Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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09/10/1999 | WO1999045436A1 Improved pattern generator for avoiding stitching errors |
09/10/1999 | WO1999045435A1 Pattern generator with improved precision |
09/10/1999 | WO1999045340A1 Measuring a diffracting structure, broadband, polarized, ellipsometric, and an underlying structure |
09/10/1999 | WO1999045170A1 Substrate plating device |
09/10/1999 | WO1999045167A1 Method of depositing silicon with high step coverage |
09/10/1999 | WO1999045165A1 Method of forming phosphosilicate glass having a high wet-etch rate |
09/10/1999 | WO1999045164A1 Method of coating and annealing large area glass substrates |
09/10/1999 | WO1999045070A1 High-melting polyamide composition for electronic applications |
09/10/1999 | WO1999044937A1 Material with reduced optical absorption |
09/10/1999 | WO1999044782A1 Method and contact point for producing an electrical connection |
09/10/1999 | WO1999044752A2 Circuit and method for specifying performance parameters in integrated circuits |
09/10/1999 | WO1999035673B1 Two-wafer loadlock wafer processing apparatus and loading and unloading method therefor |
09/10/1999 | WO1999027150A9 Sputtering target |
09/10/1999 | WO1999022396A3 Enhanced macroparticle filter and cathode arc source |
09/09/1999 | DE19908456A1 Power consumption estimation method for large scale integrated circuit e.g. for LSI chip design |
09/09/1999 | DE19847631A1 Quality management system for semiconductor device |
09/09/1999 | DE19845315A1 Semiconductor device e.g. power semiconductor with trench MOS gate |
09/09/1999 | DE19842441A1 Semiconductor device especially a chip size package for mounting on a printed circuit board |
09/09/1999 | DE19839079A1 Semiconductor device insulating layer structure especially a gate insulation structure for a dual-gate MOSFET |
09/09/1999 | DE19821726C1 Integrated CMOS circuit for high frequency applications, e.g. as a symmetrical mixer input stage or an impedance transformer |
09/09/1999 | DE19809556A1 Transverse feed device for vertical through-flow oven e.g. for semiconductor manufacture |
09/09/1999 | DE19808516A1 Unterfüllmaterial für Flip-Chip-bestückte Leiterplatten, damit ausgerüstete Leiterplatte sowie Verfahren zur Füllgradüberprüfung von damit unterfüllten Chips Underfill material for flip-chip assembled printed circuit boards, printed circuit board equipped therewith, and methods for Füllgradüberprüfung of so underfilled chips |
09/09/1999 | DE19808246A1 Verfahren zur Herstellung eines mikroelektronischen Halbleiterbauelements A process for producing a microelectronic semiconductor component, |
09/09/1999 | DE19601862C2 Vorrichtung und Verfahren zur Entdeckung von fehlerhaften Logikteilschaltungen mittels eines anomalen Ruheversorgungsstroms Apparatus and method for detection of faulty logic subcircuits by an abnormal resting supply current |
09/08/1999 | EP0940923A2 Mixed-signal circuitry and integrated circuit devices |
09/08/1999 | EP0940920A2 Current limiting receiver with impedance/load matching for a powered down receiver chip |
09/08/1999 | EP0940856A1 Ferroelectric memory element and method of producing the same |
09/08/1999 | EP0940855A2 III-V semiconductor heterojunction field effect transistor |
09/08/1999 | EP0940853A2 DRAM trench capacitor cell and method of fabricating the same |
09/08/1999 | EP0940852A2 Electrostatic discharge protection for integrated circuit semiconductor device |
09/08/1999 | EP0940851A1 Integrated circuit security system and method with implanted interconnections |
09/08/1999 | EP0940849A1 A low-loss conductive pattern on a substrate and a method for fabrication thereof |
09/08/1999 | EP0940847A2 SOI substrate bonding under clean room conditions |
09/08/1999 | EP0940846A1 Method for stripping ion implanted photoresist layer |
09/08/1999 | EP0940845A2 Susceptor for semiconductor manufacturing equipment and process for producing the same |
09/08/1999 | EP0940844A2 Integrated circuit fabrication |
09/08/1999 | EP0940843A2 Apparatus for heat-treating substrate and method for separating the substrate from the apparatus |
09/08/1999 | EP0940839A2 Etching or coating devices |
09/08/1999 | EP0940838A2 In situ removal of contaminants from the interior surfaces of an ion beam implanter |
09/08/1999 | EP0940828A2 Method for producing foil electrodes |
09/08/1999 | EP0940826A2 Inductor for use with electronic oscillators |
09/08/1999 | EP0940724A2 Developer for photosensitive polyimide precursor, and method of using it for patterning |
09/08/1999 | EP0940723A2 Sample table for pattern exposure machine |
09/08/1999 | EP0940722A2 Illumination system and REMA (reticle masking) objective with lens shift and method of use therefor |
09/08/1999 | EP0940721A2 Reticle library apparatus and method |
09/08/1999 | EP0940719A2 Photoresist film and method for forming a pattern thereof |
09/08/1999 | EP0940710A2 Display device and fabrication method thereof |
