| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 06/24/2010 | US20100158198 Eyewear for patient prompting |
| 06/23/2010 | EP2199857A1 Radiation source, lithographic apparatus and device manufacturing method |
| 06/23/2010 | EP2198676A1 High voltage electrical connection line |
| 06/23/2010 | EP2198675A1 Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device |
| 06/23/2010 | EP2198674A1 Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation |
| 06/16/2010 | EP1384394B1 Method for the generation of far ultraviolet or soft x-ray radiation |
| 06/15/2010 | CA2436879C System and method for generating microfocused laser-based x-rays for mammography |
| 06/10/2010 | WO2010063820A1 Device for generating a secondary source by laser-matter interaction, including an optical device for monitoring the direction and the position of a moving surface |
| 06/10/2010 | US20100140513 Extreme ultraviolet light source apparatus |
| 06/09/2010 | EP2193525A1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 06/08/2010 | US7734014 Extreme UV and soft X ray generator |
| 06/02/2010 | EP2191698A2 Radiation source |
| 06/01/2010 | USRE41362 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/27/2010 | DE102009044426A1 Extremultraviolett-Lichtquelleneinrichtung und Verfahren zum Steuern einer Extremultraviolett-Lichtquelleneinrichtung Extreme ultraviolet light source device and method for controlling an extreme ultraviolet light source device |
| 05/19/2010 | EP2187711A2 Inductively-driven plasma light source |
| 05/19/2010 | EP2186386A1 Lithographic apparatus and device manufacturing method |
| 05/19/2010 | CN101711376A multiplexing of pulsed sources |
| 05/06/2010 | US20100111246 X-Ray Beam Processor |
| 05/06/2010 | DE102009045703A1 Laservorrichtung und Extrem-Violett-Lichtquellenvorrichtung Laser device and extreme ultra-violet light source apparatus |
| 05/05/2010 | EP2182412A1 Radiation source and lithographic apparatus |
| 04/29/2010 | WO2010026317A3 Amplifying optical cavity of the fabry-perot type |
| 04/29/2010 | DE102009029605A1 Extremultraviolett-Lichtquellenvorrichtung, Laserlichtquelleneinrichtung für eine Extremultraviolett-Lichtquellenvorrichtung und Verfahren zur Einstellung einer Laserlichtquelleneinrichtung für eine Extremultraviolett-Lichtquellenvorrichtung Extreme ultraviolet light source device, laser light source device for an extreme ultraviolet light source device and method for adjusting a laser light source device for an extreme ultraviolet light source device |
| 04/29/2010 | DE102008031650B4 Anordnung zur Debrisunterdrückung in einer plasmabasierten Strahlungsquelle zur Erzeugung kurzwelliger Strahlung Arrangement for Debrisunterdrückung in a plasma-based radiation source for generating short-wave radiation |
| 04/27/2010 | US7705334 Extreme ultraviolet radiation source device |
| 04/27/2010 | US7705333 Extreme ultra violet light source apparatus |
| 04/22/2010 | WO2010043296A1 Electrostatic ion compressor |
| 04/21/2010 | EP2177091A1 Lithographic apparatus and device manufacturing method |
| 04/14/2010 | EP1886542B1 Gas discharge source, in particular for euv radiation |
| 04/08/2010 | DE102008049494A1 Verfahren und Anordnung zum Betreiben von plasmabasierten kurzwelligen Strahlungsquellen Method and apparatus for driving plasma-based short-wave radiation sources |
| 04/06/2010 | US7692169 Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus |
| 03/31/2010 | EP2170021A2 Source module, radiation source and lithographic apparatus |
| 03/31/2010 | EP2170020A1 Extreme ultraviolet light source device and method for generating extreme ultraviolet radiation |
| 03/31/2010 | CN101690419A Lithographic apparatus and device manufacturing method |
| 03/31/2010 | CN101689030A Debris prevention system, radiation system, and lithographic apparatus |
| 03/30/2010 | US7688948 Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology |
| 03/30/2010 | US7687788 Debris prevention system, radiation system, and lithographic apparatus |
| 03/25/2010 | DE102006022823B4 Anordnung zur Erzeugung von EUV-Strahlung auf Basis eines Gasentladungsplasmas Arrangement for the generation of EUV radiation based on a gas-discharge plasma |
| 03/24/2010 | EP1332649B1 Method and apparatus for generating x-ray or euv radiation |
| 03/23/2010 | US7683355 Extreme ultra violet light source apparatus |
| 03/23/2010 | US7683354 Water treating reactor for the drinkability thereof |
| 03/18/2010 | DE102005025624B4 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas Arrangement for the generation of intense short-wave radiation based on a gas discharge plasma, |
| 03/17/2010 | EP2164308A1 X-ray metering apparatus, and x-ray metering method |
| 03/17/2010 | EP2164307A1 Device and method for adjusting collision timing between electron beam and laser light |
| 03/17/2010 | EP2164306A1 High brightness x-ray generating device and method |
| 03/17/2010 | CN100594428C Radiation source, photoetching device and manufacturing method of device |
| 03/11/2010 | WO2010026317A2 Amplifying optical cavity of the fabry-perot type |
| 03/10/2010 | EP2161725A2 Radiation source, lithographic apparatus and device manufacturing method |
