Patents
Sitemap › H05 - Electric techniques not otherwise provided for › H05G - X-ray technique › H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma
Patents for H05G 2 - Apparatus or processes specially adapted for producing x-rays, not involving x-ray tubes, e.g. involving generation of a plasma (2,426)
09/2014
09/18/2014WO2014143504A1 Target for laser produced plasma extreme ultraviolet light source
09/18/2014WO2014139713A1 Radiation source that jets up liquid fuel to form plasma for generating radiation and recycle liquid fuel
09/18/2014US20140264093 Laser produced plasma euv light source
09/18/2014US20140264092 Extreme ultraviolet light source
09/18/2014US20140264091 Beam position control for an extreme ultraviolet light source
09/18/2014US20140264089 Apparatus and method for generating extreme ultra violet radiation
09/18/2014US20140264087 Target for laser produced plasma extreme ultraviolet light source
09/18/2014US20140261761 Method of and apparatus for supply and recovery of target material
09/16/2014US8837679 Supply of a liquid-metal target in X-ray generation
09/11/2014US20140254766 Method and arrangement for generating a jet of fluid, method and system for transforming the jet into a plasma, and uses of said system
09/11/2014US20140253894 Radiation Source
09/11/2014US20140253716 Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus
09/09/2014US8829478 Drive laser delivery systems for EUV light source
09/09/2014US8829477 Droplet generator with actuator induced nozzle cleaning
09/04/2014US20140246607 Euv light source using cryogenic droplet targets in mask inspection
08/2014
08/28/2014US20140239203 Target supply device and extreme ultraviolet light generation apparatus
08/21/2014WO2014126667A2 System and method for adjusting seed laser pulse width to control euv output energy
08/21/2014WO2014124769A1 Radiation source-collector and method for manufacture
08/21/2014WO2014096976A3 Method and device for generating narrowband, short-wave, coherent laser radiation, more particularly for xuv microscopy
08/21/2014US20140233005 System and Method for Adjusting Seed Laser Pulse Width to Control EUV Output Energy
08/20/2014EP2767145A1 Alignment system and extreme ultraviolet light generation system
08/19/2014US8809823 System and method for controlling droplet timing and steering in an LPP EUV light source
08/19/2014US8809818 EUV light source, EUV exposure apparatus, and electronic device manufacturing method
08/14/2014WO2014121873A1 Radiation source for an euv optical lithographic apparatus, and lithographic apparatus comprising such a power source
08/14/2014US20140226790 Mechanoluminescent x-ray generator
08/13/2014EP2764590A1 System and method for generating extreme ultraviolet light
08/13/2014CN203775509U 一种腔外精密可控的腔内喷气靶装置 An external cavity cavity precision controllable jet target device
08/12/2014US8804911 Nondestructive inspection system using nuclear resonance fluorescence
08/07/2014WO2014118999A1 Burst-laser generator using an optical resonator
08/07/2014WO2014118998A1 Two dimensional (2-d)-4-mirror optical resonator
08/07/2014US20140218706 Radiation source and lithographic apparatus
08/07/2014US20140217311 Chamber and extreme ultraviolet light generation apparatus
08/07/2014US20140216576 Gas lock device and extreme ultraviolet light generation apparatus
08/07/2014DE102013001940A1 Vorrichtung und Verfahren zur Erzeugung von EUV-und/oder weicher Röntgenstrahlung Apparatus and method for generating EUV and / or soft X-rays
08/06/2014CN101896980B 传输具有小束斑尺寸的粒子束的粒子束传输设备和方法 Transfer with a particle beam apparatus and method for transmitting small beam spot size of the particle beam
08/05/2014US8796652 Laser sustained plasma bulb including water
07/2014
07/31/2014WO2014116371A1 Thermal monitor for an extreme ultraviolet light source
07/31/2014US20140211184 Radiation Source
07/31/2014US20140209819 Target supply device and euv light generation chamber
07/31/2014US20140209817 Radiation Source and Method for Lithographic Apparatus for Device Manufacture
07/24/2014WO2014111097A1 Enhancement resonator including non-spherical mirrors
07/24/2014US20140203195 Thermal Monitor For An Extreme Ultraviolet Light Source
07/24/2014US20140203194 System and method for generating extreme ultra violet light
07/24/2014US20140203193 Radiation Source
07/22/2014US8787529 Compact coherent current and radiation source
07/22/2014US8785895 Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus
07/22/2014US8785893 Extreme ultraviolet light source and positioning method of light focusing optical means
07/22/2014US8785891 Adaptive shade window for plasma operations
07/17/2014WO2014109876A1 Method of timing laser beam pulses to regulate extreme ultraviolet light dosing
