Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05G - X-ray technique › H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma
Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
05/2014
05/13/2014US8723147 Extreme ultraviolet light source with a debris-mitigated and cooled collector optics
05/08/2014WO2014069283A1 Discharge electrode
05/08/2014WO2014069282A1 Foil trap and light-source device having foil trap
05/08/2014WO2014067741A1 Method and apparatus for generating radiation
05/08/2014US20140124685 System and method for generating extreme ultraviolet light, and laser apparatus
05/07/2014CN203590581U 一种紫外线发生器 An ultraviolet generator
05/07/2014CN103782662A 辐射源 Emitter
05/07/2014CN102293061B X-射线窗口 X- ray window
04/2014
04/30/2014DE102012219936A1 EUV-Lichtquelle zur Erzeugung eines Nutz-Ausgabestrahls für eine Projektionsbelichtungsanlage EUV light source for producing a useful output beam for a projection exposure apparatus
04/30/2014DE102010055889B4 Verfahren und Vorrichtung zur Erzeugung kurzwelliger Strahlung mittels einer gasentladungsbasierten Hochfrequenzhochstromentladung Method and apparatus for generating short-wave radiation by means of a gas discharge based high-frequency high-current discharge
04/30/2014CN103765998A Radiation source and lithographic apparatus
04/30/2014CN103765997A Radiation source and method for lithographic apparatus for device manufacture
04/29/2014US8710473 Droplet generation and detection device, and droplet control device
04/29/2014US8710472 Target output device and extreme ultraviolet light source apparatus
04/29/2014US8710471 Projection illumination system for EUV microlithography
04/24/2014WO2014062351A2 Target material supply apparatus for an extreme ultraviolet light source
04/24/2014US20140111635 Extreme ultraviolet light generation apparatus
04/24/2014US20140110609 Systems and methods for optics cleaning in an euv light source
04/24/2014DE102012219064A1 UV-Lichtquelle mit kombinierter Ionisation und Bildung von Excimern UV light source with combined ionization and formation of excimers
04/23/2014EP2721908A1 Extreme ultraviolet light generation system
04/23/2014EP2721907A2 System and method for generating extreme ultraviolet light
04/23/2014CN103748969A Radiation source
04/23/2014CN103748968A Radiation source and lithographic apparatus
04/23/2014CN103748967A Energy sensors for light beam alignment
04/22/2014US8704200 Laser produced plasma EUV light source
04/22/2014US8704199 Alignment of collector device in lithographic apparatus
04/17/2014US20140102875 Target material supply apparatus for an extreme ultraviolet light source
04/16/2014EP2719261A1 Systems and methods for buffer gas flow stabilization in a laser produced plasma light source
04/16/2014EP2719260A1 Method and arrangement for generating a jet of fluid, method and system for transforming the jet into plasma, and uses of said system
04/16/2014CN103733735A Radiation source
04/15/2014US8698115 Light source device and method for generating extreme ultraviolet light
04/15/2014US8698113 Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus
04/10/2014WO2014055308A1 Harsh environment optical element protection
04/10/2014DE102012218076A1 Illumination optics for extreme UV projection lithography, is designed such that any pairs of illumination light sub-bundles which are guided by different channels hit illumination field point during operation of optics
04/09/2014CN103718654A Radiation source and method for lithographic apparatus and device manufacturing method
04/08/2014US8692220 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device
04/03/2014WO2014051891A1 Pre-compensate target material push-out for euv light
04/03/2014WO2014050931A1 X-ray device and structure manufacturing method
04/01/2014US8686381 Source-collector module with GIC mirror and tin vapor LPP target system
03/2014
03/27/2014WO2014044392A1 Euv radiation generating device and operating method therefor
03/27/2014US20140084186 EUV-Strahlungserzeugungsvorrichtung und Betriebsverfahren Dafuer
03/27/2014DE102012217520A1 Strahlführungseinrichtung und Verfahren zum Einstellen des Öffnungswinkels eines Laserstrahls Beam guiding device and method for adjusting the opening angle of a laser beam
03/27/2014DE102012217120A1 EUV-Strahlungserzeugungsvorrichtung und Betriebsverfahren dafür EUV radiation generating device and driving method thereof
03/25/2014US8680496 System and method for germicidal sanitizing of an elevator or other enclosed structure
03/20/2014WO2014042003A1 Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light
03/20/2014US20140077104 Drive laser delivery systems for euv light source
03/18/2014US8675708 Laser oscillation apparatus
03/18/2014US8674328 Remote nanoscale photochemistry using guided emission in nanowires
03/11/2014US8669543 System and method for generating extreme ultraviolet light, and laser apparatus
03/06/2014US20140061512 Target supply device and extreme ultraviolet light generation apparatus
02/2014
02/26/2014EP2700986A1 Device and method for enhancing the intensity of a laser beam
02/26/2014CN203457399U Scrap gathering device and EUV light source system comprising same
02/19/2014CN103592822A Method for raising extreme ultraviolet radiation transfer efficiency and device
