| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 03/03/2011 | US20110051897 Liquid Target Producing Device Being Able to use Multiple Capillary Tube And X-Ray and EUV Light Source Device with the Same |
| 03/02/2011 | CN101111118B Stable liquid target laser plasma light source |
| 03/01/2011 | US7897948 EUV plasma discharge lamp with conveyor belt electrodes |
| 02/17/2011 | WO2011018295A1 Euv radiation system and lithographic apparatus |
| 02/16/2011 | CN101978792A Systems and methods for target material delivery in a laser produced plasma EUV light source |
| 02/16/2011 | CN101978791A Target material, a source, an EUV lithographic apparatus and a device manufacturing method using the same |
| 02/10/2011 | DE102004037521B4 Vorrichtung zur Bereitstellung von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung An apparatus for providing a target material for generating short-wave electromagnetic radiation |
| 02/09/2011 | CN101971709A Gas discharge source, in particular for euv-radiation |
| 02/09/2011 | CN101971100A Lithographic apparatus, plasma source, and reflecting method |
| 02/09/2011 | CN101490624B Correction of spatial instability of an EUV source by laser beam steering |
| 02/08/2011 | US7885387 Extreme ultraviolet light and X-ray source target and manufacturing method thereof |
| 02/08/2011 | US7885385 Tunable X-ray source |
| 02/03/2011 | WO2011013779A1 Extreme ultraviolet light source, method for controlling extreme ultraviolet light source, and recording medium in which program therefor is recorded |
| 02/03/2011 | US20110026680 X-ray generating device |
| 02/03/2011 | US20110026679 X-ray metering apparatus, and x-ray metering method |
| 02/03/2011 | US20110026675 Tangent Radiography Using Brilliant X-Ray Source |
| 02/03/2011 | US20110026002 Euv radiation generation apparatus |
| 02/03/2011 | US20110024651 Radiation system and method, and a spectral purity filter |
| 02/02/2011 | CN101965757A High voltage electrical connection line |
| 02/01/2011 | US7880153 Extreme ultra violet light source apparatus |
| 01/27/2011 | US20110020752 Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiation |
| 01/27/2011 | DE102005039849B4 Vorrichtung zur Strahlungserzeugung mittels einer Gasentladung A device for generating radiation by means of a gas discharge |
| 01/27/2011 | DE102005023060B4 Gasentladungs-Strahlungsquelle, insbesondere für EUV-Strahlung The gas discharge radiation source, in particular for EUV radiation |
| 01/26/2011 | CN101960926A Device constructed and arranged to generate radiation, lithographic apparatus, and device manufacturing method |
| 01/20/2011 | US20110014799 Projection illumination system for euv microlithography |
| 01/20/2011 | US20110013749 High brightness x-ray generating device and method |
| 01/18/2011 | US7872555 Undulator |
| 01/13/2011 | WO2010127344A3 In-situ plasma/laser hybrid scheme |
| 01/13/2011 | US20110007874 Multiple energy x-ray source |
| 01/13/2011 | US20110007772 Phase-matched Generation of Coherent Soft and Hard X-rays Using IR Lasers |
| 01/12/2011 | CN1721999B Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 01/06/2011 | WO2011000622A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter |
| 12/30/2010 | US20100327192 Alignment Laser |
| 12/29/2010 | EP2266375A2 System and methods for target material delivery in a laser produced plasma euv light source |
| 12/29/2010 | CN101932187A Method for generating plesiochronous higher harmonic or X-ray radiation through laser secondary excitation |
| 12/09/2010 | WO2009077980A8 Gas discharge source, in particular for euv-radiation |
| 12/08/2010 | EP1197127B1 Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge |
| 12/08/2010 | CN101911839A Radiation source, lithographic apparatus and device manufacturing method |
| 12/08/2010 | CN101911838A Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiation |
| 12/02/2010 | WO2010137625A1 Target output device and extreme ultraviolet light source device |
| 12/02/2010 | WO2010093903A3 Optical pumping to sustain hot plasma |
| 12/02/2010 | US20100303199 Grazing incidence collector for laser produced plasma sources |
| 12/01/2010 | EP2255600A2 A target material, a source, an euv lithographic apparatus and a device manufacturing method using the same |
| 11/25/2010 | US20100294958 Apparatus and method for measuring and controlling target trajectory in chamber apparatus |
| 11/25/2010 | US20100294953 Laser Produced Plasma EUV Light Source |
| 11/24/2010 | EP2020165B1 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus |
| 11/24/2010 | EP1305984B1 Method and apparatus for generating x-ray radiation |
| 11/24/2010 | CN101896980A Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 11/18/2010 | US20100288937 Extreme ultraviolet light source apparatus |
