| Patents for G01Q 10 - Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe (2,719) | 
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| 12/01/2011 | WO2011116218A3 Frequency measuring and control apparatus with integrated parallel synchronized oscillators | 
| 12/01/2011 | US20110296561 Control system for scanning probe microscope | 
| 11/24/2011 | US20110289635 Resonance compensation in scanning probe microscopy | 
| 11/16/2011 | CN102245348A A positioning system and method | 
| 11/15/2011 | US8058780 Circular cylinder type piezoelectric actuator and piezoelectric element and scanning probe microscope using those | 
| 11/10/2011 | WO2011138603A1 Stage for an optical instrument | 
| 11/10/2011 | US20110277192 Scanning probe microscope with drift compensation | 
| 11/01/2011 | US8049190 Electron beam writing method, fine pattern writing system, method for manufacturing uneven pattern carrying substrate, and method for manufacturing magnetic disk medium | 
| 10/27/2011 | WO2011131863A1 Contactless linear actuator comprising a flexible guiding means and application thereof to a displacement table | 
| 10/18/2011 | US8040784 Read/write tip, head and device, and use thereof, and method for manufacturing same | 
| 10/18/2011 | US8037736 Non-linearity determination of positioning scanner of measurement tool | 
| 10/13/2011 | WO2011059809A3 Scanning probe microscope having support stage incorporating a kinematic flexure arrangement | 
| 10/11/2011 | US8035089 Scanning probe apparatus | 
| 10/04/2011 | US8031436 Electron beam writing method for magnetic recording medium | 
| 10/04/2011 | US8030604 Optical component operating in near-field transmission | 
| 09/29/2011 | US20110239336 Low Drift Scanning Probe Microscope | 
| 09/27/2011 | US8028343 Scanning probe microscope with independent force control and displacement measurements | 
| 09/27/2011 | US8024963 Material property measurements using multiple frequency atomic force microscopy | 
| 09/22/2011 | WO2011116218A2 Frequency measuring and control apparatus with integrated parallel synchronized oscillators | 
| 09/20/2011 | US8024816 Approach method for probe and sample in scanning probe microscope | 
| 09/15/2011 | DE102010015966A1 Quasi in-situ raster probe microscope i.e. atomic force microscope, for use in e.g. corrosive fluid treatment, has force generating apparatus for closing and sealing chamber and producing force on locking device | 
| 09/08/2011 | US20110219479 Variable Density Scanning | 
| 09/06/2011 | US8011230 Scanning probe microscope | 
| 08/24/2011 | EP2359149A1 Scanning probe microscope with current controlled actuator | 
| 08/24/2011 | EP2359148A2 Method and apparatus of operating a scanning probe microscope | 
| 08/23/2011 | US8006315 Photon-emission scanning tunneling microscopy | 
| 08/23/2011 | US8001831 Positioning apparatus and scanning probe microscope employing the same | 
| 08/18/2011 | US20110203020 Atomic force microscopes and methods of measuring specimens using the same | 
| 08/16/2011 | US7997125 Miniaturized spring element and method for producing the spring element | 
| 08/16/2011 | US7997124 Scanning probe microscope | 
| 08/16/2011 | CA2411198C Methods utilizing scanning probe microscope tips and products therefor or produced thereby | 
| 08/11/2011 | DE10106854B4 Mikro-Tastkopf und Vorrichtung zum Messen einer Probenoberfläche Micro-probe and apparatus for measuring a sample surface | 
| 08/11/2011 | DE10084431B4 Aktive Sonde für ein Rasterkraftmikroskop mit atomarer Auflösung sowie Verfahren zur Verwendung derselben Active probe for an atomic force microscope with atomic resolution and methods of using same | 
| 08/04/2011 | US20110191917 Harmonic Correcting Controller for a Scanning Probe Microscope | 
| 08/03/2011 | EP2349638A1 A positioning system and method | 
| 07/21/2011 | US20110174974 Method and apparatus for processing a microsample | 
| 07/14/2011 | US20110173728 Probe alignment tool for the scanning probe microscope | 
| 07/13/2011 | EP2342532A1 Modular atomic force microscope | 
| 07/12/2011 | US7978344 System and method for the inspection of micro and nanomechanical structures | 
| 07/07/2011 | US20110167525 Probe detection system | 
| 07/07/2011 | US20110167524 Method and apparatus of operating a scanning probe microscope | 
| 07/06/2011 | EP1220585B1 Apparatus for charged-particle beam irradiation, and method of control thereof | 
| 07/05/2011 | US7975315 Atomic force microscope | 
| 07/05/2011 | US7975314 Scanning probe microscope and active damping drive control device | 
| 06/28/2011 | US7969650 Multiplex near-field microscopy with diffractive elements | 
| 06/23/2011 | WO2011038470A4 Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors | 
| 06/23/2011 | US20110154546 Thermal measurements using multiple frequency atomic force microscopy | 
| 06/22/2011 | EP2335254A1 Integrated micro actuator and linear variable defferential transformer for high precision position measurements | 
