| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 02/26/2003 | EP1285560A1 Method and device for generating euv radiation |
| 02/13/2003 | WO2003013197A1 Method and apparatus for generating x-ray |
| 02/13/2003 | CA2452815A1 Method and apparatus for generating x-rays |
| 02/04/2003 | US6516048 X-ray generator |
| 01/30/2003 | US20030020890 Debris removing system for use in X-ray light source |
| 01/14/2003 | US6507641 X-ray-generation devices, X-ray microlithography apparatus comprising same, and microelectronic-device fabrication methods utilizing same |
| 01/09/2003 | US20030006708 Microwave ion source |
| 01/09/2003 | US20030006383 Plasma focus light source with improved pulse power system |
| 01/08/2003 | EP1274287A1 Debris removing system for use in X-ray source |
| 01/08/2003 | CN1390435A Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography |
| 01/08/2003 | CN1390360A Plasma focus light source with improved pulse power system |
| 01/07/2003 | US6504900 Optical sample X-ray testing apparatus and method for testing optical sample with X-rays |
| 12/24/2002 | US6498832 Electrode configuration for extreme-UV electrical discharge source |
| 12/19/2002 | WO2002102122A1 Star pinch x-ray and extreme ultraviolet photon source |
| 12/12/2002 | US20020186815 Star pinch plasma source of photons or neutrons |
| 12/12/2002 | US20020186814 Star pinch X-ray and extreme ultraviolet photon source |
| 12/10/2002 | US6493423 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 12/10/2002 | US6493421 Apparatus and method for generating a high intensity X-ray beam with a selectable shape and wavelength |
| 12/05/2002 | WO2002098189A2 Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
| 12/05/2002 | DE10151080C1 Device for producing extreme ultraviolet radiation used in the semiconductor industry comprises a discharge chamber surrounded by electrode housings through which an operating gas flows under a predetermined pressure |
| 11/26/2002 | US6487003 Optical interaction device |
| 11/21/2002 | WO2002075910A3 Vacuum arc method, system, and apparatus |
| 11/21/2002 | US20020172235 Producing energetic, tunable, coherent X-rays with long wavelength light |
| 11/21/2002 | US20020171817 Lithography device wich uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 11/14/2002 | WO2002091808A1 Producing energetic, tunable, coherent x-rays with long wavelength light |
| 11/14/2002 | WO2002091807A1 High flux, high energy photon source |
| 11/14/2002 | US20020168049 Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
| 11/13/2002 | EP1072174B1 Z-pinch soft x-ray source using diluent gas |
| 11/13/2002 | CN1379968A Production of dense mist of micrometric droplets in particular for extreme UV lithography |
| 11/07/2002 | US20020163793 EUV-transparent interface structure |
| 11/07/2002 | US20020163313 Pulse power system for extreme ultraviolet and x-ray sources |
| 11/07/2002 | US20020162975 High output extreme ultraviolet source |
| 11/07/2002 | US20020162974 High temperature EUV source nozzle |
| 11/06/2002 | EP1255426A1 High temperature EUV source nozzle |
| 11/06/2002 | EP1255163A2 High output extreme ultraviolet source |
| 10/31/2002 | US20020159568 Electrode configuration for extreme-uv electrical discharge source |
| 10/25/2002 | EP0968409A4 Soft x-ray microfluoroscope |
| 10/24/2002 | WO2002085080A1 Method and device for generating extreme ultraviolet radiation in particular for lithography |
| 10/24/2002 | WO2002084406A1 Euv-transparent interface structure |
| 10/24/2002 | US20020154738 X-ray generator |
| 10/22/2002 | US6469310 Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus |
| 10/17/2002 | WO2002082872A1 Method and device for producing extreme ultraviolet radiation and soft x-radiation |
| 10/17/2002 | WO2002082871A1 Method and device for the generation of far ultraviolet or soft x-ray radiation |
| 10/17/2002 | DE10139677A1 Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung Method and device for generating extreme ultraviolet radiation and soft x-rays |
| 10/17/2002 | DE10134033A1 Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung/weicher Röntgenstrahlung Method and device for generating extreme ultraviolet radiation / soft x-ray |
| 10/10/2002 | US20020146091 Ultrabright multikilovolt x-ray source: saturated amplification on noble gas transition arrays from hollow atom states |
| 10/09/2002 | EP1248499A1 Method and apparatus for production of extreme ultraviolet radiation |
| 10/08/2002 | US6463123 Target for production of x-rays |
| 10/03/2002 | US20020141537 Laser plasma generation method and system |
| 10/03/2002 | US20020141536 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions |
| 10/02/2002 | DE10113064A1 Verfahren und Einrichtung zur Erzeugung von UV-Strahlung, insbesondere von EUV-Strahlung Method and device for generating ultraviolet radiation, in particular EUV radiation |
| 10/01/2002 | US6459766 Photon generator |
| 09/26/2002 | WO2002076157A1 X-ray method, system, and apparatus |
| 09/26/2002 | WO2002076156A1 Method and device for generating euv radiation |
| 09/26/2002 | WO2002075910A2 Vacuum arc method, system, and apparatus |
| 09/19/2002 | WO2002074022A1 Electrode configuration for extreme-uv electrical discharge source |
| 09/19/2002 | WO2002074021A1 Method for generating photons by sonoluminescence |
| 09/19/2002 | US20020131555 Apparatus for producing vacuum arc discharges |
| 09/19/2002 | US20020131554 Efficiency fluorescent x-ray source |
| 09/18/2002 | EP1240551A2 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 09/17/2002 | US6452199 Plasma focus high energy photon source with blast shield |
| 09/17/2002 | US6452194 Radiation source for use in lithographic projection apparatus |
| 09/10/2002 | US6449338 X-ray source and use in radiography |
| 09/06/2002 | WO2002069677A1 Extreme ultraviolet generating device, exposure device using the generating device, and semiconductor manufacturing method |
| 08/22/2002 | WO2002039792A3 Target for production of x-rays |
| 08/21/2002 | EP1232517A1 Plasma focus light source with improved pulse power system |
| 08/21/2002 | EP1232516A1 Method and radiation generating system using microtargets |
| 08/20/2002 | US6437349 Fluid nozzle system and method in an emitted energy system for photolithography |
| 08/14/2002 | EP1230828A1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography |
| 08/14/2002 | CN1364048A Laser plasma X-ray source |
| 08/08/2002 | WO2002061407A1 High-energy x-ray imaging device and method therefor |
| 08/01/2002 | US20020100882 Plasma focus high energy photon source with blast shield |
| 07/18/2002 | US20020094063 Laser plasma EUV light source apparatus and target used therefor |
| 07/17/2002 | EP1222842A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 07/16/2002 | US6421421 Extreme ultraviolet based on colliding neutral beams |
| 07/11/2002 | US20020090054 Apparatus and method for containing debris from laser plasma radiation sources |
| 07/02/2002 | US6414438 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 06/27/2002 | WO2002008787A3 Method and apparatus for the production of so called 'fractional hydrogen' and associated production of photon energy |
| 06/18/2002 | US6408052 Z-pinch plasma X-ray source using surface discharge preionization |
| 06/13/2002 | WO2002046839A2 Laser plasma from metals and nano-size particles |
| 06/13/2002 | US20020070353 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 06/05/2002 | EP1211918A1 Method of stopping ions and small debris in extreme-ultraviolet and soft x-rays plasma sources by using krypton |
| 06/04/2002 | US6400089 High electric field, high pressure light source |
| 05/30/2002 | US20020064253 Apparatus and method for generating a high intensity X-ray beam with a selectable shape and wavelength |
| 05/29/2002 | EP1209956A1 System and method for producing pulsed monochromatic X-rays |
| 05/23/2002 | US20020060299 Methods and apparatus for providing a broadband tunable source of coherent millimeter, sub-millimeter and infrared radiation utilizing a non-relativistic electron beam |
| 05/16/2002 | WO2002039792A2 Target for production of x-rays |
| 05/16/2002 | US20020057760 System and method for producing pulsed monochromatic X-rays |
| 05/16/2002 | DE10055134A1 Generation of X ray emissions high voltage field applied to an electrode with a sharp needle point form |
| 05/14/2002 | US6389106 Method and device for producing extreme ultraviolet and soft X-rays from a gaseous discharge |
| 05/14/2002 | US6389101 Parallel x-ray nanotomography |
| 05/02/2002 | US20020051358 System and method for providing a lithographic light source for a semiconductor manufacturing process |
| 05/02/2002 | EP1202117A1 Exposure method and exposure apparatus |
| 04/23/2002 | US6377651 Laser plasma source for extreme ultraviolet lithography using a water droplet target |
| 04/18/2002 | WO2002032197A1 Method and apparatus for generating x-ray or euv radiation |
| 04/18/2002 | US20020044629 Method and apparatus for generating X-ray or EUV radiation |
| 04/17/2002 | EP1197127A1 Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge |
| 04/03/2002 | EP1077019B1 X-ray source and its use in radiography |
| 03/28/2002 | WO2002026003A1 Method for converting laser radiation into x-radiation, in particular, into extreme ultraviolet (euv) radiation using a plasma generated by the laser radiation |
| 03/28/2002 | WO2001091523A3 Extreme ultraviolet source based on colliding neutral beams |