| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 04/19/1994 | US5304535 Etching of nanoscale structures on high temperature superconductors |
| 03/30/1994 | EP0589815A2 Two dimensional profiling with a contact force atomic force microscope |
| 03/29/1994 | US5298748 Uncooled tunneling infrared sensor |
| 03/22/1994 | US5297130 Driving apparatus and a recording and/or reproducing apparatus using the same |
| 03/22/1994 | US5296704 For investigating a surface of a sample |
| 03/17/1994 | WO1994006160A1 Electromechanical positioning device |
| 03/16/1994 | EP0587165A2 Information processing apparatus having multiprobe control circuit |
| 03/15/1994 | US5294804 Cantilever displacement detection apparatus |
| 03/08/1994 | US5293326 Ultrasonic inspection and imaging instrument |
| 03/08/1994 | US5293042 Servo circuit of scanning probe microscope |
| 03/08/1994 | US5291775 Scanning force microscope with integrated optics and cantilever mount |
| 03/02/1994 | EP0584440A1 Atomic force microscope |
| 02/22/1994 | US5289408 Memory apparatus using tunnel current techniques |
| 02/22/1994 | US5289004 Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light |
| 02/15/1994 | US5286977 Positioning device |
| 02/01/1994 | US5283442 Surface profiling using scanning force microscopy |
| 02/01/1994 | US5283437 Pneumatically and electrostatically driven scanning tunneling microscope |
| 01/04/1994 | US5276672 Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof |
| 12/28/1993 | US5274230 Scanning probe microscope having first and second optical waveguides |
| 12/15/1993 | EP0574234A1 Automatic tip approach method and apparatus for scanning probe microscope |
| 11/16/1993 | US5262643 Automatic tip approach method and apparatus for scanning probe microscope |
| 11/16/1993 | US5262642 Scanning tunneling optical spectrometer |
| 11/09/1993 | US5260648 Process and system for rapid analysis of the spectrum of a signal at one or several points of measuring |
| 11/09/1993 | US5260572 Scanning probe microscope including height plus deflection method and apparatus to achieve both high resolution and high speed scanning |
| 10/26/1993 | US5256876 Scanning tunnel microscope equipped with scanning electron microscope |
| 10/19/1993 | US5254854 Scanning microscope comprising force-sensing means and position-sensitive photodetector |
| 10/13/1993 | EP0565227A1 Scanning force microscope |
| 10/12/1993 | US5252835 Machining oxide thin-films with an atomic force microscope: pattern and object formation on the nanometer scale |
| 10/06/1993 | EP0564088A1 Scanning force microscope with integrated optics and cantilever mount |
| 09/28/1993 | US5248912 Integrated scanning tunneling microscope |
| 09/21/1993 | US5247186 Integrated optical displacement sensor |
| 09/21/1993 | CA2002187C Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit |
| 09/07/1993 | US5242541 Method of producing ultrafine silicon tips for the afm/stm profilometry |
| 08/24/1993 | US5237859 Atomic force microscope |
| 08/11/1993 | EP0428663B1 Process and device for rapid spectral analysis of a signal at one or more measurement points |
| 08/03/1993 | USRE34331 Feedback control for scanning tunnel microscopes |
| 08/03/1993 | US5233191 Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process |
| 07/28/1993 | EP0478666A4 Microfabricated microscope assembly |
| 07/22/1993 | DE3844821C2 Micromanipulator for raster tunnel microscope |
| 07/21/1993 | EP0551814A1 Surface observing apparatus and method |
| 07/20/1993 | US5229607 Combination apparatus having a scanning electron microscope therein |
| 07/20/1993 | US5229606 Jumping probe microscope |
| 06/29/1993 | US5223713 Scanner for scanning tunneling microscope |
| 06/29/1993 | US5222396 Tunnelling acoustic microscope |
| 06/09/1993 | EP0545538A1 Scanning microscope comprising force-sensing means |
| 06/08/1993 | CA1318980C Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 05/25/1993 | US5214282 Method and apparatus for processing a minute portion of a specimen |
| 05/19/1993 | EP0542094A1 Corpuscular beam test method using voltage control |
| 05/11/1993 | US5210410 Scanning probe microscope having scan correction |
| 04/21/1993 | EP0537642A2 Information processing apparatus with tracking mechanism |
| 04/20/1993 | US5204531 Method of adjusting the size of the area scanned by a scanning probe |
