| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 05/17/2005 | US6893884 Method and apparatus for measuring dopant profile of a semiconductor |
| 05/12/2005 | US20050099895 Information recording/reproducing apparatus and recording medium |
| 05/12/2005 | US20050097944 Software synchronization of multiple scanning probes |
| 05/11/2005 | EP1530210A1 Information recording/reproducing apparatus and recording medium |
| 05/05/2005 | US20050092933 Specimen holder, observation system, and method of rotating specimen |
| 05/03/2005 | US6888137 Instrument and method for observing selected stored images acquired from a scanning charged-particle beam |
| 04/26/2005 | US6885000 Method and apparatus to correct for stage motion in E-beam inspection |
| 04/26/2005 | CA2148703C Industrial material processing electron linear accelerator |
| 04/21/2005 | US20050081610 Force scanning probe microscope |
| 04/21/2005 | US20050081609 Atomic force microscope and method for determining properties of a sample surface using an atomic force microscope |
| 04/21/2005 | US20050081608 System and method for the analysis of atomic force microscopy data |
| 04/19/2005 | US6881970 Charged particle beam irradiation equipment and control method thereof |
| 04/19/2005 | US6880389 Software synchronization of multiple scanning probes |
| 04/19/2005 | US6880388 Active cantilever for nanomachining and metrology |
| 04/13/2005 | EP1336205B1 Inertial rotation device |
| 04/12/2005 | US6878936 Applications operating with beams of charged particles |
| 04/12/2005 | US6877365 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 04/06/2005 | EP1520292A2 Software synchronization of multiple scanning probes |
| 04/06/2005 | EP1274966B1 Resonant probe driving arrangement and scanning probe microscope |
| 04/06/2005 | CN1603790A Detecting device with high resolution, narrow linewidth and long effectiveness |
| 03/31/2005 | US20050066714 Active probe for an atomic force microscope and method for use thereof |
| 03/31/2005 | US20050066713 Method to transiently detect samples in atomic force microscopes |
| 03/30/2005 | CN1602430A Spot grid array electron imaging system |
| 03/29/2005 | US6872958 Platform positioning system |
| 03/24/2005 | WO2004064097A3 Charged particle beam device for inspecting or structuring a specimen |
| 03/24/2005 | US20050061975 Electron microscope observation system and observation method |
| 03/17/2005 | DE102004039692A1 Tastkopfmikroskop und Abtastverfahren Tastkopfmikroskop and scanning |
| 03/16/2005 | EP1513954A2 Device and method of use for detection and characterization of pathogens and biological materials |
| 03/10/2005 | WO2005022124A1 Scanning type probe microscope and probe moving control method therefor |
| 03/10/2005 | US20050054215 Patterned functionalized silicon surfaces |
| 03/10/2005 | US20050050947 Scanning probe microscope and scanning method |
| 03/08/2005 | US6864488 Charged particle beam exposure method and apparatus |
| 03/08/2005 | US6862921 Method and apparatus for manipulating a sample |
| 03/02/2005 | CN1587983A Light-spot tracking device for needle tip scanning |
| 03/01/2005 | US6862142 Multi-detector microscopic inspection system |
| 03/01/2005 | US6861649 Balanced momentum probe holder |
| 03/01/2005 | US6861648 Scanning probe microscopy inspection and modification system |
| 02/24/2005 | WO2004075204A3 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 02/24/2005 | US20050040919 Two-axis actuator with large stage |
| 02/24/2005 | DE10332451A1 Semiconductor substrate surface height profile measurement procedure uses scanning force microscope with high sample density and slower speed in channels and structures |
| 02/23/2005 | EP1508964A2 Two-axis actuator with large stage |
| 02/17/2005 | US20050035289 Differential in-plane tunneling current sensor |
| 02/15/2005 | US6856140 System and method for quantitative measurements of a material's complex permittivity with use of near-field microwave probes |
| 02/10/2005 | US20050029450 Sensing mode atomic force microscope |
| 02/10/2005 | US20050028583 Method and apparatus of driving torsional resonance mode of a probe-based instrument |
| 02/08/2005 | US6853824 Electrophotographic endless belt comprising meandering-preventive member, and process cartridge and electrophotographic apparatus having such an endless belt |
| 02/03/2005 | WO2005010502A1 Probe replacing method for scanning probe microscope |
| 02/03/2005 | WO2005010501A1 Scanning-type probe microscope |
| 01/27/2005 | WO2005008679A1 Probe for an atomic force microscope |
| 01/26/2005 | CN2674434Y Adaptive multi-deformation range mode piezoelectric ceramic scanner |
| 01/25/2005 | US6847029 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 01/20/2005 | WO2005006347A1 Nanoparticles functionalized probes and methods for preparing such probes |
| 01/20/2005 | US20050012936 Scanning probe microscope and measurement method using the same |
