Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
11/2000
11/30/2000WO2000023840A9 Near field optical scanning system employing microfabricated solid immersion lens
11/30/2000DE19924606A1 Ligand-Anker-Konjugate The ligand-anchor conjugates
11/29/2000EP1055907A2 Rangefinder
11/23/2000WO2000070296A1 System for sensing a sample
11/22/2000EP1054249A1 Electronic device surface signal control probe and method of manufacturing the probe
11/07/2000US6144028 Scanning probe microscope assembly and method for making confocal, spectrophotometric, Near-Field, and Scanning probe measurements and associated images
11/02/2000WO2000020823B1 Atomic force microscope for profiling high aspect ratio samples
10/2000
10/31/2000US6138503 Scanning probe microscope system including removable probe sensor assembly
10/26/2000WO2000063736A2 Optical microscopy and its use in the study of cells
10/24/2000US6137110 Focused ion beam source method and apparatus
10/24/2000US6134955 Magnetic modulation of force sensor for AC detection in an atomic force microscope
10/18/2000EP1045253A2 Prober for electrical measurements and method of measuring electrical characteristics with said prober
10/10/2000US6130428 Laser fault correction of semiconductor devices
10/10/2000US6130427 Scanning probe microscope with multimode head
10/05/2000WO2000058759A2 Active probe for an atomic force microscope and method of use thereof
10/03/2000US6127682 Scanning probe microscope and method of analyzing sample using same
09/2000
09/30/2000CA2303473A1 Prober for electrical measurement and method of measuring electrical characteristics with said prober
09/21/2000WO2000023840A8 Near field optical scanning system employing microfabricated solid immersion lens
09/21/2000WO2000020823A3 Atomic force microscope for profiling high aspect ratio samples
09/20/2000EP1037009A1 Multi-axial actuator and probe head for a scanning probe microscope
09/13/2000EP0721564B1 High precision scale and position sensor
09/12/2000US6118121 Probe scanning mechanism for a scanning probe microscope
08/2000
08/10/2000WO2000046568A2 Method of information collection and processing of sample's surface
08/09/2000EP1025416A1 Method and apparatus for obtaining improved vertical metrology measurements
08/08/2000US6100705 Method and structure for viewing static signal levels on integrated circuits using electron beam deflection device
08/08/2000US6100534 Microscopic area scanning apparatus
08/08/2000US6100523 Micro goniometer for scanning microscopy
08/02/2000EP0864181A4 Flat scanning stage for scanned probe microscopy
07/2000
07/26/2000EP0813675B1 Magnetic modulation of force sensor for ac detection in an atomic force microscope
06/2000
06/28/2000EP1012584A2 Object inspection and/or modification system and method
06/20/2000US6078174 Apparatus for measuring exchange force
06/20/2000US6078044 Probe scanning apparatus
06/20/2000US6076397 Positioning apparatus
06/15/2000DE19956725A1 Scanning probe microscope for imaging sample surface; has feedback loop to generate drive signal for controlling probe and imaging device that uses probe signal, drive signal and relation between two signals
06/13/2000US6075585 Vibrating probe for a scanning probe microscope
06/08/2000WO2000033052A1 Electronic device surface signal control probe and method of manufacturing the probe
05/2000
05/24/2000EP1002216A1 Microscope for compliance measurement
05/18/2000DE19852833A1 Scanning microscope probe distance evaluation method, e.g. for scanning near-field optical microscopy; uses detected oscillation amplitude, frequency or phase of probe subjected to lateral and superimposed vertical oscillation
05/10/2000EP0998689A1 Optical near-field microscope
05/02/2000US6057546 Kinematically mounted probe holder for scanning probe microscope
04/2000
04/27/2000WO2000023840A1 Near field optical scanning system employing microfabricated solid immersion lens
04/18/2000US6051839 Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes
04/18/2000US6051833 Probe scanning device
04/13/2000WO2000020823A2 Atomic force microscope for profiling high aspect ratio samples
04/04/2000US6046972 Method and producing probe with minute aperture, scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe
03/2000
03/23/2000WO2000016372A1 High energy electron diffraction apparatus
03/01/2000EP0847590A4 A scanning probe microscope having automatic probe exchange and alignment
