| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 06/22/2006 | WO2006064592A1 Target for extreme ultraviolet light and x-ray source and process for producing the same |
| 06/22/2006 | US20060133575 X-ray needle apparatus and method for radiation treatment |
| 06/22/2006 | US20060133574 Extreme ultraviolet light source and extreme ultraviolet light source target |
| 06/21/2006 | EP1015161B1 Plasma gun and method using the latter |
| 06/15/2006 | US20060126789 Catheter with inflatable balloon assembly and optically activated x-ray source |
| 06/15/2006 | US20060126788 X-ray catheter assembly |
| 06/08/2006 | WO2006059275A2 Method and apparatus for operating an electrical discharge device |
| 06/08/2006 | WO2006017119A3 Inductively-driven plasma light source |
| 06/08/2006 | WO2005089131A3 Lpp euv light source |
| 06/08/2006 | US20060120429 Collector optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 06/08/2006 | DE102004058500A1 Verfahren und Vorrichtung zum Betreiben einer elektrischen Entladevorrichtung Method and apparatus for operating an electrical discharge device |
| 06/07/2006 | EP1665907A2 Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation |
| 06/01/2006 | WO2006056917A1 Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology |
| 06/01/2006 | US20060113498 Gas discharge lamp |
| 05/31/2006 | EP1660946A2 Method and device for lithography by extreme ultraviolet radiation |
| 05/24/2006 | CN1778150A X-ray generator employing hemimorphy crystal and ozone generator employing it |
| 05/23/2006 | US7049614 Electrode in a discharge produced plasma extreme ultraviolet source |
| 05/17/2006 | CN1256794C Apparatus for photoreaction |
| 05/17/2006 | CN1256628C EUV-transparent interface structure |
| 05/11/2006 | WO2006009852A3 Optical elements with protective undercoating |
| 05/11/2006 | US20060098781 Method and apparatus for nanoscale surface analysis using soft X-rays |
| 05/11/2006 | US20060098780 Electron emitter assembly and method for adjusting a size of electron beams |
| 05/10/2006 | EP1654914A2 Extreme uv and soft x ray generator |
| 05/10/2006 | EP1390955A4 Laser plasma from metals and nano-size particles |
| 05/09/2006 | US7041993 Protective coatings for radiation source components |
| 05/04/2006 | US20060093091 Extractor cup on a miniature x-ray tube |
| 04/26/2006 | EP1650786A1 Focusing optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 04/26/2006 | CN1763866A T device and method for synchronous radiation fixed outlet double-crystal monochromator |
| 04/25/2006 | US7034322 Fluid jet electric discharge source |
| 04/20/2006 | DE102004005242B4 Verfahren und Vorrichtung zur plasmabasierten Erzeugung intensiver kurzwelliger Strahlung Method and apparatus for plasma-based production of intense short-wave radiation |
| 04/19/2006 | CN1762183A Device for and method of generating extreme ultraviolet and/or soft X-ray radiation by means of a plasma |
| 04/13/2006 | US20060078089 X-ray generator and exposure apparatus |
| 04/12/2006 | CN1759467A Extreme ultraviolet light source and target for extreme ultraviolet light source |
| 04/11/2006 | US7027553 Systems and methods for generating images by using monochromatic x-rays |
| 04/11/2006 | US7025646 Microcavity discharge device |
| 04/06/2006 | WO2006035748A1 Euv generator |
| 04/06/2006 | US20060071180 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 04/06/2006 | DE102005045460A1 System und Verfahren zur Bildgebung mittels monoenergetischer Röntgenstrahlenquellen System and method for imaging using monoenergetic X-ray sources |
| 04/05/2006 | EP1642482A1 Method and device for producing extreme ultraviolet radiation or soft x-ray radiation |
| 04/05/2006 | CN1250054C Metod and device for generation of far ultraviolet or soft X-ray radiation |
| 04/04/2006 | US7023961 Method and apparatus for generating X-ray |
| 03/30/2006 | WO2005096099A3 Removal of particles generated by a radiation source |
| 03/30/2006 | US20060067476 Rotating shutter for laser-produced plasma debris mitigation |
| 03/23/2006 | DE102004037521A1 Vorrichtung zur Bereitstellung von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung An apparatus for providing a target material for generating short-wave electromagnetic radiation |
| 03/21/2006 | US7016470 System and method for X-ray generation |
| 03/21/2006 | US7016390 Ultrabright tunable coherent multikilovolt x-ray source |
| 03/16/2006 | WO2006029026A2 Shield structure and focal spot control assembly for x-ray device |
| 03/16/2006 | US20060056595 Compact X-ray source and panel |
| 03/16/2006 | US20060054238 Device and method for the creation of droplet targets |
| 03/16/2006 | DE102004042501A1 Vorrichtung zur Bereitstellung eines reproduzierbaren Targetstromes für die energiestrahlinduzierte Erzeugung kurzwelliger elektromagnetischer Strahlung An apparatus for providing a reproducible target current for the energy ray-induced generation of short-wave electromagnetic radiation |