| 01/18/2005 | US6844549 Electron beam length-measurement apparatus and measurement method |
| 01/13/2005 | US20050005688 Dual stage instrument for scanning a specimen |
| 01/06/2005 | US20050001164 Method and apparatus for processing a micro sample |
| 12/29/2004 | WO2004113833A1 3-d shape measuring unit, processing unit, and production method for semiconductor device |
| 12/23/2004 | WO2004112051A1 Scanning probe microscope using a surface drive actuator to position the scanning probe tip |
| 12/23/2004 | US20040256552 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 12/23/2004 | US20040255651 Dynamic activation for an atomic force microscope and method of use thereof |
| 12/16/2004 | WO2004005845A3 Apparatus and method of operating a probe-based instrument in a torsional |
| 12/16/2004 | US20040251425 Rotational stage for high speed, large area scanning in focused beam systems |
| 12/16/2004 | US20040250608 Removable probe sensor assembly and scanning probe microscope |
| 12/09/2004 | US20040244470 Method and systems for three-dimensional motion control and tracking of a mechanically unattached magnetic probe |
| 12/07/2004 | US6827979 Improving imaging resolution; coating with hydrophobic material that overcomes water condensation interference |
| 12/02/2004 | WO2004104516A2 Spring constant calibration device |
| 12/01/2004 | EP1482297A1 Scanning probe microscope and specimen surface structure measuring method |
| 12/01/2004 | EP1481279A2 Multi-detector microscopic inspection system |
| 11/30/2004 | US6823723 Method and apparatus for performing atomic force microscopy measurements |
| 11/24/2004 | CN1177212C Shearforce detector |
| 11/18/2004 | WO2004098384A2 Parallel analysis of molecular interactions |
| 11/18/2004 | US20040227076 Scanning probe microscope |
| 11/16/2004 | US6818907 Surface plasmon enhanced illumination system |
| 11/16/2004 | US6818902 Positron source |
| 11/16/2004 | US6818891 Sensing mode atomic force microscope |
| 11/11/2004 | WO2004057303A3 Fully digital controller for cantilever-based instruments |
| 11/04/2004 | US20040216518 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 11/04/2004 | DE10297522T5 Rasterkraftsonden-Mikroskop Atomic force microscope probe |
| 11/02/2004 | US6813574 Determines location of metrology mark and compensates for any horizontal shift |
| 11/02/2004 | US6812462 Dual electron beam instrument for multi-perspective |
| 11/02/2004 | US6810720 Active probe for an atomic force microscope and method of use thereof |
| 10/28/2004 | US20040211925 Charged particle beam apparatus, charged particle beam irradiation method, and method of manufacturing semiconductor device |
| 10/28/2004 | DE202004012130U1 Quadrupole measuring device, for measurements at a probe surface under ultra-high vacuum conditions, has moveable electrode carrier supporting four convex electrodes, which is driven by single piezo-actuator |
| 10/26/2004 | US6809306 Scanning unit and scanning microscope having the same |
| 10/21/2004 | US20040206166 Fully digital controller for cantilever-based instruments |
| 10/14/2004 | US20040201327 Flexure assembly for a scanner |
| 10/12/2004 | US6803573 Scanning electron microscope |
| 10/07/2004 | WO2004060044A3 Method and apparatus for molecular analysis in small sample volumes |
| 10/05/2004 | US6800865 Adhering nanotubes to be used as probe needles to electrode in protruding fashion, adhering base end of nanotube to surface of holder with tip end protruding, irradiating with electron beam to fasten nanotube to holder with coating film |
| 09/30/2004 | WO2003101278A3 Device and method of use for detection and characterization of pathogens and biological materials |
| 09/23/2004 | US20040185740 Method for rapid screening of emission-mix using a combinatorial chemistry approach |
| 09/23/2004 | US20040184214 Methods and systems for controlling motion of and tracking a mechanically unattached probe |
| 09/22/2004 | CN2643316Y Nanometer mechanical property measuring device having high-strength probe |
| 09/16/2004 | US20040181148 Optical scanning observation apparatus |
| 09/16/2004 | US20040180555 Circuit constructions |
| 09/16/2004 | US20040178353 Positron source |
| 09/16/2004 | DE102004002199A1 Dreiachs-Linearbewegungseinheit und Vorrichtung zum Untersuchen einer Probe hiermit Three-axis linear motion unit and apparatus for inspecting a sample hereby |
| 09/14/2004 | US6791108 Protective fullerene (C60) packaging system for microelectromechanical systems applications |
| 09/09/2004 | DE10307561A1 Meßanordnung zur kombinierten Abtastung und Untersuchung von mikrotechnischen, elektrische Kontakte aufweisenden Bauelementen Measuring arrangement for combined sampling and analysis of micro-technical, electrical contacts having components |
| 09/07/2004 | US6788086 Scanning probe system with spring probe |