Patents
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
11/2007
11/15/2007US20070263696 Quantitative calorimetry signal for sub-micron scale thermal analysis
11/07/2007EP1850972A2 Thermal control of deposition in dip pen nanolithography
11/01/2007US20070253001 Three-Dimensional Shape Measuring Unit, Processing Unit, and Semiconductor Device Manufacturing Method
10/2007
10/30/2007US7288762 Fine-adjustment mechanism for scanning probe microscopy
10/24/2007CN101061059A Nano tweezers and scanning probe microscope having the same
10/23/2007US7285963 Method and system for measurement of dielectric constant of thin films using a near field microwave probe
10/23/2007US7284415 Scanning probe microscope
10/18/2007WO2007116254A1 Method and apparatus for use in real-time nanometer and subnanometer position measurements
10/18/2007DE102004002199B4 Dreiachs-Linearbewegungseinheit und Vorrichtung zum Untersuchen einer Probe hiermit Three-axis linear motion unit and apparatus for inspecting a sample hereby
10/17/2007EP1844475A1 Near-field antenna
10/16/2007US7282722 Charged particle beam apparatus and charged particle beam irradiation method
10/09/2007US7278301 System for sensing a sample
10/09/2007US7278297 Oscillating probe with a virtual probe tip
10/04/2007US20070233413 Signal processing method and apparatus for use in real-time subnanometer scale position measurements with the aid of probing sensors and beams scanning periodically undulating surfaces such as gratings and diffraction patterns generated thereby, and the like
09/2007
09/27/2007WO2007109777A2 Stiffness tomography by atomic force microscopy
09/27/2007US20070220958 Optical detection alignment/tracking method and apparatus
09/26/2007CN200952996Y Adaptive section scanning system
09/20/2007WO2007104432A1 Method for determining a dopant concentration in a semiconductor sample
09/20/2007WO2005076832A3 Method for manufacturing single wall carbon nanotube tips
09/20/2007US20070214864 Active Damping of High Speed Scanning Probe Microscope Components
09/19/2007CN101040346A Device and method for scanning probe microscopy
09/18/2007US7271882 Shape measuring apparatus, shape measuring method, and aligning method
09/13/2007DE102006011660A1 Verfahren zur Ermittlung einer Dotierungsdichte in einer Halbleiterprobe A method for determining a dopant concentration in a semiconductor sample
09/11/2007US7266997 Tactile force and/or position feedback for cantilever-based force measurement instruments
09/07/2007WO2007101133A2 Active damping of high speed scanning probe microscope components
09/07/2007WO2007100296A1 Control signal for inertial slider
09/07/2007WO2007036222A3 Method and device for positioning a movable part in a test system
09/05/2007EP1830171A1 Dynamic- mode atomic force- microscope probe(tip) vibration simulation method, program, recording medium, and vibration simulator
08/2007
08/30/2007WO2007098237A2 Method and apparatus for characterizing a probe tip
08/29/2007EP1826551A1 Positioning mechanism and microscope using the same
08/28/2007US7261352 Electrostatically driven carbon nanotube gripping device
08/23/2007US20070194234 Scanning electron microscope
08/23/2007DE102005063127B3 Mikro- und Nanospitzen sowie Verfahren zu deren Herstellung Micro- and nano-tips as well as processes for their preparation
08/16/2007US20070187594 Scanning probe apparatus
08/16/2007US20070187593 Scanning probe apparatus
08/09/2007WO2007088018A1 Miniaturized spring element and method for producing the latter
08/09/2007US20070181870 Nanometric Device for the Measurement of the Conductivity and Quantum Effects of Individual Molecules and Methods for the Manufacture and Use Thereof
08/09/2007US20070181831 Method and apparatus for processing a micro sample
08/09/2007US20070180889 Probe replacement method for scanning probe microscope
08/09/2007DE102006004922A1 Miniaturisiertes Federelement und Verfahren zu dessen Herstellung Miniaturized spring element and process for its preparation
08/09/2007CA2640702A1 Miniaturized spring element and method for producing the latter
08/08/2007EP1816100A1 Nano tweezers and scanning probe microscope having the same
08/07/2007US7253408 Environmental cell for a scanning probe microscope
08/02/2007US20070176101 Variable density scanning
07/2007
07/31/2007US7250598 Plasmon enhanced near-field optical probes
07/31/2007US7249494 Beam tracking system for scanning-probe type atomic force microscope
07/25/2007EP1811524A1 Nanometric device for the measurement of the conductivity and quantum effects of individual molecules and methods for the manufacture and use thereof
07/24/2007US7246517 Atomic force microscope with probe with improved tip movement
