| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 03/03/2004 | CN1140767C Probe scanning device for probe microscope |
| 02/26/2004 | WO2004017329A1 Sensor with cantilever and optical resonator |
| 02/26/2004 | US20040037959 Nanolithography, forming a pattern on a substrate by using a coated tip pen, coated with a compound, atomic force microscope imaging, drawing |
| 02/26/2004 | DE10329250A1 Verfahren und Vorrichtung zum Extrahieren dreidimensionaler räumlicher Daten eines Objektes unter Verwendung eines Elektronenmikroskops Method and apparatus for extracting three-dimensional spatial data of an object using an electron microscope |
| 02/19/2004 | WO2004015633A1 Method and apparatus for extracting three-dimensional spacial data of object using electron microscope |
| 02/19/2004 | US20040031315 Atomic force microscopy scanning methods |
| 02/12/2004 | US20040027688 Multi-detector microscopic inspection system |
| 02/12/2004 | US20040026619 Method and apparatus for extracting three-dimensional spacial data of object using electron microscope |
| 02/12/2004 | US20040025578 Software synchronization of multiple scanning probes |
| 02/10/2004 | US6690007 Three-dimensional atom microscope, three-dimensional observation method of atomic arrangement, and stereoscopic measuring method of atomic arrangement |
| 02/05/2004 | DE10232689A1 Mit Strahlen geladener Teilchen arbeitende Anwendungen With charged particle beams working applications |
| 02/03/2004 | US6686590 Low-vacuum scanning electron microscope |
| 01/29/2004 | US20040016882 Scanning electron microscope |
| 01/28/2004 | EP1385192A2 Device working with beams of charged particles |
| 01/27/2004 | US6683320 Through-the-lens neutralization for charged particle beam system |
| 01/21/2004 | EP1381851A2 High spatial resolution x-ray microanalysis |
| 01/20/2004 | US6680617 Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| 01/15/2004 | WO2004006302A2 Software synchronization of multiple scanning probes |
| 01/15/2004 | WO2004005845A2 Apparatus and method of operating a probe-based instrument in a torsional |
| 01/13/2004 | US6677697 Force scanning probe microscope |
| 01/13/2004 | US6677587 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 01/13/2004 | US6677581 High energy electron diffraction apparatus |
| 01/13/2004 | US6677567 Scanning probe microscope with improved scan accuracy, scan speed, and optical vision |
| 01/08/2004 | US20040004484 System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes |
| 01/07/2004 | EP1377794A1 Improved scanning probe microscope |
| 01/06/2004 | US6674057 Optical near-field microscope |
| 01/06/2004 | US6672144 Dynamic activation for an atomic force microscope and method of use thereof |
| 01/02/2004 | EP1373959A2 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 01/01/2004 | US20040000189 Tactile force and/or position feedback for cantilever-based force measurement instruments |
| 12/30/2003 | US6670624 Ion implanter in-situ mass spectrometer |
| 12/30/2003 | US6668628 Scanning probe system with spring probe |
| 12/25/2003 | US20030234358 Piezo-noise microscope and methods for use thereof |
| 12/11/2003 | WO2003101278A2 Device and method of use for detection and characterization of pathogens and biological materials |
| 12/11/2003 | CA2487792A1 Device and method of use for detection and characterization of pathogens and biological materials |
| 12/09/2003 | US6661006 Scanning probe instrument |
| 12/09/2003 | US6661004 Image deconvolution techniques for probe scanning apparatus |
| 12/03/2003 | CN1129787C Scanning tunnel microscope feedback controller adopting multi modal fuzzy control algorithm |
| 12/02/2003 | US6657221 Image classification method, observation method, and apparatus thereof with different stage moving velocities |
| 12/02/2003 | US6655196 Scanning probe microscope |
| 11/25/2003 | US6653633 Charged particle beam apparatus |
| 11/25/2003 | US6653631 Apparatus and method for defect detection using charged particle beam |
| 11/19/2003 | EP1362230A1 Balanced momentum probe holder |
| 11/18/2003 | US6649901 Enhanced optical transmission apparatus with improved aperture geometry |
| 11/13/2003 | US20030211336 Optical recording media; multilayer |
| 11/13/2003 | US20030209060 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 11/11/2003 | US6646263 Method of X-ray analysis in a particle-optical apparatus |
| 11/11/2003 | US6646261 SEM provided with a secondary electron detector having a central electrode |
| 11/06/2003 | US20030206749 Electrophotographic endless belt, process cartridge, and electrophotographic apparatus |