| 03/09/2006 | US20060050850 Shield structure and focal spot control assembly for x-ray device |
| 03/08/2006 | EP1633171A2 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured |
| 03/08/2006 | EP1632113A1 Plasma-based generation of x-ray radiation with a stratiform target material |
| 03/02/2006 | WO2006021552A1 A method and apparatus for generating radiation or particles by interaction between a laser beam and a target |
| 03/02/2006 | DE102004005241B4 Verfahren und Einrichtung zur plasmabasierten Erzeugung weicher Röntgenstrahlung Method and apparatus for plasma-based generation of soft X-rays |
| 03/02/2006 | CA2578133A1 A method and apparatus for generating radiation or particles by interaction between a laser beam and a target |
| 02/23/2006 | US20060039435 Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography |
| 02/23/2006 | DE102004039048A1 Verfahren und Einrichtung zur molekularen Bilderzeugung mit einer molekularen Sonde Method and apparatus for molecular imaging with a molecular probe |
| 02/21/2006 | US7002169 Gas bubbles trapped in liquid reservoirs; high frequency transducer |
| 02/21/2006 | US7002168 Dense plasma focus radiation source |
| 02/16/2006 | DE102004036441A1 Vorrichtung und Verfahren zum Dosieren von Targetmaterial für die Erzeugung kurzwelliger elektromagnetischer Strahlung Apparatus and method for dosing of a target material for generating short-wave electromagnetic radiation |
| 02/14/2006 | US6998787 Method of operating a microcavity discharge device |
| 02/09/2006 | WO2005089130A3 A high repetition rate laser produced plasma euv light source |
| 02/08/2006 | EP1623481A2 Systems and methods for plasma containment |
| 02/07/2006 | US6995382 Arrangement for the generation of intensive short-wave radiation based on a plasma |
| 02/01/2006 | CN1728915A Soft X ray light source of laser plasma for liquid microflow jetting target |
| 01/26/2006 | WO2006009852A2 Optical elements with protective undercoating |
| 01/26/2006 | US20060017026 Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation |
| 01/26/2006 | US20060017023 High flux, high energy photon source |
| 01/25/2006 | EP1059708B1 Apparatus for photoreaction |
| 01/24/2006 | US6989629 Method and apparatus for debris mitigation for an electrical discharge source |
| 01/19/2006 | US20060011864 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 01/18/2006 | CN1721999A Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 01/17/2006 | US6987830 Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method |
| 01/17/2006 | US6987279 Light source device and exposure equipment using the same |
| 01/17/2006 | US6987275 Lithographic apparatus and device manufacturing method |
| 01/11/2006 | EP1615482A1 Laser plasma producing method and device |
| 01/11/2006 | CN1720600A Gas discharge lamp for EUV radiation |
| 01/10/2006 | US6984941 Extreme UV radiation source and semiconductor exposure device |
| 01/05/2006 | WO2006000718A1 Device for generating extreme ultraviolet light and application to an extreme ultraviolet radiation lithography source |
| 01/05/2006 | US20060002515 System for forming x-rays and method for using same |
| 01/04/2006 | EP1612848A1 Extreme ultraviolet light source and target for extreme ultraviolet light source |
| 01/03/2006 | US6982421 Extreme ultraviolet source |
| 12/29/2005 | WO2005072027A3 Methods and devices for the production of solid filaments in a vacuum chamber |
| 12/29/2005 | DE102004028943A1 Vorrichtung zur zeitlich stabilen Erzeugung von EUV-Strahlung mittels eines laserinduzierten Plasmas Apparatus for time-stable generation of EUV radiation by means of a laser-induced plasma |
| 12/27/2005 | US6980625 System and method for generating microfocused laser-based x-rays for mammography |
| 12/22/2005 | WO2005091879A3 Euv light source |
| 12/21/2005 | EP1606980A2 Device for and method of generating extreme ultraviolet and/or soft x-ray radiation by means of a plasma |
| 12/20/2005 | US6977383 Method and apparatus for generating a membrane target for laser produced plasma |
| 12/15/2005 | US20050274912 Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma |
| 12/14/2005 | EP1604552A1 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 12/13/2005 | CA2362890C Plasma gun and methods for the use thereof |
| 12/08/2005 | WO2005081372A3 Laser multiplexing |
| 12/08/2005 | WO2005038822A3 Plasma source of directed beams and application thereof to microlithography |
| 12/08/2005 | US20050271185 Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity |
| 12/07/2005 | EP1602116A2 Discharge produced plasma euv light source |
| 12/06/2005 | US6973164 Laser-produced plasma EUV light source with pre-pulse enhancement |
| 12/06/2005 | US6972421 Extreme ultraviolet light source |
| 11/30/2005 | CN2744123Y Drop target laser plasma soft x ray light source |
| 11/24/2005 | WO2005112525A2 Apparatus, system, and method for frequency stabilized mode-locked laser |