| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 03/28/2002 | DE10047779A1 Method for converting laser beams into X-rays like EUV rays uses amplitude/phase-modulated sub-nanosecond impulses to create plasma that has high radiation conversion efficiency and is generated by the laser beams. |
| 03/27/2002 | EP1036488B1 Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
| 03/21/2002 | WO2001070627A3 Hydrogen catalysis |
| 03/20/2002 | EP1188165A1 Parallel x-ray nanotomography |
| 03/12/2002 | US6356618 Extreme-UV electrical discharge source |
| 03/12/2002 | US6356570 Source of intense coherent high frequency radiation |
| 03/07/2002 | WO2002019781A1 Electromagnetic radiation generation using a laser produced plasma |
| 03/05/2002 | US6353232 Holder assembly system and method in an emitted energy system for photolithography |
| 02/28/2002 | WO2001078469A3 Z-pinch plasma x-ray source using surface discharge preionization |
| 02/27/2002 | EP1182912A1 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
| 02/21/2002 | US20020021430 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 02/19/2002 | CA2023410C Device for generating x-radiation with a plasma source |
| 02/07/2002 | WO2002011499A1 Method and apparatus for generating x-ray or euv radiation |
| 02/07/2002 | US20020015473 Method and apparatus for generating X-ray or EUV radiation |
| 02/07/2002 | US20020014599 Plasma focus light source with tandem ellipsoidal mirror units |
| 02/07/2002 | US20020014598 Plasma focus light source with active and buffer gas control |
| 02/06/2002 | EP1177713A1 System and method for providing a lithographic light source for a semiconductor manufacturing process |
| 02/06/2002 | CN1334748A Electron beam multistage accelerator driven probe device |
| 01/31/2002 | WO2002008787A2 Method and apparatus for the production of so called 'fractional hydrogen' and associated production of photon energy |
| 01/24/2002 | WO2002007484A2 Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it |
| 01/24/2002 | US20020009176 X-ray exposure apparatus |
| 01/23/2002 | EP1173874A1 Plasma gun and methods for the use thereof |
| 01/15/2002 | US6339634 Soft x-ray light source device |
| 01/10/2002 | US20020003858 Optical sample X-ray testing apparatus and method for testing optical sample with X-rays |
| 01/09/2002 | EP1170982A1 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 01/03/2002 | WO2002001926A1 Pulsable device with an arrangement for producing radiation and method for producing radiation |
| 01/03/2002 | US20020001363 X-ray sources that maintain production of rotationally symmetrical x-ray flux during use |
| 01/02/2002 | EP1168895A1 Pulse device with a system for radiation generation and method for radiation generation |
| 12/27/2001 | WO2001099143A1 Plasma focus light source with tandem ellipsoidal mirror units |
| 12/27/2001 | WO2001042855A3 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 12/27/2001 | US20010055364 High-intensity sources of short-wavelength electromagnetic radiation for microlithography and other uses |
| 12/20/2001 | WO2001097575A1 Extreme-uv electrical discharge source |
| 12/18/2001 | US6332017 System and method for producing pulsed monochromatic X-rays |
| 12/13/2001 | WO2001095362A1 Plasma focus light source with active and buffer gas control |
| 12/13/2001 | DE10027149A1 Device for x-ray radiography has portable laser- or electron-induced x-ray source of lateral dimension less than 100 microns, x-ray pulse length shorter than 10 picoseconds |
| 12/06/2001 | WO2001070627A9 Hydrogen catalysis |
| 12/04/2001 | US6327339 Industrial x-ray/electron beam source using an electron accelerator |
| 12/04/2001 | US6327338 Replaceable carbridge for an ECR x-ray source |
| 11/29/2001 | WO2001091523A2 Extreme ultraviolet source based on colliding neutral beams |
| 11/28/2001 | EP1157597A1 Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 11/28/2001 | EP1157596A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 11/28/2001 | EP1157595A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 11/27/2001 | US6324256 Liquid sprays as the target for a laser-plasma extreme ultraviolet light source |
| 11/27/2001 | US6324255 X-ray irradiation apparatus and x-ray exposure apparatus |
| 11/22/2001 | US20010042839 Holder assembly system and method in an emitted energy system for photolithography |
| 11/21/2001 | EP1155419A1 "x-ray microscope having an x-ray source for soft x-rays |
| 11/20/2001 | US6320937 Method and apparatus for continuously generating laser plasma X-rays by the use of a cryogenic target |
| 11/15/2001 | WO2001086763A1 A device and a method for the generation of coherent x-ray radiation |
