Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05G - X-ray technique › H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma
Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
08/1998
08/13/1998WO1998035214A2 Soft x-ray microfluoroscope
08/12/1998EP0858249A1 Laser plasma X-ray source, and semiconductor lithography apparatus and method using the same
08/06/1998WO1998034234A1 Method and apparatus for producing extreme ultra-violet light for use in photolithography
07/1998
07/14/1998US5781608 X-ray exposure system
06/1998
06/25/1998WO1998027558A1 Method and apparatus for product x-radiation
06/09/1998US5763930 Plasma focus high energy photon source
06/02/1998US5761268 X-ray diagnostic apparatus
05/1998
05/14/1998WO1998020499A1 Spherical inertial electrostatic confinement device as a tunable x-ray source
05/14/1998WO1998019817A1 Plasma jet source using an inertial electrostatic confinement discharge plasma
05/14/1998CA2268465A1 Spherical inertial electrostatic confinement device as a tunable x-ray source
05/14/1998CA2268456A1 Plasma jet source using an inertial electrostatic confinement discharge plasma
04/1998
04/02/1998DE19743311A1 Target for generating pulsed x=ray and extreme ultraviolet radiation using pulsed laser radiation
03/1998
03/17/1998US5729583 Miniature x-ray source
03/04/1998EP0827280A2 Pulse generator
03/04/1998EP0826394A2 Charged particle beam apparatus and method for operating the same
03/04/1998CN1175128A Small solid klystron power source
02/1998
02/28/1998CA2213920A1 Compact solid state klystron power supply
02/05/1998WO1998005189A1 Device for generating ultra-short x-ray pulses
10/1997
10/30/1997WO1997040650A1 Method and apparatus for generating x-ray or euv radiation
10/22/1997EP0802705A2 Method and apparatus for generating high energy coherent electron beam and gamma-ray laser
10/21/1997US5680429 X-ray generating apparatus and X-ray microscope
09/1997
09/16/1997US5668848 X-ray target tape system
09/11/1997DE19608497A1 Medical X=ray diagnostic appts.
09/03/1997EP0792530A1 Low cost, high average power, high brightness solid state laser
08/1997
08/06/1997EP0788136A1 Anode assembly for generating x-rays and instrument with such anode assembly
08/05/1997US5654998 Laser-excited X-ray source
07/1997
07/03/1997WO1997024020A1 Method and device for characterising an ionised medium using an electromagnetic radiation source having an ultrashort duration
07/03/1997WO1997024019A1 Interferometric method and device for characterising a medium
06/1997
06/10/1997US5637962 Plasma wake field XUV radiation source
05/1997
05/22/1997DE19542679A1 X=ray spectrograph optics
05/07/1997DE19540195A1 X=ray fluorescence microscopy for low atomic number samples
04/1997
04/09/1997EP0766880A1 Holographic technique for extreme microcircuitry size reduction
03/1997
03/05/1997EP0752198A4 Off-axis scanning electron beam computed tomography system
02/1997
02/25/1997US5606588 Method and apparatus for generating laser plasma x-rays
02/11/1997US5602899 Anode assembly for generating x-rays and instrument with such anode assembly
01/1997
01/08/1997EP0752198A1 Off-axis scanning electron beam computed tomography system
11/1996
11/19/1996US5577092 Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
11/19/1996US5577091 Water laser plasma x-ray point sources
11/19/1996US5577090 Method and apparatus for product x-radiation
10/1996
10/15/1996US5566199 Holographic technique for extreme microcircuitry size reduction
07/1996
07/24/1996EP0723385A1 X-ray generating apparatus and x-ray microscope
07/23/1996US5539764 Laser generated X-ray source
05/1996
05/30/1996WO1996016484A1 Low cost, high average power, high brightness solid state laser
04/1996
04/02/1996US5504795 Plasma X-ray source
03/1996
03/12/1996US5499282 Efficient narrow spectral width soft-X-ray discharge sources
02/1996
02/27/1996US5495515 Method and apparatus for producing high-intensity X-rays or γ-rays
02/22/1996WO1996005600A1 A portable x-ray source and method for radiography
02/14/1996EP0696408A1 Laser-excited x-ray source
02/13/1996US5491734 Off-axis scanning electron beam computed tomography system
02/13/1996US5491707 Low cost, high average power, high brightness solid state laser
01/1996
01/23/1996US5487078 Apparatus and method for generating prompt x-radiation from gas clusters
