Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1999
08/24/1999US5942448 Method of making contacts on an integrated circuit
08/24/1999US5942447 Method of selectively etching compound semiconductor and method of manufacturing compound semiconductor device using the selective etching method
08/24/1999US5942446 Substrate having silicon containing dielectric layer and hard mask layer is partially plasma etched by etchant gas comprising fluorocarbon gas, forming fluorocarbon polymer hard mask layer; further plasma etching with fluoro etchant gas
08/24/1999US5942445 Method of manufacturing semiconductor wafers
08/24/1999US5942376 Shelf-stable liquid metal arylketone alcoholate solutions and use thereof in photoinitiated patterning of thin films
08/24/1999US5942371 Containing an acrylic polymer
08/24/1999US5942369 Positive photoresist composition
08/24/1999US5942357 Aligning a substrate pattern on a photosensitive surface of a substrate with an image of a mask pattern to be formed by exposing radiation through a projection optical system using an alignment sensor detecting a positional relationship
08/24/1999US5942328 For electronic devices
08/24/1999US5942286 Method for manufacturing organic monomolecular film
08/24/1999US5942282 Method for depositing a titanium film
08/24/1999US5942131 Treatment of a surface having an expose silicon/silica interface
08/24/1999US5942075 Plasma processing apparatus
08/24/1999US5942049 Increasing stabilized performance of amorphous silicon based devices produced by highly hydrogen diluted lower temperature plasma deposition
08/24/1999US5942042 Apparatus for improved power coupling through a workpiece in a semiconductor wafer processing system
08/24/1999US5942041 Non-sticking semi-conductor wafer clamp and method of making same
08/24/1999US5942040 Multi-target manipulator for pulsed laser deposition apparatus
08/24/1999US5942039 Self-cleaning focus ring
08/24/1999US5942037 Rotatable and translatable spray nozzle
08/24/1999US5942013 Substrate processing system
08/24/1999US5942012 Heat treatment apparatus
08/24/1999US5941759 Lapping method using upper and lower lapping turntables
08/24/1999US5941678 Overhead traveling carrier system for speedily conveying load and method of controlling thereof
08/24/1999US5941083 To be processed to a target temperature
08/24/1999US5940985 Apparatus and method for drying substrates
08/24/1999US5940964 Fabrication process for circuit substrate having interconnection leads
08/24/1999CA2075253C Method and apparatus for measuring deviation
08/24/1999CA2051554C Thin film deposition method
08/24/1999CA2051529C Thin film deposition method for wafer
08/19/1999WO1999041957A1 Method of making microwave, multifunction modules using fluoropolymer composite substrates
08/19/1999WO1999041782A2 Module tape with modules for dual-mode data carriers
08/19/1999WO1999041781A1 Base sheet for semiconductor module, method for manufacturing base sheet for semiconductor module, and semiconductor module
08/19/1999WO1999041780A1 Semiconductor component with a structure for preventing onset of cross currents
08/19/1999WO1999041779A1 Crystal ion-slicing of single-crystal films
08/19/1999WO1999041777A1 Method of producing semiconductor device and heat treating apparatus
08/19/1999WO1999041776A1 Semiconductor material epitaxial structures formed on thin-film substrates
08/19/1999WO1999041774A2 Method of manufacturing integrated circuits in which malfunctioning apparatuses are detected
08/19/1999WO1999041773A1 Substrate support for a thermal processing chamber
08/19/1999WO1999041772A2 A method of component manufacture
08/19/1999WO1999041771A1 Device for loading substrates into and unloading them from a clean room
08/19/1999WO1999041770A2 Routing topology for identical connector point layouts on primary and secondary sides of a substrate
08/19/1999WO1999041765A1 Focused particle beam systems and methods using a tilt column
08/19/1999WO1999041685A1 A method for manufacturing and designing an electronic device and electronic apparatus
08/19/1999WO1999041642A1 Positive acting photodielectric composition
08/19/1999WO1999041632A1 Improved photovoltaic generator circuit
08/19/1999WO1999041592A1 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
08/19/1999WO1999041434A2 Plating apparatus and method
08/19/1999WO1999041426A1 Reactor for chemical vapor deposition
08/19/1999WO1999041424A2 Reflow chamber and process
08/19/1999WO1999041423A2 Plasma processes for depositing low dielectric constant films
08/19/1999WO1999041038A1 Groove cleaning device for chemical-mechanical polishing
