| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 11/28/2013 | WO2013174620A1 Radiation source |
| 11/28/2013 | WO2013174525A1 Method and apparatus for generating electromagnetic radiation |
| 11/28/2013 | WO2013020613A8 Method and device for generating optical radiation by means of elecctrically operated pulsed discharges |
| 11/26/2013 | US8592788 Lithium extreme ultraviolet source and operating method |
| 11/20/2013 | EP2664220A1 Optical resonator with direct geometric access to the optical axis |
| 11/19/2013 | US8586954 Extreme ultraviolet light source apparatus |
| 11/05/2013 | US8575575 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror |
| 10/30/2013 | EP2656456A2 Laser apparatus and extreme ultraviolet light generation system including the laser apparatus |
| 10/29/2013 | US8569724 Induction heated buffer gas heat pipe for use in an extreme ultraviolet source |
| 10/29/2013 | US8569723 Extreme ultraviolet light source apparatus |
| 10/29/2013 | US8569722 Extreme ultraviolet light generation apparatus |
| 10/24/2013 | WO2013127587A3 Source collector apparatus, lithographic apparatus and device manufacturing method |
| 10/17/2013 | WO2013153156A1 All optical high energy radiation source |
| 10/17/2013 | WO2013124101A3 Fuel stream generator, source collector apparatus and lithographic apparatus |
| 10/16/2013 | EP2651196A1 All optical high energy radiation source |
| 10/16/2013 | CN203241699U Liquid metallic target generating device for plasma light source |
| 10/16/2013 | CN103354694A Method and apparatus for reducing debris by using metal liquid drop curtain |
| 10/16/2013 | CN101971100B Lithographic apparatus, plasma source, and reflecting method |
| 10/15/2013 | US8558202 Extreme ultraviolet light source apparatus |
| 10/15/2013 | US8558201 Infrared radiator arrangement for a gas analysis device |
| 10/10/2013 | WO2013149953A1 A method for stabilizing a plasma and an improved ionization chamber |
| 10/09/2013 | EP2648489A1 A method for stabilizing a plasma and an improved ionization chamber |
| 10/09/2013 | EP2646875A1 Optical device, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus |
| 10/03/2013 | WO2013144690A1 Laser apparatus and extreme ultraviolet light generation system |
| 10/03/2013 | WO2013143733A1 Fuel system for lithographic apparatus, euv source,lithographic apparatus and fuel filtering method |
| 10/03/2013 | US20130259204 X-ray generator device |
| 09/26/2013 | WO2013141580A1 Extreme ultraviolet light generating device for stabilization and improving energy efficiency through laser beam correction |
| 09/26/2013 | WO2013141578A1 Apparatus for generating extreme ultraviolet light using plasma |
| 09/25/2013 | EP2641302A1 Slab amplification device, laser apparatus, and extreme ultraviolet light generation system |
| 09/18/2013 | CN101971709B Gas discharge source, in particular for euv-radiation |
| 09/12/2013 | WO2013133135A1 X-ray generation device and x-ray generation method |
| 09/12/2013 | WO2013131706A1 Radiation source and lithographic apparatus |
| 09/12/2013 | WO2013131693A1 Ion capture apparatus, laser produced plasma radiation source, lithographic apparatus |
| 09/12/2013 | US20130234051 Droplet generator with actuator induced nozzle cleaning |
| 09/11/2013 | CN102119583B Method and device for generating EUV radiation or soft X-rays |
| 09/11/2013 | CN102084299B Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device |
| 09/06/2013 | WO2013083335A3 Radiation source |
| 09/05/2013 | DE102010047419B4 Verfahren und Vorrichtung zur Erzeugung von EUV-Strahlung aus einem Gasentladungsplasma Method and apparatus for the generation of EUV radiation from a gaseous discharge plasma |
| 09/04/2013 | CN103281855A Liquid metal target generating device for laser source |
| 09/03/2013 | US8525140 Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system |
| 08/29/2013 | WO2013124101A2 Fuel stream generator, source collector apparatus and lithographic apparatus |
| 08/29/2013 | US20130221247 Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus |
| 08/27/2013 | US8519368 Method and device for generating EUV radiation or soft X-rays |
| 08/27/2013 | US8519366 Debris protection system having a magnetic field for an EUV light source |
| 08/21/2013 | CN103257532A Radiation source and lithographic apparatus |
| 08/21/2013 | CN103257531A Cavity liquid tin target generator for laser plasma pole ultraviolet source |
| 08/20/2013 | US8513630 Extreme ultraviolet light source apparatus |
| 08/15/2013 | WO2013117355A1 Radiation source and lithograpic apparatus |
| 08/15/2013 | US20130207004 Source-collector modules for EUV lithography employing a GIC mirror and a LPP source |
| 08/14/2013 | DE102013002064A1 Quell-kollektor-module für euv-lithographie unter verwendung eines gic-spiegels und einer lpp-quelle Source-collector-module for EUV lithography using a general-gic mirror and an lpp source |
| 08/14/2013 | CN103246176A Isolation chamber for isolating laser produced plasma extreme ultraviolet light source fragments |
| 08/14/2013 | CN102325421B Regulatable X-ray pseudo-thermal light source based on microporous membrane |
