| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) |
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| 09/02/2004 | WO2004075204A2 Measuring system for the combined scanning and analysis of microtechnical components comprising electrical contacts |
| 09/02/2004 | WO2004074816A1 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 09/02/2004 | US20040169140 Charged particle beam device for inspecting or structuring a specimen |
| 09/02/2004 | US20040168527 Coated nanotube surface signal probe |
| 08/26/2004 | US20040163450 3-Axis straight-line motion stage and sample test device using the same |
| 08/25/2004 | EP1350259B1 Sem provided with a secondary electron detector having a central electrode |
| 08/25/2004 | CN2636226Y Ultramicro mass and ultramicro load change tester |
| 08/24/2004 | US6781125 Method and apparatus for processing a micro sample |
| 08/24/2004 | US6780766 Methods of forming regions of differing composition over a substrate |
| 08/19/2004 | WO2004070765A1 Resistive cantilever spring for probe microscopy |
| 08/19/2004 | US20040161332 Positioning and motion control by electrons, Ions, and neutrals in electric fields |
| 08/19/2004 | US20040159786 Method of fabricating probe for scanning probe microscope |
| 08/18/2004 | EP1446676A2 Spot grid array electron beam imaging system |
| 08/17/2004 | US6777693 Lithographic method using ultra-fine probe needle |
| 08/17/2004 | US6777688 Rotational stage for high speed, large area scanning in focused beam systems |
| 08/17/2004 | US6776030 Method of information collection and processing of sample's surface |
| 08/12/2004 | US20040155185 Method of preventing charging, and apparatus for charged particle beam using the same |
| 08/11/2004 | CN1161605C Apparatus for measuring exchange force |
| 08/10/2004 | US6774363 Method of preventing charging, and apparatus for charged particle beam using the same |
| 08/04/2004 | EP0868644B1 Multi-dimensional capacitive transducer |
| 08/03/2004 | US6771418 Method and apparatus for extracting three-dimensional spacial data of object using electron microscope |
| 08/03/2004 | US6771012 Apparatus for producing a flux of charge carriers |
| 08/03/2004 | US6770879 Motion picture output from electron microscope |
| 07/29/2004 | WO2004064097A2 Charged particle beam device for inspecting or structuring a specimen |
| 07/28/2004 | EP1441215A1 Optical scanning type observation device |
| 07/27/2004 | US6768114 Electron microscope, method for operating the same, and computer-readable medium |
| 07/22/2004 | WO2004061427A1 Measuring method and device for vibration frequency of multi-cantilever |
| 07/22/2004 | WO2004060044A2 Method and apparatus for molecular analysis in small sample volumes |
| 07/22/2004 | US20040140426 Scanning probe microscope with improved probe head mount |
| 07/22/2004 | US20040140424 Scanning probe microscope with improved probe tip mount |
| 07/22/2004 | CA2512181A1 Method and apparatus for molecular analysis in small sample volumes |
| 07/21/2004 | EP1439564A1 Charged particle beam device for inspecting or structuring a specimen |
| 07/20/2004 | US6765203 Pallet assembly for substrate inspection device and substrate inspection device |
| 07/15/2004 | WO2004059243A1 Fast scanning stage for a scanning probe microscope |
| 07/15/2004 | US20040134264 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 07/08/2004 | WO2004057303A2 Fully digital controller for cantilever-based instruments |
| 07/08/2004 | US20040129873 Fast scanning stage for a scanning probe microscope |
| 07/08/2004 | US20040129064 Topography and recognition imaging atomic force microscope and method of operation |
| 07/08/2004 | CA2510968A1 Fully digital controller for cantilever-based instruments |
| 07/07/2004 | EP1292361A4 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
| 07/01/2004 | US20040123651 Scanning probe system with spring probe |
| 07/01/2004 | DE10084431T5 Aktive Sonde für ein Rasterkraftmikroskop mit atomarer Auflösung sowie Verfahren zur Verwendung derselben Active probe for an atomic force microscope with atomic resolution and methods of using same |
| 06/29/2004 | US6756791 Method for measuring film thickness using capacitance technique |
| 06/24/2004 | US20040119022 Charged particle beam apparatus and charged particle beam irradiation method |
| 06/24/2004 | US20040118207 Differential in-plane tunneling current sensor |
| 06/24/2004 | US20040118193 System for sensing a sample |
| 06/22/2004 | US6753525 Materials analysis using backscatter electron emissions |
| 06/16/2004 | EP1427983A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 06/15/2004 | US6749776 Making ceramic materials for fluorescent lamps |
