|
| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
|---|
| 04/30/1985 | US4514634 Electron beam focussing | | 03/05/1985 | US4503329 Ion beam processing apparatus and method of correcting mask defects | | 09/11/1984 | US4471302 Method for representing logical status changes of a plurality of adjacent circuit nodes in an integrated circuit in a logic image employing a pulsed electron probe | | 12/20/1983 | US4422002 Piezo-electric travelling support | | 07/05/1983 | US4392058 Electron beam lithography | | 06/07/1983 | US4387304 Phase dependent SEM IC chip testing with voltage contrast | | 04/06/1983 | EP0075949A2 Ion beam processing apparatus and method of correcting mask defects | | 02/16/1983 | EP0071666A1 Electric travelling support | | 10/13/1982 | EP0062097A1 Method of displaying the logic status of several neighbouring modes in integrated circuits in a logic picture by using a pulsed-electron probe | | 08/10/1982 | US4343993 Scanning tunneling microscope | | 04/29/1981 | EP0027517A1 Scanning apparatus for surface analysis using vacuum-tunnel effect at cryogenic temperatures | | 04/28/1981 | US4264822 Electron beam testing method and apparatus of mask | | 10/21/1980 | US4229652 Backscatter apparatus and method for measuring thickness of a continuously moving coated strip of substrate material | | 03/13/1979 | US4144488 Investigation of near-surface electronic properties in semiconductors by electron beam scanning | | 02/27/1979 | US4142145 Method for determining conduction-band edge and electron affinity in semiconductors | | 05/09/1978 | US4088895 Memory device utilizing ion beam readout | | 03/28/1978 | US4081674 Ion microprobe analyzer | | 01/11/1977 | US4002912 Electrostatic lens to focus an ion beam to uniform density | | 12/14/1976 | US3997807 Mechanically adjustable electron gun apparatus |
|