| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 09/25/2007 | US7274030 Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma |
| 09/19/2007 | CN100338689C T device and method for synchronous radiation fixed outlet double-crystal monochromator |
| 09/13/2007 | DE102006003683B3 Anordnung und Verfahren zur Erzeugung von EUV-Strahlung hoher Durchschnittsleistung Apparatus and method for generating EUV radiation of high average power |
| 09/12/2007 | EP1390955B1 Laser plasma from metals and nano-size particles |
| 08/22/2007 | EP1820377A2 Method and apparatus for operating an electrical discharge device |
| 08/15/2007 | CN101019078A A device for generating light in the extreme ultraviolet and its application to a source for lithography using radiation in the extreme ultraviolet |
| 08/02/2007 | US20070177714 Ionizing Radiation Imaging System and Method With Decreased Radiation Dose |
| 08/01/2007 | CN101010993A A method and apparatus for generating radiation or particles by interaction between a laser beam and a target |
| 07/31/2007 | US7250621 Method and arrangement for the plasma-based generation of intensive short-wavelength radiation |
| 07/26/2007 | WO2007083662A1 X-ray generator employing hemimorphic crystal |
| 07/19/2007 | US20070165784 X-ray generator employing hemimorphic crystal and ozone generator employing it |
| 07/18/2007 | CN101002305A Laser plasma EUV light source, target material, tape material, a method of producing target material, a method of providing targets, and an EUV exposure device |
| 07/12/2007 | US20070158597 EUV light source |
| 07/12/2007 | US20070158596 EUV light source |
| 07/12/2007 | US20070158593 Infrared tag and track technique |
| 07/12/2007 | US20070158577 Method and apparatus for generating laser produced plasma |
| 07/12/2007 | US20070158540 Liquid trap for collecting liquids in a vacuum device |
| 07/12/2007 | DE102004036441B4 Vorrichtung und Verfahren zum Dosieren von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung Apparatus and method for dosing of a target material for generating short-wave electromagnetic radiation |
| 07/10/2007 | US7242748 X-ray transmissive optical mirror apparatus |
| 07/04/2007 | EP1804556A2 Radiation source |
| 07/04/2007 | EP1804555A1 EUV radiation source with cooled aperture |
| 07/03/2007 | US7239686 Method and arrangement for producing radiation |
| 06/27/2007 | EP1800188A1 Device for generating extreme ultraviolet light and application to an extreme ultraviolet radiation lithography source |
| 06/19/2007 | US7233013 Radiation source for the generation of short-wavelength radiation |
| 06/14/2007 | CA2626127A1 Soft x-ray generator |
| 06/12/2007 | US7230258 Plasma-based debris mitigation for extreme ultraviolet (EUV) light source |
| 06/07/2007 | WO2007064210A1 Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| 06/07/2007 | WO2007063062A1 Compact x-ray source |
| 06/07/2007 | US20070127007 Method and device for lithography by extreme ultraviolet radiation |
| 06/07/2007 | US20070125970 EUV light source |
| 06/07/2007 | US20070125969 Nanolithography system |
| 05/31/2007 | US20070121786 Dental diagnostic and treatment apparatus |
| 05/31/2007 | DE102005055686B3 Anordnung zur Erzeugung kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas sowie Verfahren zur Herstellung von kühlmitteldurchströmten Elektrodengehäusen Arrangement for generating short-wave radiation based on a gas discharge plasma as well as methods for producing through which coolant flows electrode housings |
| 05/30/2007 | EP1574116B1 Method for the creation of droplet targets |
| 05/30/2007 | CN1973357A EUV light source, EUV exposure system, and production method for semiconductor device |
| 05/30/2007 | CN1973338A Systems and methods for plasma containment |
| 05/24/2007 | US20070114467 Lithographic projection apparatus, gas purging method, device manufacturing method and purge gas supply system |
| 05/24/2007 | DE102005048670B3 Anordnung zur Unterdrückung von unerwünschten Spektralanteilen bei einer plasmabasierten EUV-Strahlungsquelle Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source |
| 05/23/2007 | CN1969372A EUV light source, EUV exposure equipment and semiconductor device manufacturing method |
| 05/17/2007 | US20070110216 Product to tailor distributions of energy deposition by a high energy photon beam |
| 05/16/2007 | EP1784837A2 Shield structure and focal spot control assembly for x-ray device |
| 05/16/2007 | EP1673785B1 Plasma source of directed beams and application thereof to microlithography |
| 05/16/2007 | CN1316545C Static electricity preventing device using flexible x-ray |
| 05/15/2007 | US7217939 Capillary tubing |
| 05/09/2007 | EP1782663A1 A method and apparatus for generating radiation or particles by interaction between a laser beam and a target |
| 05/09/2007 | CN1959924A Device for generating X-ray or XUV radiation |
| 05/03/2007 | US20070098129 Plasma containment method |
| 05/02/2007 | EP1779410A2 Systems and methods for reducing the influence of plasma-generated debris on the internal components of an euv light source |
| 05/02/2007 | EP1660946B1 Method and device for lithography by extreme ultraviolet radiation |
