| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 09/19/2002 | WO2002073126A1 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/19/2002 | WO2002073125A1 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/17/2002 | US6452677 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 09/12/2002 | US20020127577 Biosensor for use in the detection of molecular interactions between immobilized ligands and receptors |
| 09/12/2002 | US20020127050 Platform positioning system |
| 09/12/2002 | US20020125428 SEM provided with a secondary electron detector having a central electrode |
| 09/12/2002 | US20020125427 Method and apparatus for manipulating a sample |
| 09/12/2002 | US20020125415 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/12/2002 | US20020124636 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/12/2002 | US20020124427 Microscopic geometry measuring device |
| 09/05/2002 | US20020122373 Ultra-high density storage device with resonant scanning micromover |
| 09/04/2002 | EP1237161A2 Method and apparatus for performing atomic force microscopy measurements |
| 09/03/2002 | US6445107 Single stage microactuator for multi-dimensional actuation |
| 09/03/2002 | US6444991 Scanning charged-particle beam instrument |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/27/2002 | US6441371 Scanning probe microscope |
| 08/27/2002 | US6441359 Near field optical scanning system employing microfabricated solid immersion lens |
| 08/20/2002 | US6437343 Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope |
| 08/07/2002 | CN2504626Y Piezoelectric ceramics scanner for scan probe microscope |
| 07/30/2002 | US6426491 Micro-aperture probe evaluating apparatus having a display and a collimating optical system |
| 07/25/2002 | WO2002057749A1 Balanced momentum probe holder |
| 07/25/2002 | US20020097046 Magnetic force microscope |
| 07/25/2002 | US20020096642 Balanced momentum probe holder |
| 07/24/2002 | EP0805946B1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 07/11/2002 | US20020089339 Scanning probe microscope |
| 07/11/2002 | US20020088937 Scanning probe microscope |
| 07/09/2002 | US6417505 Near-field optical heterodyne measurement system using near-field fiber-optic probe |
| 07/09/2002 | US6415654 Scanning probe microscope system including removable probe sensor assembly |
| 07/04/2002 | WO2002052610A1 Sem provided with a secondary electron detector having a central electrode |
| 07/03/2002 | EP1220585A1 Apparatus for charged-particle beam irradiation, and method of control thereof |
| 07/02/2002 | US6414323 Charged particle beam apparatus and method of controlling charged particle beam |
| 06/27/2002 | US20020079446 Scanning probe microscope |
| 06/27/2002 | DE10062049A1 Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop Method for imaging a sample surface using a scanning probe and scanning probe microscope |
| 06/25/2002 | US6410923 Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
| 06/25/2002 | US6410907 Flexure assembly for a scanner |
| 06/20/2002 | WO2002048644A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 06/18/2002 | US6407559 Laser fault correction of semiconductor devices |
| 06/18/2002 | US6407385 Methods and apparatus for removing particulate foreign matter from the surface of a sample |
| 06/11/2002 | US6405137 Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy |
| 06/11/2002 | US6404207 Scanning capacitance device for film thickness mapping featuring enhanced lateral resolution, measurement methods using same |
| 06/06/2002 | WO2001082327A3 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 06/06/2002 | US20020067170 Scanning microwave microscope capable of realizing high resolution and microwave resonator |
| 06/06/2002 | US20020067120 Method for rapid screening of emission-mix using a combinatorial chemistry approach |
| 06/05/2002 | EP1211504A2 Apparatus for localized measurement of complex permittivity of a material |
| 05/30/2002 | WO2002043162A1 Inertial rotation device |
| 05/30/2002 | US20020063212 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 05/30/2002 | US20020062684 Dynamic activation for an atomic force microscope and method of use thereof |
| 05/28/2002 | US6396054 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/21/2002 | US6389886 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 05/16/2002 | US20020056816 Surface plasmon enhanced illumination system |
| 05/14/2002 | US6388249 Surface analyzing apparatus |
