Patents
Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719)
12/2011
12/01/2011WO2011116218A3 Frequency measuring and control apparatus with integrated parallel synchronized oscillators
12/01/2011US20110296561 Control system for scanning probe microscope
11/2011
11/24/2011US20110289635 Resonance compensation in scanning probe microscopy
11/16/2011CN102245348A A positioning system and method
11/15/2011US8058780 Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those
11/10/2011WO2011138603A1 Stage for an optical instrument
11/10/2011US20110277192 Scanning probe microscope with drift compensation
11/01/2011US8049190 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium
10/2011
10/27/2011WO2011131863A1 Contactless linear actuator comprising a flexible guiding means and application thereof to a displacement table
10/18/2011US8040784 Read/write tip, head and device, and use thereof, and method for manufacturing same
10/18/2011US8037736 Non-linearity determination of positioning scanner of measurement tool
10/13/2011WO2011059809A3 Scanning probe microscope having support stage incorporating a kinematic flexure arrangement
10/11/2011US8035089 Scanning probe apparatus
10/04/2011US8031436 Electron beam writing method for magnetic recording medium
10/04/2011US8030604 Optical component operating in near-field transmission
09/2011
09/29/2011US20110239336 Low Drift Scanning Probe Microscope
09/27/2011US8028343 Scanning probe microscope with independent force control and displacement measurements
09/27/2011US8024963 Material property measurements using multiple frequency atomic force microscopy
09/22/2011WO2011116218A2 Frequency measuring and control apparatus with integrated parallel synchronized oscillators
09/20/2011US8024816 Approach method for probe and sample in scanning probe microscope
09/15/2011DE102010015966A1 Quasi in-situ raster probe microscope i.e. atomic force microscope, for use in e.g. corrosive fluid treatment, has force generating apparatus for closing and sealing chamber and producing force on locking device
09/08/2011US20110219479 Variable Density Scanning
09/06/2011US8011230 Scanning probe microscope
08/2011
08/24/2011EP2359149A1 Scanning probe microscope with current controlled actuator
08/24/2011EP2359148A2 Method and apparatus of operating a scanning probe microscope
08/23/2011US8006315 Photon-emission scanning tunneling microscopy
08/23/2011US8001831 Positioning apparatus and scanning probe microscope employing the same
08/18/2011US20110203020 Atomic force microscopes and methods of measuring specimens using the same
08/16/2011US7997125 Miniaturized spring element and method for producing the spring element
08/16/2011US7997124 Scanning probe microscope
08/16/2011CA2411198C Methods utilizing scanning probe microscope tips and products therefor or produced thereby
08/11/2011DE10106854B4 Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche Micro-probe and apparatus for measuring a sample surface
08/11/2011DE10084431B4 Aktive Sonde für ein Rasterkraftmikroskop mit atomarer Auflösung sowie Verfahren zur Verwendung derselben Active probe for an atomic force microscope with atomic resolution and methods of using same
08/04/2011US20110191917 Harmonic Correcting Controller for a Scanning Probe Microscope
08/03/2011EP2349638A1 A positioning system and method
07/2011
07/21/2011US20110174974 Method and apparatus for processing a microsample
07/14/2011US20110173728 Probe alignment tool for the scanning probe microscope
07/13/2011EP2342532A1 Modular atomic force microscope
07/12/2011US7978344 System and method for the inspection of micro and nanomechanical structures
07/07/2011US20110167525 Probe detection system
07/07/2011US20110167524 Method and apparatus of operating a scanning probe microscope
07/06/2011EP1220585B1 Apparatus for charged-particle beam irradiation, and method of control thereof
07/05/2011US7975315 Atomic force microscope
07/05/2011US7975314 Scanning probe microscope and active damping drive control device
06/2011
06/28/2011US7969650 Multiplex near-field microscopy with diffractive elements
06/23/2011WO2011038470A4 Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors
06/23/2011US20110154546 Thermal measurements using multiple frequency atomic force microscopy
06/22/2011EP2335254A1 Integrated micro actuator and linear variable defferential transformer for high precision position measurements