| 06/22/2011 | DE102005022178B4 Positioniervorrichtung und Verfahren zur Kompensation von Beschleunigungskräften Positioning device and method of compensating for acceleration forces | 
| 06/21/2011 | US7963153 Non-destructive ambient dynamic mode AFM amplitude versus distance curve acquisition | 
| 06/16/2011 | WO2011069476A1 Nanopositioner | 
| 06/09/2011 | US20110138506 Method of probe alignment | 
| 06/09/2011 | US20110138505 Scanning probe microscopy employing correlation pattern recognition | 
| 06/07/2011 | US7958566 AFM probe with variable stiffness | 
| 06/07/2011 | US7958565 Scan type probe microscope and cantilever drive device | 
| 06/02/2011 | US20110131690 Scanning Ion Conductance Microscopy | 
| 06/01/2011 | CN102084431A Probe detection system | 
| 05/31/2011 | US7954165 Scanning probe microscope | 
| 05/25/2011 | EP2325657A1 Scanning type probe microscope | 
| 05/25/2011 | CN102072970A Method and device for lossless automatic approximation by facing nano observation and nano operation | 
| 05/25/2011 | CN102072969A Device for lossless automatic approximation by facing nano observation and nano operation | 
| 05/25/2011 | CN102071135A High resolution patch clamp based on scanning probe microscopy technology and operating method thereof | 
| 05/17/2011 | US7945966 Nanometric emitter/receiver guides | 
| 05/11/2011 | EP2318847A1 Method for measuring a piezoelectric response by means of a scanning probe microscope | 
| 05/10/2011 | US7941286 Variable density scanning | 
| 05/10/2011 | US7937991 Fully digitally controller for cantilever-based instruments | 
| 05/05/2011 | US20110107471 Scanning probe microscope having support stage incorporating a kinematic flexure arrangement | 
| 05/03/2011 | US7934323 Method and a device for the positioning of a displaceable component in an examining system | 
| 04/28/2011 | US20110097829 Method for inspection of defects on a substrate | 
| 04/26/2011 | US7933482 Optical fiber probe tips and methods for fabricating same | 
| 04/21/2011 | WO2011046941A1 Devices, systems, and methods for evaluating an environmental impact of a facility | 
| 04/21/2011 | US20110093989 Scanner device for scanning probe microscope | 
| 04/21/2011 | US20110093988 Stud scanner | 
| 04/21/2011 | US20110093987 Mems actuator device with integrated temperature sensors | 
| 04/21/2011 | DE112009001338T5 Abtastvorrichtung für Rastersondenmikroskop Scanning device for scanning probe microscope | 
| 04/21/2011 | CA2777210A1 Devices, systems, and methods for evaluating an environmental impact of a facility | 
| 04/12/2011 | US7923684 Methods, systems and computer program products for measuring critical dimensions of fine patterns using scanning electron microscope pictures and secondary electron signal profiles | 
| 04/07/2011 | WO2011038470A1 Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors | 
| 04/05/2011 | US7921466 Method of using an atomic force microscope and microscope | 
| 03/31/2011 | WO2011036598A1 Optical probe system with increased scanning speed | 
| 03/29/2011 | US7916306 Optical device comprising a cantilever and method of fabrication and use thereof | 
| 03/24/2011 | DE202010013706U1 Einrichtung zur Nivellierung Means for leveling | 
| 03/23/2011 | EP2297546A1 Probe detection system | 
| 03/23/2011 | CN201773112U Relocation system of AFM | 
| 03/22/2011 | US7908908 Materials and methods for identifying biointeractive nanostructures and/or nanoparticles | 
| 03/17/2011 | US20110062964 Method and apparatus for measuring surface properties | 
| 03/16/2011 | CN101313206B Y-shaped carbon nanotubes as AFM probe for analyzing substrates with angled topography | 
| 03/03/2011 | US20110055982 A scanning probe microscope and a measuring method using the same | 
| 03/03/2011 | US20110055981 Device for Positioning a Moveable Object of Submicron Scale | 
| 03/02/2011 | CN101982780A Technique and system for real-time detecting, controlling and diagnosing cells of robot micro nanometer mixed living body | 
| 02/24/2011 | US20110047662 Apparatus and method for investigating surface properties of different materials | 
| 02/23/2011 | EP2287624A2 Scanning Probe System | 
| 02/16/2011 | EP2283486A2 Preamplifying cantilever and applications thereof | 
| 02/15/2011 | US7891016 Automatic landing method and apparatus for scanning probe microscope using the same | 
| 02/15/2011 | US7891015 High-bandwidth actuator drive for scanning probe microscopy | 
| 02/15/2011 | US7888639 Method and apparatus for processing a micro sample | 
| 02/10/2011 | WO2011016256A1 Cantilever excitation device and scanning probe microscope | 
| 02/10/2011 | US20110035848 Laser guided tip approach with 3D registration to a surface | 
| 02/10/2011 | DE19816914B4 Abtastmikroskop Scanning tunneling microscope | 
| 02/09/2011 | EP2282217A1 Metal tip for scanning probe applications and method of producing the same |