Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
04/1992
04/08/1992EP0478666A1 Microfabricated microscope assembly.
04/07/1992US5103095 Scanning probe microscope employing adjustable tilt and unitary head
04/07/1992US5103094 Compact temperature-compensated tube-type scanning probe with large scan range
03/1992
03/31/1992CA1298416C High stability bimorph scanning tunneling microscope
03/24/1992US5099117 Scanning tunnel microscope capable of detecting electrons emanating from a specimen
03/18/1992EP0475564A1 Fine scanning mechanism for atomic force microscope
02/1992
02/26/1992EP0472342A2 Micro-displacement type information detection probe device and microscope and information processing device by use thereof
02/20/1992WO1991015333A3 Ultrafast electro-dynamic x, y and theta positioning stage
02/17/1992CA2049197C Micro-displacement type information detection probe device and scanning tunneling microscope, atomic force microscope, information processing device by use thereof
02/12/1992EP0470370A1 Information detection apparatus and method
02/05/1992EP0469879A2 Information recording device and information recording method
02/05/1992EP0469274A2 Ultrasonic inspection and imaging instrument
01/1992
01/21/1992US5083022 Scanning tunneling microscope
01/14/1992US5081353 Combined scanning electron and scanning tunnelling microscope apparatus and method
12/1991
12/31/1991US5077473 Drift compensation for scanning probe microscopes using an enhanced probe positioning system
12/27/1991EP0177566B1 Method for precision sem measurements
12/24/1991US5075548 Tunnel current probe moving mechanism having parallel cantilevers
12/18/1991EP0461393A1 Scanning tunnel microscope
12/17/1991US5073912 Sample moving apparatus, sample moving system and semiconductor manufacturing apparatus
12/04/1991EP0459392A2 Method and apparatus for processing a minute portion of a specimen
11/1991
11/19/1991US5066358 Nitride cantilevers with single crystal silicon tips
11/12/1991US5065103 Scanning capacitance - voltage microscopy
10/1991
10/29/1991US5061850 High-repetition rate position sensitive atom probe
10/22/1991US5059793 Scanning tunneling microscope having proper servo control function
10/17/1991WO1991015752A1 Scanning tunneling microscope
10/17/1991WO1991015333A2 Ultrafast electro-dynamic x, y and theta positioning stage
10/08/1991US5055680 Scanning tunneling microscope
10/02/1991EP0449221A2 Scanning probe microscope
10/02/1991EP0448985A1 Scanning capacitance - voltage microscopy
10/01/1991US5053995 Tunnel current data storage apparatus having separate lever bodies
09/1991
09/24/1991US5051646 Method of driving a piezoelectric scanner linearly with time
09/24/1991US5051594 Fine positioning device, as for the stage of a scanning tunneling microscope
09/10/1991US5047649 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
09/10/1991US5047637 Atomic probe type microscope apparatus
09/10/1991US5047633 Imaging apparatus and method
09/03/1991US5045705 Charged particle beam apparatus with charge-up compensation
08/1991
08/27/1991US5043577 Distance-controlled tunneling transducer
08/21/1991EP0442630A2 Combined scanning electron and scanning tunnelling microscope apparatus and method
08/14/1991EP0441311A2 Surface microscope apparatus
07/1991
07/16/1991US5032723 Charged particle energy analyzer
06/1991
06/26/1991EP0433604A2 Electrical probe incorporating scanning proximity microscope
06/18/1991US5025153 Scanning tunneling spectroscope and a spectroscopic information detection method
06/18/1991US5025147 Laser light
06/12/1991EP0431623A2 Method for forming probe and apparatus therefor
05/1991
05/21/1991US5017266 Piezoelectric transducer
05/21/1991US5017010 High sensitivity position sensor and method
05/14/1991US5015862 Laser modulation of LMI sources
05/14/1991US5015850 Microfabricated microscope assembly
04/1991
04/16/1991US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
04/10/1991EP0421437A2 Scanning tunneling microscope having proper servo control function
04/10/1991EP0421355A2 Scanning tunneling microscope
04/10/1991EP0421354A2 Scanning tunneling microscope
04/09/1991US5006814 Current amplifier
03/1991
03/20/1991EP0417354A1 Electron beam apparatus with charge-up compensation
03/12/1991US4999495 Scanning tunneling microscope
03/12/1991US4999494 System for scanning large sample areas with a scanning probe microscope
03/05/1991US4998016 Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
02/1991
02/20/1991EP0413040A1 Method of producing ultrafine silicon tips for the AFM/STM profilometry
02/12/1991US4992728 Electrical probe incorporating scanning proximity microscope
02/12/1991US4992660 Scanning tunneling microscope
02/12/1991US4992659 Near-field lorentz force microscopy
01/1991
01/30/1991EP0410131A1 Near-field Lorentz force microscopy
01/22/1991US4987303 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
01/16/1991EP0408009A2 Scanning tunneling spectroscope and a spectroscopic information detection method
01/16/1991EP0407460A1 An integrated mass storage device.
01/15/1991US4985627 Spin-polarized scanning tunneling microscope
01/08/1991US4983831 Time-of-flight analysis method with continuous scanning and analyzer to implement this method
01/08/1991US4983830 Focused ion beam apparatus having charged particle energy filter
01/02/1991EP0404799A1 Integrated scanning tunneling microscope.
12/1990
12/27/1990WO1990015986A1 Microfabricated microscope assembly
12/27/1990EP0403766A2 Scanning tunnelling microscope displacement detector
12/13/1990WO1990015340A1 Process and device for rapid spectral analysis of a signal at one or more measurement points
12/12/1990EP0401658A1 Scanning tunneling microscope with arrangements for detecting electrons coming from the sample
12/05/1990EP0400541A1 Atomic probe type microscope apparatus
11/1990
11/29/1990DE3844659A1 Micromanipulator
11/22/1990EP0398085A1 High sensitivity position-sensing method
11/22/1990EP0397799A1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same.
11/15/1990WO1990013907A1 Scanning tunnel microscope
11/14/1990EP0397416A1 Imaging apparatus and method
11/14/1990EP0397116A2 Information detecting apparatus
11/13/1990US4969978 Electrolytic cells
11/08/1990CA2016002A1 Imaging apparatus and method
10/1990
10/31/1990EP0394995A2 Information record/reproducing apparatus and information recording medium
10/31/1990EP0394914A1 Mechanical stage support especially for a tunneling microscope
10/10/1990EP0391429A2 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
09/1990
09/26/1990EP0388959A2 Charged particled energy analyzer
09/24/1990CA2012879A1 Charged particled energy analyzer
09/04/1990US4954704 Method to increase the speed of a scanning probe microscope
08/1990
08/22/1990EP0383323A1 Tunneling acoustic microscope
08/08/1990EP0381113A2 Tunnel current data storage apparatus having separate lever bodies
08/07/1990US4947042 Tunnel unit and scanning head for scanning tunneling microscope
07/1990
07/31/1990US4945235 Fine adjustment mechanism for a scanning tunneling microscope
07/18/1990EP0378444A2 Reproducing apparatus
07/03/1990US4939363 Scanning tunneling microscope
06/1990
06/20/1990EP0373742A2 Tunnel unit and scanning head for scanning tunneling microscope
06/12/1990US4933565 Method and apparatus for correcting defects of X-ray mask
06/12/1990US4933552 For analyzing a sample
06/12/1990CA1270133A1 Coarse approach positioning device
05/1990
05/29/1990US4929041 Cathodoluminescence system for use in a scanning electron microscope including means for controlling optical fiber aperture
05/16/1990EP0368579A2 Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
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