Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1999
08/31/1999US5946213 Intelligent adc reclassification of previously classified propagator defects
08/31/1999US5946195 Semiconductor device, method of making the same and mounting the same, circuit board and flexible substrate
08/31/1999US5946184 Electrostatic chuck, and method of and apparatus for processing sample
08/31/1999US5946183 Electrostatic chuck
08/31/1999US5946178 Protective circuit for series-connected power semiconductors
08/31/1999US5946138 Illumination optical system, exposure device and device manufacturing method
08/31/1999US5946082 Interference removal
08/31/1999US5946034 Charge/voltage conversion device
08/31/1999US5945846 Clock driver circuit in a centrally located macro cell layout region
08/31/1999US5945841 Block segmentation of configuration lines for fault tolerant programmable logic device
08/31/1999US5945834 Semiconductor wafer package, method and apparatus for connecting testing IC terminals of semiconductor wafer and probe terminals, testing method of a semiconductor integrated circuit, probe card and its manufacturing method
08/31/1999US5945740 Semiconductor device
08/31/1999US5945739 Semiconductor device having a conductor through an inter-level layer and a spin-on-glass in the inter-level layer with substantially planar upper surfaces of the conductor, the inter-level layer, and the spin-on-glass
08/31/1999US5945738 Dual landing pad structure in an integrated circuit
08/31/1999US5945737 Thin film or solder ball including a metal and an oxide, nitride, or carbide precipitate of an expandable or contractible element
08/31/1999US5945734 Wire-bond free input/output interface for GaAs ICs with means of determining known good die
08/31/1999US5945730 Semiconductor power device
08/31/1999US5945729 Technique for attaching die to leads
08/31/1999US5945728 Lead frame capacitor and capacitively coupled isolator circuit
08/31/1999US5945726 Lateral bipolar transistor
08/31/1999US5945725 Spherical shaped integrated circuit utilizing an inductor
08/31/1999US5945724 Trench isolation region for semiconductor device
08/31/1999US5945719 Substrates with silicon layer over substrates and with barrier layer of nitride, metal silicide and silicon layer
08/31/1999US5945718 Transistors and semiconductors with gallium oxide layer
08/31/1999US5945716 Semiconductor wafer and device structure
08/31/1999US5945715 Semiconductor memory device having a memory cell region and a peripheral circuit region and method of manufacturing the same
08/31/1999US5945713 Semiconductor chip
08/31/1999US5945712 Semiconductor device having a SOI structure with substrate bias formed through the insulator and in contact with one of the active diffusion layers
08/31/1999US5945711 Thin film transistor
08/31/1999US5945710 Semiconductor device with doped contact impurity regions having particular doping levels
08/31/1999US5945709 Integrated circuit die having thick bus to reduce distributed resistance
08/31/1999US5945707 DRAM cell with grooved transfer device
08/31/1999US5945706 Memory device
08/31/1999US5945705 Three-dimensional non-volatile memory
08/31/1999US5945704 Semiconductor integrated circuit
08/31/1999US5945703 Semiconductor memory device and manufacturing method therefor
08/31/1999US5945702 Semiconductor memory device with peripheral dummy cell array
08/31/1999US5945700 Semiconductor device having a semiconductor switch structure
08/31/1999US5945698 Field effect transistor assemblies and transistor gate block stacks
08/31/1999US5945697 MOS transistor and charge detector using same
08/31/1999US5945695 Multilayer; indium, arsenic, gallium intermetallic channel layer
08/31/1999US5945694 Compound semiconductor device having reduced temperature variability
08/31/1999US5945693 Field-effect transistor
08/31/1999US5945692 Semiconductor device and method of fabricating same
08/31/1999US5945690 Applying free radical particles to mask
08/31/1999US5945687 Quantization functional device, quantization functional apparatus utilizing the same, and method for producing the same
08/31/1999US5945686 Tunneling electronic device
08/31/1999US5945683 Electron beam exposure device
08/31/1999US5945682 Space-saving ion-implantation system installed both in and adjacent to a semiconductor manufacturing line
08/31/1999US5945681 Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
08/31/1999US5945355 Integrated circuit fabrication
08/31/1999US5945354 Method for reducing particles deposited onto a semiconductor wafer during plasma processing
08/31/1999US5945353 Plasma processing method
08/31/1999US5945352 Semiconductors and shields with photoresist pattern masks
