Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05G - X-ray technique › H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma
Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
03/2013
03/27/2013CN101444148B A method of increasing the conversion efficiency of an EUV and/or soft x-ray lamp and a corresponding apparatus
03/14/2013US20130062539 Apparatus and method for measuring and controlling target trajectory in chamber apparatus
03/14/2013DE10219805B4 Verfahren zur Stabilisierung der Strahlungsleistung einer gepuist betriebenen, auf gasentladungserzeugtem Plasma basierenden Strahlungsquelle A method for stabilizing the radiation power of a gepuist operated, based gasentladungserzeugtem plasma radiation source
03/13/2013CN102972099A X射线产生装置 X-ray generator
03/12/2013US8395134 Radiation source cartridge and module containing same
03/07/2013WO2013029906A1 Radiation source
03/07/2013WO2013029902A1 Radiation source and lithographic apparatus
03/07/2013WO2013029898A1 Radiation source
03/07/2013WO2013029897A1 Radiation source and lithographic apparatus
03/07/2013WO2013029896A1 Radiation source and method for lithographic apparatus for device manufacture
03/07/2013WO2013029895A1 Radiation source
03/06/2013CN102956279A Undulator and manufacture method thereof
03/06/2013CN101584255B Radiation system and lithographic apparatus
03/06/2013CN101513135B EUV plasma discharge lamp with conveyor belt electrodes
03/05/2013US8391443 Compac X-ray source
02/2013
02/28/2013WO2013028272A1 Energy sensors for light beam alignment
02/28/2013US20130051515 Craser device, imaging system and method
02/27/2013EP2563099A1 Extreme ultraviolet light generator
02/21/2013WO2013024316A2 Short period undulator
02/21/2013WO2013023710A1 Radiation source
02/21/2013WO2012131452A8 Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam
02/20/2013CN101795527B Radiation source, lithographic apparatus and device manufacturing method
02/14/2013WO2013020758A1 Radiation source and method for lithographic apparatus and device manufacturing method
02/14/2013WO2013020613A1 Method and device for generating optical radiation by means of elecctrically operated pulsed discharges
02/13/2013EP2556729A1 Euv radiation source and euv radiation generation method
02/06/2013EP2555598A1 Method and device for generating optical radiation by means of electrically operated pulsed discharges
02/06/2013EP2554027A1 System and method for generating extreme ultraviolet light, and laser apparatus
02/06/2013CN101796893B Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device
02/06/2013CN101796892B Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation
01/2013
01/31/2013WO2013014953A1 X-ray generating device and method for controlling x-ray generating device
01/23/2013EP2548270A1 Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
01/23/2013EP2548080A1 Extreme ultraviolet light generation system
01/23/2013CN101911839B Radiation source, lithographic apparatus and device manufacturing method
01/22/2013US8358069 Lighting method of light source apparatus
01/17/2013WO2013007407A1 Power supply for a discharge produced plasma euv source
01/16/2013EP2546864A1 Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly
01/09/2013EP2542936A1 Laser device, laser system, and extreme ultraviolet light generation apparatus
01/08/2013US8350239 Pen specific for erasable media usage
01/08/2013US8350238 Device patterning using irradiation
01/02/2013EP2542035A1 X-ray irradiation device and analysis device
01/02/2013EP2540142A2 Radioactive ray generating apparatus and radioactive ray imaging system
01/02/2013CN102859442A Collector mirror assembly and method for producing extreme ultraviolet radiation
01/02/2013CN101785368B Radiation source
12/2012
12/26/2012EP2538759A1 Extreme-ultraviolet light source device and method for generating extreme-ultraviolet light
12/25/2012US8338808 Ultraviolet radiation lamp and source module and treatment system containing same
12/20/2012WO2012173266A1 Extreme ultraviolet light generation system
12/20/2012WO2012173166A2 System and method for generating extreme ultraviolet light
12/13/2012WO2012170144A1 Systems and methods for buffer gas flow stabilization in a laser produced plasma light source
12/13/2012WO2012168670A1 Method and arrangement for generating a jet of fluid, method and system for transforming the jet into plasma, and uses of said system
12/13/2012WO2012107815A3 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light
12/13/2012CA2838469A1 Method and arrangement for generating a jet of fluid, method and system for transforming the jet into plasma, and uses of said system
12/12/2012EP2533078A1 Radiation source and lithographic apparatus
12/12/2012CN102823330A EUV radiation source and EUV radiation generation method
12/12/2012CN102819194A Radiation source and lithographic apparatus
12/05/2012CN101779524B Lithographic apparatus and device manufacturing method
12/05/2012CN101569243B Reducing fast ions in a plasma radiation source
