| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 08/26/2004 | DE10392145T5 Extremultraviolett-Lichtquellenvorrichtung Extreme ultraviolet light source device |
| 08/26/2004 | DE10306668A1 Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas Arrangement for the generation of intense short-wave radiation based on a plasma |
| 08/26/2004 | DE10305701A1 Anordnung zur Erzeugung von EUV-Strahlung mit hohen Repetitionsraten Arrangement for the generation of EUV radiation with high repetition rates |
| 08/19/2004 | US20040160155 Discharge produced plasma EUV light source |
| 08/19/2004 | US20040159802 Arrangement for the generation of intensive short-wave radiation based on a plasma |
| 08/12/2004 | US20040156475 Method and apparatus for generating x-ray |
| 08/12/2004 | US20040155207 Arrangement for the generation of EUV radiation |
| 08/11/2004 | EP1445993A2 Extreme uv light source and semiconductor exposure device |
| 08/05/2004 | US20040149937 Extreme UV light source and semiconductor exposure device |
| 08/03/2004 | US6770896 Method for generating extreme ultraviolet radiation based on a radiation-emitting plasma |
| 07/29/2004 | WO2004036612A8 A dense plasma focus radiation source |
| 07/29/2004 | US20040145292 Radiation source with high average EUV radiation output |
| 07/22/2004 | WO2004062050A2 Method and apparatus for generating a membrane target for laser produced plasma |
| 07/22/2004 | US20040141165 Radiation source, lithographic apparatus, and device manufacturing method |
| 07/22/2004 | US20040140439 Electrode insulator materials for use in extreme ultraviolet electric discharge sources |
| 07/22/2004 | DE10341538A1 Laser-plasma X-ray source, for producing radiation in veins and arteries, has small housing containing plasma forming target and laser control optics |
| 07/22/2004 | DE10260458B3 Radiation source for production of extreme ultraviolet radiation, useful in research into smaller transistors from the micrometer to the nanometer range, is based on dense hot plasma obtained by gas discharge |
| 07/21/2004 | EP1438637A2 Lithographic apparatus and device manufacturing method |
| 07/20/2004 | US6765987 Resonant plasma x-ray source |
| 07/20/2004 | CA2315740C Discharge lamp sources apparatus and methods |
| 07/15/2004 | US20040135985 Lithographic projection apparatus with multiple suppression meshes |
| 07/15/2004 | US20040135517 Radiation source for generating extreme ultraviolet radiation |
| 07/15/2004 | US20040135103 Thermionic-cathode for pre-ionization of an extreme ultraviolet (EUV) source supply |
| 07/15/2004 | DE10261803A1 Radiation source generating extreme ultraviolet (EUV) radiation for lithographic technique in forming structure of dimensions less than 70 nm in semiconductor by plasma, using magnetic valve and field for enveloping plasma |
| 07/15/2004 | DE10260376A1 Vorrichtung und Verfahren zur Erzeugung eines Tröpfchen-Targets Apparatus and method for generating a droplet target, |
| 07/13/2004 | US6762424 Plasma generation |
| 07/08/2004 | US20040129896 Method and device for generating extreme ultravilolet radiation in particular for lithography |
| 07/06/2004 | US6760406 Method and apparatus for generating X-ray or EUV radiation |
| 07/01/2004 | WO2004056158A2 Device and method for the creation of droplet targets |
| 07/01/2004 | US20040125828 Device and a method for the generation of coherent x-ray radiation |
| 07/01/2004 | US20040124373 Electrical discharge gas plasma EUV source insulator components |
| 06/24/2004 | US20040120461 Protective coatings for radiation source components |
| 06/24/2004 | US20040119394 Method and apparatus for debris mitigation for an electrical discharge source |
| 06/23/2004 | CN1506763A Photoetching projector with multi-suppressing silk screen |
| 06/22/2004 | US6753941 Lithographic apparatus and device manufacturing method |
| 06/17/2004 | WO2004051698A2 Gas discharge lamp for euv radiation |
| 06/17/2004 | US20040114720 Droplet and filament target stabilizer for EUV source nozzles |
| 06/16/2004 | EP1429187A2 Droplet and filament target stabilizer for EUV source nozzles |
| 06/16/2004 | EP1428416A1 Discharge source with gas curtain for protecting optics from particles |
| 06/16/2004 | EP1016092B1 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 06/10/2004 | US20040108473 Extreme ultraviolet light source |
| 06/10/2004 | US20040108468 Methods and apparatus for providing a broadband tunable source of coherent millimeter, sub-millimeter and infrared radiation utilizing a non-relativistic electron beam |
| 06/09/2004 | EP1305985B1 Z-pinch plasma x-ray source using surface discharge preionization |
| 06/03/2004 | US20040105095 Arrangement for the optical detection of a moving target flow for a pulsed energy beam pumped radiation |
| 06/03/2004 | US20040105082 Radiation source, lithographic apparatus and device manufacturing method |
| 06/01/2004 | US6744851 Linear filament array sheet for EUV production |
| 06/01/2004 | US6744060 Pulse power system for extreme ultraviolet and x-ray sources |
| 05/27/2004 | DE10251435B3 Radiation source for extreme UV radiation for photolithographic exposure applications for semiconductor chip manufacture |
| 05/26/2004 | CN1500369A Metod and device for generation of far ultraviolet or soft X-ray radiation |
