| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 03/05/2015 | WO2015029137A1 Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system |
| 03/05/2015 | WO2015028211A1 Radiation source and lithographic apparatus |
| 03/05/2015 | WO2015028103A1 Beam guiding apparatus and euv radiation generating equipment incorporating same |
| 03/05/2015 | US20150063547 Method for Stabilizing a Plasma and an Improved Ionization Chamber |
| 03/03/2015 | US8969840 Droplet generator with actuator induced nozzle cleaning |
| 03/03/2015 | US8969839 Laser produced plasma EUV light source |
| 03/03/2015 | US8969838 Systems and methods for protecting an EUV light source chamber from high pressure source material leaks |
| 02/26/2015 | WO2015025218A1 Method and device for cooling radiation sources based on a plasma |
| 02/26/2015 | US20150055106 Radiation Source and Lithographic Apparatus |
| 02/26/2015 | DE102013109048A1 Verfahren und Vorrichtung zur Kühlung von Strahlungsquellen auf Basis eines Plasmas Method and apparatus for cooling of radiation sources based on a plasma |
| 02/24/2015 | US8963110 Continuous generation of extreme ultraviolet light |
| 02/17/2015 | US8958143 Master oscillator—power amplifier drive laser with pre-pulse for EUV light source |
| 02/17/2015 | US8957356 System and method for generating extreme ultraviolet light |
| 02/12/2015 | US20150041659 System and Method for Return Beam Metrology with Optical Switch |
| 02/11/2015 | EP2835039A1 A method for stabilizing a plasma and an improved ionization chamber |
| 02/05/2015 | WO2015015922A1 Filter and target supply apparatus |
| 02/05/2015 | WO2015014531A1 Component for a radiation source, associated radiation source and lithographic apparatus |
| 02/05/2015 | US20150034845 Euvl light source system and method |
| 02/05/2015 | US20150034844 System and method for reducing contamination in extreme ultraviolet lithography light source |
| 02/05/2015 | US20150034843 Shade structure |
| 02/05/2015 | DE102013012956A1 Kollektoranordnung für EUV- und/oder weiche Röntgenstrahlung Collector assembly for EUV and / or soft X-rays |
| 02/03/2015 | US8946661 Radiation source, lithographic apparatus and device manufacturing method |
| 02/03/2015 | US8946659 Particle beam transport apparatus and method of transporting a particle beam with small beam spot size |
| 01/29/2015 | WO2015013185A1 System and method for generation of extreme ultraviolet light |
| 01/29/2015 | US20150028231 Laser apparatus |
| 01/28/2015 | CN103246176B 一种用于隔离激光等离子体极紫外光源碎屑隔离腔 A method for the isolation of laser plasma EUV source debris isolation chamber |
| 01/27/2015 | US8941336 Optical characterization systems employing compact synchrotron radiation sources |
| 01/22/2015 | US20150022795 Power supply for a discharge produced plasma euv source |
| 01/20/2015 | US8938048 X-ray generator device |
| 01/15/2015 | US20150015863 Radiation Source and Lithographic Apparatus |
| 01/14/2015 | CN102256429B 一种修复euv光源集光器的方法及装置 A prosthetic euv light collector method and apparatus |
| 01/13/2015 | US8934608 High flux, narrow bandwidth compton light sources via extended laser-electron interactions |
| 01/08/2015 | US20150008345 Extreme ultraviolet light generation apparatus |
| 01/08/2015 | US20150008335 System and method for producing an exclusionary buffer gas flow in an euv light source |
| 01/06/2015 | US8927952 Target for laser produced plasma extreme ultraviolet light source |
| 01/06/2015 | US8927951 Target supply device |
| 01/01/2015 | US20150002830 Radiation source and lithographic apparatus |
| 12/30/2014 | US8921815 Target supply device |
| 12/30/2014 | US8921814 Photon source, metrology apparatus, lithographic system and device manufacturing method |
| 12/25/2014 | US20140376697 Modulated method for efficient, narrow-bandwidth, laser compton x-ray and gamma-ray sources |
| 12/25/2014 | US20140375974 Source-collector device, lithographic apparatus, and device manufacturing method |
| 12/25/2014 | US20140374625 Euv discharge lamp with moving protective component |
| 12/25/2014 | US20140374611 Continuous Generation of Extreme Ultraviolet Light |
| 12/23/2014 | US8917814 X-ray generator and composite device using the same and X-ray generating method |
| 12/18/2014 | US20140369474 X-ray generation devices and methods |
| 12/18/2014 | US20140368803 Illumination optical unit for euv projection lithography, and optical system comprising such an illumination optical unit |
| 12/18/2014 | US20140368802 Radiation source |
| 12/18/2014 | US20140367592 Gas refraction compensation for laser-sustained plasma bulbs |
| 12/17/2014 | CN102484045B 等离子体光源系统 Plasma source system |
| 12/16/2014 | US8912514 Target for extreme ultraviolet light source |
