Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/1999
09/23/1999DE19847684A1 Semiconductor device e.g. for CMOS SRAM
09/23/1999DE19845294A1 Semiconductor device with silicon-on-insulator structure
09/23/1999DE19843650A1 Semiconductor device production process for producing a laser cut device with a rear plated heat sink
09/23/1999DE19841764A1 Semiconductor component with a chip having a lead-on-chip structure mounted on a lead structuring substrate
09/23/1999DE19833570A1 Multi-port semiconductor memory with grouped bitlines
09/23/1999DE19825608C1 Integrated circuit
09/23/1999DE19821452A1 Etching of a silicon nitride layer especially a cover layer on a polysilicon gate or a mask layer in shallow trench isolation production
09/23/1999DE19816927A1 Metal deposition onto a substrate surface with a recess especially a sub-micron size via in semiconductor device production
09/23/1999DE19816219C1 Semiconductor element with capacitive storage element
09/23/1999DE19812212A1 MOS-Transistor in einer Ein-Transistor-Speicherzelle mit einem lokal verdickten Gateoxid und Herstellverfahren MOS transistor in a one-transistor memory cell with a locally thickened gate oxide and manufacturing processes
09/23/1999DE19811965A1 Three-dimensional crystalline silicon structures are produced e.g. for micromechanical sensors, actuators and light guide components
09/23/1999DE19811882A1 DRAM cell arrangement
09/23/1999DE19811878A1 Verfahren zum naßchemischen pyramidalen Texturätzen von Siliziumoberflächen A method for wet chemical pyramidal texture etching of silicon surfaces
09/23/1999DE19805624A1 Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen Lock for opening and closing of cleanroom transport boxes
09/23/1999CA2324151A1 Chemical mechanical polishing slurry useful for copper substrates
09/23/1999CA2323583A1 Method for making smart cards using isotropic thermoset adhesive materials
09/23/1999CA2323582A1 Method for making tamper-preventing, contact-type, smart cards
09/23/1999CA2288021A1 Method and apparatus for direct writing of semiconductor die using microcolumn array
09/22/1999EP0944114A2 Process for the wet etching of a pyramidal texture on silicium surfaces
09/22/1999EP0944090A2 Semiconductor memory device
09/22/1999EP0943398A2 Surface grinding machine and workpiece carrier used therefor
09/22/1999EP0943390A2 Multi-laser combustion surface treatment
09/22/1999EP0943158A2 Affinity based self-assembly systems and devices for photonic and electronic applications
09/22/1999EP0943156A1 METHOD FOR PRODUCING A MATRIX FROM THIN-FILM TRANSISTORS, INCLUDING WITH a:Si-H AS SEMICONDUCTOR, INTENDED FOR LIQUID CRYSTAL DISPLAYS
09/22/1999EP0943155A1 Method for anisotropic etching of silicon
09/22/1999EP0943127A1 Method for testing and for generating a mapping for an electronic device
09/22/1999EP0943119A1 Reticle that compensates for lens error in a photolithographic system
09/22/1999EP0943088A1 Wafer inspection system for distinguishing pits and particles
09/22/1999EP0907905A4 Process for modulating interferometric lithography patterns to record selected discrete patterns in photoresist
09/22/1999EP0807191B1 Method and device for protecting the susceptor during epitaxial growth by cvd
09/22/1999EP0793736B1 Process for preparing micromechanical components having free-standing microstructures or membranes
09/22/1999EP0721514B1 Magnetically enhanced multiple capacitive plasma generation apparatus and related method
09/22/1999EP0712447B1 Welded susceptor assembly
09/22/1999CN1229525A Semiconductor package and method for manufacturing the same
09/22/1999CN1229524A Semiconductor device and its manufacture method
09/22/1999CN1229523A Method of manufacturing semiconductor device with multilayer wiring
09/22/1999CN1229522A Detergent for lithography
09/22/1999CN1229496A Method for making smart cards and resulting cards
09/22/1999CN1229445A Single crystal SiC and process for preparing the same
09/22/1999CN1229280A Semiconductor device and method of manufacturing thereof
09/22/1999CN1229278A Semiconductor device and method for manufacturing same
09/22/1999CN1229277A Method for making capacitor of dynamic RAM
09/22/1999CN1229276A Capacitor of dynamic RAM and method for making bottom electrode thereof
09/22/1999CN1229275A Capacitor of dynamic RAM and method for making bottom electrode thereof
09/22/1999CN1229274A Method of manufacturing semiconductor device
09/22/1999CN1229273A Mehtod for making semiconductor device
09/22/1999CN1229272A Method for making dynamic RAM and metal link
09/22/1999CN1229271A Method for making dielectric layer window
09/22/1999CN1229270A Semiconductor apparatus and method for manufacturing same
09/22/1999CN1229269A Operating method and device of base plate and sticking checking method and device used thereof
09/22/1999CN1229268A Metal interlayer dielectric layer and making method thereof