07/19/2007WO2007079975A1 Microtips and nanotips, and method for their production
07/12/2007WO2007076828A1 Method for operating a measurement system containing a scanning probe microscope, and measurement system
07/12/2007US20070158591 Method and apparatus for processing a micro sample
07/12/2007US20070158564 Method and apparatus for processing a micro sample
07/12/2007US20070158559 Scanning probe apparatus
07/12/2007US20070157712 Micromotion device and scanning probe microscope
07/10/2007US7241994 Scanning probe microscope and specimen surface structure measuring method
07/05/2007WO2007075908A2 Atom probe test standards and associated methods
07/05/2007WO2007074228A1 Improved photon-emission scanning tunnel microscopy
07/04/2007EP1804050A2 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever
06/2007
06/28/2007WO2007072621A1 Scanning probe microscope
06/28/2007US20070144243 Scanning probe apparatus and drive stage therefor
06/26/2007US7234342 Fully digital controller for cantilever-based instruments
06/20/2007EP1797567A1 Device and method for scanning probe microscopy
06/20/2007EP1797393A2 Sensors for electrochemical, electrical or topographical analysis
06/14/2007WO2007065802A1 Y-shaped carbon nanotubes as afm probe for analyzing substrates with angled topography
06/14/2007WO2006090593A9 Displacement detection mechanism for scanning probe microscope and scanning probe microscope
06/13/2007CN1979126A Method for analysis of a sample
06/07/2007US20070128623 Biomolecule interaction using atomic force microscope
06/07/2007US20070125946 Y-shaped carbon nanotubes as afm probe for analyzing substrates with angled topography
06/07/2007US20070125160 Short and thin silicon cantilever with tip and fabrication thereof
06/07/2007US20070125159 Method for analysis of a sample
05/2007
05/31/2007WO2007061286A1 Optical device comprising a cantilever and method of fabrication and use thereof
05/31/2007WO2007059833A1 Microscope, in particular a scanning probe microscope provided with a programmable logic
05/31/2007WO2007001397A3 Nanostructure devices and fabrication method
05/31/2007US20070119241 Method and apparatus of driving torsional resonance mode of a probe-based instrument
05/31/2007DE102005057218A1 Sondenvorrichtung und Messanordnung zur Messung von Mikro- und/oder Nanostrukturen A probe assembly and measuring arrangement for measurement of micro- and / or nano-structures
05/31/2007CA2631179A1 Optical device comprising a cantilever and method of fabrication and use thereof
05/24/2007US20070114441 Scanning stage for scanning probe microscope
05/24/2007DE102005055460A1 Laser microscope pulse forced mode raster surface inspection process, digitizing information to generate real time force-time graph profile
05/23/2007CN1967687A Read-in and read device of millimicro data using cantilever structure and its manufacturing method
05/22/2007US7221639 Pickup device
05/22/2007US7220962 Cantilever array and scanning probe microscope including a sliding, guiding, and rotating mechanism
05/22/2007US7219538 Balanced momentum probe holder
05/18/2007WO2007018230A9 Optical probe
05/16/2007CN1963451A Vibration-type cantilever holder and scanning probe microscope
05/15/2007US7217925 Scanning electron microscope
05/10/2007US20070104079 Vibration-type cantilever holder and scanning probe microscope
05/10/2007DE102004056241B4 Nahfeldsonde Near-field probe
05/09/2007EP1782432A1 Tip structure for scanning devices, method of its preparation and devices thereon
05/09/2007CN1314578C Methods utilizing scanning probe microscope tips and products therefor or produced thereby
05/03/2007WO2007006834A3 System and method for the inspection of micro and nanomechanical structures
05/02/2007EP1780529A1 Molecule measuring device and molecule measuring method
05/02/2007EP1780173A1 Nanometric mechanical oscillator, method of fabricating the same, and measurement apparatus using the same
05/02/2007EP1779391A1 Optically controllable device
05/02/2007EP1203749B1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it
05/02/2007CN1313815C Detecting device with high resolution, narrow linewidth and long effectiveness
05/02/2007CN1313813C Detecting method and structure for microstructure binding process
05/01/2007US7211795 Method for manufacturing single wall carbon nanotube tips
05/01/2007US7210330 Methods of fabricating structures for characterizing tip shape of scanning probe microscope probes and structures fabricated thereby
04/2007
04/26/2007WO2007045739A1 Reading/writing tip, head and device, and use thereof, and method for making same
04/26/2007US20070089498 Method and apparatus of high speed property mapping
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