| 06/15/2004 | US6748794 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 06/10/2004 | US20040110360 Methods of Forming Regions of Differing Composition Over a Substrate |
| 06/09/2004 | EP0864181B1 Flat scanning stage for scanned probe microscopy |
| 06/08/2004 | US6745617 Scanning probe microscope |
| 06/03/2004 | US20040106862 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 05/27/2004 | WO2003067632B1 Multi-detector microscopic inspection system |
| 05/25/2004 | US6740876 Scanning probe microscope |
| 05/21/2004 | WO2004042741A2 Topography and recognition imaging atomic force microscope and method of operation |
| 05/20/2004 | US20040094713 Scanning electron microscope |
| 05/20/2004 | US20040094711 Non-contact scanning apparatus using frequency response separation scheme and scanning method thereof |
| 05/20/2004 | US20040093935 Scanning probe microscope and operation method |
| 05/18/2004 | US6737167 Can resolve the optical information on sample surface without diffraction limit; optically transparent dielectric thin film covering nanostructured layer for localized nonlinear near-field optical interactions |
| 05/13/2004 | WO2004040267A1 Scanning method and apparatus |
| 05/13/2004 | WO2004006302A3 Software synchronization of multiple scanning probes |
| 05/13/2004 | US20040089059 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 05/11/2004 | US6735163 Ultra-high density storage device with resonant scanning micromover |
| 05/11/2004 | US6734426 Probe scanning device |
| 05/11/2004 | US6734425 Scanning probe system with spring probe and actuation/sensing structure |
| 05/06/2004 | WO2002010828A9 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 05/06/2004 | US20040084618 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 05/04/2004 | US6730906 Method and apparatus for testing a substrate |
| 04/29/2004 | US20040079142 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 04/29/2004 | DE10296461T5 Vorrichtung und Verfahren zum Isolieren und Messen einer Bewegung in einer messtechnischen Vorrichtung Apparatus and method for isolating and measuring a movement in a metrological device |
| 04/22/2004 | US20040074300 Inertial rotation device |
| 04/22/2004 | US20040074288 Method of manufacturing the multi-tip probe, a multi-tip probe, and surface characteristic analysis apparatus |
| 04/21/2004 | EP1411341A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 04/20/2004 | US6724199 Pin and cup devices for measuring film thickness |
| 04/15/2004 | WO2004031769A1 Interaction detecting method and bioassay device, and bioassay-use substrate |
| 04/15/2004 | US20040069959 Charged particle beam irradiation equipment and control method thereof |
| 04/15/2004 | US20040069956 Charged particle beam apparatus |
| 04/15/2004 | US20040069944 Balanced momentum probe holder |
| 04/14/2004 | EP1408327A2 Apertured probes for localized measurements of a material's complex permittivity and fabrication method |
| 04/13/2004 | US6720551 Flexure assembly for a scanner |
| 04/08/2004 | US20040065821 Intermittent contact imaging under force-feedback control |
| 04/08/2004 | US20040065819 Scanning unit and scanning microscope having the same |
| 04/06/2004 | US6717419 Liquid dielectric capacitor for film thickness mapping |
| 04/06/2004 | US6715346 Atomic force microscopy scanning methods |
| 04/06/2004 | US6715345 Coaxial probe with cantilever and scanning micro-wave microscope including the same |
| 03/30/2004 | US6713761 Scanning electron microscope |
| 03/25/2004 | WO2003067632A3 Multi-detector microscopic inspection system |
| 03/25/2004 | US20040056193 Applications operating with beams of charged particles |
| 03/23/2004 | US6710339 Scanning probe microscope |
| 03/18/2004 | US20040051049 Rotational stage for high speed, large area scanning in focused beam systems |
| 03/17/2004 | EP1398818A2 Charged particle beam apparatus and irradiation method |
| 03/11/2004 | US20040047245 Pickup device |
| 03/11/2004 | US20040046125 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method |
| 03/09/2004 | US6703614 Method for determining the distance of a near-field probe from a specimen surface to be examined, and near-field microscope |
| 03/04/2004 | WO2004019011A1 Probe unit |
| 03/04/2004 | US20040041095 Methods and apparatus for electron beam inspection of samples |
| 03/04/2004 | DE10337255A1 Abtastverfahren für die Atomkraftmikroskopie Scanning for atomic force microscopy |
| 03/04/2004 | DE10296462T5 Vorrichtung und Verfahren zum Isolieren und Messen einer Bewegung in einer Messtechnischen Vorrichtung Apparatus and method for isolating and measuring a movement in a measuring device of Technology |