H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma

Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
11/2011
11/10/2011	WO2011138259A1 Euv collector
11/10/2011	US20110273691 Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device
11/03/2011	US20110266467 Extreme ultraviolet light source apparatus
11/02/2011	EP1502485B1 Method of generating extreme ultraviolet radiation
11/02/2011	CN102231935A Method and apparatus for generating coherent extreme ultraviolet radiation
10/2011
10/27/2011	WO2011131431A1 Collector mirror assembly and method for producing extreme ultraviolet radiation
10/26/2011	EP2380411A1 Method and device for generating euv radiation or soft x-rays with enhanced efficiency
10/26/2011	EP1428416B1 Discharge source with gas curtain for protecting optics from particles
10/20/2011	DE102010015495A1 Vorrichtung zum Erzeugen von UV-Licht Apparatus for producing UV-light
10/19/2011	EP2378844A1 Plasma light source and plasma light generation method
10/19/2011	EP1853882B1 Systems for protecting internal components of an euv light source from plasma-generated debris
10/18/2011	US8040033 Electrode device for gas discharge sources and method of operating a gas discharge source having this electrode device
10/13/2011	WO2011126947A1 Extreme ultraviolet light source
10/13/2011	WO2011124434A1 Euv radiation source and euv radiation generation method
10/13/2011	US20110249801 Gamma Ray Generator
10/13/2011	US20110248192 Method and device for generating euv radiation or soft x-rays with enhanced efficiency
10/13/2011	US20110248191 Systems and methods for target material delivery protection in a laser produced plasma euv light source
10/12/2011	EP2300879B1 Extreme uv radiation generating device comprising a contamination captor and method of purifying tin in said device
10/06/2011	WO2011122689A1 System and method for generating extreme ultraviolet light, and laser apparatus
10/06/2011	WO2011122397A1 Extreme ultraviolet light generator
10/06/2011	WO2011122020A1 X-ray irradiation device and analysis device
10/06/2011	US20110240890 Extreme Ultraviolet Light Source
09/2011
09/29/2011	WO2011116898A1 Steering device for controlling the direction and/or velocity of droplets of a target material and extreme euv source with such a steering device
09/22/2011	WO2011115233A1 Extreme ultraviolet light generation system
09/22/2011	WO2011115025A1 Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system
09/22/2011	WO2011114889A1 Extreme ultraviolet light source device and location adjustment method for light focusing optical means
09/22/2011	WO2011114887A1 Irradiance distribution detection method in extreme ultraviolet light source device, and location adjustment method for light focusing optical means
09/21/2011	EP1775756B1 Euv light source, euv exposure equipment and semiconductor device manufacturing method
09/21/2011	CN101689030B Debris prevention system, radiation system, and lithographic apparatus
09/15/2011	WO2011111582A1 Collector mirror assembly and extreme ultraviolet light source device using said collector mirror assembly
09/15/2011	US20110220816 Extreme ultraviolet light generation apparatus
09/15/2011	DE102009058266A1 Medizinisches Röntgenaufnahmesystem Medical X-ray imaging system
09/14/2011	EP2364579A1 Device for generating a secondary source by laser-matter interaction, including an optical device for monitoring the direction and the position of a moving surface
09/14/2011	CN102178541A Medical x-ray imaging system
09/09/2011	WO2011108761A1 Laser device, laser system, and extreme ultraviolet light generation apparatus
09/01/2011	WO2011105035A2 Radioactive ray generating apparatus and radioactive ray imaging system
08/2011
08/25/2011	WO2011102277A1 Extreme-ultraviolet light source device and method for generating extreme-ultraviolet light
08/25/2011	WO2011102162A1 Chamber apparatus, and extreme ultraviolet light generating device
08/25/2011	DE102006032607B4 Anordnung zur Erzeugung elektromagnetischer Strahlung und Verfahren zum Betreiben der Anordnung Arrangement for generating electromagnetic radiation and method for operating the arrangement
08/23/2011	US8003962 Extreme ultraviolet light source apparatus and nozzle protection device
08/16/2011	US8000448 Device and method for adjusting collision timing between electron beam and laser light
08/16/2011	US7999241 Extreme ultraviolet light source apparatus
08/11/2011	US20110192995 LPP EUV Light Source Drive Laser System
08/03/2011	CN101390453B Method and device for generating in particular EUV radiation and/or soft X-ray radiation
07/2011
07/28/2011	US20110180734 Extreme ultraviolet light source apparatus
07/28/2011	DE102010056555A1 Colled spider and method for grazing-incidence collectors Colled spider and method for grazing-incidence collectors
07/28/2011	DE102009020776B4 Anordnung zur kontinuierlichen Erzeugung von flüssigem Zinn als Emittermaterial in EUV-Strahlungsquellen Arrangement for the continuous production of liquid tin as an emitter material in EUV radiation sources
07/21/2011	DE102010004715A1 Device for generating Exahertz rays, has control console comprising actual desk provided with elements for adjustment of data, where rays generated by device are divided into small regions
