| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 01/15/2009 | WO2009008230A1 Euv light source, euv exposure apparatus and electronic device manufacturing method |
| 01/14/2009 | EP2014141A1 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 01/13/2009 | US7476876 Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems |
| 01/08/2009 | WO2009005061A1 X-ray metering apparatus, and x-ray metering method |
| 01/08/2009 | WO2009005060A1 Device and method for adjusting collision timing between electron beam and laser light |
| 01/08/2009 | WO2009005059A1 High brightness x-ray generating device and method |
| 01/06/2009 | US7473908 Getter and cleaning arrangement for a lithographic apparatus and method for cleaning a surface |
| 01/02/2009 | DE102007020742B3 Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung Arrangement for switching large electric currents through a gas discharge |
| 01/01/2009 | US20090003528 Target location by tracking of imaging device |
| 12/31/2008 | WO2009002161A1 Method for protecting an optical element in a radiation source for electromagnetic radiation with a wavelength in the extreme ultraviolet (xuv) wavelength range, and radiation source |
| 12/24/2008 | CN100446167C Plasma focus light source with impoved pulse power system |
| 12/18/2008 | WO2008152926A1 Euv light source, euv exposure apparatus and semiconductor device manufacturing method |
| 12/16/2008 | US7465946 Alternative fuels for EUV light source |
| 12/09/2008 | US7462850 Radical cleaning arrangement for a lithographic apparatus |
| 12/04/2008 | US20080298552 Method and Device for Generating in Particular Euv Radiation And/or Soft X-Ray Radiation |
| 12/04/2008 | US20080296799 Methods and Devices for the Production of Solid Filaments in a Vacuum Chamber |
| 12/03/2008 | EP1998601A1 Apparatus and method for measuring profile of electronic beam and laser beam |
| 12/02/2008 | US7460646 Device for and method of generating extreme ultraviolet and/or soft-x-ray radiation by means of a plasma |
| 11/27/2008 | DE102004021336B4 Vorrichtung und Verfahren zur Verbesserung optischer Eigenschaften und in der Vorrichtung verwendetes optisches System Apparatus and method for improving optical properties and the device used optical system |
| 11/26/2008 | CN100438717C X-ray generator and photo ionization device using it |
| 11/20/2008 | WO2008140305A1 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 11/20/2008 | DE102007023444A1 Einrichtung zur Erzeugung eines Gasvorhangs für plasmabasierte EUV-Strahlungsquellen Means for generating a gas curtain for plasma-based EUV radiation sources |
| 11/11/2008 | US7449704 EUV light source |
| 11/11/2008 | US7449703 Method and apparatus for EUV plasma source target delivery target material handling |
| 11/04/2008 | US7446329 Erosion resistance of EUV source electrodes |
| 10/30/2008 | WO2008075952A3 Reducing fast ions in a plasma radiation source having a second activation source |
| 10/30/2008 | DE102005034359B4 Verfahren und Vorrichtung zur Bereitstellung fester Filamente in einer Vakuumkammer Method and apparatus for providing fixed filaments in a vacuum chamber |
| 10/28/2008 | US7443956 X-ray transmissive optical mirror apparatus |
| 10/16/2008 | WO2008123301A1 X-ray generator employing hemimorphic crystal |
| 10/16/2008 | WO2008072962A3 Radiation system and lithographic apparatus |
| 10/14/2008 | US7435982 Laser-driven light source |
| 10/09/2008 | WO2008120571A1 Charged particle beam decelerating device and method, and x-ray generating apparatus using the same |
| 10/09/2008 | WO2008119478A1 Radiation source and method for generating electromagnetic radiation |
| 10/02/2008 | WO2008088940A3 Inductively-driven plasma light source with magnetic core |
| 10/02/2008 | WO2008072966A3 Plasma radiation source with axial magnetic field |
| 10/02/2008 | WO2007005414A3 Alternative fuels for euv light source |
| 10/01/2008 | EP1976344A2 Extreme ultraviolet light source device and extreme ultraviolet radiation generating method |
| 10/01/2008 | EP1975983A2 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 09/25/2008 | US20080231215 Undulator |
| 09/24/2008 | EP1972999A2 Foil trap and extreme ultraviolet light source device using the foil trap |
| 09/23/2008 | US7427766 Method and apparatus for producing extreme ultraviolet radiation or soft X-ray radiation |
| 09/17/2008 | EP1969427A1 Lithographic apparatus including a cleaning device and method for cleaning an optical element |
| 09/17/2008 | CN100420352C Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation |
| 09/09/2008 | US7424095 Modular X-ray tube and method of production thereof |
| 09/04/2008 | US20080210889 Extreme ultra violet light source apparatus |
| 09/03/2008 | CN101258783A High efficiency monochromatic X-ray source using an optical undulator |
| 08/28/2008 | US20080203325 Method of Protecting a Radiation Source Producing Euv-Radiation and/or Soft X-Rays Against Short Circuits |
| 08/21/2008 | US20080197297 High repetition rate laser produced plasma EUV light source |
| 08/19/2008 | US7414251 Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system |
| 08/13/2008 | EP1955362A2 Plasma-based euv light source |
| 08/12/2008 | US7411203 EUV light source |
| 08/07/2008 | WO2008074443A3 Method and apparatuses for producing x-ray radiation |