07/17/2014DE102013000407A1 Verfahren zur Verbesserung der Benetzbarkeit einer rotierenden Elektrode in einer Gasentladungslampe A method for improving the wettability of a rotating electrode in a gas discharge lamp
07/16/2014EP2755452A1 Method for improving the wetting properties of a rotary electrode in a gas discharge lamp
07/16/2014CN103929871A 一种腔外精密可控的腔内喷气靶装置 An external cavity precision controlled chamber jet target device
07/10/2014WO2014106356A1 Extreme uv light generation device with pre-shaped and enhanced target source
07/10/2014US20140191108 Alignment system and extreme ultraviolet light generation system
07/09/2014EP2752098A1 Radiation source
07/03/2014WO2014101565A1 Ct device and method thereof
07/03/2014US20140183379 System and method for generating extreme ultraviolet light
07/01/2014US8766212 Correction of spatial instability of an EUV source by laser beam steering
06/2014
06/26/2014WO2014098181A1 Extreme ultraviolet light generation system and extreme ultraviolet generation apparatus
06/26/2014WO2014097811A1 Apparatus for controlling laser beam, and apparatus for generating extreme uv light
06/26/2014WO2014096976A2 Method and device for generating narrowband, short-wave, coherent laser radiation, more particularly for xuv microscopy
06/26/2014WO2014095262A1 Beam delivery for euv lithography
06/26/2014WO2014095261A1 Beam delivery for euv lithography
06/26/2014US20140176005 Method of Calibrating a DPP-Generated EUV Light Source
06/25/2014EP2747090A1 Radiation generating apparatus and radiation generating method
06/25/2014EP2745650A1 Energy sensors for light beam alignment
06/25/2014EP2745649A2 Short period undulator
06/25/2014EP2745648A1 Radiation source and method for lithographic apparatus and device manufacturing method
06/25/2014CN103889136A 一种机械式x射线源 A mechanical-type x-ray source
06/25/2014CN102257883B 用于以提高的效率生成euv辐射或软x射线的方法和装置 Method and apparatus for generating euv to improve efficiency or soft x-ray radiation
06/25/2014CN101978791B 靶材、源、euv光刻设备和使用该设备的器件制造方法 Target source, euv lithographic apparatus and a device manufacturing method using the apparatus
06/24/2014US8759804 Chamber apparatus and extreme ultraviolet light generation system
06/19/2014WO2014090480A1 Power source for a lithographic apparatus, and lithographic apparatus comprising such a power source
06/19/2014WO2014062351A3 Target material supply for an extreme ultraviolet light source
06/19/2014US20140166907 Apparatus and method for generating extreme ultra violet radiation
06/18/2014EP2742780A1 Radiation source
06/18/2014EP2742387A1 Radiation source and lithographic apparatus
06/12/2014US20140160453 Radiation source
06/12/2014US20140160450 Radiation source and method for lithographic apparatus and device manufacturing method
06/12/2014US20140159581 Method and device for generating optical radiation by means of electrically operated pulsed discharges
06/11/2014EP2740333A1 Method and device for generating optical radiation by means of elecctrically operated pulsed discharges
06/11/2014CN203645903U 一种碎屑收集装置和包含该收集装置的euv光源系统 Euv light source system and a debris collecting device that contains the collection device
06/11/2014CN103858176A Radiation generating apparatus and radiation generating method
06/11/2014CN102289158B Radiation system and lithographic apparatus
06/10/2014US8749756 Lithographic apparatus and device manufacturing method
06/10/2014US8748853 Chamber apparatus
06/05/2014WO2014082811A1 Droplet generator, euv radiation source, lithographic apparatus, method for generating droplets and device manufacturing method
06/05/2014US20140151583 Alignment of light source focus
06/05/2014US20140151582 Droplet Dispensing Device and Light Source Comprising Such a Droplet Dispensing Device
06/05/2014DE102012113005B3 Verfahren und Vorrichtung zur Ansteuerung einer Resonanzladeschaltung Method and apparatus for driving a resonant load circuit
06/04/2014CN103843463A Radiation source
06/03/2014US8742378 Target supply unit
05/2014
05/28/2014EP2736307A1 X-ray generating device and method for controlling x-ray generating device
05/27/2014US8737570 Gamma ray generator
05/22/2014WO2014075881A1 Radiation source and method for lithography
05/21/2014EP2732558A1 Power supply for a discharge produced plasma euv source
05/15/2014WO2014072149A2 Method and apparatus for generating radiation
05/15/2014WO2013189827A3 Radiation source and lithographic apparatus.
05/15/2014US20140131587 Extreme ultraviolet light source apparatus
05/14/2014CN101978792B 用于在激光致等离子体euv光源中输送靶材料的系统和方法 System and method in a laser-induced plasma source in euv for transporting the target material
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