Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1999
08/31/1999CA2139267C Multi-layer wiring substrate
08/26/1999WO1999043192A1 Device for positioning electronic circuits arranged on a foil
08/26/1999WO1999043031A1 Display devices
08/26/1999WO1999043030A1 Mos transistor memory cell and method for producing the same
08/26/1999WO1999043029A1 Trench-gate mos transistor, its use in an eeprom device and process for manufacturing the same
08/26/1999WO1999043026A1 Method and apparatus for improving gap-fill capability using chemical and physical etchbacks
08/26/1999WO1999043025A1 Low dielectric constant films with high glass transition temperatures made by electron beam curing
08/26/1999WO1999043024A1 Method for limiting internal diffusion in a semiconductor device with composite si/sige gate
08/26/1999WO1999043023A1 Method for nitriding the gate oxide layer of a semiconductor device and resulting device
08/26/1999WO1999043022A1 Thermal cycling module and process using radiant heat
08/26/1999WO1999043021A1 End effector for wafer handler in processing system
08/26/1999WO1999043018A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition
08/26/1999WO1999043017A1 Rf powered plasma enhanced chemical vapor deposition reactor and methods
08/26/1999WO1999042945A1 Non-lot based method for assembling integrated circuit devices
08/26/1999WO1999042904A1 Filter for extreme ultraviolet lithography
08/26/1999WO1999042897A1 Active matrix substrate, electro-optic device, method of manufacturing active matrix substrate, and electronic device
08/26/1999WO1999042636A1 Cvd reactor and use thereof
08/26/1999WO1999042635A1 Apparatus and method for depositing a semiconductor material
08/26/1999WO1999042289A1 Method and apparatus for removing die from a wafer and conveying die to a pickup location
08/26/1999WO1999042282A1 A-site and/or b-site modified pbzrtio3 materials and films
08/26/1999WO1999042256A1 Single drive, dual plane robot
08/26/1999WO1999042227A1 Multistage flow-rate washing method and multistage flow-rate washing device
08/26/1999WO1999042200A1 Aerosol method and apparatus for making particulate products
08/26/1999WO1999033119A3 Power semiconductor devices
08/26/1999WO1999031720A3 Thin film transistors and electronic devices comprising such
08/26/1999WO1999030369A3 Thin film transistors and electronic devices comprising such
08/26/1999WO1999030363A3 Semiconductor device and method of manufacturing such a device
08/26/1999WO1999030358A3 Ion implantation process
08/26/1999WO1999028914A3 Programmable sub-surface aggregating metallization structure and method of making same
08/26/1999WO1999002251A3 Bulk chemical delivery system
08/26/1999DE19905749A1 CMOS standby current reduction circuit
08/26/1999DE19900610A1 Power semiconductor device e.g. a transistor or diode is protected against external contamination
08/26/1999DE19900091A1 Semiconductor silicon wafers with oxidation annealing to eliminate surface and internal defects
08/26/1999DE19860163A1 Appliance for dry etching a wafer and related method for removing the coating from a defined edge zone on underside of the wafer
08/26/1999DE19845858A1 Semiconductor device and method for manufacturing it
08/26/1999DE19844451A1 Barrier layer structure, especially for copper interconnections in a VLSI
08/26/1999DE19843947A1 Alignment of a semiconductor component in error detection equipment
08/26/1999DE19843160A1 Semiconductor device and method for manufacturing it
08/26/1999DE19840988A1 Method for manufacturing a contact structure for integrated circuits
08/26/1999DE19822797A1 Embedded DRAM produced by simplified, reduced cost process
08/26/1999DE19805786A1 Halbleiterbauelement mit Struktur zur Vermeidung von Querströmen A semiconductor device with structure to prevent cross flow
08/26/1999DE19748844C1 Dummy template determining tolerances when populating circuit boards
08/25/1999EP0938139A2 Microwave and millimeter wave device
08/25/1999EP0938138A2 Fet array for operation at different power levels
08/25/1999EP0938136A1 Semiconductor device with salicide structure and fabrication method thereof
08/25/1999EP0938135A2 Method and apparatus for machining an electrically conductive film
08/25/1999EP0938134A2 Plasma processing method
08/25/1999EP0938133A2 Etching process for forming a rough surface of a semiconductor
08/25/1999EP0938132A2 Porous region removing method and semiconductor substrate manufacturing method
08/25/1999EP0938130A2 A process for fabricating a device with shallow junctions
