| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 02/11/1999 | WO1999006793A1 Microscope for compliance measurement |
| 02/10/1999 | EP0896201A1 Scanning probe microscope |
| 02/09/1999 | US5869751 Multi-dimensional capacitive transducer |
| 02/02/1999 | US5866806 System for locating a feature of a surface |
| 02/02/1999 | US5866805 Cantilevers for a magnetically driven atomic force microscope |
| 01/19/1999 | US5861754 Position detection device |
| 01/14/1999 | DE19826984A1 Miniature positioning arrangement |
| 01/07/1999 | EP0855045A4 High resolution fiber optic probe for near field optical microscopy |
| 12/29/1998 | US5854487 Scanning probe microscope providing unobstructed top down and bottom up views |
| 12/22/1998 | US5852297 Focused ion beam apparatus and method for irradiating focused ion beam |
| 12/22/1998 | US5852232 Instrument for sensing a sample |
| 12/15/1998 | US5850038 Scanning probe microscope incorporating an optical microscope |
| 12/08/1998 | US5847488 Apparatus having drive device using electromechanical transducer |
| 12/08/1998 | US5847383 Approaching device of scanning probe microscope |
| 11/18/1998 | EP0792437A4 Capacitive transducer with electrostatic actuation |
| 11/17/1998 | US5838000 Method device and system for optical near-field scanning microscopy of test specimens in liquids |
| 11/11/1998 | EP0805946A4 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 11/11/1998 | EP0721564A4 High precision scale and position sensor |
| 11/05/1998 | WO1998034092A3 Object inspection and/or modification system and method |
| 11/03/1998 | US5831961 Information processing apparatus with probe undergoing circular motion |
| 11/03/1998 | US5831264 Electrostrictive actuator for scanned-probe microscope |
| 10/22/1998 | DE19816914A1 Scanning microscope with stage observing=evaluating parameters of sample surface |
| 10/21/1998 | EP0872707A1 Apparatus for measuring exchange force |
| 10/15/1998 | DE19816480A1 Scanning microscope with orthogonally displaced scanning head |
| 10/14/1998 | EP0871166A1 Apparatus for machining, recording, or reproducing, using scanning probe microscope |
| 10/14/1998 | EP0871165A2 Information recording/reproducing apparatus and method for recording and/or reproducing information on information recording carrier by use of probe electrode |
| 10/14/1998 | EP0871006A1 Scanning probe microscope |
| 10/13/1998 | US5821549 Through-the-substrate investigation of flip-chip IC's |
| 10/10/1998 | CA2231224A1 Apparatus for machining, recording, and reproducing, using scanning probe microscope |
| 10/09/1998 | CA2231310A1 Scanning probe microscope |
| 10/07/1998 | EP0868644A1 Multi-dimensional capacitive transducer |
| 09/22/1998 | US5811802 Scanning probe microscope with hollow pivot assembly |
| 09/22/1998 | CA2116497C Information recording and reproducing apparatus using probe |
| 09/16/1998 | EP0864899A2 Scanning near-field optical microscope |
| 09/16/1998 | EP0864181A1 Flat scanning stage for scanned probe microscopy |
| 09/15/1998 | US5808302 Fine positioning apparatus with atomic resolution |
| 09/12/1998 | CA2229221A1 Scanning near-field optical microscope |
| 09/09/1998 | EP0863543A2 Through-the-substrate investigation of flip-chip IC's |
| 09/08/1998 | US5805541 Information processing apparatus |
| 09/08/1998 | US5805448 Hybrid control system for scanning probe microscopes |
| 09/08/1998 | US5804709 For measuring a force used in atomic force microscopy |
| 09/03/1998 | WO1998038501A1 Scanning probe microscope providing unobstructed top down and bottom up views |
| 09/01/1998 | US5801939 Precision positioning control apparatus and precision positioning control method |
| 09/01/1998 | US5801381 Between a microscope probe tip and a sample surface |
| 08/27/1998 | DE19807911A1 Coarse probe adjustment for raster microscope |
| 08/13/1998 | DE19804017A1 Probe scanner for raster probe microscope |
| 08/11/1998 | US5793040 Information processing aparatus effecting probe position control with electrostatic force |
| 08/06/1998 | WO1998034092A2 Object inspection and/or modification system and method |
| 07/29/1998 | EP0855045A1 High resolution fiber optic probe for near field optical microscopy |
| 07/09/1998 | WO1998029707A1 Acoustic sensor as proximity detector |
| 06/30/1998 | US5773824 For determining topographical characteristics of a sample surface |
| 06/17/1998 | EP0847590A1 A scanning probe microscope having automatic probe exchange and alignment |