12/04/2012US8324600 Apparatus and method for measuring and controlling target trajectory in chamber apparatus
11/2012
11/28/2012CN101606442B Plasma radiation source with axial magnetic field
11/27/2012US8319200 Radiation source, lithographic apparatus and device manufacturing method
11/22/2012DE102011076011A1 Reflektives optisches Element und optisches System für die EUV-Lithographie The reflective optical element and optical system for EUV lithography
11/21/2012CN102792782A Radioactive ray generating apparatus and radioactive ray imaging system
11/15/2012US20120288065 Compact Coherent Current and Radiation Source
11/15/2012DE102011086565A1 Collector used in projection exposure system, for aligning extreme UV (EUV) radiation of EUV laser plasma source, has sub unit whose passage opening feeds material from plasma source feed device and adapts to scattering of trajectories
11/13/2012US8308198 Water-based fluorescent ink, recorded image using the same, and judging method
11/08/2012US20120280149 Euv radiation source comprising a droplet accelerator and lithographic apparatus
11/08/2012US20120280148 Euv radiation source and lithographic apparatus
11/01/2012WO2012148272A1 Method and system for generating electromagnetic radiation
11/01/2012WO2012118280A3 Apparatus for generating stabilized extreme ultraviolet light using plasma
11/01/2012WO2012114178A3 Optical device, laser apparatus, and extreme ultraviolet light generation system
11/01/2012WO2012085638A3 Laser apparatus and extreme ultraviolet light generation system including the laser apparatus
10/2012
10/31/2012EP2519082A1 Method and system for generating electromagnetic radiation
10/24/2012EP2514279A1 Metrology for extreme ultraviolet light source
10/24/2012CN101868112B Parallel wire-array Z-pinch load
10/24/2012CN101802716B Lithographic apparatus and device manufacturing method
10/23/2012US8294129 Extreme ultraviolet light source apparatus
10/17/2012EP2510760A2 Apparatus and method for generating x-ray using electron cyclotron resonance ion source
10/17/2012CN102736450A Metallic target generator without vibrating rod
10/11/2012WO2012136343A1 Droplet dispensing device and light source comprising such a droplet dispensing device
10/09/2012US8284898 Interleaving multi-energy X-ray energy operation of a standing wave linear accelerator
10/04/2012WO2012134736A1 System and method for compensating for thermal effects in an euv light source
10/04/2012WO2012133720A1 Extreme ultraviolet light generation apparatus
10/04/2012WO2012132803A1 Extreme ultra violet light source device
10/04/2012WO2012132156A1 X-ray generating apparatus and method of controlling x-ray generating apparatus
10/04/2012WO2012131452A1 Laser apparatus, extreme ultraviolet light generation system, and method for generating laser team
10/04/2012WO2012131450A1 Laser device, laser apparatus, and extreme ultraviolet light generation system
10/04/2012DE102011082821A1 Extreme-UV radiation source for use in e.g. reflectometer of projection exposure system for extreme UV-lithography to manufacture memory chip, has overlapping device arranged in optical path to overlap electronic radiation with light rays
10/03/2012CN102714911A EUV radiation source and lithographic apparatus
09/2012
09/27/2012WO2012127290A1 Apparatus and method for generating extreme ultraviolet light
09/26/2012CN102696283A EUV radiation source comprising a droplet accelerator and lithographic apparatus
09/13/2012US20120228525 System and method for generating extreme ultraviolet light
09/13/2012DE102011082043A1 Mirror for collector of extreme UV light source used in projection exposure system, has layer arrangement whose average sputtering rate with respect to particle energies of tin particle is set to specific range at specific time period
09/12/2012EP2498275A2 EUV light source, EUV exposure system, and production method for semiconductor device
09/07/2012WO2012118280A2 Apparatus for generating stabilized extreme ultraviolet light using plasma
09/06/2012US20120223256 Systems and methods for optics cleaning in an euv light source
09/05/2012EP2494854A1 Electrode system, in particular for gas discharge light sources
09/05/2012CN101932187B Method for generating plesiochronous higher harmonic or X-ray radiation through laser secondary excitation
09/04/2012US8256441 Method for cleaning optical element of EUV light source device and optical element cleaning device
08/2012
08/30/2012WO2012114178A2 Optical device, laser apparatus, and extreme ultraviolet light generation system
08/30/2012DE102011090083A1 Device for suppressing solid particle portions carried with effective radiation along optical path in light source system of e.g. metrology system, has deflection device comprising electrodes for deflecting solid particle portions from path
08/28/2012US8253123 Method and device for generating EUV radiation or soft X-rays with enhanced efficiency
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