08/25/1999EP0938129A1 Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof
08/25/1999EP0938074A1 Active matrix display device and method of driving the same
08/25/1999EP0938031A1 A process for device fabrication using a variable transmission aperture
08/25/1999EP0938009A1 Optical device and a microlithography projection exposure system with passive thermal compensation
08/25/1999EP0937991A2 System and method for determining the delay makeup of a circuit
08/25/1999EP0937986A2 Single cable, single point, stimulus and response probing system and method
08/25/1999EP0937790A2 Method of making GaN single crystal and apparatus for making GaN single crystal
08/25/1999EP0937691A1 Process for etching a conductive layer
08/25/1999EP0937541A2 Probe end cleaning sheet
08/25/1999EP0937535A1 Energy beam processing method and processing apparatus therefor
08/25/1999EP0937530A1 Method for making wire connections to semiconductor chips
08/25/1999EP0937509A1 Sponge roller for cleaning
08/25/1999EP0937308A1 Micromachining using high energy light ions
08/25/1999EP0937302A1 Spin dependent tunneling memory
08/25/1999EP0890050A4 Method and apparatus for pressure control in vacuum processors
08/25/1999EP0830686A4 Negative voltage switching circuit
08/25/1999EP0823131B1 Read-only storage cell arrangement and process for its production
08/25/1999EP0815594B1 Read-only storage cell arrangement and process for its production
08/25/1999EP0815590A4 Method for making improved lsco stack electrode
08/25/1999EP0618535B1 EEPROM card with defective cell substitution and cache memory
08/25/1999EP0602250B1 Thin film transistor, display device, and method for manufacturing thin film transistor
08/25/1999CN1227015A Programmable switch, adjustable capacitance and resonant circuit effected by means of such switch
08/25/1999CN1227001A Floating gate memory cell with charge leakage prevention
08/25/1999CN1227000A Process for producing barrier-free semiconductor storage assemblies
08/25/1999CN1226999A Semiconductor device with layer of precious metal and process for production of same
08/25/1999CN1226998A Aqueous cleaning solution for semiconductor substrate
08/25/1999CN1226990A Programmable metallization cell and method of making
08/25/1999CN1226914A Pressure-sensitive adhesive having excellent heat resistance and heat conductivity, adhesive sheets, and method of securing electronic component to heat-radiating member therewith
08/25/1999CN1226903A Perfluorinated hydrocarbon polymer-filled adhesive formulations and use thereof
08/25/1999CN1226758A Testing IC socket
08/25/1999CN1226753A Field effect transistors with vertical gate side walls and method for making such transistors
08/25/1999CN1226752A Field effect transistors with improved implants and method for making such transistors
08/25/1999CN1226751A Semiconductor device
08/25/1999CN1226748A Memory unit and manufacture thereof
08/25/1999CN1226747A Semiconductor device and manufacturing method thereof
08/25/1999CN1226746A Multi-layer solder seal band for semiconductor substrates and process thereof
08/25/1999CN1226745A Method to incorporate non-volatile memory and logic components into single sub-0.3 micron fabrication process for embedded non-volatile memory
08/25/1999CN1226744A Planarization of non-conformal device layer in semiconductor fabrication
08/25/1999CN1226743A Semiconductor device having shallow isolation trench
08/25/1999CN1226742A Method for manufacturing semiconductor device
08/25/1999CN1226741A Method for making field effect transistors having sub-lithographic gates with vertical side walls
08/25/1999CN1226740A Plasma processing apparatus
08/25/1999CN1226565A Copolymer resin, preparation thereof, and photoresist using the same
08/25/1999CN1044840C Method of using GaN/Al2O3 composite material as substrate in epitaxial growth of III-V families nitride
08/25/1999CN1044839C Plate-free phototching process for manufacturing vacuum microelectronic devices
08/25/1999CN1044833C Alcohol-sensitive tin dioxide element and manufacture thereof
08/24/1999US5943638 Position detecting method by reflected scattered light of a laser beam applied to a position-detected object
08/24/1999US5943602 Method to cure mobile ion contamination in semiconductor processing
08/24/1999US5943601 Depositing group 4a metal underlayer onto substrate; depositing aluminum or aluminum alloy layer which is in electrical contact with metal underlayer
08/24/1999US5943600 Treatment of a titanium nitride layer to improve resistance to elevated temperatures