09/08/1999 | EP0940483A2 Anodizing method and apparatus and semiconductor substrate manufacturing method |
09/08/1999 | EP0940420A1 Nylon 12, nylon 12 composition, method for producing nylon 12 and tubular molded product using nylon 12 |
09/08/1999 | EP0940222A2 Method and apparatus for chemical mechanical planarization (CMP) of a semiconductor wafer |
09/08/1999 | EP0940219A2 A wafer processing machine and a processing method thereby |
09/08/1999 | EP0939974A2 Manufacture of a semiconductor device with a mos transistor having an ldd structure |
09/08/1999 | EP0939973A1 Process for manufacturing micromechanical functional elements |
09/08/1999 | EP0939972A1 Plasma etch reactor and method |
09/08/1999 | EP0939957A2 Programmable metallization cell structure and method of making same |
09/08/1999 | EP0815565A4 Method and apparatus for micromachining using hard x-rays |
09/08/1999 | EP0777760B1 Transport system for thin film sputtering system |
09/08/1999 | EP0761017B1 Semiconductor device of the type sealed in glass having a silver-copper bonding layer between slugs and connection conductors |
09/08/1999 | CN1228199A Formation of source/drain from doped glass |
09/08/1999 | CN1228198A Process for producing semiconductor bodies with MOVPE-layer sequence |
09/08/1999 | CN1228197A Method and device for washing electronic parts member or like |
09/08/1999 | CN1228196A Plasma etch reactor and method |
09/08/1999 | CN1228172A Liquid antireflective coating for photoresist compositions |
09/08/1999 | CN1227973A 半导体器件 Semiconductor devices |
09/08/1999 | CN1227972A Non-volatile semiconductor memory device and data erase method of non-volatile semiconductor memory device |
09/08/1999 | CN1227971A Semiconductor device with silicide layers and fabrication method thereof |
09/08/1999 | CN1227970A Memory cell structure and fabrication method |
09/08/1999 | CN1227969A Method of fabricating semiconductor device |
09/08/1999 | CN1227968A Susceptor for semiconductor manufacturing equipment and process for producing the same |
09/08/1999 | CN1227967A Semiconductor device and method for making the same |
09/08/1999 | CN1227966A Apparatus for manufacturing semiconductor device, and method of manufacturing capacitor of semiconductor device thereby |
09/08/1999 | CN1227965A Method of manufacturing semiconductor device having shallow junction |
09/08/1999 | CN1227964A SOI substrate and method and system for manufacturing the same |
09/08/1999 | CN1227963A Defect induced buried oxide for throughput SOI |
09/08/1999 | CN1227961A Focussed ion beam apparatus and control method for same |
09/08/1999 | CN1227923A Circuit board for testing semiconductor device |
09/08/1999 | CN1227881A Magnetic filter for ion source |
09/07/1999 | USRE36290 Manufacture of high precision electronic components with ultra-high purity liquids |
09/07/1999 | US5950181 Apparatus and method for detecting and assessing a spatially discrete dot pattern |
09/07/1999 | US5950109 Methods of depositing films on semiconductor wafers using partial deposition and reloading techniques |
09/07/1999 | US5950108 Method of fabricating a conductive plug |
09/07/1999 | US5950107 In-situ pre-ILD deposition treatment to improve ILD to metal adhesion |
09/07/1999 | US5950106 Method of patterning a metal substrate using spin-on glass as a hard mask |
09/07/1999 | US5950105 Completely buried contact holes and methods of forming same |
09/07/1999 | US5950104 Contact process using Y-contact etching |
09/07/1999 | US5950102 Method for fabricating air-insulated multilevel metal interconnections for integrated circuits |
09/07/1999 | US5950101 Method for manufacturing a semiconductor device involving forming two silicon oxide layers by CVD and forming HMDS between the silicon oxide layers |
09/07/1999 | US5950100 Method of manufacturing semiconductor device and apparatus for the same |
09/07/1999 | US5950099 Method of forming an interconnect |
09/07/1999 | US5950098 Manufacturing method of a semiconductor device with a silicide layer |
09/07/1999 | US5950097 Advanced isolation scheme for deep submicron technology |
09/07/1999 | US5950096 Process for improving device yield in integrated circuit fabrication |
09/07/1999 | US5950095 Semiconductor memory cell fabrication method |
09/07/1999 | US5950094 Method for fabricating fully dielectric isolated silicon (FDIS) |
09/07/1999 | US5950093 Method for aligning shallow trench isolation |
09/07/1999 | US5950092 Use of a plasma source to form a layer during the formation of a semiconductor device |
09/07/1999 | US5950091 Method of making a polysilicon gate conductor of an integrated circuit formed as a sidewall spacer on a sacrificial material |
09/07/1999 | US5950090 Method for fabricating a metal-oxide semiconductor transistor |
09/07/1999 | US5950089 Method of making read-only memory device having a silicon-on-insulator structure |
09/07/1999 | US5950088 Semiconductor memory device and method of manufacturing the same |