| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 05/25/2005 | CN1619759A Static electricity preventing device using flexible x-ray and method for making its flexible x-ray tubes |
| 05/19/2005 | US20050105689 Device for generating x-rays having a liquid metal anode |
| 05/18/2005 | CN1618259A Method and device for generating extreme ultraviolet radiation in particular for lithography |
| 05/17/2005 | US6894298 Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge |
| 05/12/2005 | US20050100071 Electromagnetic radiation generation using a laser produced plasma |
| 05/10/2005 | US6891927 Light generation apparatus, exposure apparatus, and device manufacturing method |
| 05/04/2005 | EP1528846A2 EUV source |
| 05/03/2005 | US6888921 Laser plasma X-ray generating apparatus |
| 05/03/2005 | US6888297 Method and apparatus for debris mitigation for an electrical discharge source |
| 04/28/2005 | WO2005038822A2 Plasma source of directed beams and application thereof to microlithography |
| 04/26/2005 | US6885015 Thermionic-cathode for pre-ionization of an extreme ultraviolet (EUV) source supply |
| 04/19/2005 | US6882704 For photolithography exposure processes; semiconductor chips with structure widths of less than 50 nm; hot plasma emitting desired radiation is generated in a vacuum chamber; energy monitor unit; beam characteristics reproducible over the long |
| 04/19/2005 | US6881971 Arrangement for the suppression of particle emission in the generation of radiation based on hot plasma |
| 04/13/2005 | CN1196978C Shield nozzle for control of gas spray in super ultraviolet light source |
| 04/07/2005 | US20050072942 EUV source |
| 03/31/2005 | WO2005029191A2 Method and device for lithography by extreme ultraviolet radiation |
| 03/31/2005 | WO2004079763A3 Ultrabright tunable coherent multikilovolt x-ray source |
| 03/24/2005 | WO2005026650A2 Plasma flare ir and uv emitting devices |
| 03/24/2005 | DE10337667A1 Plasma-Strahlungsquelle und Anordnung zur Erzeugung eines Gasvorhangs für Plasma-Strahlungsquellen Plasma radiation source and arrangement for producing a gas curtain for plasma radiation sources |
| 03/23/2005 | CN1598399A Microwave powered lamphead having external shutter |
| 03/17/2005 | WO2005025280A2 Method and apparatus for producing extreme ultraviolett radiation or soft x-ray radiation |
| 03/17/2005 | DE10215469B4 Anordnung zur Unterdrückung von Teilchenemission bei einer Strahlungserzeugung auf Basis eines heißen Plasmas Arrangement for the suppression of particle emission at a radiation generation based on a hot plasma |
| 03/15/2005 | US6867843 Debris removing system for use in X-ray light source |
| 03/09/2005 | EP1048050B1 A source of intense coherent high frequency radiation |
| 03/08/2005 | US6865255 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions |
| 03/08/2005 | US6864497 Droplet and filament target stabilizer for EUV source nozzles |
| 03/03/2005 | WO2005020644A1 Euv light source |
| 03/02/2005 | EP1509979A1 Method and arrangement for generating amplified spontaneous emission of coherent short-wave radiation |
| 03/01/2005 | US6862339 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions |
| 03/01/2005 | US6861656 High-luminosity EUV-source devices for use in extreme ultraviolet (soft X-ray) lithography systems and other EUV optical systems |
| 02/24/2005 | US20050040347 Method and device for the generation of far ultraviolet or soft x-ray radiation |
| 02/17/2005 | WO2005015962A2 Plasma radiation source and device for creating a gas curtain for plasma radiation sources |
| 02/17/2005 | WO2005015602A2 Extreme uv and soft x ray generator |
| 02/15/2005 | US6855943 Droplet target delivery method for high pulse-rate laser-plasma extreme ultraviolet light source |
| 02/10/2005 | WO2004062050A3 Method and apparatus for generating a membrane target for laser produced plasma |
| 02/10/2005 | US20050031502 Tungsten core is coated with a porous tungsten has a porosity operative to facilitate the release of bubbles and absorbed gases |
| 02/03/2005 | US20050025882 comprise a main optical body comprising a crystal containing halogen atoms; a reflectivity coating for changing the reflectivity of a surface of the main body; and, an intermediate protective layer comprising a material containing free halogen atoms |
| 02/02/2005 | EP1502485A1 Method of generating extreme ultraviolet radiation |
| 01/27/2005 | US20050019492 Protective coatings for radiation source components |
| 01/25/2005 | US6847044 Electrical discharge gas plasma EUV source insulator components |
| 01/20/2005 | WO2005006414A1 Focusing optical system, light source unit, illumination optical apparatus, and exposure apparatus |
| 01/19/2005 | CN1185911C Liquid droplet mist generating method and apparatus, mask-alignment for ultraviolet light source and substrate |
| 01/13/2005 | WO2005004555A1 Method and device for producing extreme ultraviolet radiation or soft x-ray radiation |
| 01/13/2005 | WO2004084592A3 Device for and method of generating extreme ultraviolet and/or soft x-ray radiation by means of a plasma |
| 01/05/2005 | EP1493039A2 Extreme ultraviolet light source |
| 01/05/2005 | DE10326279A1 Plasma-basierte Erzeugung von Röntgenstrahlung mit einem schichtförmigen Targetmaterial Plasma-based generation of X-radiation with a layer-shaped target material |