| 03/04/2010 | US20100051831 Light source employing laser-produced plasma |
| 03/03/2010 | EP2159638A1 Radiation source and lithographic apparatus |
| 02/25/2010 | WO2010020490A2 X-ray source |
| 02/25/2010 | DE102008038427A1 Röntgenquelle X-ray source |
| 02/24/2010 | EP2157481A2 Radiation source, lithographic apparatus, and device manufacturing method |
| 02/18/2010 | WO2010019068A1 Method for producing x-ray radiation and a device for carrying out said method |
| 02/18/2010 | WO2010017892A1 Radiation source, lithographic apparatus and device manufacturing method |
| 02/18/2010 | US20100038562 Radiation source, lithographic apparatus and device manufacturing method |
| 02/17/2010 | EP2154574A2 Radiation sources and methods of generating radiation |
| 02/11/2010 | DE102008031650A1 Debris filter arrangement for plasma-based radiation source utilized for semiconductor lithography application, has plasma and buffer gas sections, where pressure gradient between sections is adjusted to order of magnitude |
| 02/11/2010 | DE102004063832B4 Anordnung zur Erzeugung eines gepulsten Laserstrahls hoher Durchschnittsleistung Arrangement for generating a pulsed laser beam of high average power |
| 02/04/2010 | WO2010013167A1 Method and device for generating euv radiation or soft x-rays |
| 02/04/2010 | US20100025600 Systems and methods for heating an EUV collector mirror |
| 02/02/2010 | US7655925 Gas management system for a laser-produced-plasma EUV light source |
| 01/21/2010 | WO2010007569A1 Extreme uv radiation generating device comprising a contamination captor |
| 01/21/2010 | WO2010007015A1 Source module of an euv lithographic apparatus, lithographic apparatus, and method for manufacturing a device |
| 01/19/2010 | US7649188 LPP type extreme ultra violet light source apparatus and driver laser for the same |
| 01/19/2010 | US7649187 Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated |
| 01/19/2010 | US7649186 Extreme UV radiation focusing mirror and extreme UV radiation source device |
| 01/14/2010 | WO2010004481A1 Extreme uv radiation generating device comprising a corrosion-resistant material |
| 01/14/2010 | WO2009126770A3 Plasma-based euv light source |
| 01/14/2010 | DE10308174B4 Anordnung zur Debrisreduktion bei einer Strahlungsquelle auf Basis eines Plasmas Arrangement for Debrisreduktion at a radiation source based on a plasma |
| 01/12/2010 | US7646851 Device and method for generating X-rays having different energy levels and material discrimination system |
| 01/05/2010 | US7643609 Secondary X-ray imaging technique for diagnosing a health condition |
| 01/05/2010 | US7642533 Extreme ultraviolet light source |
| 12/30/2009 | WO2009117048A3 System and methods for target material delivery in a laser produced plasma euv light source |
| 12/23/2009 | EP2135258A2 Laser activated micro accelerator platform |
| 12/23/2009 | CN101611351A Radiation system and lithographic apparatus |
| 12/17/2009 | US20090309037 Systems and Methods for Simulating a Vehicle Exhaust Plume |
| 12/16/2009 | CN101606442A Plasma radiation source with axial magnetic field |
| 12/10/2009 | DE10306668B4 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas Arrangement for the generation of intense short-wave radiation based on a plasma |
| 12/09/2009 | EP2131634A1 Charged particle beam decelerating device and method, and x-ray generating apparatus using the same |
| 12/08/2009 | US7630475 Gas discharge source, in particular for EUV radiation |
| 12/02/2009 | CN101595430A Shadowing electrodes for debris suppression in an EUV source |
| 11/26/2009 | WO2009095220A3 Grazing incidence collector for laser produced plasma sources |
| 11/26/2009 | US20090289205 Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device |
| 11/26/2009 | DE102007060807B4 Gasentladungsquelle, insbesondere für EUV-Strahlung Gas discharge source, in particular for EUV radiation |
| 11/18/2009 | CN101584255A Radiation system and lithographic apparatus |
| 11/17/2009 | US7619232 Method and device for producing extreme ultraviolet radiation or soft X-ray radiation |
| 11/12/2009 | WO2009116867A3 A target material, a source, an euv lithographic apparatus and a device manufacturing method using the same |
| 11/11/2009 | EP2115406A2 Laser produced plasma euv light source |
| 11/11/2009 | EP1650786B1 Light source unit, illumination optical apparatus and exposure apparatus |
| 11/10/2009 | US7615767 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 11/05/2009 | US20090274275 Nuclear gauges and related methods of assembly |
| 11/05/2009 | US20090272919 Exreme ultraviolet light source apparatus |
| 11/05/2009 | US20090272917 Radiation source |
| 11/05/2009 | US20090272916 Radiation source and lithographic apparatus |
| 11/03/2009 | US7612353 Lithographic apparatus, contaminant trap, and device manufacturing method |
| 10/29/2009 | US20090267004 Excimer radiation lamp assembly, and source module and fluid treatment system containing same |
| 10/28/2009 | CN101569243A Reducing fast ions in a plasma radiation source |
| 10/22/2009 | US20090262899 Betatron with a yoke made of composite powder |
| 10/21/2009 | EP1532848B1 Gas discharge lamp |
| 10/20/2009 | US7605385 Electro-less discharge extreme ultraviolet light source |