| 08/07/2008 | WO2008072959A3 Radiation system and lithographic apparatus |
| 08/07/2008 | WO2008072959A2 Radiation system and lithographic apparatus |
| 08/07/2008 | US20080185949 Plasma flare IR and UV emitting devices |
| 08/07/2008 | DE102008007387A1 Reflektives optisches Element für EUV-Lithographievorrichtungen The reflective optical element for EUV lithography devices |
| 08/07/2008 | DE102007004440A1 Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter Strahlung mittels einer elektrisch betriebenen Gasentladung Apparatus and method for generating extreme ultraviolet radiation by means of an electrically operated gas discharge |
| 08/06/2008 | EP0895706B2 Method and apparatus for generating x-ray or euv radiation |
| 08/06/2008 | CN101237908A Apparatus for the production of electron beams and x-ray beams for interstitial and intra-operatory radiation therapy |
| 08/05/2008 | US7408179 Transition radiation apparatus and method therefor |
| 07/31/2008 | DE102006060368B3 Verfahren und Anordnung zur Stabilisierung der mittleren abgegebenen Strahlungsleistung einer gepulst betriebenen Strahlungsquelle Method and apparatus for stabilizing the average emitted radiation power of a pulsed radiation source operated |
| 07/29/2008 | US7405416 Method and apparatus for EUV plasma source target delivery |
| 07/24/2008 | WO2008088940A2 Inductively-driven plasma light source with magnetic core |
| 07/24/2008 | WO2008088488A1 Laser produced plasma euv light source |
| 07/15/2008 | US7399981 Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography |
| 07/08/2008 | US7397190 Gas discharge lamp for extreme UV radiation |
| 07/08/2008 | US7397055 Smith-Purcell radiation source using negative-index metamaterial (NIM) |
| 07/03/2008 | US20080157010 Method and Apparatus For Generating Radiation or Particles By Interaction Between a Laser Beam and a Target |
| 07/03/2008 | DE102006060998A1 Verfahren und Vorrichtung zum Erzeugen von Röntgenstrahlung Method and apparatus for generating X-radiation |
| 07/03/2008 | DE102006017904B4 Anordnung zur Erzeugung von extrem ultravioletter Strahlung aus einem energiestrahlerzeugten Plasma mit hoher Konversionseffizienz und minimaler Kontamination Arrangement for the generation of extreme ultraviolet radiation from an energy beam produced plasma with a high conversion efficiency and minimal contamination |
| 07/02/2008 | EP1938671A2 Soft x-ray generator |
| 06/26/2008 | WO2008075952A2 Reducing fast ions in a plasma radiation source having a second activation source |
| 06/26/2008 | WO2008074443A2 Method and apparatuses for producing x-ray radiation |
| 06/26/2008 | US20080152090 Euv Light Source |
| 06/26/2008 | US20080149862 Laser produced plasma EUV light source |
| 06/26/2008 | DE102005030304B4 Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter Strahlung Apparatus and method for generating extreme ultraviolet radiation |
| 06/24/2008 | US7391851 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 06/19/2008 | WO2008072966A2 Plasma radiation source with axial magnetic field |
| 06/19/2008 | WO2008072962A2 Radiation system and lithographic apparatus |
| 06/19/2008 | US20080143228 Extreme Uv and Soft X Ray Generator |
| 06/19/2008 | US20080142741 Radiation system and lithographic apparatus |
| 06/19/2008 | US20080142736 Radiation system and lithographic apparatus |
| 06/18/2008 | EP1931812A1 Targets and processes for fabricating same |
| 06/17/2008 | US7388220 EUV light source |
| 06/12/2008 | WO2008069654A1 Plasma radiation source with rotating electrodes and liquid metal provider |
| 06/12/2008 | WO2008069653A1 Shadowing electrodes for debris suppression in an euv source |
| 06/12/2008 | US20080138588 Generating an assist feature of a lithography mask by providing a layout for a material layer of a semiconductor device, the layout including a pattern for one feature of the semiconductor device; in the pattern for the feature where the assist feature extends completely through the pattern |
| 06/11/2008 | EP1929281A1 Isotopic imaging via nuclear resonance fluorescene with laser-based thomson radiation |
| 06/11/2008 | CN101199240A Method of protecting a radiation source producing EUV-radiation and/or soft X-rays against short circuits |
| 06/10/2008 | US7385212 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 06/10/2008 | US7385211 Method of generating extreme ultraviolet radiation |
| 06/03/2008 | US7382861 High efficiency monochromatic X-ray source using an optical undulator |
| 05/29/2008 | US20080121824 Extreme uv radiation focuing mirror and extreme uv radiation source device |
| 05/28/2008 | CN100391316C Device for and method of generating extreme ultraviolet and/or soft X-ray radiation by means of a plasma |
| 05/22/2008 | US20080116400 Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation |
| 05/15/2008 | WO2008029327A3 Euv plasma discharge lamp with conveyor belt electrodes |
| 05/14/2008 | EP1919560A1 Apparatus for the production of electron beams and x-ray beams for interstitial and intra-operatory radiation therapy |
| 05/14/2008 | CN101180923A Gas discharge source, in particular for EUV radiation |
| 05/13/2008 | US7372059 Plasma-based EUV light source |
| 05/13/2008 | US7372056 LPP EUV plasma source material target delivery system |