| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 12/06/2001 | US20010048068 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/06/2001 | US20010047682 Dual stage instrument for scanning a specimen |
| 12/06/2001 | DE10112316A1 Mikrostrukturmessgerät Microstructure meter |
| 12/05/2001 | EP1160611A2 Probe opening forming apparatus and near-field optical microscope using the same |
| 11/27/2001 | US6323483 High bandwidth recoiless microactuator |
| 11/15/2001 | US20010040215 Apparatus for producing a flux of charge carriers |
| 11/14/2001 | EP1153262A1 Method of information collection and processing of sample's surface |
| 11/08/2001 | US20010038072 Image deconvolution techniques for probe scanning apparatus |
| 11/07/2001 | EP1151464A1 Method and apparatus for a coaxial optical microscope with focused ion beam |
| 11/07/2001 | CN2458619Y Sensor for shear force of piezoelectric ceramics |
| 11/06/2001 | US6313461 Scanning-aperture electron microscope for magnetic imaging |
| 11/01/2001 | WO2001082327A2 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 11/01/2001 | WO2001081863A1 Electron beam length measuring instrument and length measuring method |
| 11/01/2001 | WO2001081857A2 Resonant probe driving arrangement and scanning probe microscope |
| 11/01/2001 | CA2406407A1 Resonant probe driving arrangement and scanning probe microscope |
| 10/30/2001 | US6310342 Optical microscope stage for scanning probe microscope |
| 10/30/2001 | US6308557 Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process |
| 10/25/2001 | US20010032931 Charged particle beam instrument |
| 10/25/2001 | US20010032496 Probe scanning method |
| 10/18/2001 | US20010030286 Scanning probe microscope |
| 10/11/2001 | DE10113966A1 Sondenelektronenmikroskop Electron probe |
| 10/09/2001 | USRE37404 Detection system for atomic force microscopes |
| 09/27/2001 | WO2001033232A3 Precision stage |
| 09/26/2001 | EP0754289B1 Measurement of AFM cantilever deflection with high frequency radiation and dopant profiler |
| 09/25/2001 | US6294774 Scanning probe microscope having graphical information |
| 09/20/2001 | WO2001069298A1 Improved lens for microscopic inspection |
| 09/19/2001 | EP1134771A1 Apparatus for producing a flux of charge carriers |
| 09/18/2001 | US6291822 Scanning probe microscope |
| 09/18/2001 | US6291820 Highly charged ion secondary ion mass spectroscopy |
| 09/11/2001 | US6288391 Method for locking probe of scanning probe microscope |
| 09/06/2001 | US20010019109 Scanning electron microscope |
| 08/30/2001 | WO2001063555A2 Image deconvolution techniques for probe scanning apparatus |
| 08/30/2001 | US20010017696 Rangefinder |
| 08/30/2001 | US20010017354 Micro-aperture probe evaluating apparatus |
| 08/28/2001 | US6281491 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 08/23/2001 | US20010015097 Scanning system having a deflectable probe tip |
| 08/21/2001 | US6278113 Scanning probe microscope |
| 08/21/2001 | US6277438 Protective fullerene (C60) packaging system for microelectromechanical systems applications |
| 08/16/2001 | US20010013575 Flexure assembly for a scanner |
| 08/16/2001 | US20010013574 Intermittent contact imaging under force-feedback control |
| 08/16/2001 | EP0826145B1 Data acquisition and control apparatus for scanning probe systems |
| 08/02/2001 | US20010010356 Through-the-substrate investigation of flip-chip IC's |
| 08/02/2001 | DE10003693A1 Abtastsystem mit auslenkbarer Tastspitze Scanning probe tip deflectable |
| 07/31/2001 | US6267005 Dual stage instrument for scanning a specimen |
| 07/24/2001 | US6265711 Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
| 07/18/2001 | CN1068677C 原子力显微镜 AFM |
| 07/12/2001 | WO2000058759A3 Active probe for an atomic force microscope and method of use thereof |
| 07/10/2001 | US6259093 Surface analyzing apparatus |
| 07/10/2001 | US6257053 Scanning probe microscope having piezoelectric member for controlling movement of probe |
| 07/05/2001 | WO2000073796A3 Ligand-anchor conjugates for producing a biosensor layer |
| 07/04/2001 | EP1113482A1 High energy electron diffraction apparatus |