| 05/19/2004 | EP1420296A2 Low vapor pressure, low debris solid target for euv production |
| 05/19/2004 | DE10113064B4 Verfahren und Einrichtung zur Erzeugung von UV-Strahlung, insbesondere von EUV-Strahlung Method and device for generating ultraviolet radiation, in particular EUV radiation |
| 05/19/2004 | CN1498056A Radiation source, photoetching equipment and device manufacturing method |
| 05/19/2004 | CN1497349A Radiation source, photoetching device and manufacturing method of device |
| 05/18/2004 | US6738452 Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source |
| 05/13/2004 | US20040089819 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/12/2004 | EP1418796A2 Erosion reduction for EUV laser produced plasma target sources |
| 05/06/2004 | US20040086080 Erosion reduction for EUV laser produced plasma target sources |
| 05/05/2004 | CN1494819A Extreme ultraviolet generating device, exposure device using the same and semiconductor mfg. method |
| 04/29/2004 | WO2004036612A2 A dense plasma focus radiation source |
| 04/29/2004 | CA2499181A1 A dense plasma focus radiation source |
| 04/27/2004 | US6728337 Star pinch plasma source of photons or neutrons |
| 04/22/2004 | DE10339495A1 Optical detector for a moving target stream for a pulsed pumped generator for soft x-rays or extreme ultraviolet is remote from the plasma to avoid damage |
| 04/21/2004 | EP1410696A1 Method for converting laser radiation into x-radiation, in particular, into extreme ultraviolet (euv) radiation using a plasma generated by the laser radiation |
| 04/20/2004 | US6724782 Femtosecond laser-electron x-ray source |
| 04/20/2004 | US6724465 Lithography device which uses a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band in this range |
| 04/20/2004 | US6724004 Method and apparatus for elimination of high energy ion from EUV radiating device |
| 04/15/2004 | WO2004032211A1 X-ray generator and exposure device |
| 04/15/2004 | US20040071267 Dense plasma focus radiation source |
| 04/15/2004 | US20040071266 Low vapor pressure, low debris solid target for EUV production |
| 04/08/2004 | WO2004030423A1 X-ray generating device and exposure device |
| 04/08/2004 | US20040065624 Method for generating photons by sonoluminescence |
| 04/07/2004 | EP1406124A1 Radiation source, lithographic apparatus, and device manufacturing method |
| 04/01/2004 | WO2004028219A1 Liquid trap for receiving liquids in a vacuum device |
| 04/01/2004 | US20040062352 Laser plasma X-ray generating apparatus |
| 04/01/2004 | DE10242622A1 Flüssigkeitsfalle zum Auffangen von Flüssigkeiten in einer Vakuumeinrichtung Liquid trap for collecting liquids in a vacuum device |
| 03/30/2004 | US6714624 Discharge source with gas curtain for protecting optics from particles |
| 03/25/2004 | US20040057470 Ultrabright tunable coherent multikilovolt x-ray source |
| 03/24/2004 | EP1401248A2 Radiation source, lithographic apparatus, and device manufacturing method |
| 03/23/2004 | US6711233 Method and apparatus for generating X-ray or EUV radiation |
| 03/17/2004 | EP1397945A1 Star pinch x-ray and extreme ultraviolet photon source |
| 03/11/2004 | US20040046503 Microcavity discharge device |
| 03/04/2004 | WO2004019662A1 Gas discharge lamp |
| 03/04/2004 | DE10233634A1 Target material used in plasma-based production of (soft) x-radiation, e.g. in analytical chemistry, x-ray microscopy or lithography, comprises polymer, preferably (per)fluorinated polymer, liquid at room temperature |
| 02/26/2004 | US20040037392 System and method for generating microfocused laser-based x-rays for mammography |
| 02/25/2004 | EP1390955A2 Laser plasma from metals and nano-size particles |
| 02/19/2004 | WO2003026363A8 Discharge source with gas curtain for protecting optics from particles |
| 02/19/2004 | DE10238096B3 Gas discharge lamp for extreme UV lithography or X-ray microscopy has tapered electrode opening for transport of charge carriers from external region to discharge space |
| 02/17/2004 | US6693989 Ultrabright multikilovolt x-ray source: saturated amplification on noble gas transition arrays from hollow atom states |
| 02/10/2004 | US6690764 X-ray sources that maintain production of rotationally symmetrical x-ray flux during use |
| 02/10/2004 | US6690023 Methods and apparatus for providing a broadband tunable source of coherent millimeter, sub-millimeter and infrared radiation utilizing a non-relativistic electron beam |
| 02/04/2004 | EP1386525A1 High flux, high energy photon source |
| 02/03/2004 | US6687333 System and method for producing pulsed monochromatic X-rays |
| 01/29/2004 | WO2004010745A1 Capillary tubing |
| 01/29/2004 | WO2003092466A3 A source of penetrating electromagnetic radiation |
| 01/29/2004 | US20040016894 Plasma generation |
| 01/28/2004 | EP1384394A1 Method and device for the generation of far ultraviolet or soft x-ray radiation |
| 01/27/2004 | US6683936 EUV-transparent interface structure |
| 01/22/2004 | US20040013233 High-energy x-ray imaging device and method therefor |
| 01/22/2004 | US20040013226 Lithographic apparatus and device manufacturing method |
| 01/21/2004 | EP1382230A1 Method and device for generating extreme ultraviolet radiation in particular for lithography |