| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
|---|
| 11/24/2005 | US20050259787 System and method for monochromatic x-ray beam therapy |
| 11/24/2005 | US20050258768 Method and arrangement for the plasma-based generation of intensive short-wavelength radiation |
| 11/24/2005 | DE102004021336A1 Optical characteristic recovery method of optical element e.g. light transmissive window of ultraviolet lamp, involves forming vacuum region of activity energy existence, at side of photo-irradiation surface of optical system |
| 11/23/2005 | EP1485936B1 A device for generating x-rays having a liquid metal anode |
| 11/22/2005 | US6968038 Apparatus and method for generating high-order harmonic X-ray, and point-diffraction interferometer using high-order harmonic X-ray |
| 11/22/2005 | US6967341 Method and device for the generation of far ultraviolet or soft x-ray radiation |
| 11/17/2005 | US20050254535 Apparatus, system, and method for generating phase-locked harmonic RF source from an optical pulse train |
| 11/17/2005 | US20050254534 Apparatus, system, and method for frequency stabilized mode-locked laser |
| 11/17/2005 | US20050253092 Radiation source, lithographic apparatus, and device manufacturing method |
| 11/15/2005 | US6965117 Extreme UV light source and semiconductor exposure device |
| 11/03/2005 | US20050243966 X-ray transmissive optical mirror apparatus |
| 11/01/2005 | US6961408 Device for generating X-rays having a liquid metal anode |
| 10/27/2005 | WO2005101926A2 Apparatus, system, and method for high flux, compact compton x-ray source |
| 10/27/2005 | WO2005101925A2 Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity |
| 10/27/2005 | WO2005101924A1 Method and device for obtaining euv radiation from a gas-discharge plasma |
| 10/27/2005 | US20050236954 Microcavity discharge device |
| 10/27/2005 | DE102005011592A1 System und Verfahren zur Röntgenstrahlerzeugnung System and method for X-ray beam generating drying |
| 10/26/2005 | EP1589792A2 Light source apparatus and exposure apparatus having the same |
| 10/20/2005 | US20050230645 Extreme ultraviolet light source |
| 10/18/2005 | US6956885 Electromagnetic radiation generation using a laser produced plasma |
| 10/13/2005 | WO2005096680A1 Light source unit, illumination optical device and exposing method |
| 10/13/2005 | WO2005094318A2 Morphology and spectroscopy of nanoscale regions using x-rays generated by laser produced plasma |
| 10/13/2005 | US20050226383 Apparatus, system, and method for high flux, compact compton x-ray source |
| 10/13/2005 | DE10256663B3 Gasentladungslampe für EUV-Strahlung Gas discharge lamp for EUV radiation |
| 10/12/2005 | CN1222829C Lithography device which uses source of radiation in the extreme ultraviolet range and multi-layered mirrors with broad spectral band in this range |
| 10/06/2005 | WO2005091879A2 Euv light source |
| 10/06/2005 | WO2004081503A3 Discharge produced plasma euv light source |
| 10/06/2005 | DE10305701B4 Anordnung zur Erzeugung von EUV-Strahlung mit hohen Repetitionsraten Arrangement for the generation of EUV radiation with high repetition rates |
| 10/05/2005 | CN1678163A System and method for X-ray generation |
| 09/29/2005 | WO2005089131A2 Lpp euv light source |
| 09/29/2005 | WO2005089130A2 A high repetition rate laser produced plasma euv light source |
| 09/29/2005 | US20050213710 System and method for laser X-ray generation |
| 09/29/2005 | US20050213708 System and method for X-ray generation |
| 09/29/2005 | US20050211910 Morphology and Spectroscopy of Nanoscale Regions using X-Rays Generated by Laser Produced Plasma |
| 09/28/2005 | CN1674205A Plasma focus light source with impoved pulse power system |
| 09/22/2005 | US20050207536 X-ray-generating devices and exposure apparatus comprising same |
| 09/22/2005 | US20050207527 Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method |
| 09/22/2005 | US20050205811 LPP EUV light source |
| 09/22/2005 | US20050205810 High repetition rate laser produced plasma EUV light source |
| 09/22/2005 | US20050205803 Light source device and exposure equipment using the same |
| 09/20/2005 | US6946669 Arrangement for the generation of EUV radiation with high repetition rates |
| 09/15/2005 | US20050200304 Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources |
| 09/15/2005 | US20050199829 EUV light source |
| 09/14/2005 | EP1574116A2 Device and method for the creation of droplet targets |
| 09/07/2005 | EP1570507A2 Gas discharge lamp for euv radiation |
| 09/01/2005 | WO2005081372A2 Laser multiplexing |
| 08/31/2005 | CN1663326A Method and arrangement for producing radiation |
| 08/31/2005 | CN1217560C Extreme ultraviolet source based on colliding neutral beams |
| 08/25/2005 | US20050184248 EUV light spectrum measuring apparatus and calculating method of EUV light intensity |
| 08/25/2005 | DE102004005242A1 Process for the generation of intensive short wavelength plasma emissions for EUV lithography |