| 08/08/2013 | DE102012201557A1 Beam guidance system for focusingly guiding X-ray beam from e.g. carbon dioxide high power laser onto tin droplet for EUV lithography, has mirror, where beam-induced changes of beam guidance properties of mirror are partially compensated |
| 08/07/2013 | CN103237401A Fragment removing system for removing fragments in ultra-violet lithography illumination source of capillary discharge electrode |
| 08/07/2013 | CN103235487A Generation method and generation apparatus for laser plasma extreme ultraviolet light source droplet target |
| 08/06/2013 | US8502178 Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon |
| 08/01/2013 | WO2013110968A1 Extreme ultraviolet light generation apparatus |
| 07/25/2013 | WO2013107660A1 Beam guidance system for the focusing guidance of radiation from a high-power laser light source onto a target and lpp x-ray beam source with a laser light source and such a beam guidance system |
| 07/25/2013 | US20130187065 Extreme ultraviolet light source device and control method for extreme ultraviolet light source device |
| 07/24/2013 | CN103217869A Liquid tin target generator for laser plasma extreme ultraviolet light source |
| 07/18/2013 | WO2013104947A1 Device for controlling laser beam and apparatus for generating extreme ultraviolet light |
| 07/18/2013 | WO2013072165A3 Radiation source device, lithographic apparatus, and device manufacturing method |
| 07/17/2013 | CN103209536A Method for producing soft X ray |
| 06/27/2013 | WO2013092094A1 Radiation source and method for lithographic apparatus and device manufacture |
| 06/27/2013 | DE102011089779A1 Device for suppression of foreign particles carried with light beam from light source system for metrology system, sets axial distance of chopper rotational axis smaller than radius maximum value and greater than radius minimum value |
| 06/20/2013 | US20130153794 Extreme ultraviolet light generation apparatus |
| 06/20/2013 | US20130153792 Droplet generator steering system |
| 06/11/2013 | US8462425 Oscillator-amplifier drive laser with seed protection for an EUV light source |
| 06/11/2013 | US8461560 LPP EUV light source drive laser system |
| 06/06/2013 | WO2013050736A3 High -harmonic optical generator |
| 06/05/2013 | EP2599134A1 High-temperature superconductor magnet system |
| 06/05/2013 | CN102119365B Radiation source, lithographic apparatus and device manufacturing method |
| 06/05/2013 | CN101690419B Lithographic apparatus and device manufacturing method |
| 06/04/2013 | US8455850 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light |
| 05/23/2013 | US20130126762 Extreme ultra violet light source apparatus |
| 05/22/2013 | EP2594118A2 Method and apparatus for synchronized starting of soft x-ray lasers |
| 05/21/2013 | US8445877 Extreme ultraviolet light source apparatus and target supply device |
| 05/15/2013 | EP2592909A2 X-ray generating device |
| 05/15/2013 | CN103108481A Light focusing system anti-pollution protection device |
| 05/15/2013 | CN103108480A Extreme ultraviolet (EUV) light source pollutant collecting device |
| 05/08/2013 | CN102099746B Extreme uv radiation generating device comprising a contamination captor |
| 05/07/2013 | US8436328 Extreme ultraviolet light source apparatus |
| 05/02/2013 | WO2013061051A1 X-ray generation |
| 05/02/2013 | US20130105713 Extreme ultraviolet light generation apparatus |
| 05/02/2013 | US20130105712 Apparatus and method for generating extreme ultraviolet light |
| 05/02/2013 | DE102005020521B4 Verfahren und Anordnung zur Unterdrückung von Debris bei der Erzeugung kurzwelliger Strahlung auf Basis eines Plasmas Method and apparatus for suppressing debris in the generation of short-wave radiation based on a plasma |
| 05/01/2013 | CN103079327A Target-source-pre-shaping-enhanced extreme ultra-violet light generating device |
| 04/30/2013 | US8431916 Radiation source and lithographic apparatus |
| 04/24/2013 | CN103064260A Tin droplet target generation device used for light source of EUV (Extreme Ultraviolet) lithography machine |
| 04/18/2013 | WO2013054163A1 Alignment system and extreme ultraviolet light generation system |
| 04/16/2013 | US8421043 Solid state radiation source array |
| 04/11/2013 | WO2013051338A1 Radiation generating apparatus and radiation generating method |
| 04/11/2013 | WO2013050842A1 System and method for generating extreme ultraviolet light |
| 04/11/2013 | WO2013050736A2 High harmonic optical generator |
| 04/11/2013 | WO2013050212A1 Radiation source |
| 04/11/2013 | WO2013024316A3 Short period undulator |
| 04/11/2013 | DE10361908B4 Anordnung zur Erzeugung impulsförmiger Ströme hoher Repetitionsrate und hoher Stromstärke für gasentladungsgepumpte Strahlungsquellen Arrangement for generating pulsed currents of high repetition rate and high amperage for gas-discharge-pumped radiation sources |
| 04/02/2013 | US8411815 Grazing incidence collector for laser produced plasma sources |
| 03/28/2013 | WO2013041323A1 Radiation source |
| 03/28/2013 | WO2012173166A3 System and method for generating extreme ultraviolet light |