09/22/1999CN1229267A Nest for dicing, and method and apparatus for cutting tapeless substrate using the same
09/22/1999CN1229266A Manufacturing process for semiconductor device
09/22/1999CN1229265A Method for preventing failure in semiconductor fabricating process due to change in process condition recipe
09/22/1999CN1229051A Wafer cassette transfer system and method
09/22/1999CN1229050A Automated transportation system and method capable of recognizing wafer carrier related data
09/22/1999CN1045218C System for conveying liquid at special speed using supersonic vibrator
09/21/1999USRE36311 Integrated high-voltage bipolar power transistor and low voltage MOS power transistor structure in the emitter switching configuration and relative manufacturing process
09/21/1999US5956618 Process for producing multi-level metallization in an integrated circuit
09/21/1999US5956617 Method of manufacturing a semiconductor device employing salicide technology
09/21/1999US5956616 Method of depositing thin films by plasma-enhanced chemical vapor deposition
09/21/1999US5956615 Method of forming a metal contact to landing pad structure in an integrated circuit
09/21/1999US5956614 Process for forming a metal-silicide gate for dynamic random access memory
09/21/1999US5956613 Carbon is scavenged by introducing scavenger gases to react with carbon
09/21/1999US5956612 High aspect ratio contact structures.
09/21/1999US5956611 Field emission displays with reduced light leakage
09/21/1999US5956610 Method and system for providing electrical insulation for local interconnect in a logic circuit
09/21/1999US5956609 Method for reducing stress and improving step-coverage of tungsten interconnects and plugs
09/21/1999US5956608 Modulating surface morphology of barrier layers
09/21/1999US5956607 Laser wire bonding for wire embedded dielectrics to integrated circuits
09/21/1999US5956606 Method for bumping and packaging semiconductor die
09/21/1999US5956605 Use of nitrides for flip-chip encapsulation
09/21/1999US5956604 Ohmic contact to Gallium Arsenide using epitaxially deposited Cobalt Digermanide
09/21/1999US5956603 Gas immersion laser annealing method suitable for use in the fabrication of reduced-dimension integrated circuits
09/21/1999US5956602 Deposition of polycrystal Si film
09/21/1999US5956601 Method of mounting a plurality of semiconductor devices in corresponding supporters
09/21/1999US5956600 Method of manufacturing a semiconductor device
09/21/1999US5956599 Method for forming isolation layer in semiconductor device
09/21/1999US5956598 Method for fabricating a shallow-trench isolation structure with a rounded corner in integrated circuit
09/21/1999US5956597 Method for producing SOI & non-SOI circuits on a single wafer
09/21/1999US5956596 Method of forming and cleaning a laser marking region at a round zone of a semiconductor wafer
09/21/1999US5956595 Method of fabricating a semiconductor integrated circuit having a capacitor with lower electrode comprising titanium nitride
09/21/1999US5956594 Method for simultaneously forming capacitor plate and metal contact structures for a high density DRAM device
09/21/1999US5956593 Semiconductor device comprising an MOS capacitance
09/21/1999US5956592 Method of manufacturing a semiconductor device having polysilicon resistors with a specific resistance ratio resistant to manufacturing processes
09/21/1999US5956591 Method of making NMOS and PMOS devices having LDD structures using separate drive-in steps
09/21/1999US5956590 Process of forming a field effect transistor without spacer mask edge defects
09/21/1999US5956589 Method of forming narrow thermal silicon dioxide side isolation regions in a semiconductor substrate and MOS semiconductor devices fabricated by this method
09/21/1999US5956588 High withstand voltage transistor and method for manufacturing the same
09/21/1999US5956587 Method for crown type capacitor in dynamic random access memory
09/21/1999US5956586 Semiconductor memory device and method of manufacturing the same
09/21/1999US5956585 Method of forming a self-aligned damage-free buried contact
09/21/1999US5956584 Method of making self-aligned silicide CMOS transistors
09/21/1999US5956583 Method for forming complementary wells and self-aligned trench with a single mask
09/21/1999US5956582 Current limiting circuit with continuous metallization
09/21/1999US5956581 Crystalline silicon film on a glass substrate or a substrate having an insulating surface at a relatively low temperature
09/21/1999US5956580 Method to form ultra-short channel elevated S/D MOSFETS on an ultra-thin SOI substrate
09/21/1999US5956579 Semiconductor, semiconductor device, and method for fabricating the same
09/21/1999US5956577 Method of manufacturing serrated gate-type or joined structure
09/21/1999US5956575 Microconnectors
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