| 05/08/2002 | EP1204133A2 Method and apparatus for processing a micro sample |
| 05/08/2002 | EP1203749A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/02/2002 | US20020050565 Method and apparatus for processing a micro sample |
| 04/25/2002 | US20020047493 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 04/16/2002 | US6373070 Method apparatus for a coaxial optical microscope with focused ion beam |
| 04/11/2002 | WO2001081857A3 Resonant probe driving arrangement and scanning probe microscope |
| 04/09/2002 | US6370306 Optical waveguide probe and its manufacturing method |
| 04/09/2002 | US6369379 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 04/04/2002 | US20020038984 Single stage microactuator for multi-dimensional actuation |
| 04/02/2002 | US6365895 Apparatus for measuring a micro surface configuration and a method for manufacturing a probe incorporated in this measuring apparatus |
| 03/26/2002 | US6362923 Lens for microscopic inspection |
| 03/21/2002 | US20020033952 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 03/20/2002 | EP1189240A1 Multi-probe measuring device and method of use |
| 03/19/2002 | US6357285 Method and apparatus for the quantitative and objective correlation of data from a local sensitive force detector |
| 03/14/2002 | US20020030160 Positron trap beam source for positron microbeam production |
| 03/13/2002 | EP1185869A2 Ligand-anchor conjugates for producing a biosensor layer |
| 03/12/2002 | US6355994 Precision stage |
| 03/07/2002 | US20020027191 Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing |
| 03/05/2002 | US6353219 Object inspection and/or modification system and method |
| 02/28/2002 | US20020024023 Method and apparatus for testing a substrate |
| 02/28/2002 | US20020024013 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 02/28/2002 | DE10039337A1 Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken Combination of scanning and imaging methods in the review of photomasks |
| 02/26/2002 | USRE37560 Scan control for scanning probe microscopes |
| 02/26/2002 | US6349591 Device and method for controlling the interaction of a tip and a sample, notably for atomic force microscopy and nano-indentation |
| 02/20/2002 | EP0818052A4 Combined scanning probe and scanning energy microscope |
| 02/14/2002 | US20020017621 Device and method for combining scanning and imaging methods in checking photomasks |
| 02/14/2002 | US20020017615 Scanning unit and scanning microscope having the same |
| 02/13/2002 | EP1179748A2 Combination of imaging and scanning methods for checking reticles |
| 02/07/2002 | WO2002010829A2 Multiple-source arrays with optical transmission enhanced by resonant cavities |
| 02/07/2002 | WO2002010828A2 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 02/07/2002 | US20020014589 Three-dimensional atom microscope, three-dimensional observation method of atomic arrangemment, and stereoscopic measuring method of atomic arrangement |
| 01/31/2002 | WO2002008774A1 Probe driving method, and probe apparatus |
| 01/30/2002 | CN1333460A Scanning tunnel microscope feedback controller adopting multi-modal fuzzy control algorithm |
| 01/23/2002 | EP1174995A2 Single stage microactuator for multidimensional actuation with multi-folded spring |
| 01/23/2002 | EP1174994A1 Single stage microactuator for multi-dimensional actuation |
| 01/23/2002 | EP1174871A1 Apparatus for electrostatically sensing the position of an xy-stage through time-division multiplexing |
| 01/17/2002 | US20020005484 Apparatus and method for defect detection using charged particle beam |
| 01/17/2002 | US20020005482 Scanning probe instrument |
| 01/17/2002 | US20020005481 Scanning tunneling charge transfer microscope |
| 01/16/2002 | EP1171791A2 Optical microscopy and its use in the study of cells |
| 01/08/2002 | US6337479 Object inspection and/or modification system and method |
| 01/01/2002 | US6335522 Optical probe having a refractive index micro-lens and method of manufacturing the same |
| 12/27/2001 | US20010055151 Scanning probe microscope and method of processing signals in the same |
| 12/27/2001 | US20010054692 Scanning electron microscope |
| 12/27/2001 | US20010054691 Optical system for scanning microscope |
| 12/20/2001 | US20010052781 Method of inspecting pattern and inspecting instrument |
| 12/13/2001 | US20010051337 Analyzing miniature deposits |
| 12/06/2001 | WO2001091855A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 12/06/2001 | US20010048076 Surface analyzing apparatus |