H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma

Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
12/2006
12/21/2006	WO2006135928A2 Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays
12/21/2006	US20060285645 CT imaging system with multiple peak X-ray source
12/14/2006	WO2006104956A3 Compact, high-flux, short-pulse x-ray source
12/14/2006	WO2006029026A3 Shield structure and focal spot control assembly for x-ray device
12/13/2006	EP1732086A1 Soft x-ray processing device and soft x-ray processing method
12/13/2006	EP1730764A2 Lpp euv light source
12/13/2006	EP1730763A2 Euv light source
12/07/2006	WO2005094318A3 Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma
12/07/2006	DE102005045568A1 Vorrichtung und Verfahren zum Schutz einer optischen Komponente, insbesondere in einer EUV-Quelle Apparatus and method for protection of an optical component, in particular in an EUV source
12/07/2006	DE102005025624A1 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas Arrangement for the generation of intense short-wave radiation based on a gas discharge plasma,
12/06/2006	EP1729550A2 Arrangement and method for protecting an optical component, particularly in an EUV source
12/05/2006	US7145987 X-ray-generating devices and exposure apparatus comprising same
11/2006
11/30/2006	US20060269047 Device and method for generating an x-ray point source by geometric confinement
11/30/2006	DE10325151B4 Vorrichtung für die Erzeugung und/oder Beeinflussung elektromagnetischer Strahlung eines Plasmas An apparatus for generating and / or influencing electromagnetic radiation of a plasma
11/30/2006	DE102005023060A1 Gasentladungsquelle, insbesondere für EUV-Strahlung Gas discharge source, in particular for EUV radiation
11/29/2006	EP1726028A2 A high repetition rate laser produced plasma euv light source
11/28/2006	US7141798 Spectrum measuring apparatus and method
11/23/2006	WO2006123270A2 Gas discharge source, in particular for euv radiation
11/23/2006	US20060262905 Reduced divergence electromagnetic field configuration
11/22/2006	CN1868005A Plasma source of directed beams and application thereof to microlithography
11/16/2006	WO2006121126A1 Multi-color x-ray generator
11/16/2006	WO2006121125A1 Device for switching/generating x-rays for diagnosis and curing
11/16/2006	WO2006120942A1 Plasma generating apparatus and plasma generating method
11/15/2006	CN1864104A Method and device for lithography by extreme ultraviolet radiation
11/14/2006	US7136455 Electron emitter assembly and method for adjusting a size of electron beams
11/14/2006	US7135692 Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation
11/09/2006	US20060251217 Compact, high-flux, short-pulse x-ray source
11/09/2006	US20060249698 Debris collector for euv light generator
11/09/2006	DE102005020521A1 Verfahren und Anordnung zur Unterdrückung von Debris bei der Erzeugung kurzwelliger Strahlung auf Basis eines Plasmas Method and apparatus for suppressing debris in the generation of short-wave radiation based on a plasma
11/08/2006	EP1719218A2 Laser multiplexing
11/02/2006	WO2005101926A3 Apparatus, system, and method for high flux, compact compton x-ray source
11/02/2006	US20060243927 Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma
11/02/2006	EP1716726A2 Method and device for generating in particular euv radiation and/or soft x-ray radiation
10/2006
10/26/2006	US20060237669 Method and apparatus for plasma generation
10/25/2006	EP1715731A1 Undulator
10/24/2006	US7127036 Device for generating X-rays having a liquid metal anode
10/24/2006	US7126143 Method and device for producing extreme ultraviolet radiation and soft x-ray radiation
10/19/2006	WO2006108479A1 Laser x-ray source apparatus and target used therefore
10/18/2006	CN1849850A Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation
10/17/2006	US7122814 Arrangement for the stabilization of the radiation emission of a plasma
10/12/2006	WO2006106091A1 Photon source comprising an ecr source equipped with mirrors
10/12/2006	DE102005017262B3 Kollektorspiegel für plasmabasierte kurzwellige Strahlungsquellen Collector mirror plasma-based short-wave radiation sources
10/12/2006	DE102004028943B4 Vorrichtung zur zeitlich stabilen Erzeugung von EUV-Strahlung mittels eines laserinduzierten Plasmas Apparatus for time-stable generation of EUV radiation by means of a laser-induced plasma
10/11/2006	EP1709844A2 Methods and devices for the production of solid filaments in a vacuum chamber
10/05/2006	WO2006104956A2 Compact, high-flux, short-pulse x-ray source
10/05/2006	US20060222147 System and method for X-ray generation
10/05/2006	US20060219959 Radiation source for the generation of short-wavelength radiation
10/05/2006	US20060219958 Contamination barrier and lithographic apparatus comprising same
10/05/2006	US20060219957 Laser produced plasma EUV light source
10/05/2006	DE102005015274A1 Radiation source for producing EUV radiation, has vacuum chamber with areas with different high particle deceleration through buffer gas, where deceleration prevails in one area same as in another area where optical unit is arranged