| 11/05/2003 | CN1453662A Electronic photographic ring band, processing box and electronic photographic apparatus |
| 10/29/2003 | EP1357445A2 Electrophotographic endless belt, process cartridge, and electrophotographic apparatus |
| 10/16/2003 | WO2003006952A3 Method and apparatus for manipulating a sample |
| 10/16/2003 | US20030193026 Electron microscope, method for operating the same, and computer-readable medium |
| 10/15/2003 | EP1002216B1 Microscope for compliance measurement |
| 10/09/2003 | WO2003019238A3 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 10/08/2003 | EP1351256A2 Scanning probe system with spring probe |
| 10/08/2003 | EP1350471A1 Ultrasonic transesophageal probe for the imaging and diagnosis of multiple scan planes |
| 10/08/2003 | EP1350259A1 Sem provided with a secondary electron detector having a central electrode |
| 10/07/2003 | US6630668 Remote control of a scanning electron microscope aperture and gun alignment |
| 10/07/2003 | US6630666 Positron trap beam source for positron microbeam production |
| 10/02/2003 | US20030186471 Method and apparatus for measuring dopant profile of a semiconductor |
| 10/02/2003 | US20030186311 Using near field scanning probes and microarrays for analyzing pyhsical properties such as viscoelasticity, morphology and friction of liquid sample |
| 10/02/2003 | US20030184332 Probe driving method, and probe apparatus |
| 10/02/2003 | US20030183761 Scanning probe system with spring probe and actuation/sensing structure |
| 10/02/2003 | US20030182993 Scanning probe system with spring probe |
| 09/30/2003 | US6627888 Scanning electron microscope |
| 09/25/2003 | US20030179007 Method of inspecting pattern and inspecting instrument |
| 09/24/2003 | CN1444494A Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 09/18/2003 | WO2003041109A3 Spot grid array electron imagine system |
| 09/18/2003 | WO2003016781A3 Surface plasmon enhanced illumination system |
| 09/18/2003 | US20030175945 Measuring, analyzing surface of sampling; determination work function; generating configuration images |
| 09/18/2003 | US20030173501 Enhanced optical transmission apparatus with imporved aperture geometry |
| 09/16/2003 | US6621080 Apparatus for measuring a micro surface configuration and a method for manufacturing a probe incorporated in this measuring apparatus |
| 09/10/2003 | EP1342049A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 09/09/2003 | US6617761 Scanning unit and scanning microscope having the same |
| 09/09/2003 | US6617595 Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses |
| 09/09/2003 | US6617569 Probe opening forming apparatus and near-field optical microscope using the same |
| 09/02/2003 | US6614227 Scanning microwave microscope capable of realizing high resolution and microwave resonator |
| 09/02/2003 | US6612160 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 08/28/2003 | WO2003029921A3 Methods and systems for three-dimensional motion control and tracking of a mechanically unattached magnetic probe |
| 08/26/2003 | US6611178 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 08/21/2003 | WO2003069271A1 Improved scanning probe microscope |
| 08/21/2003 | US20030155934 Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| 08/21/2003 | US20030155481 Scanning probe microscope |
| 08/20/2003 | EP1336205A1 Inertial rotation device |
| 08/19/2003 | US6608307 System and method for accurate positioning of a scanning probe microscope |
| 08/14/2003 | WO2003067632A2 Multi-detector microscopic inspection system |
| 08/14/2003 | WO2003067224A1 Scanning probe microscope and specimen surface structure measuring method |
| 08/13/2003 | EP1335209A1 Probe driving method, and probe apparatus |
| 08/12/2003 | US6604295 Microscopic geometry measuring device |
| 08/07/2003 | US20030146380 Sensing mode atomic force microscope |
| 08/05/2003 | US6603239 Micromanipulator with piezoelectric movement elements |
| 07/24/2003 | US20030137216 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement |
| 07/24/2003 | US20030136907 Charged particle beam apparatus |
| 07/22/2003 | US6597185 Apparatus for localized measurements of complex permittivity of a material |
| 07/22/2003 | US6596992 Method of operating scanning probe microscope |
| 07/15/2003 | US6593571 Scanning probe microscope |
| 07/10/2003 | WO2002010829A8 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 07/08/2003 | US6590703 Optical system for scanning microscope |
| 07/08/2003 | US6590208 Balanced momentum probe holder |
| 07/03/2003 | US20030122073 Coated nanotube surface signal probe and method of attaching nanotube to probe holder |