| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 07/01/2003 | US6586952 Method of inspecting pattern and inspecting instrument |
| 07/01/2003 | US6586754 Servo control, and its application in a lithographic projection apparatus |
| 07/01/2003 | US6586736 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
| 06/26/2003 | DE20303784U1 Active vibration compensation apparatus e.g. for atomic force microscope, digitizes sensor signals, supplies to digital data processor for analysis, and controls actuator accordingly |
| 06/24/2003 | US6583412 Scanning tunneling charge transfer microscope |
| 06/24/2003 | US6583411 Multiple local probe measuring device and method |
| 06/19/2003 | WO2003050821A1 Force scanning probe microscope |
| 06/19/2003 | US20030110844 Force scanning probe microscope |
| 06/12/2003 | US20030107296 Lever mechanism for increasing displacement of micro-actuating device |
| 06/12/2003 | US20030107006 Charged particle beam exposure method and apparatus |
| 06/03/2003 | US6573369 Method and apparatus for solid state molecular analysis |
| 06/03/2003 | US6571612 Probe scanning method |
| 05/22/2003 | US20030094036 Active probe for an atomic force microscope and method of use thereof |
| 05/15/2003 | WO2003041109A2 Spot grid array electron imagine system |
| 05/15/2003 | US20030089163 System for sensing a sample |
| 05/15/2003 | US20030089162 Dual stage instrument for scanning a specimen |
| 05/14/2003 | EP0792437B1 Capacitive transducer with electrostatic actuation |
| 05/08/2003 | WO2003038410A1 Optical scanning type observation device |
| 05/08/2003 | US20030085355 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 05/08/2003 | US20030085354 Method of preventing charging, and apparatus for charged particle beam using the same |
| 05/08/2003 | US20030085353 Spot grid array electron imaging system |
| 05/06/2003 | US6559456 Charged particle beam exposure method and apparatus |
| 05/02/2003 | EP1305816A2 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 04/23/2003 | EP1303777A2 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 04/22/2003 | US6552805 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 04/22/2003 | US6552556 Prober for electrical measurement of potentials in the interior of ultra-fine semiconductor devices, and method of measuring electrical characteristics with said prober |
| 04/22/2003 | US6552339 Micro goniometer for scanning probe microscopy |
| 04/22/2003 | US6552331 Device and method for combining scanning and imaging methods in checking photomasks |
| 04/17/2003 | US20030073250 Method and apparatus for solid state molecular analysis |
| 04/10/2003 | WO2003029921A2 Methods and systems for three-dimensional motion control and tracking of a mechanically unattached magnetic probe |
| 03/27/2003 | US20030057382 Charged particle beam irradiation equipment and control method thereof |
| 03/26/2003 | CN1405547A Shearforce detector |
| 03/26/2003 | CN1405546A Scanning probe-needle microscope |
| 03/25/2003 | US6538249 Image-formation apparatus using charged particle beams under various focus conditions |
| 03/20/2003 | US20030052270 Electron beam length-measurement apparatus and measurement method |
| 03/19/2003 | EP1292361A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 03/13/2003 | US20030049381 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 03/12/2003 | CN1402830A Precision stage |
| 03/11/2003 | US6530268 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 03/11/2003 | US6530267 Scanning system having a deflectable probe tip |
| 03/11/2003 | US6530266 Active probe for an atomic force microscope and method of use thereof |
| 03/06/2003 | WO2003019238A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 03/06/2003 | US20030042409 Intermittent contact imaging under force-feedback control |
| 03/04/2003 | US6528785 Microscope probe needle |
| 02/27/2003 | WO2003016781A2 Surface plasmon enhanced illumination system |
| 02/25/2003 | US6525316 Multiaxis actuator and measuring head, especially for a scanning probe microscope |
| 02/20/2003 | US20030036204 Surface plasmon enhanced illumination system |
| 02/20/2003 | US20030034453 Coaxial probe and scanning micro-wave microscope including the same |
| 02/20/2003 | US20030033863 Atomic force microscopy for high throughput analysis |
| 02/18/2003 | US6520005 System for sensing a sample |
