| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 10/15/2009 | WO2009126770A2 Plasma-based euv light source |
| 10/08/2009 | WO2009121438A1 Projection illumination system for euv microlithography |
| 10/08/2009 | US20090252297 Superconductor Electromagnetic Transmitter Device |
| 10/08/2009 | US20090252296 Multi-color x-ray generator |
| 10/08/2009 | US20090250638 Euv plasma discharge lamp with conveyor belt electrodes |
| 10/06/2009 | US7599470 Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination |
| 10/06/2009 | US7598503 Lithographic apparatus and cleaning method therefor |
| 09/29/2009 | US7596208 Apparatus system, and method for high flux, compact compton x-ray source |
| 09/24/2009 | WO2009116867A2 A target material, a source, an euv lithographic apparatus and a device manufacturing method using the same |
| 09/16/2009 | CN100541336C A device for generating light in the extreme ultraviolet and its application to a source for lithography using radiation in the extreme ultraviolet |
| 09/15/2009 | US7589337 LPP EUV plasma source material target delivery system |
| 09/11/2009 | WO2009110793A1 Lithographic apparatus, plasma source, and reflecting method |
| 09/11/2009 | WO2006093782A3 Source material dispenser for euv light source |
| 09/03/2009 | WO2009108049A1 Device constructed and arranged to generate radiation, lithographic apparatus, and device manufacturing method |
| 09/02/2009 | EP2095693A1 Laser produced plasma euv light source |
| 08/27/2009 | WO2009104059A1 Multiplexing of pulsed sources |
| 08/26/2009 | EP2092394A2 Radiation system and lithographic apparatus |
| 08/25/2009 | CA2241116C Radiation (e.g. x-ray pulse) generator mechanisms |
| 08/19/2009 | EP1623481A4 Systems and methods for plasma containment |
| 08/19/2009 | CN101513135A EUV plasma discharge lamp with conveyor belt electrodes |
| 08/18/2009 | US7576343 Method and apparatus for generating laser produced plasma |
| 08/12/2009 | EP1654914B8 Extreme uv and soft x ray generator |
| 08/06/2009 | WO2009095220A2 Grazing incidence collector for laser produced plasma sources |
| 08/06/2009 | DE102007051295B4 Anordnung zur Erzeugung von EUV-Strahlung Arrangement for the generation of EUV radiation |
| 08/05/2009 | EP2084500A2 Drive laser delivery systems for euv light source |
| 07/30/2009 | WO2009092600A1 Intra-cavity generation of pulsed coherent radiation in the uv or xuv wavelength range |
| 07/30/2009 | DE19983270B4 Laserplasmalichtquelle und Verfahren zur Erzeugung von Strahlung unter Verwendung derselben Laser plasma light source and method for generating radiation using the same |
| 07/29/2009 | EP2083328A1 Grazing incidence collector for laser produced plasma sources |
| 07/29/2009 | EP2083319A1 Intra-cavity generation of pulsed coherent radiation in the UV or XUV wavelength range |
| 07/22/2009 | EP1552534A4 Dense plasma focus radiation source |
| 07/22/2009 | CN100516643C Microwave powered lamphead having external shutter |
| 07/09/2009 | WO2009083175A1 Extreme ultraviolet radiation source and method for producing extreme ultraviolet radiation |
| 07/09/2009 | US20090173896 Method and apparatus for operating an electricl discharge device |
| 07/07/2009 | US7557366 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 07/02/2009 | US20090168967 Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology |
| 07/02/2009 | DE102007060807A1 Gasentladungsquelle, insbesondere für EUV-Strahlung Gas discharge source, in particular for EUV radiation |
| 07/01/2009 | EP2074634A1 Method for regenerating a surface of an optical element in an xuv radiation source and xuv radiation source |
| 06/25/2009 | WO2009078722A1 Radiation source, lithographic apparatus and device manufacturing method |
| 06/25/2009 | WO2009077980A1 Gas discharge source, in particular for euv-radiation |
| 06/25/2009 | WO2009077943A1 Method for laser-based plasma production and radiation source, in particular for euv radiation |
| 06/24/2009 | CN100505974C Radiation source, photoetching equipment and device manufacturing method |
| 06/11/2009 | US20090146083 Hydrogen catalysis |
| 06/04/2009 | WO2009068182A1 Radiation generation by means of laser radiation of a free droplet target |
| 06/04/2009 | US20090141858 Beam admission unit, beam generation device and tomography device |
| 06/03/2009 | EP2064929A2 Euv plasma discharge lamp with conveyor belt electrodes |
| 05/28/2009 | DE102007056872A1 Strahlungserzeugung mittels Laserbestrahlung eines freien Tröpfchentargets Radiation generation by laser irradiation of a free droplet targets |
| 05/27/2009 | CN101444148A A method of increasing the conversion efficiency of an EUV and/or soft X-ray lamp and a corresponding apparatus |
| 05/21/2009 | US20090129551 Electrode for X-ray apparatus |
| 05/20/2009 | EP2060159A1 Charged particle accelerator and radiation source |
