| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 02/15/2001 | WO2001011737A1 High electric field, high pressure light source |
| 02/13/2001 | US6188746 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 02/13/2001 | US6188076 Discharge lamp sources apparatus and methods |
| 02/06/2001 | US6183139 X-ray scanning method and apparatus |
| 02/01/2001 | DE19962160A1 Extreme UV and soft X-ray radiation source e.g. for extreme UV lithography, has auxiliary electrode behind opening in one main gas discharge electrode for increasing energy conversion efficiency |
| 01/31/2001 | EP1072174A1 Z-pinch soft x-ray source using diluent gas |
| 01/30/2001 | US6180952 Holder assembly system and method in an emitted energy system for photolithography |
| 01/17/2001 | EP1068020A1 Fluid nozzle system , energy emission system for photolithography and its method of manufacture |
| 01/17/2001 | EP1068019A1 Energy emission system for photolithography |
| 01/09/2001 | US6172324 Plasma focus radiation source |
| 01/04/2001 | WO2001001736A1 Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge |
| 12/13/2000 | EP1059708A1 Apparatus for photoreaction |
| 12/06/2000 | EP1057078A1 Method of imaging a mask pattern on a substrate by means of euv radiation, and apparatus and mask for performing the method |
| 12/05/2000 | US6157701 X-ray generating apparatus and X-ray microscope |
| 11/30/2000 | WO2000072330A1 Parallel x-ray nanotomography |
| 11/30/2000 | DE19924204A1 Einrichtung und Verfahren zur Erzeugung von Röntgenstrahlen Apparatus and method for generating X-rays |
| 11/29/2000 | EP1056317A2 Device and method for generating X-rays |
| 11/16/2000 | WO2000069229A1 System and method for providing a lithographic light source for a semiconductor manufacturing process |
| 11/15/2000 | EP1051727A1 Discharge lamp sources apparatus and methods |
| 11/02/2000 | EP1048050A1 A source of intense coherent high frequency radiation |
| 10/31/2000 | US6141400 X-ray source which emits fluorescent X-rays |
| 10/25/2000 | EP1047288A2 Plasma focus high energy photon source |
| 10/17/2000 | US6134295 Apparatus using a x-ray source for radiation therapy port verification |
| 10/17/2000 | US6133577 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 10/12/2000 | WO2000060909A1 Laser plasma light source and method of generating radiation using the same |
| 10/05/2000 | WO2000058989A1 Plasma gun and methods for the use thereof |
| 09/20/2000 | EP1037510A2 Plasma focus high energy photon source with blast shield |
| 09/20/2000 | EP1036488A1 Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
| 09/19/2000 | US6121569 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 09/14/2000 | WO2000021114A9 X-ray scanning method and apparatus |
| 09/08/2000 | WO2000035535B1 Electron beam multistage accelerator driven probe device |
| 09/05/2000 | US6115452 X-ray radiography with highly charged ions |
| 08/29/2000 | US6111932 Electron beam multistage accelerator |
| 08/24/2000 | DE19909241A1 Gas discharge illumination device in which gas or plasma is controlled in glass bulb using magnetic field |
| 08/22/2000 | US6105885 Fluid nozzle system and method in an emitted energy system for photolithography |
| 07/05/2000 | EP1016092A1 Method and apparatus for producing extreme ultra-violet light for use in photolithography |
| 07/05/2000 | EP1015161A1 Plasma gun and methods for the use thereof |
| 07/04/2000 | US6084198 Plasma gun and methods for the use thereof |
| 06/29/2000 | WO2000038015A1 Method of imaging a mask pattern on a substrate by means of euv radiation, and apparatus and mask for performing the method |
| 06/29/2000 | WO2000021114A8 X-ray scanning method and apparatus |
| 06/29/2000 | WO1999056521A3 Method and apparatus for the production of neutrons and other particles |
| 06/22/2000 | WO2000035535A1 Electron beam multistage accelerator driven probe device |
| 06/22/2000 | CA2356619A1 Electron beam multistage accelerator driven probe device |
| 06/21/2000 | EP1010184A1 Spherical inertial electrostatic confinement device as a tunable x-ray source |
| 06/13/2000 | US6075838 Z-pinch soft x-ray source using diluent gas |
| 05/23/2000 | US6065203 Method of manufacturing very small diameter deep passages |
| 05/18/2000 | WO2000028631A1 Apparatus for photoreaction |
| 05/16/2000 | US6064072 Plasma focus high energy photon source |
| 05/04/2000 | WO2000025322A1 Shaped source of soft x-ray, extreme ultraviolet and ultraviolet radiation |
| 04/18/2000 | US6051841 Plasma focus high energy photon source |
| 04/13/2000 | WO2000021114A1 X-ray scanning method and apparatus |
