Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
05/1990
05/16/1990EP0368510A1 Current amplifier
05/15/1990US4925139 Mechanical stage support for a scanning tunneling microscope
05/08/1990US4924091 Scanning ion conductance microscope
04/1990
04/18/1990EP0363550A1 Distance-controlled tunneling transducer and direct access storage unit employing the transducer
04/17/1990US4918309 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method
04/11/1990EP0362498A1 Inspection system utilizing retarding field back scattered electron collection
04/04/1990EP0361932A2 Scanning tunnel-current-detecting device and method
04/03/1990US4914293 Microscope apparatus
04/03/1990US4912822 Method of making an integrated scanning tunneling microscope
03/1990
03/27/1990US4912327 Pulsed microfocused ion beams
03/22/1990WO1990002955A1 Process and device for measuring states and variations over time
03/06/1990US4906840 Integrated scanning tunneling microscope
02/1990
02/28/1990EP0355241A1 Spin-polarized scanning tunneling microscope
02/20/1990US4902892 Method of measurement by scanning tunneling microscope
01/1990
01/16/1990US4894538 Scanning device for scanning tunneling microscope
01/16/1990US4894537 High stability bimorph scanning tunneling microscope
01/10/1990EP0349911A2 Micromanipulator
12/1989
12/27/1989EP0348239A1 Scanning tunneling microscope
12/27/1989EP0347739A2 Scanning tunneling microscope and surface topographic observation method
12/26/1989US4889988 Feedback control for scanning tunnel microscopes
12/20/1989EP0346446A1 Secondary ion mass spectrometer
12/05/1989US4885465 Spectrum display device for x-ray microanalyzer or the like
11/1989
11/28/1989US4883959 Scanning surface microscope using a micro-balance device for holding a probe-tip
11/14/1989US4880975 Fine adjustment mechanism for a scanning tunneling microscope
11/02/1989DE3812684A1 Method for fast scanning of uneven surfaces with the scanning tunnel microscope
10/1989
10/31/1989US4877957 Scanning type tunnel microscope
10/17/1989US4874947 Focused ion beam imaging and process control
10/03/1989US4871938 Positioning device for a scanning tunneling microscope
09/1989
09/26/1989US4870352 Contactless current probe based on electron tunneling
09/19/1989US4868396 Cell and substrate for electrochemical STM studies
09/19/1989CA1259710A1 Kinematic arrangement for the micro-movements of objects
09/12/1989US4866272 Surface analyzer for determining the energy distribution of scattered proton beams
09/12/1989US4866271 Relative displacement control apparatus
09/08/1989WO1989008322A1 Focused ion beam imaging and process control
09/08/1989WO1989007259A3 Integrated scanning tunneling microscope
09/08/1989WO1989007258A3 Integrated scanning tunneling microscope
09/06/1989EP0331148A2 Microscope apparatus
08/1989
08/29/1989US4861990 Tunneling susceptometry
08/10/1989WO1989007259A2 Integrated scanning tunneling microscope
08/10/1989WO1989007258A2 Integrated scanning tunneling microscope
08/10/1989WO1989007256A1 An integrated mass storage device
07/1989
07/25/1989US4851671 Oscillating quartz atomic force microscope
07/13/1989WO1989006436A1 Secondary ion mass spectrometer
06/1989
06/20/1989US4841191 Piezoelectric actuator control apparatus
06/14/1989EP0320354A1 Process for analysing the time of flight using continuous scanning, and analytical device for carrying out this process
06/13/1989US4839520 Production of pulsed electron beams
06/06/1989US4837506 Apparatus including a focused UV light source for non-contact measuremenht and alteration of electrical properties of conductors
06/06/1989US4837445 Coarse adjusting device of scanning tunneling microscope
06/06/1989US4837435 Tunneling scanning microscope having light source
05/1989
05/31/1989EP0318289A2 Apparatus and method for detecting tunnel current and electro-chemical reaction
04/1989
04/18/1989CA1252918A1 Scanning tunneling microscope