| 05/02/2007 | CN1314300C Star pinch x-ray and extreme ultraviolet photon source |
| 04/26/2007 | US20070090304 Method and apparatus for producing extreme ultraviolet radiation or soft x-ray radiation |
| 04/24/2007 | US7208746 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/18/2007 | EP1775756A1 Euv light source, euv exposure equipment and semiconductor device manufacturing method |
| 04/18/2007 | EP1775755A1 Euv light source, euv exposure system, and production method for semiconductor device |
| 04/18/2007 | EP1774838A2 Inductively-driven plasma light source |
| 04/18/2007 | CN1311716C Method and device for producing extreme ultraviolet radiation and soft X-radiation |
| 04/17/2007 | US7206379 RF accelerator for imaging applications |
| 04/12/2007 | WO2006134513A3 Method of protecting a radiation source producing euv-radiation and/or soft x-rays against short circuits |
| 04/12/2007 | WO2006130630A3 X-ray pixel beam array systems and methods for electronically shaping radiation fields and modulating radiation field intensity patterns for radiotherapy |
| 04/11/2007 | EP1173874A4 Plasma gun and methods for the use thereof |
| 04/05/2007 | WO2007038527A1 Isotopic imaging via nuclear resonance fluorescene with laser-based thomson radiation |
| 04/05/2007 | WO2005101925A3 Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity |
| 03/29/2007 | WO2005112525A3 Apparatus, system, and method for frequency stabilized mode-locked laser |
| 03/21/2007 | CN1933090A X-ray generating method and x-ray generating apparatus |
| 03/13/2007 | US7189974 EUV light spectrum measuring apparatus and calculating method of EUV light intensity |
| 03/13/2007 | US7189446 Curved honeycomb article, EUV apparatus having a curved honeycomb article, and method of making a curved honeycomb article |
| 03/08/2007 | WO2007003806A3 Photon source comprising a pressure gradient ecr source |
| 03/08/2007 | WO2006123270A3 Gas discharge source, in particular for euv radiation |
| 03/07/2007 | EP1665907B1 Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation |
| 03/01/2007 | DE102005041567A1 Plasma-based high power-extreme ultraviolet-gas discharge source`s arrangement, has thermo container and supply line, transferring working medium from gas supply to pre-ionization unit, where line is connected with one of electrode housings |
| 03/01/2007 | DE102005039849A1 Vorrichtung zur Strahlungserzeugung mittels einer Gasentladung A device for generating radiation by means of a gas discharge |
| 02/21/2007 | CN1918667A Soft x-ray processing device and soft x-ray processing method |
| 02/20/2007 | US7180083 EUV light source collector erosion mitigation |
| 02/20/2007 | US7180082 Method for plasma formation for extreme ultraviolet lithography-theta pinch |
| 02/20/2007 | US7180081 Discharge produced plasma EUV light source |
| 02/15/2007 | WO2007017177A1 Apparatus for the production of electron beams and x-ray beams for interstitial and intra-operatory radiation therapy |
| 02/14/2007 | EP1155419B1 "x-ray microscope having an x-ray source for soft x-rays |
| 02/08/2007 | WO2004086440A3 Systems and methods for plasma containment |
| 02/08/2007 | US20070030956 X-ray generator for an x-ray apparatus with x-ray lens module |
| 02/08/2007 | US20070029511 High repetition rate laser produced plasma EUV light source |
| 02/06/2007 | US7173999 X-ray microscope having an X-ray source for soft X-ray |
| 02/01/2007 | US20070023711 Discharge produced plasma EUV light source |
| 02/01/2007 | US20070023705 EUV light source collector lifetime improvements |
| 02/01/2007 | DE102005034359A1 A solid filament for laser applications is produced from a fluid in a vacuum chamber using a cooling process |
| 01/25/2007 | US20070019789 Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays |
| 01/24/2007 | EP1746865A2 Device for producing extreme UV radiation |
| 01/24/2007 | EP1745682A2 Apparatus, system, and method for high flux, compact compton x-ray source |
| 01/18/2007 | US20070014392 High Efficiency Monochromatic X-Ray Source Using An Optical Undulator |
| 01/18/2007 | US20070012889 Gaseous extreme-ultraviolet spectral purity filters and optical systems comprising same |
| 01/17/2007 | EP1743221A2 Removal of particles generated by a radiation source |
| 01/16/2007 | US7164144 EUV light source |
| 01/11/2007 | WO2006104956A9 Compact, high-flux, short-pulse x-ray source |
| 01/09/2007 | US7161163 Method and arrangement for the plasma-based generation of soft x-radiation |
| 01/04/2007 | WO2007002386A2 Euv light source collector lifetime improvements |
| 01/04/2007 | WO2007002374A2 Euv light source collector erosion mitigation |
| 01/04/2007 | US20070002474 Apparatus for evalulating EUV light source, and evaluation method using the same |
| 01/04/2007 | US20070001571 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 12/28/2006 | US20060291627 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 12/28/2006 | DE102005030304A1 Extreme ultraviolet radiation production device, has injection device positioned on discharge device, where injection device provides series of individual volumes of source materials, and is injected at distance to electrodes in area |
| 12/26/2006 | US7154109 Method and apparatus for producing electromagnetic radiation |