| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 09/16/1997 | US5668371 Method and apparatus for proton therapy |
| 09/09/1997 | US5665253 Method of manufacturing single-wafer tunneling sensor |
| 09/03/1997 | EP0792437A1 Capacitive transducer with electrostatic actuation |
| 09/02/1997 | US5664036 High resolution fiber optic probe for near field optical microscopy and method of making same |
| 08/26/1997 | US5661235 Multi-dimensional capacitive transducer |
| 08/20/1997 | EP0790482A1 A dual stage instrument for scanning a specimen |
| 08/20/1997 | EP0790481A1 Non-tilting plate actuator for use in a micropositioning device |
| 08/20/1997 | EP0790480A1 Tilting positioner for a micropositioning device |
| 08/19/1997 | CA2057619C Cantilever probe and apparatus using the same |
| 08/05/1997 | CA2052882C Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same |
| 07/30/1997 | EP0786099A1 Fiber optic probe for near field optical microscopy |
| 07/29/1997 | US5652428 Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere |
| 07/29/1997 | US5652377 Scanning method with scanning probe microscope |
| 07/17/1997 | DE19600240A1 Raster scan force microscope with mechanical coarse setting also sensor and evaluator |
| 07/16/1997 | EP0783662A1 Fine positioning apparatus with atomic resolution |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/09/1997 | EP0408602B1 Focused ion beam imaging and process control |
| 06/26/1997 | WO1997022845A1 Multi-dimensional capacitive transducer |
| 06/24/1997 | US5641896 Coupled oscillator scanning imager |
| 06/10/1997 | US5637879 Focused ion beam column with electrically variable blanking aperture |
| 06/05/1997 | WO1997020354A1 Flat scanning stage for scanned probe microscopy |
| 06/03/1997 | US5635836 Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope |
| 06/03/1997 | US5634466 Ultrasonic transesophageal probe with detachable transducer tip |
| 05/21/1997 | CN1150253A 原子力显微镜 AFM |
| 05/20/1997 | US5631463 Cantilever detector having piezoelectric film of zinc oxide or aluminum nitride and platinum or palladium electrodes with controlled crystal orientation, for scanning tunneling microscopes |
| 05/06/1997 | US5627371 Tilting positioner for a micropositioning device |
| 05/02/1997 | EP0770847A2 Method and device for measuring the distance between a gauge and a measuring surface |
| 04/22/1997 | US5623295 Information recording reproducing apparatus using probe |
| 04/17/1997 | WO1997014067A1 High resolution fiber optic probe for near field optical microscopy |
| 04/08/1997 | US5619034 Differentiating mass spectrometer |
| 04/08/1997 | US5618760 Method of etching a pattern on a substrate using a scanning probe microscope |
| 04/01/1997 | US5616916 Configuration measuring method and apparatus for optically detecting a displacement of a probe due to an atomic force |
| 03/25/1997 | US5614712 Method of engaging the scanning probe of a scanning probe microscope with a sample surface |
| 03/18/1997 | US5612491 Formation of a magnetic film on an atomic force microscope cantilever |
| 03/11/1997 | US5610898 Information recording/reproducing method for recording and/or reproducing information on information recording carrier by use of probe electrode |
| 03/06/1997 | WO1997008733A1 A scanning probe microscope having automatic probe exchange and alignment |
| 03/06/1997 | DE19532838A1 Non contact scanning force microscope |
| 02/26/1997 | EP0759537A2 A scanning force microscope with optical device |
| 01/22/1997 | EP0754289A1 Cantilever deflection sensor and use thereof |
| 01/21/1997 | US5596194 Single-wafer tunneling sensor and low-cost IC manufacturing method |
| 12/31/1996 | US5589686 Method of an apparatus for real-time nanometer-scale position measurement of the sensor of a scanning tunneling microscope or other sensor scanning atomic or other undulating surfaces |
| 12/31/1996 | CA2048365C Information processing device and information processing method |
| 12/03/1996 | US5581537 Information record/reproducing apparatus and information recording medium |
| 12/03/1996 | US5581082 Combined scanning probe and scanning energy microscope |
| 11/26/1996 | CA2070946C Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same |
| 11/19/1996 | US5576483 Capacitive transducer with electrostatic actuation |
| 11/14/1996 | WO1996035943A1 Data acquisition and control apparatus for scanning probe systems |
| 10/22/1996 | US5568004 Electromechanical positioning device |
| 10/09/1996 | EP0736746A1 Method of using scanning probe microscope permitting cleaning of probe microscope or of probe tip in ambient atmosphere |
| 10/03/1996 | WO1996030927A1 Combined scanning probe and scanning energy microscope |
| 10/03/1996 | CA2213970A1 Combined scanning probe and scanning energy microscope |
| 10/02/1996 | EP0478666B1 Microfabricated microscope assembly |
| 10/01/1996 | CA2060674C Driving apparatus and a recording and/or reproducing apparatus using the same |
| 09/25/1996 | EP0734045A2 Focused ion beam apparatus and method for irradiating focused ion beam |
| 09/19/1996 | WO1996028837A1 Hybrid control system for scanning probe microscopes |
| 09/19/1996 | WO1996028706A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 09/17/1996 | US5557156 Scan control for scanning probe microscopes |
| 09/17/1996 | US5555887 Ultrasonic transducer probe with heat dissipating lens |
| 09/10/1996 | US5554851 Parallel plane holding mechanism and apparatus using such a mechanism |
| 09/10/1996 | US5553487 Methods of operating atomic force microscopes to measure friction |
| 09/10/1996 | US5553486 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 08/28/1996 | EP0729006A2 Information processing apparatus with probe undergoing circular motion |
| 08/15/1996 | WO1996024819A1 Cantilever deflection sensor and use thereof |
| 08/14/1996 | EP0726566A2 Information processing apparatus that has a position drift detector |
| 08/13/1996 | US5546375 Method of manufacturing a tip for scanning tunneling microscope using peeling layer |
| 08/13/1996 | US5546374 Information recording and/or reproducing apparatus using probe |
| 08/06/1996 | US5543614 Scanning probe microscope capable of suppressing probe vibration caused by feedback control |
| 07/30/1996 | US5540229 System and method for viewing three-dimensional echographic data |
| 07/17/1996 | EP0722077A2 Information processing apparatus effecting probe position control with electrostatic force |
| 07/17/1996 | EP0721564A1 High precision scale and position sensor |
| 07/02/1996 | US5532494 Treatment and observation apparatus using scanning probe |
| 06/25/1996 | US5530253 Sample stage for scanning probe microscope head |
| 06/12/1996 | EP0716417A2 Information processing apparatus provided with mechanism for controlling position of probe |
| 06/11/1996 | US5526334 Information processing apparatus with multiple probes and method therefor |
| 06/11/1996 | US5524479 Detecting system for scanning microscopes |
| 05/28/1996 | US5521377 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 05/23/1996 | WO1996015423A1 Capacitive transducer with electrostatic actuation |
| 05/21/1996 | US5519686 Encoder for controlling measurements in the range of a few angstroms |
| 05/14/1996 | US5517482 Information recording/reproducing apparatus having fuzzy operating unit |
| 05/14/1996 | US5517027 Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these |
| 05/14/1996 | US5515719 Controlled force microscope for operation in liquids |
| 05/08/1996 | EP0711029A2 Microstructure and method of forming the same |
| 05/07/1996 | US5513518 For generating a signal corresponding to a scanned sample |
| 05/02/1996 | WO1996012930A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 04/30/1996 | US5511931 Micromotion stage |
| 04/25/1996 | WO1996012206A1 Fiber optic probe for near field optical microscopy |
| 04/23/1996 | US5510615 Scanning probe microscope apparatus for use in a scanning electron microscope |
| 04/16/1996 | US5507179 Synchronous sampling scanning force microscope |
| 04/10/1996 | EP0706052A2 Sensor using tunnel current |
| 04/09/1996 | US5506829 Cantilever probe and apparatus using the same |
| 04/03/1996 | EP0611485B1 Electromechanical positioning device |
| 04/02/1996 | US5504338 Apparatus and method using low-voltage and/or low-current scanning probe lithography |
| 04/02/1996 | US5503010 Directional atomic force microscope and method of observing a sample with the microscope |
| 03/26/1996 | US5502305 Measurement of trace element concentration distribution, and evaluation of carriers, in semiconductors, and preparation of standard samples |
| 03/13/1996 | EP0701135A1 Single-wafer tunneling sensor and low-cost IC manufacturing method |
| 03/12/1996 | US5497656 Method of measuring a surface profile using an atomic force microscope |
| 03/07/1996 | WO1996007074A1 Fine positioning apparatus with atomic resolution |
| 03/05/1996 | US5496999 Scanning probe microscope |
| 02/13/1996 | CA2007618C Reproducing apparatus |
| 02/08/1996 | WO1996003641A1 Scanning probe microscope assembly |