08/19/1999WO1999041022A1 Accurate positioning of a wafer
08/19/1999WO1999035688B1 Gettering device for ion capture
08/19/1999WO1999033114A3 Semiconductor substrate with embedded isolating layer for integrated circuits
08/19/1999WO1999029439A8 Photoresist coating process control with solvent vapor sensor
08/19/1999DE19905220A1 Multichip module on intermediate support
08/19/1999DE19846938A1 Method for separating required chips from semiconductor wafer
08/19/1999DE19843173A1 Semiconductor device copper wiring production especially for highly integrated power semiconductor device
08/19/1999DE19838854A1 Semiconductor device, e.g. nonvolatile memory integrated with charge pump transformer circuit in chip
08/19/1999DE19831600C1 Pressure sensor groups intactness assessment method
08/19/1999DE19826546A1 Dual damascene structure with improved control of the etching stop
08/19/1999DE19823133A1 Multiple voltage MOS transistor production for sub-micron applications requiring selection between two or more voltages
08/19/1999DE19819265C1 Method of parameterising an integrated circuit with supply voltage, reference potential and output connectors; parameterising signal is formed by code with edge change after each bit
08/19/1999DE19806819A1 Dielectric insulated (DI)semiconductor device
08/19/1999DE19805835A1 Substrate manipulation and holding apparatus used for silicon wafer etching e.g. for manufacturing micro-mechanical pressure or mass flow sensors
08/19/1999DE19805525A1 Liquid etchant for undercutting regions of silicon dioxide layers on a rotating semiconductor wafer
08/19/1999DE19752404C1 Very thin semiconductor chip manufacturing method
08/19/1999CA2320920A1 A method of component manufacture
08/19/1999CA2320919A1 A method of producing a detector belonging to a gas sensor, and a detector produced in accordance with the method
08/19/1999CA2320852A1 Positive acting photodielectric composition
08/19/1999CA2320149A1 Focused particle beam systems and methods using a tilt column
08/18/1999EP0936806A2 Method of driving solid-state imaging device, solid-state imaging device and camera
08/18/1999EP0936681A2 Photoconductive thin film, and photovoltaic device making use of the same
08/18/1999EP0936679A1 Method of manufacturing semiconductor devices having a built-in capacitor
08/18/1999EP0936678A1 Circuit structure with at least one capacitor and corresponding method
08/18/1999EP0936677A1 Power semiconducteur device with an isolated gate electrode and its method of fabrication
08/18/1999EP0936676A2 MOS field effect transistors and its method of fabrication
08/18/1999EP0936675A2 C-axis oriented thin film ferroelectric transistor memory cell and method of making the same
08/18/1999EP0936674A1 A VDMOS transistor protected against overvoltages between source and gate
08/18/1999EP0936673A1 Memory cell array and corresponding manufacturing process
08/18/1999EP0936672A2 Semiconductor device and method of manufacturing the same
08/18/1999EP0936669A1 Semiconductor device and method of manufacturing the same
08/18/1999EP0936668A2 Method of producing thin film transistor
08/18/1999EP0936667A1 Lattice matched barrier for dual doped polysilicon gates
08/18/1999EP0936666A2 Method of reducing metal voids in semiconductor device interconnection
08/18/1999EP0936665A1 Semiconductor device having a shallow isolation trench and fabrication process
08/18/1999EP0936664A2 Partial silicidation method to form shallow source/drain junctions
08/18/1999EP0936663A2 Porous region removing method and semiconductor substrate manufacturing method
08/18/1999EP0936662A2 Semiconductor thermal processor with recirculating heater exhaust cooling system
08/18/1999EP0936661A2 Double wall reaction chamber glassware
08/18/1999EP0936658A2 Charged particle beam exposure method and apparatus
08/18/1999EP0936624A2 Magnetoresistive memory devices
08/18/1999EP0936623A2 Magnetic tunnel junction devices
08/18/1999EP0936622A2 Magnetic memory devices having multiple magnetic tunnel junctions therein
08/18/1999EP0936600A2 Magnetic recording medium, method for producing the same and method for forming film by plasma CVD
08/18/1999EP0936505A1 Method of producing phase mask for fabricating optical fiber and optical fiber with bragg's diffraction grating produced by using the phase mask
08/18/1999EP0936504A1 A radiation-sensitive material and a method for forming a pattern therewith
08/18/1999EP0936368A2 Air bearing operable in a vacuum region
08/18/1999EP0936291A1 Crystal growth observing apparatus
08/18/1999EP0936284A2 Method and apparatus for producing thin films
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