| 04/06/2000 | WO2000019496A1 Laser plasma x-ray generator, semiconductor aligner having the generator, and semiconductor exposure method |
| 03/14/2000 | US6038279 X-ray generating device, and exposure apparatus and semiconductor device production method using the X-ray generating device |
| 03/07/2000 | US6035015 Compton backscattered collmated X-ray source |
| 03/01/2000 | EP0981936A1 Plasma focus high energy photon source |
| 02/29/2000 | US6031241 Capillary discharge extreme ultraviolet lamp source for EUV microlithography and other related applications |
| 01/19/2000 | EP0792530A4 Low cost, high average power, high brightness solid state laser |
| 01/05/2000 | EP0968409A2 Soft x-ray microfluoroscope |
| 12/29/1999 | WO1999067806A1 Radiation (e.g. x-ray pulse) generator mechanisms |
| 12/14/1999 | US6002744 Method and apparatus for generating X-ray or EUV radiation |
| 12/01/1999 | CN1237264A Spherical inertial electrostatic confinement device as turnable X-ray source |
| 11/30/1999 | US5995586 X-ray generator |
| 11/23/1999 | US5991360 Laser plasma x-ray source, semiconductor lithography apparatus using the same and a method thereof |
| 11/17/1999 | CN1235569A Plasma jet source using internal electrostatic confinement discharge plasma |
| 11/11/1999 | WO1999057946A1 X-ray source and use in radiography |
| 11/11/1999 | WO1999056521A2 Method and apparatus for the production of neutrons and other particles |
| 10/19/1999 | US5969367 Charged particle beam apparatus and method for operating the same |
| 10/14/1999 | WO1999051357A1 Energy emission system for photolithography |
| 10/14/1999 | WO1999051356A1 Fluid nozzle system, energy emission system for photolithography and its method of manufacture |
| 10/14/1999 | WO1999051355A1 Diffuser system and energy emission system for photolithography |
| 10/05/1999 | US5963616 Configurations, materials and wavelengths for EUV lithium plasma discharge lamps |
| 09/23/1999 | WO1999048343A1 Z-pinch soft x-ray source using diluent gas |
| 09/09/1999 | DE19805290A1 Monochromatic fluorescent x-ray source with increased efficiency |
| 09/01/1999 | EP0938396A1 Plasma jet source using an inertial electrostatic confinement discharge plasma |
| 08/03/1999 | US5933440 Electronic-laser system for outputting radio-frequency signal and pulse laser beam synchronous with radio-frequency signal |
| 08/03/1999 | US5933335 Compact solid state klystron power supply |
| 07/27/1999 | US5930125 Compact solid state klystron power supply |
| 07/08/1999 | WO1999034395A1 Discharge lamp sources apparatus and methods |
| 07/01/1999 | WO1999033084A1 A source of intense coherent high frequency radiation |
| 06/22/1999 | US5914998 X-ray microbeam generating method and device for the same |
| 06/17/1999 | DE19753696A1 Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung Apparatus and method for generating extreme ultraviolet radiation and soft x-ray radiation from a gas discharge |
| 06/15/1999 | US5912939 Soft x-ray microfluoroscope |
| 06/10/1999 | WO1999029145A1 Method and device for producing extreme ultraviolet and soft x-rays from a gaseous discharge |
| 05/19/1999 | EP0916236A1 Device for generating ultra-short x-ray pulses |
| 04/06/1999 | US5892810 X-ray source for lithography |
| 03/23/1999 | US5887008 Method and apparatus for generating high energy coherent electron beam and gamma-ray laser |
| 02/25/1999 | WO1999009793A1 Compton backscattered collimated x-ray source |
| 02/10/1999 | EP0895706A1 Method and apparatus for generating x-ray or euv radiation |
| 02/03/1999 | EP0752198B1 Off-axis scanning electron beam computed tomography system |
| 02/02/1999 | US5866871 Plasma gun and methods for the use thereof |
| 01/13/1999 | EP0891024A1 Electronic-laser system for outputting radio-frequency signal and pulse laser beam synchronous with radio-frequency signal |
| 12/17/1998 | WO1998057335A1 Thin radiators in a recycled electron beam |
| 11/19/1998 | WO1998052389A1 Plasma focus high energy photon source |
| 11/05/1998 | WO1998048973A1 Plasma gun and methods for the use thereof |
| 10/22/1998 | WO1998035214A3 Soft x-ray microfluoroscope |
| 10/20/1998 | US5825847 Compton backscattered collimated x-ray source |
| 10/07/1998 | EP0868835A1 Method and device for characterising an ionised medium using an electromagnetic radiation source having an ultrashort duration |
| 10/07/1998 | EP0868834A1 Interferometric method and device for characterising a medium |
| 09/29/1998 | US5814821 Mobile irradiation device |
| 09/17/1998 | DE19710222A1 X=ray beam generator especially for fast computer tomography in medicine |