| 12/10/2014 | CN102484938B 等离子体光源 Plasma light source |
| 12/09/2014 | US8907567 Plasma light source and plasma light generation method |
| 12/09/2014 | US8907310 EUV optics |
| 12/04/2014 | US20140353528 Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system |
| 12/02/2014 | US8901524 Extreme ultraviolet light source apparatus |
| 12/02/2014 | US8901523 Apparatus for protecting EUV optical elements |
| 12/02/2014 | US8901522 Chamber apparatus and extreme ultraviolet light generation system |
| 12/02/2014 | US8901521 Module and method for producing extreme ultraviolet radiation |
| 11/27/2014 | US20140348189 Laser apparatus |
| 11/27/2014 | US20140346376 Laser apparatus and extreme ultraviolet light generation apparatus |
| 11/27/2014 | US20140346375 Laser apparatus, laser system, and extreme ultraviolet light generation apparatus |
| 11/27/2014 | US20140346374 Faraday rotator, optical isolator, laser apparatus, and extreme ultraviolet light generation apparatus |
| 11/27/2014 | US20140346373 Droplet generator with actuator induced nozzle cleaning |
| 11/25/2014 | US8895946 Source-collector modules for EUV lithography employing a GIC mirror and a LPP source |
| 11/18/2014 | US8890099 Radiation source and method for lithographic apparatus for device manufacture |
| 11/13/2014 | US20140332700 Extreme ultraviolet light generation apparatus |
| 11/11/2014 | US8885680 Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam |
| 11/11/2014 | US8884257 Chamber apparatus and extreme ultraviolet light generation system |
| 11/11/2014 | US8881526 Laser for steam turbine system |
| 11/06/2014 | US20140326904 Sn vapor EUV LLP source system for EUV lithography |
| 10/30/2014 | US20140319388 Laser apparatus and extreme ultraviolet light generation apparatus |
| 10/30/2014 | US20140319387 Extreme ultraviolet ligth source devices |
| 10/28/2014 | US8872144 System and method for laser beam focus control for extreme ultraviolet laser produced plasma source |
| 10/28/2014 | US8872143 Target for laser produced plasma extreme ultraviolet light source |
| 10/28/2014 | US8872142 Extreme ultraviolet light generation apparatus |
| 10/28/2014 | US8872126 Target supply device and extreme ultraviolet light generation apparatus |
| 10/28/2014 | US8869419 Efficient irradiation system using curved reflective surfaces |
| 10/21/2014 | US8866111 Radiation source and method for lithographic apparatus and device manufacturing method |
| 10/21/2014 | US8866110 Extreme ultraviolet light source |
| 10/16/2014 | US20140307857 Arrangement for the Handling of a Liquid Metal for Cooling Revolving Components of a Radiation Source Based on a Radiation-Emitting Plasma |
| 10/16/2014 | US20140306115 Debris Protection System For Reflective Optic Utilizing Gas Flow |
| 10/09/2014 | WO2014161698A1 Source collector apparatus, lithographic apparatus and method |
| 10/09/2014 | US20140299791 Target for extreme ultraviolet light source |
| 10/08/2014 | EP2787582A1 Optical pulse generator |
| 10/07/2014 | US8855164 Laser apparatus |
| 10/07/2014 | US8853656 Extreme ultraviolet light source device |
| 10/02/2014 | WO2014158464A1 Method of and apparatus for supply and recovery of target material |
| 10/02/2014 | WO2014155776A1 Optical resonator system |
| 10/02/2014 | WO2014154433A1 Radiation collector, radiation source and lithographic apparatus |
| 09/30/2014 | US8849364 High-temperature superconductor magnet system |
| 09/30/2014 | US8848277 System and method for protecting a seed laser in an EUV light source with a Bragg AOM |
| 09/30/2014 | US8847183 System, method and apparatus for laser produced plasma extreme ultraviolet chamber with hot walls and cold collector mirror |
| 09/30/2014 | US8847182 EUV radiation generating apparatus and operating methods |
| 09/30/2014 | US8847181 System and method for generating extreme ultraviolet light |
| 09/25/2014 | WO2014149436A1 Extreme ultraviolet light source |
| 09/25/2014 | WO2014149435A1 Beam position control for an extreme ultraviolet light source |
| 09/25/2014 | WO2014147901A1 Extreme ultraviolet light generating device, method for generating extreme ultraviolet light, convergent light beam measurement device for pulse laser light, and convergent light beam measurement method |
| 09/25/2014 | US20140284502 Target generation device and extreme ultraviolet light generation apparatus |
| 09/24/2014 | EP2782429A1 Method and system of manufacturing a target for emission of photon radiation, particularly x-rays, or particles, particularly proptons or electrons by laser bombardment |
| 09/23/2014 | US8841639 Control method for target supply device, and target supply device |