| Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426) |
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| 05/13/2008 | US7372055 Night vision infrared illuminator |
| 05/07/2008 | EP1800188B1 Device for generating extreme ultraviolet light and application to an extreme ultraviolet radiation lithography source |
| 05/06/2008 | US7368742 Arrangement and method for metering target material for the generation of short-wavelength electromagnetic radiation |
| 05/06/2008 | US7368741 Extreme ultraviolet light source |
| 04/30/2008 | EP1915596A2 Alternative fuels for euv light source |
| 04/30/2008 | DE102006050953A1 Betatron for use in X-ray testing system, has contraction and expansion coil arranged between front side of inner yoke parts and betatron tube, where radius of coil is equal to reference turning radius of electrons in betatron tube |
| 04/30/2008 | DE102006050952A1 Lead shield of a betatron in x-ray generator for x-ray test equipment for safety checking of objects, comprises four shielding parts, of which two parts are semi-cylindrically formed and are provided with recesses in their lateral surfaces |
| 04/30/2008 | DE102006050947A1 Betatron for use in X-ray testing system, has control electronics that is provided for controlling current flow by tune coil during injection phase of electrons into torus-shaped betatron tube that is arranged between inner yoke parts |
| 04/24/2008 | WO2007135587A3 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus |
| 04/22/2008 | US7361918 High repetition rate laser produced plasma EUV light source |
| 04/17/2008 | WO2008044921A1 Method for regenerating a surface of an optical element in an xuv radiation source and xuv radiation source |
| 04/17/2008 | WO2008044319A1 Euv light generating apparatus and euv exposure apparatus |
| 04/17/2008 | US20080087840 Extreme ultra violet light source apparatus |
| 04/10/2008 | US20080083886 Optical system suitable for processing multiphoton curable photoreactive compositions |
| 04/09/2008 | EP1907804A2 Lpp euv light source drive laser system |
| 04/03/2008 | WO2008010710A3 Correction of spatial instability of an euv source by laser beam steering |
| 03/27/2008 | US20080073598 Extreme ultra violet light source apparatus |
| 03/25/2008 | US7348582 Light source apparatus and exposure apparatus having the same |
| 03/20/2008 | WO2008032050A1 Charged particle accelerator and radiation source |
| 03/20/2008 | US20080068575 Euv Light Source, Euv Exposure Equipment, And Semiconductor Device Manufacturing Method |
| 03/19/2008 | EP1899697A2 Euv light source collector lifetime improvements |
| 03/13/2008 | WO2008029327A2 Euv plasma discharge lamp with conveyor belt electrodes |
| 03/12/2008 | EP1897422A2 Method of protecting a radiation source producing euv-radiation and/or soft x-rays against short circuits |
| 03/12/2008 | CN100375219C Gas discharge lamp for EUV radiation |
| 03/05/2008 | CN100373994C Soft X ray light source of laser plasma for liquid microflow jetting target |
| 03/05/2008 | CN100373993C Method for obtaining an extraeme ultraviolet radiation source, radiation source and use in lithography |
| 03/04/2008 | US7339181 High flux, high energy photon source |
| 02/28/2008 | US20080048134 Light source device for producing extreme ultraviolet radiation and method of generating extreme ultraviolet radiation |
| 02/26/2008 | US7336764 Electron beam accelerator and ceramic stage with electrically-conductive layer or coating therefor |
| 02/26/2008 | US7335900 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 02/21/2008 | US20080043919 X-ray source assembly |
| 02/21/2008 | US20080043918 Apparatus for controlling radiation in a radiation generator |
| 02/20/2008 | EP1889523A2 High efficiency monochromatic x-ray source using an optical undulator |
| 02/20/2008 | EP1889522A1 Laser x-ray source apparatus and target used therefore |
| 02/14/2008 | US20080035865 Extreme ultra violet light source device |
| 02/13/2008 | EP1887841A1 Plasma generating apparatus and plasma generating method |
| 02/13/2008 | EP1886542A2 Gas discharge source, in particular for euv radiation |
| 02/12/2008 | US7328885 Plasma radiation source and device for creating a gas curtain for plasma radiation sources |
| 02/07/2008 | US20080031420 X-ray transmissive optical mirror apparatus |
| 02/07/2008 | DE102006036173A1 Pulse -operated gas discharge pumped radiation source e.g. excimer laser, pulse energy controlling method for semiconductor lithography application, involves changing charging voltage for pulse in comparison with voltage of previous pulse |
| 02/06/2008 | EP1885166A2 Extreme ultraviolet light source device and method of generating extreme ultraviolet radiation |
| 01/31/2008 | US20080023657 Extreme ultraviolet light source |
| 01/30/2008 | EP1883280A1 EUV light source device with raw material gasified by energy beam before plasma gets excited |
| 01/30/2008 | CN100366129C Method and arrangement for producing radiation |
| 01/29/2008 | US7323703 EUV light source |
| 01/29/2008 | US7323701 Gas discharge lamp |
| 01/24/2008 | WO2006078963A3 Method and system for generating mid-infrared light |
| 01/24/2008 | US20080019481 Monochromatic x-ray source and x-ray microscope using one such source |
| 01/24/2008 | US20080017801 EUV light source |
| 01/23/2008 | CN101111119A Micro-current target laser plasma soft X ray-extreme ultraviolet light source |
| 01/23/2008 | CN101111118A Stable liquid target laser plasma light source |
| 01/17/2008 | DE102006032607A1 Anordnung zur Erzeugung elektromagnetischer Strahlung und Verfahren zum Betreiben der Anordnung Arrangement for generating electromagnetic radiation and method for operating the arrangement |