| 06/16/1998 | US5767514 Sensing electron flow between a tip and a surface of a sample |
| 06/09/1998 | US5763879 Diamond probe tip |
| 06/03/1998 | EP0813675A4 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 06/02/1998 | US5760396 Scanning probe microscope |
| 05/26/1998 | US5756997 Scanning probe/optical microscope with modular objective/probe and drive/detector units |
| 05/20/1998 | EP0843175A1 Scanning probe microscope and signal processing apparatus |
| 05/20/1998 | EP0843151A1 Probe scanning apparatus for probe microscope |
| 05/20/1998 | CN1182216A Probe scanning apparatus for probe microscope |
| 05/19/1998 | US5753911 Electrostatic actuator, probe using the actuator, scanning probe microscope, processing apparatus, and recording/reproducing apparatus |
| 05/19/1998 | US5753814 Magnetically-oscillated probe microscope for operation in liquids |
| 05/06/1998 | EP0839311A1 Inter-atomic measurement technique |
| 04/29/1998 | EP0838658A1 Tunnel effect sensor, particularly for measuring the topography of a surface |
| 04/29/1998 | EP0838302A1 Positioning mechanism |
| 04/28/1998 | US5744799 Apparatus for and method of real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
| 04/21/1998 | US5742377 Cantilever for scanning probe microscope including piezoelectric element and method of using the same |
| 04/21/1998 | US5742172 Scanning probe microscope and method for obtaining topographic image, surface potential image, and electrostatic capacitance distribution image |
| 04/01/1998 | EP0833125A2 Scanning probe microscope with hollow pivot assembly |
| 03/17/1998 | US5729015 Position control system for scanning probe microscope |
| 03/04/1998 | EP0826145A1 Data acquisition and control apparatus for scanning probe systems |
| 03/03/1998 | US5723981 Method for measuring the electrical potential in a semiconductor element |
| 03/03/1998 | US5723775 Atomic force microscope under high speed feedback control |
| 02/24/1998 | US5721721 Two scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording medium |
| 02/10/1998 | CA2071726C Recording medium, information-processing apparatus using same, and information-erasing method |
| 02/04/1998 | EP0822435A1 Device and method for scanning near field optical microscopy of samples in fluids |
| 02/03/1998 | US5714756 Scanning probe microscope having a single viewing device for on-axis and oblique angle views |
| 02/03/1998 | CA2195838A1 Method and device for optical near-field scanning microscopy of test specimens in liquids |
| 01/28/1998 | EP0821216A2 Position detection device |
| 01/14/1998 | EP0818052A1 Combined scanning probe and scanning energy microscope |
| 01/06/1998 | US5705878 Flat scanning stage for scanned probe microscopy |
| 01/06/1998 | US5705814 Scanning probe microscope having automatic probe exchange and alignment |
| 12/29/1997 | EP0813675A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 12/23/1997 | US5700953 Method for mapping mechanical property of a material using a scanning force microscope |
| 12/09/1997 | CA2066478C Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same |
| 12/02/1997 | US5693997 Non-tilting plate actuator for use in a micropositioning device |
| 12/02/1997 | CA2080251C Information processing apparatus with tracking mechanism |
| 11/27/1997 | WO1997044631A1 Inter-atomic measurement technique |
| 11/27/1997 | DE19721313A1 Test specimen critical dimension measurement system for e.g. semiconductor manufacture |
| 11/25/1997 | CA2059990C Moving apparatus, a moving method and an information detection and/or input apparatus using the same |
| 11/19/1997 | EP0807799A1 Probe Scanning Apparatus |
| 11/12/1997 | EP0805946A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 10/22/1997 | EP0786099A4 Fiber optic probe for near field optical microscopy |
| 10/21/1997 | US5680387 Detachable sealed container enclosing an information recording/reproducing probe and a recording medium |
| 10/21/1997 | US5679952 Scanning probe microscope |
| 10/21/1997 | US5679888 Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor |
| 10/14/1997 | CA2069708C Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 10/07/1997 | US5675154 Scanning probe microscope |
| 09/30/1997 | US5672816 Large stage system for scanning probe microscopes and other instruments |
| 09/23/1997 | US5670712 Method and apparatus for magnetic force control of a scanning probe |