02/2000
02/22/2000US6028305 Dual cantilever scanning probe microscope
02/15/2000CA2098040C Automatic tip approach method and apparatus for scanning probe microscope
02/08/2000US6021665 Cantilever tracking type scanning probe microscope
01/2000
01/18/2000CA2075855C Scanning microscope comprising force-sensing means
12/1999
12/29/1999EP0868644A4 Multi-dimensional capacitive transducer
12/15/1999EP0964251A1 Optical waveguide probe and its manufacturing method
12/14/1999US6002131 Scanning probe potentiometer
12/14/1999US6000947 Method of fabricating transistor or other electronic device using scanning probe microscope
12/02/1999WO1999061949A1 Optical near-field microscope
12/02/1999DE19823265A1 Image generation method for raster scanning microscope
11/1999
11/30/1999US5994750 Microstructure and method of forming the same
11/30/1999US5994691 Near-field scanning optical microscope
11/25/1999DE19822869A1 Optical near-field microscope
11/23/1999US5990477 Apparatus for machining, recording, and reproducing, using scanning probe microscope
11/16/1999US5983713 Scanning probe microscope
11/16/1999US5983712 Microscope for compliance measurement
11/02/1999US5978326 Information processing apparatus using an offset signal to control the position of a probe
10/1999
10/19/1999US5966787 Piezoelectric actuator,
10/19/1999CA2073919C Multiple probe electrode arrangement for scanning tunnelling microscope recording and reading
10/12/1999US5965885 Probe scanning apparatus for probe microscope
10/12/1999US5965881 Scanning probe microscope and processing apparatus
10/05/1999US5963367 Micromechanical xyz stage for use with optical elements
09/1999
09/21/1999CA2070359C Scanning probe microscope
09/14/1999US5952656 Energy filter
09/07/1999US5949070 For examining surface contours of a specimen
09/07/1999US5948972 For sensing a sample
08/1999
08/31/1999US5945671 Scanning probe microscope and micro-area processing machine both having micro-positioning mechanism
08/31/1999CA2076925C Information processing apparatus and scanning tunnel microscope
08/26/1999DE19906591A1 Measuring method for scanning probe microscope
08/24/1999US5943548 Method of analyzing a wafer in a semiconductor device fabrication process
08/17/1999US5939719 Scanning probe microscope with scan correction
08/11/1999EP0935137A1 Scanning probe microscope
08/03/1999US5932876 Tunnel effect sensor, suitable for determining the topography of a surface
08/03/1999CA2053533C Information recording unit, apparatus and method for information recording/reproduction in conjunction with a scanning tunneling microscope
07/1999
07/28/1999EP0932182A2 Method and an apparatus for testing a substrate
07/28/1999EP0932020A1 Micro surface measuring apparatus and probe manufacturing
07/20/1999US5925818 Method and apparatus for magnetic force control of a scanning probe
07/14/1999EP0928950A2 Method for detecting and examining slightly irregular surface states, and its use for fabricating liquid crystal display devices
06/1999
06/24/1999WO1999031514A1 Optical waveguide probe and its manufacturing method
06/16/1999EP0922929A1 Scanning-probe device with compensation for the disturbing influence of mechanical vibrations on the scanning process
06/15/1999US5912461 Probe scanning mechanism for a scanning probe microscope
06/03/1999WO1999015851A9 Method and apparatus for obtaining improved vertical metrology measurements
05/1999
05/11/1999US5903085 Tester for testing a recording head
05/06/1999EP0913665A1 Fine movement mechanism and scanning probe microscope
04/1999
04/27/1999US5898106 Method and apparatus for obtaining improved vertical metrology measurements
04/14/1999EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit
04/07/1999EP0783662B1 Fine positioning apparatus with atomic resolution
04/01/1999WO1999015851A1 Method and apparatus for obtaining improved vertical metrology measurements
03/1999
03/31/1999CN1212365A Apparatus for measuring exchange force
03/24/1999EP0903606A2 Micromechanical XYZ stage for use with optical elements
03/16/1999US5883705 Atomic force microscope for high speed imaging including integral actuator and sensor
03/02/1999US5877891 Scanning probe microscope having a single viewing device for on-axis and oblique optical views
03/02/1999US5877497 Data acquisition and control apparatus for scanning probe systems
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