| 08/25/2005 | DE102004005241A1 Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung Method and apparatus for plasma-based generation of soft X-rays |
| 08/24/2005 | EP1566663A2 EUV light spectrum measuring apparatus and calculating method of EUV light intensity |
| 08/23/2005 | US6933683 Microwave powered lamphead having external shutter |
| 08/23/2005 | US6933515 Laser-produced plasma EUV light source with isolated plasma |
| 08/23/2005 | US6933510 Radiation source, lithographic apparatus, and device manufacturing method |
| 08/18/2005 | US20050178985 Injection pinch discharge extreme ultraviolet source |
| 08/18/2005 | US20050178979 Light generator and exposure apparatus |
| 08/18/2005 | DE102004003854A1 Verfahren und Vorrichtungen zur Erzeugung fester Filamente in einer Vakuumkammer Methods and apparatus for producing solid filaments in a vacuum chamber |
| 08/16/2005 | US6931099 High-energy X-ray imaging device and method therefor |
| 08/16/2005 | US6931049 Laser plasma generation method and system |
| 08/11/2005 | WO2005026650A3 Plasma flare ir and uv emitting devices |
| 08/11/2005 | US20050175153 Device for generating x-rays having a liquid metal anode |
| 08/11/2005 | US20050175149 Capillary tubing |
| 08/09/2005 | US6927405 Method for obtaining an extreme ultraviolet radiation source, radiation source and use in lithography |
| 08/04/2005 | WO2005072029A1 Undulator |
| 08/04/2005 | WO2005072027A2 Methods and devices for the production of solid filaments in a vacuum chamber |
| 08/04/2005 | US20050169429 Method and arrangement for the plasma-based generation of soft x-radiation |
| 08/04/2005 | US20050167618 Light source device and exposure equipment using the same |
| 08/04/2005 | US20050167617 Method of generating extreme ultraviolet radiation |
| 08/04/2005 | DE10310623B4 Verfahren und Vorrichtung zum Erzeugen eines Plasmas durch eletrische Entladung in einem Entladungsraum Method and apparatus for generating a plasma by eletrische discharge in a discharge space |
| 08/03/2005 | CN1650676A Method of generating extreme ultraviolet radiation |
| 08/02/2005 | US6924600 Laser plasma generation method and structure thereof |
| 07/28/2005 | WO2005015962A3 Plasma radiation source and device for creating a gas curtain for plasma radiation sources |
| 07/28/2005 | DE10361908A1 Pulse electric current generating apparatus used in microchip manufacture, has capacitor bank comprised of two capacitors, for producing high voltage for discharge |
| 07/28/2005 | DE10359464A1 Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung Method and apparatus for generating in particular EUV radiation and / or soft X-rays |
| 07/26/2005 | US6922019 Microwave ion source |
| 07/14/2005 | US20050151455 Extreme ultraviolet source |
| 07/13/2005 | EP1552534A2 Dense plasma focus radiation source |
| 07/07/2005 | US20050147199 Systems and methods for generating images by using monochromatic x-rays |
| 07/07/2005 | DE10357412A1 Equipment intercepting and carrying off fluid target matter from plasma interaction includes provision for size reduction and liquefaction of matter |
| 06/30/2005 | DE10355188A1 Manufacturing method for vacuum tube of synchrotron radiation tube for undulator magnets and "free electron laser", in which several tubular semi-finished products of electrically highly conductive alloy |
| 06/29/2005 | EP1549116A2 Extreme ultraviolet source |
| 06/28/2005 | US6912267 Erosion reduction for EUV laser produced plasma target sources |
| 06/22/2005 | EP1545168A1 X-ray generating device and exposure device |
| 06/16/2005 | WO2005025280A3 Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation |
| 06/16/2005 | US20050129177 Method and arrangement for producing radiation |
| 06/16/2005 | DE10342239A1 Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung Method and device for generating extreme ultraviolet radiation or soft X-rays |
| 06/15/2005 | EP1540999A1 Capillary tubing |
| 06/15/2005 | CN1627191A Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
| 06/14/2005 | US6906788 Lithographic projection apparatus with multiple suppression meshes |
| 06/09/2005 | WO2005029191A3 Method and device for lithography by extreme ultraviolet radiation |
| 06/09/2005 | US20050121624 Lithographic apparatus, illumination system and method for providing a projection beam of EUV radiation |
| 06/08/2005 | EP1538484A1 EUV illumination system and lithographic apparatus |
| 06/08/2005 | EP1537765A1 Liquid trap for receiving liquids in a vacuum device |
| 06/07/2005 | US6903354 Extreme ultraviolet transition oscillator |
| 06/02/2005 | WO2005015602A3 Extreme uv and soft x ray generator |
| 06/02/2005 | US20050115333 Gas flow measurement apparatus and method for EVU light source |
| 06/01/2005 | CN1204591C Plasma focus light source with improved pulse power system |
| 05/26/2005 | WO2005048662A1 Method for generating high-temperature high-density plasma by cusp cross-section pinch |
| 05/25/2005 | EP1532848A1 Gas discharge lamp |