07/14/2011	WO2011082894A1 Euv radiation source and lithographic apparatus
07/14/2011	WO2011082891A1 Euv radiation source comprising a droplet accelerator and lithographic apparatus
07/14/2011	US20110168925 Source-collector module with GIC mirror and LPP EUV light source
07/14/2011	DE102010056553A1 Quellkollektormodul mit GIC-Spiegel und LPP-EUV-Lichtquelle Source collector module with GIC mirror and LPP EUV light source
07/06/2011	CN1820556B Method and device for producing extreme ultravoilet radiation or soft X-ray radiation
07/06/2011	CN1678163B System and method for X-ray generation
07/06/2011	CN102119583A Method and device for generating EUV radiation or soft X-rays
07/06/2011	CN102119365A Radiation source, lithographic apparatus and device manufacturing method
06/2011
06/23/2011	WO2011075345A1 Metrology for extreme ultraviolet light source
06/22/2011	EP2337058A1 Compact X-ray source
06/22/2011	EP2335460A2 Amplifying optical cavity of the fabry-perot type
06/22/2011	CN102106190A Extreme uv radiation generating device comprising a corrosion-resistant material
06/21/2011	US7964857 Plasma source of directed beams and application thereof to microlithography
06/16/2011	WO2011069881A1 Euv light source for an illumination system of a microlithographic projection exposure apparatus
06/16/2011	US20110143269 Radiation source, lithographic apparatus, and device manufacturing method
06/16/2011	US20110140009 Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light
06/16/2011	DE102009047712A1 EUV-Lichtquelle für eine Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage EUV light source for an illumination device of a microlithography projection exposure apparatus
06/15/2011	CN102099746A Extreme uv radiation generating device comprising a contamination captor
06/09/2011	DE102010041393A1 Method for characterizing molding body utilized as substrate for extreme UV mirror of lithography system, involves determining space-resolved distribution of titanium oxide content of molding body in surface-proximate volume area
06/09/2011	DE102006060998B4 Verfahren und Vorrichtungen zum Erzeugen von Röntgenstrahlung Methods and apparatus for generating X-radiation
06/02/2011	US20110130613 Mechanoluminescent x-ray generator
06/01/2011	CN102084299A Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device
05/2011
05/31/2011	US7952084 Radiation source and lithographic apparatus
05/19/2011	US20110116604 Plasma-based generation of X-radiation with a sheet-shaped target material
05/18/2011	EP1820377B1 Method and apparatus for operating an electrical discharge device
05/18/2011	CN101111119B Micro-current target laser plasma soft X ray-extreme ultraviolet light source
05/12/2011	WO2011055376A1 Biological laser plasma x-ray point source
05/12/2011	DE102007004440B4 Vorrichtung und Verfahren zur Erzeugung von extrem ultravioletter Strahlung mittels einer elektrisch betriebenen Gasentladung Apparatus and method for generating extreme ultraviolet radiation by means of an electrically operated gas discharge
05/11/2011	EP2223574B1 Gas discharge source, in particular for euv-radiation
05/11/2011	CN101438631B Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
05/05/2011	WO2011051839A1 Electrode system, in particular for gas discharge light sources
05/05/2011	US20110101251 Extreme uv radiation generating device comprising a corrosion-resistant material
05/04/2011	CN201821563U Device for generating quasi-synchronous higher harmonics or X-ray radiation through multiple laser excitations
04/2011
04/27/2011	EP1368999B1 Method for generating photons by sonoluminescence
04/20/2011	EP1774838B1 Inductively-driven plasma light source
04/20/2011	CN1973357B EUV light source, EUV exposure system, and production method for semiconductor device
04/19/2011	US7928418 Extreme ultra violet light source apparatus
04/19/2011	US7928416 Laser produced plasma EUV light source
04/13/2011	EP2308272A1 Method and device for generating euv radiation or soft x-rays
04/07/2011	US20110079736 Laser produced plasma EUV light source
04/06/2011	CN101065999B Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology
03/2011
03/31/2011	US20110073784 Apparatus and method for generating high-intensity optical pulses with an enhancement cavity
03/30/2011	EP2300879A1 Extreme uv radiation generating device comprising a contamination captor
03/30/2011	EP2300878A1 Source module of an euv lithographic apparatus, lithographic apparatus, and method for manufacturing a device
03/24/2011	US20110068282 Plasma source of directed beams and application thereof to microlithography
03/23/2011	EP2298041A1 Extreme uv radiation generating device comprising a corrosion-resistant material
03/17/2011	DE112009000120T5 Kollektor mit streifendem Einfall für Laser-Erzeuge Plasmaquellen Grazing incidence collector for laser-plasma sources Create
03/17/2011	DE102009040034A1 Photonenquelle Photon source
03/10/2011	WO2011027737A1 Plasma light source
03/10/2011	WO2011027717A1 Lpp euv light source and method for producing same
03/10/2011	WO2011027699A1 Plasma light source system
03/09/2011	CN1816243B Ion source apparatus and method

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