Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05G - X-ray technique › H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma
Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
08/2012
08/23/2012DE102011004446A1 Optical element for optical device e.g. projection exposure apparatus, has optically active element that is formed from silicon, and cooling element that is formed of silicon carbide or siliconized silicon carbide
08/16/2012US20120205558 Tools, Methods and Devices for Mitigating Extreme Ultraviolet Optics Contamination
08/15/2012EP2488002A2 Lpp euv light source drive laser system
08/14/2012US8242695 Laser driven light source
08/09/2012WO2012007778A3 Method and apparatus for synchronized starting of soft x-ray lasers
08/08/2012EP1851520B1 Laser produced plasma euv light source
08/02/2012WO2012100846A1 Conduit for radiation, suitable for use in a lithographic apparatus
08/01/2012EP2480936A1 Source collector apparatus, lithographic apparatus and device manufacturing method
07/2012
07/31/2012US8232537 Radiation source, lithographic apparatus and device manufacturing method
07/24/2012US8227779 Gas discharge source for generating EUV-radiation
07/19/2012WO2012095150A1 Optical resonator with direct geometric access to the optical axis
07/18/2012CN102598874A Electrode system, in particular for gas discharge light sources
07/11/2012EP2475229A1 Plasma light source
07/11/2012EP2475228A1 Lpp euv light source and method for producing same
07/11/2012EP2474997A1 Plasma light source system
07/11/2012CN102170086B Device for generating X rays by laser irradiation of solid cone target
07/03/2012US8212228 Extreme ultra violet light source apparatus
06/2012
06/28/2012DE10205189B4 Verfahren zur Erzeugung von extrem ultravioletter Strahlung auf Basis eines strahlungsemittierenden Plasmas A method of generating extreme ultraviolet radiation, based on a radiation-emitting plasma
06/28/2012DE10037439B4 Verfahren und Vorrichtung zur Aktivierung der Radioaktivität von Atomkernen, insbesondere zur Aktivierung kurzlebiger radioaktiver Isotope für medizinische Zwecke Method and apparatus for the activation of the radioactivity of atomic nuclei, in particular for activation of short-lived radioactive isotopes for medical purposes
06/27/2012EP2220915B1 Radiation source, lithographic apparatus and method of producing radiation
06/26/2012US8208602 High flux photon beams using optic devices
06/21/2012DE102010055889A1 Verfahren und Vorrichtung zur Erzeugung kurzwelliger Strahlung mittels einer gasentladungsbasierten Hochfrequenzhochstromentladung Method and apparatus for generating short-wave radiation by means of a gas discharge based high-frequency high-current discharge
06/20/2012EP2465010A1 Euv radiation system and lithographic apparatus
06/14/2012WO2012031607A8 Method of generating enhanced intra-resonator laser light, enhancement resonator and laser device
06/13/2012CN101611351B Radiation system and lithographic apparatus
06/07/2012WO2012073087A1 Optical device, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus
05/2012
05/31/2012WO2012069898A1 Extreme ultraviolet light generation
05/31/2012DE102011055691A1 Kompakter Mammograph und zugehöriges Mammographieverfahren Compact mammography mammography and related method
05/30/2012EP1907804B1 Lpp euv light source drive laser system
05/30/2012EP1899697B1 Euv light source collector lifetime improvements
05/30/2012CN102484938A 等离子体光源 The plasma source
05/30/2012CN102484937A Lpp方式的euv光源及其产生方法 Euv light source and its production method Lpp way
05/30/2012CN102484045A Plasma light source system
05/24/2012WO2012066402A1 Slab amplification device, laser apparatus, and extreme ultraviolet light generation system
05/24/2012US20120126148 Device for Generating a Secondary Source by Laser-Material Interaction Comprising an Optical Device for Controlling the Orientation and the Position of a Surface in Movement
05/24/2012DE112010000850T5 Verfahren und Vorrichtung zum Aufrechterhalten und Erzeugen eines Plasmas Method and apparatus for maintaining and generating a plasma
05/23/2012CN102472981A Euv辐射系统和光刻设备 Euv radiation system and lithography equipment
05/23/2012CN102472975A 光谱纯度滤光片、光刻设备和用于制造光谱纯度滤光片的方法 The spectral purity filter, the spectral purity filter lithographic apparatus and a method for manufacturing
05/16/2012DE102011111244A9 Quellkollektormodul mit GIC-Spiegel- und Xenonflüssigkeits-EUV-LPP-Target-System Source collector module with GIC mirror and xenon liquid EUV LPP target system
05/10/2012DE102010050947A1 Verfahren und Anordnung zur Stabilisierung des Quellortes der Erzeugung extrem ultravioletter (EUV-)Strahlung auf Basis eines Entladungsplasmas Method and system for stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma
05/09/2012EP2449430A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
05/09/2012CN102450108A In-situ plasma/laser hybrid scheme
05/09/2012CN101490790B Method and system for producing X-ray radiation
05/08/2012US8173985 Beam transport system for extreme ultraviolet light source
05/08/2012US8173984 Extreme ultraviolet light source apparatus
05/02/2012CN1778150B X-ray generator employing hemimorphy crystal
04/2012
04/26/2012DE102010015495B4 Vorrichtung zum Erzeugen von UV-Licht Apparatus for producing UV-light
04/25/2012EP2164308B1 X-ray metering apparatus, and x-ray metering method
04/24/2012US8164076 Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light
04/19/2012WO2011141024A3 Generation of short-wave ultrashort light pulses and use thereof
