Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
11/2005
11/03/2005US20050241175 Method and apparatus for removing and/or preventing surface contamination of a probe
11/02/2005EP1592057A2 Method and apparatus for removing and/or preventing surface contamination of a probe
11/02/2005EP1171791B1 Optical microscopy and its use in the study of cells
11/01/2005US6960766 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method
11/01/2005US6960765 Probe driving method, and probe apparatus
11/01/2005US6959481 Apertured probes for localized measurements of a material's complex permittivity and fabrication method
10/2005
10/27/2005DE10393612T5 Rasterkraftmikroskop und Betriebsverfahren zur Topographie- und Erkennungsbildgebung Atomic force microscope and operating procedures for topography and recognition imaging
10/26/2005CN1688884A Interaction detecting method and bioassay device, and bioassay-use substrate
10/25/2005US6958477 Electron beam apparatus, and inspection instrument and inspection process thereof
10/20/2005WO2005097669A1 Method for modifying existing micro- and nano-structures using a near-field scanning optical microscope
10/20/2005US20050231066 Fine-adjustment mechanism for scanning probe microscopy
10/20/2005US20050230619 Method and system for measurement of dielectric constant of thin films using a near field microwave probe
10/19/2005EP1587113A2 Stylus system for modifying small structures
10/19/2005EP1513954A4 Device and method of use for detection and characterization of pathogens and biological materials
10/18/2005US6956212 Electron microscope observation system and observation method
10/18/2005US6956211 Charged particle beam apparatus and charged particle beam irradiation method
10/12/2005EP1583845A2 Method and apparatus for molecular analysis in small sample volumes
10/12/2005CN1682315A Sensor with suspending arm and optical resonator
10/11/2005US6953519 making a cantilever using lithographic techniques and forming microscopic electrodes at a distal end of the cantilever by sputtering and gas-assisted etching processing using a focused charge particle beam
10/11/2005US6952952 Topography and recognition imaging atomic force microscope and method of operation
10/06/2005US20050221577 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope
10/05/2005EP1583104A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same
10/05/2005EP1342049B1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
10/04/2005US6951130 Software synchronization of multiple scanning probes
10/04/2005US6951129 Scanning probe microscope with improved probe head mount
09/2005
09/29/2005US20050211927 Method and apparatus for processing a micro sample
09/29/2005DE10393608T5 Scanverfahren und -vorrichtung Scanning method and apparatus
09/29/2005DE102004012520A1 Punktquelle für Elektronen-Feldemissionen mit lokaler Abschirmung Point source for electron field emission with local shielding
09/28/2005CN1673067A Positioning device for microscopic motion
09/27/2005US6950179 Shape measuring apparatus, shape measuring method, and aligning method
09/27/2005US6949732 Optical apparatuses using the near-field light
09/27/2005CA2361759C Method of information collection and processing of sample's surface
09/22/2005US20050206877 Shape measuring apparatus, shape measuring method, and aligning method
09/22/2005DE102005003684A1 Feinjustierungsmechanismus zur Rastersondenmikroskopie Fine adjustment mechanism for scanning probe microscopy
09/21/2005EP1577660A1 Measuring method and device for vibration frequency of multi-cantilever
09/20/2005US6946655 Spot grid array electron imaging system
09/20/2005US6946654 Collection of secondary electrons through the objective lens of a scanning electron microscope
09/20/2005US6945100 Scanning probe microscope with improved probe tip mount
09/20/2005US6945099 Torsional resonance mode probe-based instrument and method
09/15/2005WO2004104516A3 Spring constant calibration device
09/15/2005US20050199828 Method and apparatus for processing a micro sample
09/15/2005US20050199046 Scanning probe microscope
09/14/2005EP1574815A2 A dual stage instrument for scanning a specimen
09/14/2005EP1574282A2 Positioning device for microscopic motion
09/14/2005EP1573299A2 Fully digital controller for cantilever-based instruments
09/13/2005US6943350 Methods and apparatus for electron beam inspection of samples
09/13/2005US6941798 Scanning probe microscope and operation method
09/08/2005US20050194534 Method of operating a probe microscope
09/07/2005EP1571691A2 Point source for electron field emission with local shielding.