| 11/16/2010 | US7835499 Compact, short-pulse X-ray and T-ray fused source |
| 11/11/2010 | WO2004051698A8 Gas discharge lamp for euv radiation |
| 11/11/2010 | US20100282987 Arrangement for the continuous generation of liquid tin as emitter material in euv radiation sources |
| 11/11/2010 | US20100282986 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device and corresponding irradiation device |
| 11/11/2010 | DE102009020776A1 Anordnung zur kontinuierlichen Erzeugung von flüssigem Zinn als Emittermaterial in EUV-Strahlungsquellen Arrangement for the continuous production of liquid tin as an emitter material in EUV radiation sources |
| 11/04/2010 | WO2010127344A2 In-situ plasma/laser hybrid scheme |
| 11/04/2010 | CA2760612A1 In-situ plasma/laser hybrid scheme |
| 11/03/2010 | EP2245910A1 Device constructed and arranged to generate radiation, lithographic apparatus, and device manufacturing method |
| 11/03/2010 | EP2245635A1 Mechanoluminescent x-ray generator |
| 11/03/2010 | EP2245511A1 Multiplexing of pulsed sources |
| 10/28/2010 | US20100271610 Lithographic radiation source, collector, apparatus and method |
| 10/21/2010 | US20100264336 Gas discharge source, in particular for euv-radiation |
| 10/20/2010 | CN101868112A Parallel wire-array Z-pinch load |
| 10/14/2010 | US20100260321 Discretely addressable large-area x-ray system |
| 10/14/2010 | US20100260317 X-ray pixel beam array systems and methods for electronically shaping radiation fields and modulation radiation field intensity patterns for radiotherapy |
| 10/14/2010 | US20100258749 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror |
| 10/12/2010 | US7812330 Radical cleaning arrangement for a lithographic apparatus |
| 10/06/2010 | EP2236014A1 Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiation |
| 10/05/2010 | US7809112 Method and device for generating EUV radiation and/or soft X-ray radiation |
| 09/30/2010 | US20100243922 Extreme ultraviolet light source apparatus |
| 09/29/2010 | CN1864104B Method and device for lithography by extreme ultraviolet radiation |
| 09/29/2010 | CN101849212A Radiation system and method, and a spectral purity filter |
| 09/02/2010 | WO2010098483A1 Plasma light source and plasma light generating method |
| 09/02/2010 | WO2010097968A1 Method and apparatus of precisely measuring intensity profile of x-ray nanobeam |
| 09/01/2010 | EP2223574A1 Gas discharge source, in particular for euv-radiation |
| 08/31/2010 | US7787595 Electron source |
| 08/26/2010 | US20100213395 Extreme ultraviolet light source apparatus |
| 08/25/2010 | EP2220915A1 Radiation source, lithographic apparatus and device manufacturing method |
| 08/24/2010 | US7781751 Portable wavelength transforming converter for UV LEDs |
| 08/19/2010 | WO2010093903A2 Optical pumping to sustain hot plasma |
| 08/11/2010 | CN101802716A Lithographic apparatus and device manufacturing method |
| 08/05/2010 | US20100193710 Laser apparatus and extreme ultraviolet light source apparatus |
| 08/04/2010 | CN101796893A Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device |
| 08/04/2010 | CN101796892A Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation |
| 08/04/2010 | CN101795527A Radiation source, lithographic apparatus and device manufacturing method |
| 07/29/2010 | WO2010085179A1 Mobile digital low-dose x-ray device |
| 07/29/2010 | WO2010083854A1 X-ray window |
| 07/29/2010 | US20100189223 Digitally addressed flat panel x-ray sources |
| 07/28/2010 | EP2211594A2 Extreme ultraviolet light source device |
| 07/28/2010 | CN1868005B Plasma source of directed beams and application thereof to microlithography |
| 07/27/2010 | US7763870 Optical system for radiation in the EUV-wavelength range and method for measuring a contamination status of EUV-reflective elements |
| 07/21/2010 | CN101785369A Module and method for producing extreme ultraviolet radiation |
| 07/21/2010 | CN101785368A Radiation source |
| 07/15/2010 | US20100176313 Extreme ultraviolet light source |
| 07/14/2010 | CN101779524A Lithographic apparatus and device manufacturing method |
| 07/08/2010 | US20100171049 Extreme ultraviolet light source apparatus |
| 07/06/2010 | US7750326 Lithographic apparatus and cleaning method therefor |
| 07/01/2010 | DE102008062127A1 Flexible flat element for generating X-ray radiation, comprises adhesive mass layer having first and second adhesive mass side surfaces, covering layer bonded with first adhesive mass side surface, and carrier having carrier side surfaces |
| 06/30/2010 | EP2203033A2 Extreme ultraviolet light source device |
| 06/24/2010 | WO2010071036A1 Plasma light source and plasma light generation method |
| 06/24/2010 | WO2010070540A1 Method and device for generating euv radiation or soft x-rays with enhanced efficiency |