| 06/26/2001 | US6252238 Micro-processing method using a probe |
| 06/26/2001 | US6252226 Nanometer scale data storage device and associated positioning system |
| 06/19/2001 | US6249000 Scanning probe microscope |
| 06/12/2001 | US6246066 Magnetic field generator and charged particle beam irradiator |
| 06/12/2001 | US6246054 Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls |
| 06/12/2001 | US6246052 Flexure assembly for a scanner |
| 06/12/2001 | US6244103 Interpolated height determination in an atomic force microscope |
| 06/05/2001 | USRE37203 Feedback control for scanning tunnel microscopes |
| 06/05/2001 | US6242736 Scanning probe microscope |
| 06/05/2001 | US6242734 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 06/05/2001 | US6240771 Device for noncontact intermittent contact scanning of a surface and a process therefore |
| 05/15/2001 | US6232597 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/15/2001 | US6232588 Near field scanning apparatus having an intensity distribution pattern detection |
| 05/10/2001 | WO2001033232A2 Precision stage |
| 05/08/2001 | US6229607 Fine movement mechanism unit and scanning probe microscope |
| 05/08/2001 | US6229138 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/01/2001 | US6225626 Through-the-substrate investigation of flip chip IC's |
| 05/01/2001 | US6223591 Probe needle arrangement and movement method for use in an atomic force microscope |
| 04/19/2001 | WO2001027967A1 Method and apparatus for a coaxial optical microscope with focused ion beam |
| 04/19/2001 | US20010000279 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 04/10/2001 | US6215121 Three-dimensional scanning probe microscope |
| 04/05/2001 | WO2001024591A1 Apparatus for charged-particle beam irradiation, and method of control thereof |
| 03/29/2001 | WO2001022468A1 High bandwidth recoiless microactuator |
| 03/29/2001 | WO2001022433A1 Flexure assembly for a scanner |
| 03/15/2001 | WO2001018843A1 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
| 03/13/2001 | US6201227 Scanning probe microscope |
| 03/06/2001 | US6198097 Photocharge microscope |
| 03/01/2001 | DE19935570A1 Mikromanipulator Micromanipulator |
| 02/27/2001 | US6194711 Scanning near-field optical microscope |
| 02/20/2001 | US6189374 Active probe for an atomic force microscope and method of use thereof |
| 02/13/2001 | US6188161 Driving apparatus using transducer |
| 02/13/2001 | US6185992 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 02/08/2001 | WO2001009965A1 Micromanipulator with piezoelectric movement elements |
| 02/06/2001 | US6184533 Scanning probe microscope with the stage unit |
| 02/06/2001 | US6184519 Surface analyzing apparatus with anti-vibration table |
| 02/01/2001 | WO2000063736A3 Optical microscopy and its use in the study of cells |
| 01/30/2001 | US6181097 High precision three-dimensional alignment system for lithography, fabrication and inspection |
| 01/25/2001 | WO2001006205A1 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 01/25/2001 | WO2001005701A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 01/24/2001 | EP1071112A2 Scanning charged-particle beam instrument |
| 01/24/2001 | EP1025416A4 Method and apparatus for obtaining improved vertical metrology measurements |
| 01/16/2001 | US6175417 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 12/21/2000 | WO2000046568A3 Method of information collection and processing of sample's surface |
| 12/20/2000 | EP1061551A2 Scanning charged-particle beam instrument and method of observing specimen image therewith |
| 12/19/2000 | US6163519 Scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe |
| 12/07/2000 | WO2000073796A2 Ligand-anchor conjugates for producing a biosensor layer |
| 12/07/2000 | CA2375120A1 Bioactive sensors |
| 12/05/2000 | US6157451 Sample CD measurement system |
| 12/05/2000 | US6156216 Etching top working surface of silicon wafer to make silicon stylus of a specific area with a base and an apex, depositing nitride film, spin coating a resist, etching specific area of nitride covered silcone stylus to expose apex of stylus |