| 12/30/2004 | US20040264512 Laser-produced plasma EUV light source with pre-pulse enhancement |
| 12/30/2004 | US20040262545 Laser-produced plasma EUV light source with isolated plasma |
| 12/30/2004 | DE10314849B3 Anordnung zur Stabilisierung der Strahlungsemission eines Plasmas Arrangement for stabilizing the radiation emission of a plasma |
| 12/29/2004 | EP1492395A2 Laser-produced plasma EUV light source with isolated plasma |
| 12/29/2004 | EP1492394A2 Laser-produced plasma EUV light source with pre-pulse enhancement |
| 12/28/2004 | US6835944 Low vapor pressure, low debris solid target for EUV production |
| 12/16/2004 | WO2004110112A1 Plasma-based generation of x-ray radiation with a stratiform target material |
| 12/15/2004 | EP1485936A1 A device for generating x-rays having a liquid metal anode |
| 12/15/2004 | EP1485935A1 A device for generating x-rays having a liquid metal anode |
| 12/14/2004 | US6831963 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 12/14/2004 | US6831935 Multistage synchronization of pulsed radiation sources |
| 12/09/2004 | WO2004036612A3 A dense plasma focus radiation source |
| 12/07/2004 | US6829280 Device and a method for the generation of coherent x-ray radiation |
| 12/07/2004 | US6829261 Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation |
| 12/02/2004 | US20040238762 Extreme ultraviolet light source |
| 11/18/2004 | WO2004100621A1 Laser plasma producing method and device |
| 11/16/2004 | US6818912 Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 11/11/2004 | DE102004009881A1 Mikrowellenbetriebener Leuchtkopf mit einem externen Verschluss Microwave-powered lamp head with an external shutter |
| 11/10/2004 | EP1051727A4 Discharge lamp sources apparatus and methods |
| 11/09/2004 | US6815900 Radiation source with high average EUV radiation output |
| 11/09/2004 | US6815700 Plasma focus light source with improved pulse power system |
| 11/04/2004 | WO2004095895A1 Debris collector for euv light generator |
| 11/04/2004 | US20040219728 Extreme ultraviolet light generating device, exposure apparatus using the same and semiconductor manufacturing method |
| 11/03/2004 | EP1230828B1 Method for obtaining an extreme ultraviolet radiation source and its use in lithography |
| 10/26/2004 | US6809328 Protective coatings for radiation source components |
| 10/21/2004 | US20040208286 EUV, XUV, and X-ray wavelength sources created from laser plasma produced from liquid metal solutions |
| 10/21/2004 | US20040208285 Miniature X-ray source and catheter system |
| 10/20/2004 | CN1539254A Star pinch x-ray and extreme ultraviolet photon source |
| 10/14/2004 | US20040200977 Method and apparatus for generating a membrane target for laser produced plasma |
| 10/13/2004 | EP1467602A2 Gas flow measurement apparatus and method for EUV light source |
| 10/12/2004 | US6804327 Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays |
| 10/07/2004 | WO2004086467A1 Extreme ultraviolet light source and target for extreme ultraviolet light source |
| 10/07/2004 | WO2004086440A2 Systems and methods for plasma containment |
| 10/07/2004 | US20040195529 Arrangement for the stabilization of the radiation emission of a plasma |
| 10/07/2004 | CA2518486A1 Systems and methods for plasma containment |
| 09/30/2004 | WO2004084592A2 Device for and method of generating extreme ultraviolet and/or soft x-ray radiation by means of a plasma |
| 09/30/2004 | DE10310623A1 Verfahren und Vorrichtung zum Erzeugen eines Plasmas durch eletrische Entladung in einem Entladungsraum Method and apparatus for generating a plasma by eletrische discharge in a discharge space |
| 09/23/2004 | WO2004082340A1 Method and device for the generation of a plasma through electric discharge in a discharge space |
| 09/23/2004 | WO2004081503A2 Discharge produced plasma euv light source |
| 09/23/2004 | US20040183486 Extreme ultraviolet transition oscillator |
| 09/23/2004 | US20040183481 Microwave powered lamphead having external shutter |
| 09/23/2004 | US20040183038 Extreme UV radiation source and semiconductor exposure device |
| 09/23/2004 | US20040183037 Method and device for producing extreme ultraviolet radiation and soft x-ray radiation |
| 09/22/2004 | EP1460886A2 Extreme UV radiation source and semiconductor exposure device |
| 09/22/2004 | CN1531840A Method and device for producing extreme ultraviolet radiation and soft X-radiation |
| 09/16/2004 | WO2004079763A2 Ultrabright tunable coherent multikilovolt x-ray source |
| 09/16/2004 | WO2004056158A3 Device and method for the creation of droplet targets |
| 09/16/2004 | US20040178365 Electrode in a discharge produced plasma extreme ultraviolet source |
| 09/14/2004 | US6792076 Target steering system for EUV droplet generators |
| 09/10/2004 | WO2004051698A3 Gas discharge lamp for euv radiation |
| 09/09/2004 | US20040174955 Apparatus and method for generating high-order harmonic X-ray, and point-diffraction interferometer using high-order harmonic X-ray |
| 09/07/2004 | US6788763 Device for producing an extreme ultraviolet and soft x radiation from a gaseous discharge |
| 09/07/2004 | US6787788 Electrode insulator materials for use in extreme ultraviolet electric discharge sources |
| 09/02/2004 | US20040170252 EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions, and nano-size particles in solutions |