04/04/1989US4818872 Integrated charge neutralization and imaging system
03/1989
03/29/1989EP0308537A1 Sensor for converting a distance to optical and further to electrical energy, and surface scanning apparatus using same
03/21/1989US4814622 High speed scanning tunneling microscope
03/01/1989EP0304893A2 Encoder
03/01/1989EP0304525A1 Pulsed microfocused ion beams
01/1989
01/24/1989US4800273 Secondary ion mass spectrometer
01/17/1989US4798989 Scanning tunneling microscope installed in electron microscope
01/11/1989EP0298495A2 Method and apparatus for correcting defects of x-ray mask
12/1988
12/28/1988EP0296871A2 Tunnelling scanning microscope
12/28/1988EP0296262A1 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method
12/27/1988US4794646 Charged beam pattern defect inspection apparatus
12/27/1988US4794259 Charged particle collection
11/1988
11/29/1988US4788495 Method for the indirect identification of the intensity distribution of particle beam pulses generated in a particle beam measuring instrument
11/29/1988US4788426 Electronic read/write system
11/17/1988WO1988009051A1 Integrated charge neutralization and imaging system
11/17/1988EP0290647A1 Oscillating quartz atomic force microscope
11/15/1988US4785177 Kinematic arrangement for the micro-movements of objects
11/09/1988EP0290046A2 Surface analyzer
10/1988
10/18/1988US4778993 Time-of-flight mass spectrometry
09/1988
09/20/1988US4772817 Cathode mounting a high-frequency piezoelectric chip
09/06/1988US4769763 Control for coordinate measuring instruments
08/1988
08/30/1988US4768155 Supersonic flaw detecting system
08/23/1988US4766372 Electron beam tester
08/23/1988US4766311 Method and apparatus for precision SEM measurements
08/09/1988US4762996 Coarse approach positioning device
05/1988
05/04/1988EP0266039A2 Time-of-flight mass spectrometry
05/03/1988CA1236223A1 Focused ion beam processing
04/1988
04/06/1988EP0262855A2 Production of pulsed electron beams
02/1988
02/23/1988US4727250 Apparatus for measuring the angular distribution of charged particles scattered by a sample surface
01/1988
01/13/1988EP0252745A2 Relative displacement control apparatus
01/13/1988EP0252174A1 Coarse-approach positioning device
12/1987
12/16/1987EP0249214A2 Electrophotographic image recording system
12/09/1987EP0248233A2 Cathode mounting a high-frequency piezoelectric chip
10/1987
10/28/1987EP0242993A1 Apparatus and method for collecting charged particles
10/06/1987US4698587 Method of characterizing critical timing paths and analyzing timing related failure modes in very large scale integrated circuits
09/1987
09/30/1987EP0239085A2 Device for micro-movement of objects
06/1987
06/23/1987US4675602 Method for automatically setting an operating point given signal curve measurements with a particle beam measuring apparatus
06/02/1987US4670651 Apparatus for performing the SNMS method
05/1987
05/26/1987US4668865 Scanning tunneling microscope
02/1987
02/25/1987EP0211202A1 Control device for coordinate measuring tools
01/1987
01/27/1987US4639301 Focused ion beam processing
11/1986
11/05/1986EP0200333A2 Ion beam processing method and apparatus
10/1986
10/08/1986EP0196531A1 Method for indirectly determining the intensity distribution of pulsed particle beams produced in a particle beam measuring instrument
09/1986
09/17/1986EP0194323A1 Scanning tunneling microscope
07/1986
07/30/1986EP0189137A2 Ultrasonic flaw detecting system
04/1986
04/02/1986EP0175807A1 Apparatus for the sputtered neutral mass spectrometry
10/1985
10/02/1985EP0156006A1 Process for automatically adjusting the operating point of corpuscular radiation-measuring apparatuses during signal structure measurement
09/1985
09/26/1985WO1985004250A1 Method and apparatus for precision sem measurements
08/1985
08/28/1985EP0152501A1 Device for measuring the angular distribution of charged particles diffracted on a sample surface
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