10/05/2006	DE102005014433B3 Verfahren und Anordnung zur effizienten Erzeugung von kurzwelliger Strahlung auf Basis eines lasererzeugten Plasmas Method and apparatus for efficient generation of short-wave radiation based on a laser-produced plasma
10/03/2006	US7115887 Method for generating extreme ultraviolet with mather-type plasma accelerators for use in Extreme Ultraviolet Lithography
09/2006
09/28/2006	WO2006100217A1 Photon source comprising an electron cyclotron resonance multicharged ion plasma source
09/28/2006	US20060216193 Cleaning tools with UV flash unit
09/21/2006	DE102005007370B3 Ultraviolet light source for e.g. ultraviolet microscopy, has dielectric arranged between two electrodes, where one electrode includes tip directed to another electrode, such that shortest distance is defined between electrodes
09/19/2006	US7110504 Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method
09/19/2006	US7110503 X-ray measuring and testing system
09/14/2006	US20060203965 Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma
09/13/2006	EP1119870A4 X-ray scanning method and apparatus
09/13/2006	CN1833472A Extreme uv and soft x ray generator
09/08/2006	WO2006093693A2 Method and apparatus for euv plasma source target delivery
09/08/2006	WO2006092518A1 Monochromatic x-ray source and x-ray microscope using one such source
08/2006
08/31/2006	WO2006091948A2 Laser produced plasma euv light source with pre-pulse
08/31/2006	WO2006059275A3 Method and apparatus for operating an electrical discharge device
08/31/2006	US20060193438 X-ray source assembly having enhanced output stability using tube power adjustments and remote calibration
08/31/2006	US20060192156 Light source apparatus and exposure apparatus having the same
08/31/2006	US20060192155 Method and apparatus for euv light source target material handling
08/31/2006	US20060192154 Method and apparatus for EUV plasma source target delivery
08/30/2006	EP1509979B1 Method and arrangement for generating amplified spontaneous emission of coherent short-wave radiation
08/30/2006	CN1823685A Method for reducing beam hardening artifacts from a generated image of an object
08/30/2006	CN1272989C Method and apparatus for generating X-ray
08/24/2006	WO2005060321A8 Method and device for generating in particular euv radiation and/or soft x-ray radiation
08/24/2006	WO2005060321A2 Method and device for generating in particular euv radiation and/or soft x-ray radiation
08/24/2006	DE102005007884A1 Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter (EUV-) Strahlung Apparatus and method for generating extreme ultraviolet (EUV) radiation
08/22/2006	US7095038 EUV source
08/16/2006	EP1691588A2 Apparatus and method for production of extreme ultraviolet (EUV) radiation
08/16/2006	CN1820556A Method and device for producing extreme ultravoilet radiation or soft X-ray radiation
08/15/2006	US7092488 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions
08/15/2006	US7091507 Light generator and exposure apparatus
08/09/2006	CN1816243A Ion source apparatus and method
08/08/2006	US7087914 High repetition rate laser produced plasma EUV light source
07/2006
07/27/2006	US20060163500 Extreme UV radiation source device and method for eliminating debris which forms within the device
07/26/2006	EP1684557A2 Extreme UV radiation source device and method for eliminating debris which forms within the device
07/25/2006	US7081638 System and method to improve uniformity of ultraviolet energy application and method for making the same
07/25/2006	US7080563 Gas flow measurement apparatus and method for EVU light source
07/20/2006	WO2006075535A1 Laser plasma euv light source, target member, production method for target member, target supplying method, and euv exposure system
07/20/2006	US20060158126 Plasma radiation source and device for creating a gas curtain for plasma radiation sources
07/20/2006	DE102004063832A1 Anordnung zur Erzeugung eines gepulsten Laserstrahls hoher Durchschnittsleistung Arrangement for generating a pulsed laser beam of high average power
07/18/2006	US7078717 Light source device and exposure equipment using the same
07/11/2006	US7075096 Injection pinch discharge extreme ultraviolet source
07/04/2006	US7072444 Method and system for generating monochromatic X-rays
07/04/2006	US7072370 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
06/2006
06/29/2006	WO2006068671A2 X-ray needle apparatus and method for radiation treatment
06/29/2006	WO1998027558A8 Method and apparatus for product x-radiation
06/29/2006	US20060138960 Gas discharge lamp for euv radiation
06/28/2006	EP1673785A2 Plasma source of directed beams and application thereof to microlithography
06/28/2006	EP1673585A2 Plasma flare ir and uv emitting devices
06/27/2006	US7068754 System to generate therapeutic radiation
06/27/2006	US7068367 Arrangement for the optical detection of a moving target flow for a pulsed energy beam pumped radiation
06/27/2006	US7067832 Extreme ultraviolet light source

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