| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/07/1999 | US5948217 Method and apparatus for endpointing while milling an integrated circuit |
| 09/07/1999 | US5948216 Method for making thin film tantalum oxide layers with enhanced dielectric properties and capacitors employing such layers |
| 09/07/1999 | US5948206 Apparatus for determining removed amount of wafer |
| 09/07/1999 | US5948205 Polishing apparatus and method for planarizing layer on a semiconductor wafer |
| 09/07/1999 | US5948204 Wafer carrier ring method and apparatus for chemical-mechanical planarization |
| 09/07/1999 | US5948203 Optical dielectric thickness monitor for chemical-mechanical polishing process monitoring |
| 09/07/1999 | US5948200 Method of manufacturing laminated ceramic electronic parts |
| 09/07/1999 | US5948193 Process for fabricating a multilayer ceramic substrate from thin greensheet |
| 09/07/1999 | US5948192 Glass-ceramic substrate and method of producing the same |
| 09/07/1999 | US5948173 Cleaning tank; rotation |
| 09/07/1999 | US5948168 Distributed microwave plasma reactor for semiconductor processing |
| 09/07/1999 | US5948167 Thin film deposition apparatus |
| 09/07/1999 | US5948165 Electrostatic chucking mechanism |
| 09/07/1999 | US5948164 Seed crystal holder |
| 09/07/1999 | US5948162 Method for forming SOI structure |
| 09/07/1999 | US5948161 Method of fabricating a semiconductor device and method of cleaning a crystalline semiconductor surface |
| 09/07/1999 | US5947718 Semiconductor processing furnace |
| 09/07/1999 | US5947677 Cassette transfer mechanism |
| 09/07/1999 | US5947675 Cassette transfer mechanism |
| 09/07/1999 | US5947645 Fiber dispensing system |
| 09/07/1999 | US5947136 Catch cup cleaning system |
| 09/07/1999 | US5947134 Scrubbing equipment for a semiconductor device using laser distance sensor to automatically adjust brush height above the wafer |
| 09/07/1999 | US5947102 Method for cutting wafers from a crystal |
| 09/07/1999 | US5946803 Method for making heat sink having ultra-thin fins |
| 09/07/1999 | US5946787 Method of repairing a substrate array |
| 09/07/1999 | CA2127192C Shaping ate bursts, particularly in gallium arsenide |
| 09/02/1999 | WO1999044242A1 Method of detaching thin-film device, method of transferring thin-film device, thin-film device, active matrix substrate, and liquid crystal display |
| 09/02/1999 | WO1999044241A2 Semiconductor device comprising a mos transistor |
| 09/02/1999 | WO1999044239A1 Electrically programmable memory cell arrangement and method for producing the same |
| 09/02/1999 | WO1999044238A1 Electrically programmable memory cell arrangement and method for producing the same |
| 09/02/1999 | WO1999044237A1 Semiconductor device and method for producing the same |
| 09/02/1999 | WO1999044233A1 Low profile ball grid array package |
| 09/02/1999 | WO1999044232A1 Method of increasing alignment tolerances for interconnect structures |
| 09/02/1999 | WO1999044231A1 Semiconductor wafer inspection apparatus |
| 09/02/1999 | WO1999044230A1 Underfilling material for flip-chip fitted printed circuit boards, a printed circuit board equipped therewith, and a method for filling ratio verification of chips which are underfilled therewith |
| 09/02/1999 | WO1999044229A1 A method for generating electrical conducting or semiconducting structures in two or three dimensions, a method for erasing the same structures and an electric field generator/modulator for use with the method for generating |
| 09/02/1999 | WO1999044227A1 Surface treating agent for micromachining and method for surface treatment |
| 09/02/1999 | WO1999044226A1 Oxygen enhancement of ion metal plasma (imp) sputter deposited barrier layers |
| 09/02/1999 | WO1999044225A1 Method for producing a microelectronic semiconductor component |
| 09/02/1999 | WO1999044224A1 Methods of fabricating gallium nitride semiconductor layers by lateral overgrowth through masks, and gallium nitride semiconductor structures fabricated thereby |
| 09/02/1999 | WO1999044223A2 Process of shallow trench isolating active devices to avoid sub-threshold kinks arising from corner effects without additional processing |
| 09/02/1999 | WO1999044222A1 Slip free vertical rack design having rounded horizontal arms |
| 09/02/1999 | WO1999044221A1 A seal member and a vacuum chamber |
| 09/02/1999 | WO1999044220A1 Cooling system with antifreeze for cooling magnetron for process chamber of processing system |
| 09/02/1999 | WO1999044219A1 Low pressure inductively coupled high density plasma reactor |
| 09/02/1999 | WO1999044204A2 Memory cell arrangement and method for producing the same |
| 09/02/1999 | WO1999044094A1 Active matrix substrate and liquid crystal display comprising the same |
| 09/02/1999 | WO1999043873A1 A method for wet etching |
| 09/02/1999 | WO1999043867A1 Deposition of copper with increased adhesion |
| 09/02/1999 | WO1999043866A1 Liquid vaporizer systems and methods for their use |
| 09/02/1999 | WO1999043761A1 Abrasive composition for polishing semiconductor device and process for producing semiconductor device with the same |