| 11/14/2001 | EP1016092A4 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 11/13/2001 | US6316776 Charged particle beam apparatus and method for operating the same |
| 11/07/2001 | CN1320840A Shield nozzle for control of gas spray in super ultraviolet light source |
| 10/31/2001 | EP1150169A2 Gas jet nozzle for extreme ultraviolet light source |
| 10/24/2001 | EP1148769A2 Photon generator |
| 10/24/2001 | EP1146931A1 Electron beam multistage accelerator driven probe device |
| 10/24/2001 | CN1318970A Photon generator |
| 10/23/2001 | US6307913 Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation |
| 10/18/2001 | WO2001078469A2 Z-pinch plasma x-ray source using surface discharge preionization |
| 10/17/2001 | CA2342567A1 Photon generator |
| 10/16/2001 | US6304630 Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 10/09/2001 | US6300720 Plasma gun and methods for the use thereof |
| 09/27/2001 | WO2001070627A2 Hydrogen catalysis |
| 09/27/2001 | WO2000058989A8 Plasma gun and methods for the use thereof |
| 09/27/2001 | CA2400788A1 Hydrogen catalysis |
| 09/11/2001 | CA2229170C Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof |
| 09/04/2001 | US6285743 Method and apparatus for soft X-ray generation |
| 08/28/2001 | US6280906 Method of imaging a mask pattern on a substrate by means of EUV radiation, and apparatus and mask for performing the method |
| 08/14/2001 | US6275565 Laser plasma light source and method of generating radiation using the same |
| 08/01/2001 | EP1119870A1 X-ray scanning method and apparatus |
| 08/01/2001 | CN1306673A Discharge lamp source appts and method |
| 07/25/2001 | EP1010184A4 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 07/25/2001 | EP0938396A4 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 07/25/2001 | EP0868835B1 Method and device for characterising an ionised medium using an electromagnetic radiation source having an ultrashort duration |
| 07/05/2001 | WO2001049087A1 Method of generating euv radiation, method of manufacturing a device by means of said radiation, euv radiation source unit, and lithographic projection apparatus provided with such a radiation source unit |
| 07/05/2001 | WO2001049086A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 07/05/2001 | WO2001049085A1 Method of generating extremely short-wave radiation, method of manufacturing a device by means of said radiation, extremely short-wave radiation source unit and lithographic projection apparatus provided with such a radiation source unit |
| 07/05/2001 | US20010006217 Method of generating extremely short-wave radiation, and extremely short-wave radiation source unit |
| 06/28/2001 | WO2001046962A1 'x-ray microscope having an x-ray source for soft x-rays |
| 06/21/2001 | US20010004104 Radiation source for use in lithographic projection apparatus |
| 06/20/2001 | EP1109427A2 Radiation source for use in lithographic projection apparatus |
| 06/20/2001 | CN1300179A Laser plasma soft X-ray source with jet target |
| 06/14/2001 | WO2001042855A2 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 05/29/2001 | US6240163 Radiation E.G. X-ray pulse generator mechanisms |
| 05/25/2001 | WO2001037618A1 Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography |
| 05/25/2001 | WO2001037309A1 Plasma focus light source with improved pulse power system |
| 05/16/2001 | EP1100113A2 Dielectric barrier discharge lamp |
| 05/15/2001 | US6232613 Debris blocker/collector and emission enhancer for discharge sources |
| 05/03/2001 | WO2001031678A1 Method and radiation generating system using microtargets |
| 05/01/2001 | US6226354 Short-wavelength electromagnetic-radiation generator |
| 04/26/2001 | WO2001030122A1 Production of a dense mist of micrometric droplets in particular for extreme uv lithography |
| 04/10/2001 | US6215851 High current proton beam target |
| 04/04/2001 | CN1290415A Apparatus for photoreaction |
| 03/27/2001 | US6207951 Method of generating a pulsed metastable atom beam and pulsed ultraviolet radiation and an apparatus therefor |
| 03/21/2001 | EP1048050A4 A source of intense coherent high frequency radiation |
| 03/15/2001 | WO2001019143A1 Time-gated imaging with a split-beam source |
| 03/14/2001 | EP1082727A2 Method and apparatus for the production of neutrons and other particles |
| 03/13/2001 | US6201851 Internal target radiator using a betatron |
| 03/06/2001 | US6198804 Electron beam multistage accelerator |
| 02/27/2001 | US6194733 Method and apparatus for adjustably supporting a light source for use in photolithography |
| 02/21/2001 | EP1077019A1 X-ray source and use in radiography |
| 02/20/2001 | US6190835 A coaxial shielding fluid is produced around the process fluid plume. a plasma is generated by providing an energy source that impinges on the process fluid plume. |