08/31/1999US5945351 Protective chambers with covers for semiconductors and etching
08/31/1999US5945350 Masking with silicon over nitride film using patterns
08/31/1999US5945349 Method of enabling analysis of defects of semiconductor device with three dimensions
08/31/1999US5945348 Method for reducing the heights of interconnects on a projecting region with a smaller reduction in the heights of other interconnects
08/31/1999US5945347 Rotating wafer carrier
08/31/1999US5945346 Chemical mechanical planarization system and method therefor
08/31/1999US5945259 Covering first photoresist pattern with another as etching buffer, etching connector using both patterns as etching mask, then removing second pattern and again etching using first pattern as mask, preventing undercutting, sharp edges
08/31/1999US5945256 Reducing detectable variations in brightness or electrical properties near the boundaries of exposure regions in liquid crystal displays or microelectronic devices
08/31/1999US5945254 Crosslinking dielectric layer by using ultraviolet, ion beam or electron beam radiation while keeping termperature below recrystallization temperature of the thin film metal, for preventing warping, metal interdiffusion and corrosion
08/31/1999US5945253 A polyether containing atleast some monomer repeat units with photosensitivity imparting epoxy substituents which enable crosslinking or chain extensiion of the polymer upon exposure to actinic radiation
08/31/1999US5945250 Positive photosensitive composition
08/31/1999US5945239 Adjustment method for an optical projection system to change image distortion
08/31/1999US5945237 Halftone phase-shift mask and halftone phase-shift mask defect correction method
08/31/1999US5945188 Insulating film of adhesive layer, polyamide resin, inorganic filler, epoxy resin layer with siloxane
08/31/1999US5945161 Apparatus and method for supplying process solution to surface of substrate to be processed
08/31/1999US5945155 Low dielectric constant amorphous fluorinated carbon and method of preparation
08/31/1999US5945130 Apparatus for circuit encapsulation
08/31/1999US5945012 Tumbling barrel plasma processor
08/31/1999US5944941 Turning-over machine and polishing apparatus
08/31/1999US5944940 Wafer transfer system and method of using the same
08/31/1999US5944939 Wet station apparatus having quartz heater monitoring system and method of monitoring thereof
08/31/1999US5944907 Cleaning device and method
08/31/1999US5944906 Treating surface with hydrofluoric acid, then with surfactant, then with ammonium hydroxide and second surfactant, rinsing
08/31/1999US5944904 Substrate carrier having a streamlined shape and method for thin film formation
08/31/1999US5944902 Plasma source for HDP-CVD chamber
08/31/1999US5944899 Inductively coupled plasma processing chamber
08/31/1999US5944894 Substrate treatment system
08/31/1999US5944889 Methods of heat-treating semiconductor wafers
08/31/1999US5944857 Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor
08/31/1999US5944836 Clock signal distributing circuit
08/31/1999US5944602 For the transport of at least one electronic component
08/31/1999US5944590 Polishing apparatus having retainer ring rounded along outer periphery of lower surface and method of regulating retainer ring to appropriate configuration
08/31/1999US5944589 Abrasive pad and manufacturing method thereof and substrate polishing method using said abrasive pad
08/31/1999US5944583 For polishing a semiconductor wafer
08/31/1999US5944580 For a chemical mechanical polishing apparatus
08/31/1999US5944537 Photolithographically patterned spring contact and apparatus and methods for electrically contacting devices
08/31/1999US5944476 Unitary specimen prealigner and continuously rotatable multiple link robot arm mechanism
08/31/1999US5944475 Rotated, orthogonal load compatible front-opening interface
08/31/1999US5944422 Apparatus for measuring the processing temperature of workpieces particularly semiconductor wafers
08/31/1999US5944194 300 mm microenvironment pod with door on side
08/31/1999US5944193 Wafer storing system having vessel coating with ozone-proof material and method of storing semiconductor wafer
08/31/1999US5944043 Isolation and protection system for preventing a source of ultra-purified water from being contaminated with chemicals
08/31/1999US5944038 Wafer restraining device
08/31/1999US5943880 Cooling apparatus, cooling method, and processing apparatus
08/31/1999US5943752 Of electronic components
08/31/1999US5943726 Substrate processing apparatus
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