02/18/2014US8653492 Target for laser produced plasma extreme ultraviolet light source
02/18/2014US8653491 System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
02/18/2014US8653437 EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods
02/13/2014WO2014024865A1 Target supply apparatus and extreme ultraviolet light generating apparatus
02/13/2014WO2014023660A1 Illumination system for an euv projection lithographic projection exposure apparatus
02/13/2014US20140044235 Apparatus and method to generate x-rays by contact electrification
02/13/2014US20140042653 Control method for target supply device, and target supply device
02/13/2014US20140042343 Laser produced plasma euv light source
02/13/2014DE102012214063A1 Beleuchtungssystem für eine Projektionsbelichtungsanlage für die EUV-Projektionslithographie Illumination system for a projection exposure apparatus for EUV projection lithography
02/12/2014EP2694218A1 Droplet dispensing device and light source comprising such a droplet dispensing device
02/06/2014WO2014019803A1 Method and apparatus for generating radiation
02/06/2014US20140034852 Extreme ultraviolet light generation apparatus
02/06/2014US20140034684 Target supply apparatus, control system, control apparatus and control circuit thereof
02/06/2014DE102012113007B3 Method for controlling discharge plasma radiation source based on pulsed radiation stabilization, involves determining calibration function if deviation value between statistical value and reference value exceeds preset tolerance range
02/05/2014EP2693848A1 X-ray generating apparatus and method of controlling x-ray generating apparatus
02/05/2014EP2692213A1 System and method for compensating for thermal effects in an euv light source
02/05/2014EP2692212A1 Extreme ultraviolet light generation apparatus
02/05/2014EP2692030A1 Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam
02/05/2014CN103561534A Ultraviolet light generator
01/2014
01/30/2014WO2014016139A1 Euv light source
01/30/2014DE102013010589A1 Acceleration of ions used in e.g. cancer therapy, involves injecting gaseous mixture containing gas component containing hydrogen by nozzle into vacuum, irradiating pulsed laser light to gaseous mixture, ionizing, and accelerating
01/21/2014US8633459 Systems and methods for optics cleaning in an EUV light source
01/09/2014WO2014006427A1 Tunable converging gamma ray beam
01/09/2014WO2014006193A1 Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method
01/09/2014US20140008554 Extreme ultraviolet light source apparatus
01/08/2014EP2682695A1 Device and method for extruding a solid body
01/08/2014EP2681164A1 Systems and methods for optics cleaning in an euv light source
01/03/2014WO2014000998A1 Photon source, metrology apparatus, lithographic system and device manufacturing method
01/02/2014US20140001369 Chamber apparatus and extreme ultraviolet light generation system
01/01/2014EP2679078A2 Optical device, laser apparatus, and extreme ultraviolet light generation system
01/01/2014CN103493604A X-ray generating device and method for controlling x-ray generating device
12/2013
12/27/2013WO2013190944A1 Extreme ultraviolet light generation system
12/24/2013DE102012012492A1 Method for generating laser-excited particle radiation in mega electron volt-range, involves forming particle radiation and electromagnetic secondary radiation from plasma, where secondary radiation is time-synchronizingly delayed
12/19/2013WO2013186052A1 Euv excitation light source with a laser beam source and a beam guiding device for manipulating the laser beam
12/19/2013DE102013202372A1 Method for preparing electromagnetic wave-diffracting structure of wavefront source, involves applying beam of charged or uncharged particles on substrate, and removing material of basic structure on substrate
12/18/2013EP2673856A2 Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light
12/12/2013WO2013107686A3 Source-collector device, lithographic apparatus, and device manufacturing method
12/12/2013US20130327955 Radiation source, lithographic apparatus and device manufacturing method
12/12/2013DE102012209837A1 EUV-Anregungslichtquelle mit einer Laserstrahlquelle und einer Strahlführungsvorrichtung zum Manipulieren des Laserstrahls EUV excitation light source having a laser beam source and a beam guiding device for manipulating the laser beam
12/12/2013DE102012109809B3 Device for producing extreme UV radiation based on gas discharge plasma, has stripper including blowing elements i.e. grooves, and boundary at legs so that stripper is axially adjustable, where grooves are formed in rotation direction
12/10/2013US8604453 Extreme ultraviolet light source apparatus and method of generating ultraviolet light
12/10/2013US8604451 Target supply apparatus
12/05/2013WO2013180007A1 Extreme uv light generation device and extreme uv light generation system
12/04/2013CN103430631A X-ray generating apparatus and method of controlling x-ray generating apparatus
12/03/2013US8598552 System and method to optimize extreme ultraviolet light generation
12/03/2013US8598551 EUV radiation source comprising a droplet accelerator and lithographic apparatus
12/03/2013US8598549 EUV optics
1 2 3 4 5 6 7 8 9 10 11 12 13 ... 25