| 05/20/2009 | EP1146931A4 Electron beam multistage accelerator driven probe device |
| 05/20/2009 | CN101438631A Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 05/14/2009 | WO2009061192A1 Radiation system and method, and a spectral purity filter |
| 05/14/2009 | DE102007053076A1 Device for producing X-rays by polarizable pyroelectrical crystals, has particle source connected to vacuum chamber for guiding gaseous adsorbate, where electric field causing deceleration to target and production of X-rays is changed |
| 05/13/2009 | CN100487572C Photoetching projector with multi-suppressing silk screen and method for manufacturing the integrated structure |
| 05/12/2009 | US7531820 Arrangement and method for the generation of extreme ultraviolet radiation |
| 05/07/2009 | WO2009057493A1 X-ray generator employing hemimorphic crystal |
| 05/06/2009 | CN100485864C EUV light source, EUV exposure equipment and semiconductor device manufacturing method |
| 05/05/2009 | US7528395 Radiation source, lithographic apparatus and device manufacturing method |
| 04/30/2009 | WO2007053334A3 Euv light source |
| 04/29/2009 | EP1232517A4 Plasma focus light source with improved pulse power system |
| 04/28/2009 | US7525111 High repetition rate laser produced plasma EUV light source |
| 04/23/2009 | DE102007051295A1 Anordnung zur Erzeugung von EUV-Strahlung Arrangement for the generation of EUV radiation |
| 04/22/2009 | EP2051140A1 An extreme ultraviolet light source device and a method for generating extreme ultraviolet radiation |
| 04/22/2009 | CN100482030C Extreme UV and soft x ray generator |
| 04/21/2009 | US7521702 Extreme ultraviolet light source and extreme ultraviolet light source target |
| 04/16/2009 | WO2009024860A3 Euv radiation source |
| 04/16/2009 | WO2006093693A3 Method and apparatus for euv plasma source target delivery |
| 04/16/2009 | US20090095096 Hazardous materials sensing robot |
| 04/14/2009 | US7518300 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 04/14/2009 | US7518134 Plasma radiation source for a lithographic apparatus |
| 04/09/2009 | WO2009044312A1 High voltage electrical connection line |
| 04/09/2009 | DE102007023444B4 Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen Means for generating a gas curtain for plasma-based EUV radiation sources |
| 04/08/2009 | EP2046100A1 A method for generating extreme ultraviolet radiation and an extreme ultraviolet light source device |
| 04/02/2009 | WO2009040424A1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 04/02/2009 | WO2009039884A1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 04/02/2009 | US20090084992 Method for generating extreme ultraviolet radiation and an extreme ultraviolet light source device |
| 03/26/2009 | WO2009038460A1 Lithographic apparatus and device manufacturing method |
| 03/25/2009 | EP1654914B1 Extreme uv and soft x ray generator |
| 03/18/2009 | CN101390453A Method and device for generating in particular EUV radiation and/or soft X-ray radiation |
| 03/12/2009 | WO2009031104A1 Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device |
| 03/12/2009 | WO2009031059A1 Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation |
| 03/11/2009 | EP2034490A1 High efficiency collector for laser plasma EUV source |
| 03/05/2009 | US20090057567 Gas management system for a laser-produced-plasma EUV light source |
| 03/05/2009 | DE102005041567B4 EUV-Strahlungsquelle mit hoher Strahlungsleistung auf Basis einer Gasentladung EUV radiation source with high radiant power based on a gas discharge |
| 03/03/2009 | US7498593 Terahertz radiation sources and methods |
| 02/26/2009 | WO2009025557A1 Module and method for producing extreme ultraviolet radiation |
| 02/26/2009 | WO2009024860A2 Euv radiation source |
| 02/17/2009 | US7492867 Nanoparticle seeded short-wavelength discharge lamps |
| 02/12/2009 | WO2009020390A1 Lithographic apparatus and device manufacturing method |
| 02/12/2009 | WO2009018933A1 Lithographic apparatus and device manufacturing method |
| 02/12/2009 | US20090040491 Lithographic apparatus and device manufacturing method |
| 02/04/2009 | EP2020165A2 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus |
| 02/03/2009 | US7486984 System and method for monochromatic x-ray beam therapy |
| 01/28/2009 | CN101356476A Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| 01/27/2009 | US7482610 Vertical-cavity enhanced resonant thermal emitter |
| 01/22/2009 | WO2009011579A1 Debris prevention system, radiation system, and lithographic apparatus |
| 01/21/2009 | EP2016608A1 Debris reduction in electron-impact x-ray sources |
| 01/20/2009 | US7480030 Method and device for lithography by extreme ultraviolet radiation |
| 01/20/2009 | US7479646 Extreme ultraviolet source with wide angle vapor containment and reflux |
| 01/20/2009 | US7479645 Device for producing extreme UV radiation |