| 09/02/1999 | WO1999043582A1 Door assembly for semiconductor wafer manufacturing |
| 09/02/1999 | WO1999043479A1 Microcutter and method for producing microreliefs in a structure |
| 09/02/1999 | WO1999043467A1 Work outer periphery polishing device |
| 09/02/1999 | WO1999043465A1 Apparatus and method for the face-up surface treatment of wafers |
| 09/02/1999 | WO1999043448A1 Methods of wet processing electronic components using process liquids with controlled levels of gases |
| 09/02/1999 | WO1999043447A1 Apparatus and method for cleaning semiconductor wafers |
| 09/02/1999 | WO1999029001A3 Electrostatic chuck capable of rapidly dechucking a substrate |
| 09/02/1999 | WO1999028953A3 LONG RANGE ORDERED AND EPITAXIAL OXIDES INCLUDING SiO2, ON Si, SixGe1-x, GaAs AND OTHER SEMICONDUCTORS, MATERIAL SYNTHESIS, AND APPLICATIONS THEREOF |
| 09/02/1999 | WO1999027576A3 Method of manufacturing a semiconductor device comprising a field effect transistor |
| 09/02/1999 | DE19907201A1 Vertical metal insulator semiconductor field effect transistor (MISFET) |
| 09/02/1999 | DE19906815A1 Manufacture of liquid crystal display with a reduced number of masking steps |
| 09/02/1999 | DE19848265A1 Drying apparatus for a semiconductor component e.g. a wafer or a mask |
| 09/02/1999 | DE19847641A1 Semiconductor device production process especially for producing a conductive structure e.g. a silicide electrode or connection for a MOS transistor |
| 09/02/1999 | DE19808206A1 Low pressure gas discharge treatment of wafers for lacquer removal, cleaning or etching |
| 09/02/1999 | DE19807920A1 Speicherzellenanordnung und entsprechendes Herstellungsverfahren Memory cell array and method of manufacture |
| 09/02/1999 | DE19807776A1 Halbleitervorrichtung und entsprechendes Herstellungsverfahren A semiconductor device and manufacturing method thereof |
| 09/02/1999 | CA2321866A1 Apparatus and method for cleaning semiconductor wafers |
| 09/01/1999 | EP0939464A2 Submount assembly and associated packaging method |
| 09/01/1999 | EP0939445A2 Semiconductor integrated circuit device and method of arranging functional cell |
| 09/01/1999 | EP0939440A2 Process for producing semiconductor device package and organopolysiloxane composition used therefor |
| 09/01/1999 | EP0939439A1 Method of forming fully depleted simox CMOS having electrostatic discharge protection |
| 09/01/1999 | EP0939438A2 Method for forming trench capacitors with doped portions in an integrated circuit |
| 09/01/1999 | EP0939437A2 Planarization of wiring layers |
| 09/01/1999 | EP0939436A2 Manufacture of flip-chip devices |
| 09/01/1999 | EP0939435A1 Contact between a monocrystalline silicon region and a polycrystalline silicon structure and method of manufacturing such a contact |
| 09/01/1999 | EP0939434A1 Method for fabricating ferroelectric thin films using a sol-gel technique |
| 09/01/1999 | EP0939433A2 Method for reforming undercoating surface and method for production of semiconductor device |
| 09/01/1999 | EP0939432A1 Mask design method for manufacturing a dummy region in a trench isolation region between electrically active regions of a microelectronic device |
| 09/01/1999 | EP0939431A1 Cerium oxide abrasive and method of abrading substrates |
| 09/01/1999 | EP0939430A2 Method of manufacturing a polycristalline silicon structure |
| 09/01/1999 | EP0939423A1 Ion source having wide output current operating range |
| 09/01/1999 | EP0939422A2 Magnetic filter for ion source |
| 09/01/1999 | EP0939343A1 Exposure method and exposure apparatus |
| 09/01/1999 | EP0939342A1 Process for forming photoresist patterns |
| 09/01/1999 | EP0939341A2 Illumination system and exposure apparatus and method |
| 09/01/1999 | EP0939320A2 Test method and device for a semiconductor integrated circuit |
| 09/01/1999 | EP0939145A1 Continuous gas saturation system and method |
| 09/01/1999 | EP0938946A1 Method of cleaving a brittle material using a point heat source for providing a thermal stress |
| 09/01/1999 | EP0938752A1 Asymmetrical transistor with lightly and heavily doped drain regions and ultra-heavily doped source region |
| 09/01/1999 | EP0938751A1 Controllable semiconductor structure with improved switching properties |
| 09/01/1999 | EP0938747A1 Variable high temperature chuck for high density plasma chemical vapor deposition |
| 09/01/1999 | EP0938746A1 Process for wet chemical etching or surface cleaning of mixed crystal compounds containing arsenic |
| 09/01/1999 | EP0938745A1 Wafer cleaning system |
| 09/01/1999 | EP0938744A1 Method for identifying wafers in chip manufacturing and device for its implementation |
| 09/01/1999 | EP0938741A1 Vacuum plasma processor having coil whth intermediate portion coupling lower magnetic flux density to plasma than center and peripheral portions of the coil |
| 09/01/1999 | EP0938740A1 Particle controlling method and plasma processing chamber |
| 09/01/1999 | EP0938725A1 Screen and driver assembly for screen pixels |
| 09/01/1999 | EP0938716A1 Computer assisted method of partitioning an electrical circuit |
| 09/01/1999 | EP0938634A2 Gas panel |