192Y Sample receiving desk for new type super-high vacuum system sample transferring device |
| 03/14/2007 | CN1304867C 扫描探针显微镜及其操作方法 Scanning probe microscopy and its method of operation |
| 03/07/2007 | EP1290430A4 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 03/07/2007 | EP1105914B1 Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current |
| 03/01/2007 | WO2007024155A1 Scanning probe microscope combined with an object surface modifying device |
| 02/28/2007 | EP1756595A2 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 02/28/2007 | CN2874723Y Metal phase scan sample table of atomic power microscope |
| 02/28/2007 | CN1920476A Nano multi-step height sample plate and its preparation |
| 02/22/2007 | WO2007022013A2 Tracking qualification and self-optimizing probe microscope and method |
| 02/22/2007 | WO2007020856A1 Method and equipment for measuring displacement, stage equipment and probe microscope |
| 02/21/2007 | CN1916597A Method for observing microscopic structure of stainless steel |
| 02/15/2007 | US20070036910 Apparatus for patterning recording media |