12/1995
12/21/1995WO1995034901A1 Soft x-ray submicron lithography using multiply charged ions
12/05/1995US5473661 Apparatus for the production of short-wave electromagnetic radiation
10/1995
10/24/1995US5461656 Microwave X-ray source and methods of sterilization
10/17/1995US5459771 Water laser plasma x-ray point source and apparatus
09/1995
09/21/1995WO1995025370A1 Apparatus and method for generating prompt x-radiation from gas clusters
07/1995
07/18/1995US5434875 Low cost, high average power, high brightness solid state laser
07/06/1995WO1995018480A1 Holographic technique for extreme microcircuitry size reduction
06/1995
06/22/1995WO1995017081A1 Off-axis scanning electron beam computed tomography system
05/1995
05/31/1995EP0588863B1 Device for generating short-wave electromagnetic radiation
04/1995
04/05/1995EP0342208B1 X-ray lithography system comprising a thin target
01/1995
01/24/1995US5384794 Undulator where the wavelength of the radiation light is changed by varying the frequency of the electromagnetic wave travelling in the waveguide
01/17/1995US5383049 Elliptically polarizing adjustable phase insertion device
12/1994
12/20/1994US5375158 X-ray source for mammography
11/1994
11/10/1994WO1994026080A1 Laser-excited x-ray source
10/1994
10/11/1994US5355399 Portable X-ray source and method for radiography
10/04/1994US5353291 Laser synchrotron source (LSS)
08/1994
08/02/1994US5335258 Submicrosecond, synchronizable x-ray source
07/1994
07/05/1994US5327475 Soft x-ray submicron lithography using multiply charged ions
06/1994
06/21/1994US5323442 Microwave X-ray source and methods of use
05/1994
05/31/1994US5317574 Method and apparatus for generating x-ray and/or extreme ultraviolet laser
03/1994
03/09/1994EP0312587B1 Plasma focus apparatus with field distortion elements
09/1993
09/21/1993US5247562 Tunable source of monochromatic, highly-directional x-rays and a method for producing such radiation
09/07/1993US5243638 Apparatus and method for generating a plasma x-ray source
09/02/1993WO1993017446A1 A microwave x-ray source and methods of sterilization
07/1993
07/29/1993DE4119729A1 Einrichtung zum erzeugen kurzwelliger elektromagnetischer strahlung Means for generating short-wave electromagnetic radiation
07/13/1993US5227733 Inverse compton scattering apparatus
06/1993
06/23/1993EP0398995B1 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and use as electron gun
06/01/1993USH1200 Method or creating x-rays from a pulsed laser source using a gaseous medium
01/1993
01/19/1993CA1312908C Plasma x-ray tube, for the x-ray pre-ionisation of gas lasers
01/19/1993CA1312907C Plasma x-ray tube, in particular for x-ray preionization of gas lasers and method for producing x-radiation with such an x-ray tube
12/1992
12/29/1992US5175757 Apparatus and method to enhance X-ray production in laser produced plasmas
12/23/1992WO1992022993A1 Device for generating short-wave electromagnetic radiation
12/23/1992CA2111333A1 Device for generating short-wave electromagnetic radiation
12/16/1992CN1067121A X-ray converging-beam photoetching method and equipment thereof
12/08/1992US5170418 X-ray exposure apparatus
11/1992
11/03/1992CA1309772C Plasma focus apparatus with field distortion elements
09/1992
09/29/1992US5151928 Method and apparatus for generating x rays
09/15/1992US5148461 Circuits responsive to and controlling charged particles
09/15/1992US5148459 Power source for x-ray system
07/1992
07/28/1992US5134641 Plasma x-ray tube, in particular for x-ray preionizing of gas lasers, and an electron gun using the plasma x-ray tube
07/14/1992USRE33992 Pulsed X-ray lithography
03/1992
03/31/1992CA1298417C Portable radiography system using a relativistic electron beam
03/11/1992EP0474011A2 Method and apparatus for generating X rays
12/1991
12/27/1991EP0462756A2 X-ray exposure apparatus
12/27/1991EP0237559B1 Radiation source
11/1991
11/28/1991WO1991018401A1 Mask tray for and method of loading mask in lithography system
11/26/1991US5068884 X-ray generation system for an ultra fine lithography and a method therefor
08/1991
08/27/1991US5044004 Flash X-ray apparatus
07/1991
07/25/1991WO1991011043A1 Laser plasma x-ray source
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