06/22/2011DE102005022178B4 Positioniervorrichtung und Verfahren zur Kompensation von Beschleunigungskräften Positioning device and method of compensating for acceleration forces
06/21/2011US7963153 Non-destructive ambient dynamic mode AFM amplitude versus distance curve acquisition
06/16/2011WO2011069476A1 Nanopositioner
06/09/2011US20110138506 Method of probe alignment
06/09/2011US20110138505 Scanning probe microscopy employing correlation pattern recognition
06/07/2011US7958566 AFM probe with variable stiffness
06/07/2011US7958565 Scan type probe microscope and cantilever drive device
06/02/2011US20110131690 Scanning Ion Conductance Microscopy
06/01/2011CN102084431A Probe detection system
05/2011
05/31/2011US7954165 Scanning probe microscope
05/25/2011EP2325657A1 Scanning type probe microscope
05/25/2011CN102072970A Method and device for lossless automatic approximation by facing nano observation and nano operation
05/25/2011CN102072969A Device for lossless automatic approximation by facing nano observation and nano operation
05/25/2011CN102071135A High resolution patch clamp based on scanning probe microscopy technology and operating method thereof
05/17/2011US7945966 Nanometric emitter/receiver guides
05/11/2011EP2318847A1 Method for measuring a piezoelectric response by means of a scanning probe microscope
05/10/2011US7941286 Variable density scanning
05/10/2011US7937991 Fully digitally controller for cantilever-based instruments
05/05/2011US20110107471 Scanning probe microscope having support stage incorporating a kinematic flexure arrangement
05/03/2011US7934323 Method and a device for the positioning of a displaceable component in an examining system
04/2011
04/28/2011US20110097829 Method for inspection of defects on a substrate
04/26/2011US7933482 Optical fiber probe tips and methods for fabricating same
04/21/2011WO2011046941A1 Devices, systems, and methods for evaluating an environmental impact of a facility
04/21/2011US20110093989 Scanner device for scanning probe microscope
04/21/2011US20110093988 Stud scanner
04/21/2011US20110093987 Mems actuator device with integrated temperature sensors
04/21/2011DE112009001338T5 Abtastvorrichtung für Rastersondenmikroskop Scanning device for scanning probe microscope
04/21/2011CA2777210A1 Devices, systems, and methods for evaluating an environmental impact of a facility
04/12/2011US7923684 Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles
04/07/2011WO2011038470A1 Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors
04/05/2011US7921466 Method of using an atomic force microscope and microscope
03/2011
03/31/2011WO2011036598A1 Optical probe system with increased scanning speed
03/29/2011US7916306 Optical device comprising a cantilever and method of fabrication and use thereof
03/24/2011DE202010013706U1 Einrichtung zur Nivellierung Means for leveling
03/23/2011EP2297546A1 Probe detection system
03/23/2011CN201773112U Relocation system of AFM
03/22/2011US7908908 Materials and methods for identifying biointeractive nanostructures and/or nanoparticles
03/17/2011US20110062964 Method and apparatus for measuring surface properties
03/16/2011CN101313206B Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography
03/03/2011US20110055982 A scanning probe microscope and a measuring method using the same
03/03/2011US20110055981 Device for Positioning a Moveable Object of Submicron Scale
03/02/2011CN101982780A Technique and system for real-time detecting, controlling and diagnosing cells of robot micro nanometer mixed living body
02/2011
02/24/2011US20110047662 Apparatus and method for investigating surface properties of different materials
02/23/2011EP2287624A2 Scanning Probe System
02/16/2011EP2283486A2 Preamplifying cantilever and applications thereof
02/15/2011US7891016 Automatic landing method and apparatus for scanning probe microscope using the same
02/15/2011US7891015 High-bandwidth actuator drive for scanning probe microscopy
02/15/2011US7888639 Method and apparatus for processing a micro sample
02/10/2011WO2011016256A1 Cantilever excitation device and scanning probe microscope
02/10/2011US20110035848 Laser guided tip approach with 3D registration to a surface
02/10/2011DE19816914B4 Abtastmikroskop Scanning tunneling microscope
02/09/2011EP2282217A1 Metal tip for scanning probe applications and method of producing the same
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