| 04/07/1993 | EP0535934A1 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 04/06/1993 | US5200617 PMN translator and linearization system in scanning probe microscope |
| 04/06/1993 | CA1315898C Scanning tunneling microscope and surface topographic observation method |
| 03/31/1993 | EP0534406A1 Parallel plane holding mechanism and apparatus using such a mechanism |
| 03/30/1993 | US5198667 Method and apparatus for performing scanning tunneling optical absorption spectroscopy |
| 03/23/1993 | US5196701 High-resolution detection of material property variations |
| 03/17/1993 | EP0531779A1 X-ray mask containing a cantilevered tip for gap control and alignment |
| 03/03/1993 | EP0529616A2 Information processing apparatus and scanning tunnel microscope |
| 02/09/1993 | US5185571 Process and system for the asynchronous measurement of signal courses |
| 01/20/1993 | EP0523676A2 Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode, information recording/reproducing apparatus executing the method, and information recording carrier suitable for the method |
| 01/20/1993 | EP0523042A1 Ultrafast electro-dynamic x, y and theta positioning stage. |
| 01/13/1993 | EP0407460A4 An integrated mass storage device |
| 12/23/1992 | EP0519745A2 Recording medium, information processing apparatus using same, and information-erasing method |
| 12/22/1992 | US5173605 Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control |
| 12/16/1992 | EP0518618A2 Scanning tunneling microscope with cantilever type displacement element |
| 12/09/1992 | EP0517270A1 Scanning probe microscope |
| 12/02/1992 | EP0516418A1 Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 11/24/1992 | US5166516 Scanning probe microscope with slant detection and compensation |
| 11/17/1992 | US5164791 Minute displacement detector using optical interferometry |
| 11/10/1992 | US5162653 Scanning tunneling microscope and surface topographic observation method |
| 11/04/1992 | EP0511763A2 Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same |
| 10/29/1992 | WO1992018853A1 Imaging beta tracer microscope |
| 10/20/1992 | US5157256 System for exchanging samples and electrode tip units in a surface probe microscope |
| 10/13/1992 | US5155715 Reproducing apparatus |
| 10/06/1992 | US5153494 Ultrafast electro-dynamic x, y and theta positioning stage |
| 09/22/1992 | US5150392 For providing precise alignment |
| 09/22/1992 | US5150035 Encoder having atomic or molecular structure reference scale |
| 09/15/1992 | US5148026 Scanning probe microscopy |
| 09/01/1992 | US5144128 Surface microscope and surface microscopy |
| 08/25/1992 | US5142145 Composite scanning tunneling microscope |
| 08/19/1992 | EP0499149A1 Driving apparatus and a recording and/or reproducing apparatus using the same |
| 08/11/1992 | US5138159 Scanning tunneling microscope |
| 08/05/1992 | EP0497288A2 Probe scanning system |
| 07/21/1992 | US5132533 Method for forming probe and apparatus therefor |
| 07/14/1992 | US5130539 Imaging beta tracer microscope |
| 07/14/1992 | US5129132 Method of making an integrated scanning tunneling microscope |
| 07/07/1992 | US5128544 Scanning probe microscope |
| 07/01/1992 | EP0492915A1 Cantilever probe and apparatus using the same |
| 07/01/1992 | EP0491973A1 Integrated pneumatically and electrostatically controlled scanning tunneling microscope and method of making the same |
| 06/16/1992 | US5122739 STM-like device and method for measuring node voltages on integrated circuits |
| 05/27/1992 | EP0487300A1 Scanning probe microscopy |
| 05/26/1992 | US5117110 Composite scanning tunnelling microscope with a positioning function |
| 05/14/1992 | WO1992008336A1 Etching of nanoscale structures on high temperature superconductors |
| 04/22/1992 | EP0481498A2 Information recording unit and apparatus and method for information recording/reproduction |
| 04/21/1992 | US5107114 Fine scanning mechanism for atomic force microscope |
| 04/21/1992 | US5107113 Method and apparatus for correcting distortions in scanning tunneling microscope images |
| 04/21/1992 | US5107112 Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 04/15/1992 | EP0480645A1 Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same |
| 04/15/1992 | EP0480183A2 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |