| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 04/19/2007 | WO2007041976A1 Method for examining a measurement object, and apparatus |
| 04/19/2007 | US20070085022 Scanning mechanism for scanning probe microscope |
| 04/18/2007 | EP1775570A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775569A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775568A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775567A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser Doppler interferometer with specimen light excitation function, using the array and cantilever |
| 04/18/2007 | EP1775258A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 04/17/2007 | US7205560 Method and apparatus for processing a micro sample |
| 04/17/2007 | US7205554 Method and apparatus for processing a micro sample |
| 04/17/2007 | US7204131 Dynamic activation for an atomic force microscope and method of use thereof |
| 04/12/2007 | WO2007041556A2 Scanning probe microscopy method and apparatus utilizing sample pitch |
| 04/12/2007 | DE102006038148A1 Standard-Spezimen zur Evaluierung einer Sondenform und Verfahren zu Evaluierung einer Sondenform Standard specimen for evaluation of a probe form and methods for evaluation of a special form |
| 04/05/2007 | WO2007036614A1 Measuring system |
| 04/05/2007 | WO2007036222A2 Method and device for positioning a movable part in a test system |
| 04/05/2007 | US20070075243 Scanning probe microscopy method and apparatus utilizing sample pitch |
| 04/05/2007 | DE102005043974A1 Micromechanical scanning sensor, especially for raster force microscope, has sensor unit with base consisting of first material connected to sensor arm and functional part consisting of second material joined to base |
| 04/03/2007 | US7198961 Method for modifying existing micro-and nano-structures using a near-field scanning optical microscope |
| 03/29/2007 | WO2007035659A1 Method and apparatus for measuring a characteristic of a sample feature |
| 03/29/2007 | WO2006117525A3 Positioning apparatus and method |
| 03/28/2007 | EP1767490A2 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same |
| 03/27/2007 | US7196454 Positioning device for microscopic motion |
| 03/27/2007 | US7194897 Non-contact scanning apparatus using frequency response scheme and scanning method thereof |
| 03/22/2007 | US20070067140 Method and apparatus for measuring a characteristic of a sample feature |
| 03/22/2007 | US20070062265 Oscillator for atomic force microscope and other applications |
| 03/22/2007 | DE102006039651A1 Cantilever und Prüfvorrichtung Cantilever and Tester |
| 03/20/2007 | US7193424 Electrical scanning probe microscope apparatus |
| 03/20/2007 | US7193224 Scanning microscope and laser microscope |
| 03/15/2007 | WO2005103604A3 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes |
| 03/15/2007 | US20070056362 Oscillating probe with a virtual probe tip |
| 03/13/2007 | US7191092 Methods and systems for controlling motion of and tracking a mechanically unattached probe |
| 03/13/2007 | US7189969 Methods and systems for controlling motion of and tracking a mechanically unattached probe |
| 03/08/2007 | US20070051887 Cantilever and inspecting apparatus |
| 03/08/2007 | DE10393939T5 Schnell verfahrbare Abtastbühne für ein Rastersondenmikroskop Quickly movable scanning stage for a scanning probe microscope |
| 03/07/2007 | EP1054249B1 Electronic device surface signal control probe and method of manufacturing the probe |
| 03/01/2007 | WO2007024711A2 Oscillator and method of making for atomic force microscope and other applications |
| 03/01/2007 | WO2007024155A1 Scanning probe microscope combined with an object surface modifying device |
| 03/01/2007 | US20070044545 Oscillator and method of making for atomic force microscope and other applications |
| 03/01/2007 | US20070044544 Method and apparatus for determining surface characteristics by using spm techniques with acoustic excitation and real-time digitizing |
| 03/01/2007 | DE102005041301A1 Microstructure unit`s surface property measuring system for use during manufacturing of integrated circuit, has signal processing unit designed to digitize and record several frequency components for each scanning position |
| 02/28/2007 | EP1757919A1 Probe head manufacturing method |
| 02/28/2007 | EP1756835A1 Method and apparatus for obtaining quantitative measurements using a probe based instrument |
| 02/28/2007 | EP1756595A2 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 02/27/2007 | US7183122 Physical nano-machining with a scanning probe system for integrated circuit modification |
| 02/27/2007 | US7181958 High aspect ratio tip atomic force microscopy cantilevers and method of manufacture |
| 02/22/2007 | WO2007022013A2 Tracking qualification and self-optimizing probe microscope and method |
| 02/22/2007 | WO2007020856A1 Method and equipment for measuring displacement, stage equipment and probe microscope |
| 02/22/2007 | WO2007019913A1 Device for the vibration excitation of an elastic bar fixed on one side of an atomic force microscope |
| 02/22/2007 | US20070040117 Standard specimen for probe shape evaluation and method for evaluating probe shape |
| 02/22/2007 | DE102005038245A1 Vorrichtung zur Schwingungsanregung eines einseitig in einem Rasterkraftmikroskop befestigten Federbalkens Device for oscillation excitation of a cantilevered in an atomic force microscope cantilever |
| 02/15/2007 | WO2007018230A1 Optical probe |
| 02/15/2007 | US20070035724 Nanoparticles functionalized probes and methods for preparing such probes |
| 02/15/2007 | US20070034797 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 02/15/2007 | US20070033991 Tracking qualification and self-optimizing probe microscope and method |
| 02/14/2007 | EP1752756A1 Scanning mechanism for scanning probe microscope |
| 02/13/2007 | US7176450 Long travel near-field scanning optical microscope |
| 02/13/2007 | US7176118 Circuit constructions |
| 02/08/2007 | WO2007016299A2 Atom probe evaporation processes |
| 02/07/2007 | EP1749185A2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing spm probes |
| 02/01/2007 | WO2007013507A1 Drive device |
| 02/01/2007 | WO2005114230A3 Method and apparatus for measuring electrical properties in torsional resonance mode |
| 02/01/2007 | US20070024295 Probe for an atomic force microscope |
| 02/01/2007 | US20070023657 Charged particle beam apparatus |
| 02/01/2007 | US20070022804 Scanning probe microscopy inspection and modification system |
| 01/30/2007 | US7170048 Compound scanning probe microscope |
| 01/30/2007 | US7168301 Method and apparatus of driving torsional resonance mode of a probe-based instrument |
| 01/25/2007 | US20070018097 Scanning probe microscope and method of operating the same |
| 01/25/2007 | US20070018096 Cantilever array, method for fabricating the same, scanning probe microscope, sliding apparatus of guiding and rotating mechanism, sensor, homodyne laser interferometer, laser doppler interferometer having optically exciting function for exciting sample, each using the same, and method for exciting cantilevers |
| 01/24/2007 | EP1622500A4 Parallel analysis of molecular interactions |
| 01/24/2007 | CN1900688A Full digital control method and system for scam probe microscope |
| 01/18/2007 | WO2007006834A2 System and method for the inspection of micro and nanomechanical structures |
| 01/18/2007 | US20070013999 Multiplex near-field microscopy with diffractive elements |
| 01/18/2007 | US20070012873 Scanning-type probe microscope |
| 01/18/2007 | CA2626230A1 System and method for surface inspection of micro and nanomechanical structures |
| 01/17/2007 | EP1744325A1 System and method for surface inspection of micro and nanomechanical structures |
| 01/04/2007 | WO2007001397A2 Nanostructure devices and fabrication method |
| 01/02/2007 | US7158234 Optical scanning observation apparatus |
| 12/28/2006 | WO2006136705A1 Higher harmonics atomic force microscope |
| 12/28/2006 | US20060289749 Method for determining material interfacial and metrology information of a sample using atomic force microscopy |
| 12/28/2006 | DE102005017676B3 Nahfeldoptik für elektromagnetische Strahlung im infraroten THz- und Sub-THz-Bereich Near-field optics for electromagnetic radiation in the infrared THz and sub-THz range |
| 12/26/2006 | US7152462 Topography and recognition imaging atomic force microscope and method of operation |
| 12/21/2006 | WO2006036217A3 Thermal control of deposition in dip pen nanolithography |
| 12/21/2006 | US20060284083 Scanning type probe microscope and probe moving control method therefor |
| 12/21/2006 | US20060283240 Force scanning probe microscope |
| 12/19/2006 | US7151244 Method and apparatus for calibration of near-field scanning optical microscope tips for laser machining |
| 12/14/2006 | WO2006131639A1 Nanometric emitter/receiver guides |
| 12/14/2006 | US20060278825 High aspect ratio micromechanical probe tips and methods of fabrication |
| 12/14/2006 | US20060277972 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby |
| 12/13/2006 | EP1732084A2 A method for determining material interfacial and metrology information of a sample using atomic force microscopy |
| 12/13/2006 | CN1877246A A method for determining material interfacial and metrology information of a sample using atomic force microscopy |
| 12/07/2006 | WO2006129561A1 Scan type probe microscope and cantilever drive device |
| 12/07/2006 | WO2006128944A1 Sensor device and equipment for measuring resistivity using the four-point method and method of producing said device |
| 12/07/2006 | WO2006102600A3 Materials and methods for identifying biointeractive nanostructures and/or nanoparticles |
| 12/07/2006 | US20060272398 Beam tracking system for scanning-probe type atomic force microscope |
| 11/30/2006 | WO2006125788A1 Local injector of spin-polarized electrons with semiconductor tip under light excitation |
| 11/30/2006 | US20060270101 Patterned functionalized silicon surfaces |
| 11/30/2006 | US20060267596 Spring constant calibration device |
| 11/28/2006 | US7142077 Two-axis actuator with large stage |
| 11/23/2006 | WO2006124572A2 Dual wavelength polarized near-field imaging apparatus |
| 11/23/2006 | WO2006123239A1 Displacement sensor, its use, and method for making such a sensor |
| 11/23/2006 | US20060261264 Feedback influenced increased-quality-factor scanning probe microscope |