| 02/13/2003 | US20030030449 Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| 02/11/2003 | US6518582 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/11/2003 | US6518571 Through-the-substrate investigation of flip-chip IC's |
| 02/11/2003 | US6518570 Sensing mode atomic force microscope |
| 02/06/2003 | WO2002086476A3 High spatial resolution x-ray microanalysis |
| 02/04/2003 | US6515489 Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing |
| 02/04/2003 | US6515282 Testing of interconnection circuitry using two modulated charged particle beams |
| 02/04/2003 | US6515277 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 01/30/2003 | US20030020025 Lithographic method using ultra-fine probe needle |
| 01/23/2003 | WO2003006952A2 Method and apparatus for manipulating a sample |
| 01/23/2003 | WO2002010829A3 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 01/23/2003 | WO2001063555A3 Image deconvolution techniques for probe scanning apparatus |
| 01/23/2003 | US20030015651 Optical apparatuses using the near-field light |
| 01/21/2003 | US6509670 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 01/16/2003 | US20030013111 Method and apparatus for solid state molecular analysis |
| 01/16/2003 | US20030010928 Probe scanning device |
| 01/16/2003 | US20030010099 Scanning probe microscope |
| 01/15/2003 | EP1274966A2 Resonant probe driving arrangement and scanning probe microscope |
| 01/07/2003 | US6504386 Liquid dielectric capacitor for film thickness mapping, measurement methods using same |
| 01/07/2003 | US6504365 Magnetic force microscope |
| 01/03/2003 | WO2002010828A3 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 01/02/2003 | EP1271554A2 Scanning probe microscope |
| 12/31/2002 | US6501210 Positioning mechanism having elongate bending elements oriented perpendicular to the direction of movement |
| 12/31/2002 | US6499340 Scanning probe microscope and method of measuring geometry of sample surface with scanning probe microscope |
| 12/27/2002 | WO2002103328A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 12/25/2002 | CN2528004Y Adjustable pitch device for scanning probe microscope |
| 12/05/2002 | WO2002073125B1 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 12/05/2002 | US20020180983 Shape measuring apparatus, shape measuring method, and aligning method |
| 12/05/2002 | US20020178802 Scanning probe microscope and method of processing signals in the same |
| 12/04/2002 | EP1261890A1 Improved lens for microscopic inspection |
| 12/04/2002 | EP1261878A2 Precision stage |
| 12/03/2002 | US6489611 Atomic force microscope for profiling high aspect ratio samples |
| 11/28/2002 | US20020174716 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 11/28/2002 | US20020174714 System for sensing a sample |
| 11/21/2002 | US20020172943 Device and method of use for detection and characterization of pathogens and biological materials |
| 11/21/2002 | US20020171051 Image classification method, obervation method, and apparatus thereof |
| 11/14/2002 | WO2002073126B1 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 11/14/2002 | US20020166966 Low-vacuum scanning electron microscope |
| 10/31/2002 | WO2002086476A2 High spatial resolution x-ray microanalysis |
| 10/31/2002 | WO2001022433A8 Flexure assembly for a scanner |
| 10/31/2002 | US20020157457 Method and apparatus for performing atomic force microscopy measurements |
| 10/24/2002 | US20020154731 Method of X-ray analysis in a particle-optical apparatus |
| 10/24/2002 | US20020153480 Flexure assembly for a scanner |
| 10/17/2002 | US20020148955 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 10/17/2002 | DE10118962A1 High-resolution detection of material properties using polarized light, by moving micro-object in close proximity to surface of sample opposite illuminated side |
| 10/10/2002 | WO2002080187A1 Array and method for quasi-parallel probe microscopy |
| 10/10/2002 | DE10115690A1 Quasi-Paralleles Rasterkraftmikroskop Quasi-Parallel scanning force microscope |
| 10/01/2002 | US6459280 Capacitance devices for film thickness mapping, measurement methods using same |
| 10/01/2002 | US6459088 Drive stage and scanning probe microscope and information recording/reproducing apparatus using the same |
| 09/26/2002 | US20020134949 Through-the-lens neutralization for charged particle beam system |