| 01/17/2008 | DE102006032606A1 Erzeugung von elektromagnetischer Strahlung, insbesondere Röntgenstrahlung Generating electromagnetic radiation, in particular X-radiation |
| 01/10/2008 | US20080006783 Arrangement for the generation of extreme ultraviolet radiation by means of electric discharge at electrodes which can be regenerated |
| 01/08/2008 | US7317196 LPP EUV light source |
| 01/03/2008 | US20080002813 Apparatus system, and method for high flux, compact compton x-ray source |
| 12/25/2007 | US7312459 Apparatus for evaluating EUV light source, and evaluation method using the same |
| 12/19/2007 | EP1782663B1 A method and apparatus for generating radiation or particles by interaction between a laser beam and a target |
| 12/18/2007 | US7310408 System and method for X-ray generation by inverse compton scattering |
| 12/13/2007 | WO2006135928A3 Systems and methods for achieving a required spot says for nanoscale surface analysis using soft x-rays |
| 12/11/2007 | US7306015 Device and method for the creation of droplet targets |
| 12/06/2007 | WO2006130856A3 High efficiency monochromatic x-ray source using an optical undulator |
| 12/06/2007 | US20070278429 High flux, high energy photon source |
| 11/29/2007 | WO2007135587A2 A method of increasing the conversion efficiency of an euv and/or soft x-ray lamp and a corresponding apparatus |
| 11/29/2007 | US20070274455 Methods and Systems for Analyzing Samples Using Particle Irradition |
| 11/29/2007 | US20070272669 Laser Multiplexing |
| 11/29/2007 | DE102006024210A1 Selbstabgleichende driftfreie Hochfrequenz-Phasendetektor-Schaltung Self-adaptive drift-free high-frequency phase detector circuit |
| 11/28/2007 | CN100351699C Lithographic apparatus and device manufacturing method |
| 11/27/2007 | US7301972 Apparatus, system, and method for frequency stabilized mode-locked laser |
| 11/22/2007 | WO2007133144A1 Debris reduction in electron-impact x-ray sources |
| 11/22/2007 | WO2007066239A3 Soft x-ray generator |
| 11/22/2007 | US20070269013 Device and method for generating x-rays having different energy levels and material discrimination system |
| 11/22/2007 | DE102007020984A1 Vorrichtung und Verfahren zum Erzeugen von Röntgenstrahlen mit unterschiedlichen Energieniveaus und Materialbestimmungssystem Apparatus and method for generating X-rays having different energy levels and material identification system |
| 11/22/2007 | DE102006027856B3 Extreme ultraviolet radiation generating arrangement for semiconductor lithography, has electrodes immersed into containers, directed into vacuum chamber and re-guided into containers after electrical discharge between electrodes |
| 11/22/2007 | DE102006022970B3 UV-Lichtquelle UV-light source |
| 11/22/2007 | DE102006022823A1 Radiation source for producing extreme ultraviolet radiation, has two internal electrode plates firmly connected by isolation layer, and two external electrode plates arranged torque proof on both sides internal electrode |
| 11/20/2007 | US7297968 Debris collector for EUV light generator |
| 11/15/2007 | WO2007129891A1 Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby |
| 11/14/2007 | EP1854121A1 Method and apparatus for euv light source target material handling |
| 11/14/2007 | EP1854120A1 Monochromatic x-ray source and x-ray microscope using one such source |
| 11/14/2007 | EP1853882A2 Systems for protecting internal components of an euv light source from plasma-generated debris |
| 11/13/2007 | US7295653 Apparatus, system, and method for optical pulse gain enhancement for high-finesse external cavity |
| 11/06/2007 | US7291853 Discharge produced plasma EUV light source |
| 11/01/2007 | WO2006093783A3 Laser produced plasma euv light source |
| 11/01/2007 | US20070253535 Source of x-rays |
| 10/31/2007 | EP1305813A4 Plasma focus light source with active and buffer gas control |
| 10/31/2007 | CN101065999A Method and apparatus for generating radiation in the wavelength range from about 1 nm to about 30 nm, and use in a lithography device or in metrology |
| 10/18/2007 | DE102006017904A1 Extreme ultraviolet radiation production arrangement for production of semiconductor chips, has injection unit with target nozzle for production of defined droplet size and drop sequence |
| 10/16/2007 | US7282728 Modular fixture |
| 10/11/2007 | WO2005060321A3 Method and device for generating in particular euv radiation and/or soft x-ray radiation |
| 10/11/2007 | DE102006015641A1 Vorrichtung zur Erzeugung von extrem ultravioletter Strahlung mittels einer elektrisch betriebenen Gasentladung A device for generating extreme ultraviolet radiation by means of an electrically operated gas discharge |
| 10/10/2007 | CN100342759C Method of generating extreme ultraviolet radiation |
| 10/04/2007 | US20070228303 Light source |
| 10/04/2007 | US20070228300 Laser-Driven Light Source |
| 10/04/2007 | DE10339495B4 Anordnung zur optischen Detektion eines bewegten Targetstromes für eine gepulste energiestrahlgepumpte Strahlungserzeugung Arrangement for optical detection of a moving target current for a pulsed energy beam pumped radiation generation |
| 10/04/2007 | DE102006015640B3 Extreme ultraviolet radiation generating device for use in extreme ultraviolet lithography, has high voltage supply unit comprising capacitor battery, which consists of capacitor units that are arranged along round rings |
| 10/02/2007 | US7277526 Apparatus, system, and method for high flux, compact compton x-ray source |
| 09/27/2007 | WO2007108320A1 Apparatus and method for measuring profile of electronic beam and laser beam |
| 09/27/2007 | US20070223655 X-ray generating method and x-ray generating apparatus |
| 09/26/2007 | EP1837897A1 Laser plasma euv light source, target member, production method for target member, target supplying method, and euv exposure system |