09/07/2005CN1666312A Software synchronization of multiple scanning probes
09/06/2005US6940210 Inertial rotation device
09/01/2005US20050189480 Long travel near-field scanning optical microscope
08/2005
08/30/2005US6936818 Charged particle beam apparatus
08/25/2005WO2005076832A2 Method for manufacturing single wall carbon nanotube tips
08/25/2005US20050184623 Positioning device for microscopic motion
08/25/2005US20050184237 Charged particle beam apparatus
08/23/2005US6933512 Charged particle beam instrument
08/23/2005US6931917 System for sensing a sample
08/18/2005US20050181132 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
08/18/2005US20050178965 Scanning electron microscope
08/17/2005CN1656236A Device and method of use for detection and characterization of pathogens and biological materials
08/17/2005CN1654920A Fine adjustment arrangement for detecting scanning probe microscope
08/16/2005US6930317 Charged particle beam apparatus, charged particle beam irradiation method, and method of manufacturing semiconductor device
08/16/2005US6929934 apparatus for imaging an object, comprising a probe via which an assay component may be delivered; a sensor to detect ion current; and means for controlling the position of the probe relative to the object in response to the ion current
08/16/2005US6928863 Apparatus and method for isolating and measuring movement in a metrology apparatus
08/11/2005US20050172704 Methods utilizing scanning probe microscope tips and products thereof or produced thereby
08/11/2005US20050172703 Scanning probe microscopy inspection and modification system
08/09/2005US6927391 Method and apparatus for processing a micro sample
08/03/2005CN1648634A Detecting method and structure for microstructure binding process
08/02/2005US6924482 Method of inspecting pattern and inspecting instrument
08/02/2005US6923044 Active cantilever for nanomachining and metrology
07/2005
07/28/2005US20050161594 Plasmon enhanced near-field optical probes
07/21/2005WO2005066609A1 Afm cantilever with nanoindentation test functionality
07/20/2005EP1555676A2 Method of operating a probe microscope
07/14/2005US20050153357 For detection of molecular interactions between immobilized ligands and receptors; immobilization on solid phase, biochemical conjugation, cleavage
07/14/2005US20050151077 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope
07/13/2005EP1553048A1 Nanometric mechanical oscillator
07/13/2005EP1553047A1 Nanometric mechanical oscillator
07/07/2005US20050145021 Method and apparatus for manipulating a sample
06/2005
06/30/2005WO2005059514A2 High aspect ratio tip atomic force microscopy cantilevers and method of manufacture
06/29/2005EP1548438A1 Interaction detecting method and bioassay device, and bioassay-use substrate
06/28/2005US6911656 Rotational stage for high speed, large area scanning in focused beam systems
06/28/2005US6911646 Measurements of electromagnetic properties and interactions based on radiation-excited polarizations
06/28/2005US6910368 Removable probe sensor assembly and scanning probe microscope
06/16/2005WO2004042741A3 Topography and recognition imaging atomic force microscope and method of operation
06/16/2005US20050127292 Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
06/16/2005DE10332451B4 Verfahren und Vorrichtung zum Bestimmen eines Höhenprofils auf einer Substratoberfläche Method and apparatus for determining a height profile of a substrate surface
06/15/2005EP1540661A1 Sensor with cantilever and optical resonator
06/14/2005US6906450 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement
06/08/2005EP1336205B8 Inertial rotation device
06/08/2005CN1624452A Scanning probe microscope and scanning method
06/07/2005US6903351 Charged particle beam irradiation equipment having scanning electromagnet power supplies
06/07/2005US6901800 Differential in-plane tunneling current sensor
06/02/2005WO2005050666A2 An oscillating probe with a virtual probe tip
05/2005
05/31/2005US6900446 Charged particle beam irradiation equipment and control method thereof
05/31/2005US6900443 Charged particle beam device for inspecting or structuring a specimen
05/26/2005US20050109937 Scanning electron microscope
05/24/2005US6897445 Scanning electron microscope
05/24/2005US6897015 Detecting target parasite in sample; provide substrate with a surface, deposit gold layer on surface, incubate with sample, image surface under microscope
05/24/2005US6895818 Differential in-plane tunneling current sensor
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