04/19/2012DE102011007828A1 Extreme UV lithography system for use in vacuum housing for bringing perfection to imaging characteristics of projection system, has filling gases and beryllium ions provided in optical path of radiation and including optical element effect
04/17/2012US8158959 Extreme ultraviolet light source apparatus
04/10/2012US8154000 Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources
04/05/2012US20120080584 Euv light source with subsystem(s) for maintaining lpp drive laser output during euv non-output periods
04/05/2012DE102010047419A1 Verfahren und Vorrichtung zur Erzeugung von EUV-Strahlung aus einem Gasentladungsplasma Method and apparatus for the generation of EUV radiation from a gaseous discharge plasma
03/2012
03/29/2012WO2011105035A4 Radioactive ray generating apparatus and radioactive ray imaging system
03/28/2012EP2198674B1 Rotating wheel electrode device for gas discharge sources comprising wheel cover for high power operation
03/28/2012EP1716726B1 Method and device for generating in particular euv radiation and/or soft x-ray radiation
03/27/2012US8143606 Extreme ultra violet light source device
03/22/2012DE10337667B4 Plasma-Strahlungsquelle und Anordnung zur Erzeugung eines Gasvorhangs für Plasma-Strahlungsquellen Plasma radiation source and arrangement for producing a gas curtain for plasma radiation sources
03/21/2012EP2164307B1 Device and method for adjusting collision timing between electron beam and laser light
03/21/2012CN101237908B Apparatus for the production of electron beams and x-ray beams for interstitial and intra-operatory radiation therapy
03/15/2012WO2012031841A1 Lithographic apparatus, euv radiation generation apparatus and device manufacturing method
03/15/2012WO2012031607A1 Method of generating enhanced intra-resonator laser light, enhancement resonator and laser device
03/15/2012WO2012005338A3 X-ray generating device
03/15/2012DE102011111244A1 Quellkollektormodul mit GIC-Spiegel- und Xenonflüssigkeits-EUV-LPP-Target-System Source collector module with GIC mirror and xenon liquid EUV LPP target system
03/07/2012EP2425685A2 In-situ plasma/laser hybrid scheme
03/06/2012US8129700 Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source
03/01/2012US20120050708 Source-collector module with GIC mirror and tin rod EUV LPP target system
03/01/2012US20120050707 Source-collector module with GIC mirror and tin wire EUV LPP target system
03/01/2012US20120050706 Source-collector module with GIC mirror and xenon ice EUV LPP target system
03/01/2012US20120050704 Source-collector module with GIC mirror and xenon liquid EUV LPP target system
03/01/2012DE102011111462A1 Quellkollektormodul mit gic-spiegel und xenon-eis-euv-lpp-target-system Source collector module with gic-mirror-and-ice-xenon euv lpp target system
03/01/2012DE102011111334A1 Quellkollektormodul mit GIC-Spiegel und Zinndraht-EUV-LPP-Target-System Source collector module with GIC mirror and tin wire EUV LPP target system
03/01/2012DE102011111260A1 Quellkollektormodul mit GIC-Spiegel und Zinn-Stab-EUV-LPP-Target-System Source collector module with GIC mirror and tin rod EUV LPP target system
02/2012
02/29/2012EP2014141B1 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
02/23/2012WO2012023853A1 Spectral filter for splitting a beam with electromagnetic radiation having wavelengths in the extreme ultraviolet (euv) or soft x-ray (soft x) and the infrared (ir) wavelength range
02/23/2012DE102005015274B4 Strahlungsquelle zur Erzeugung kurzwelliger Strahlung Radiation source for generating short-wave radiation
02/22/2012EP2420112A2 Monochromatic x-ray methods and apparatus
02/15/2012EP1615482B1 Laser plasma producing method and device
02/02/2012WO2012013205A1 High-temperature superconductor magnet system
02/02/2012WO2011105035A3 Radioactive ray generating apparatus and radioactive ray imaging system
02/01/2012EP2193525B1 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size
01/2012
01/26/2012DE102006036173B4 Verfahren zur Impulsenergieregelung von Gasentladungs-Strahlungsquellen A method for pulse energy control of gas-discharge light sources
01/24/2012US8102968 High brightness X-ray generating device and method
01/24/2012US8101930 Method of increasing the operation lifetime of a collector optics arranged in an irradiation device
01/19/2012WO2012007146A1 Method of improving the operation efficiency of a euv plasma discharge lamp
01/18/2012CN102325421A Regulatable X-ray pseudo-thermal light source based on microporous membrane
01/12/2012WO2012005338A2 X-ray generating device
01/04/2012EP2402789A1 Method and apparatus of precisely measuring intensity profile of x-ray nanobeam
12/2011
12/29/2011US20110318694 Source-collector module with GIC mirror and tin vapor LPP target system
12/29/2011DE102011106249A1 Quellkollektormodul mit GIC-Spiegel und Zinndampf-LPP-Target-System Source collector module with GIC mirror and tin vapor-LPP target system
12/21/2011CN102293061A X-射线窗口 X- ray window
12/21/2011CN102289158A 辐射系统和光刻设备 Radiation system and lithographic apparatus
12/14/2011CN101180923B 气体放电源，特别是euv辐射 Gas discharge source, in particular the radiation euv
11/2011
11/30/2011EP2389789A1 X-ray window
11/29/2011US8067756 Extreme ultraviolet light source apparatus
11/24/2011US20110284731 Gamma-ray detectors for downhole applications
11/23/2011CN102257883A Method and device for generating EUV radiation or soft x-rays with enhanced efficiency
11/23/2011CN102256429A Collector for EUV light source
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